CN-111068963-B - Filter wetting system and liquid supply system

Abstract

The invention provides a filter wetting system and a liquid supply system. The filter wetting system comprises a filter device, a discharge pipeline and a wetting pipeline, wherein the filter device comprises at least one filter, the discharge pipeline is connected with a drain outlet of the filter device and used for discharging residual liquid generated after filtration by the filter device, and one end of the wetting pipeline is connected with the discharge pipeline and used for prewetting the standby filter. The liquid supply system comprises a liquid supply pipeline, a filtering device, a spraying device, a discharge pipeline and a wetting pipeline, wherein one end of the liquid supply pipeline is connected to a liquid supply source. The filter wetting system and the liquid supply system can be used for pre-wetting the standby filter in the normal liquid supply process without occupying the working period of equipment, thereby effectively saving the downtime of the equipment, improving the yield of the equipment and reducing the production cost.

Inventors

• Request for anonymity

Assignees

• 长鑫存储技术有限公司

Dates

Publication Date

20260508

Application Date

20181019

Claims (16)

1. 1. A filter wetting system, comprising: A filtering device comprising at least one filter; the discharge pipeline is connected with the drain outlet of the filtering device and is used for discharging residual liquid generated after filtering by the filtering device; One end of the wetting pipeline is connected with the discharge pipeline and is used for prewetting the standby filter; the filtering device comprises a first filter and a second filter, wherein the first filter and the second filter comprise a liquid inlet, a liquid outlet and a sewage outlet, the liquid inlet of the first filter corresponds to the liquid inlet of the filtering device, the liquid outlet of the first filter is connected with the liquid inlet of the second filter, the sewage outlet of the second filter is connected with the discharge pipeline, and the filtering grade of the second filter is higher than that of the first filter.
2. 2. The filter wetting system according to claim 1, wherein the other end of the wetting line is connected to the drain line and the back-up filter is connected to the wetting line.
3. 3. The filter wetting system according to claim 1, wherein the wetting tube is provided with a filter holder for receiving the spare filter.
4. 4. The filter wetting system according to claim 1, wherein a valve is arranged on the wetting conduit, which valve is arranged at an end of the wetting conduit adjacent to the discharge conduit.
5. 5. The filter wetting system according to claim 1, further comprising a recovery vessel connected to the drain line for recovering a residual liquid drained by the drain line.
6. 6. The filter wetting system according to claim 4, further comprising a delay coupled to the valve for closing the valve after a set time.
7. 7. The filter wetting system according to claim 5, wherein the other end of the wetting conduit is connected to the recycling container.
8. 8. A liquid supply system, comprising: A liquid supply line having one end connected to a liquid supply source; The filtering device comprises a liquid inlet, a liquid outlet and a sewage outlet, wherein the liquid inlet of the filtering device is connected with one end of the liquid supply pipeline, which is far away from the liquid supply source, and the filtering device is used for filtering impurities contained in liquid in the liquid supply pipeline; the spraying device is connected with the liquid outlet of the filtering device and is used for spraying the filtered liquid onto the substrate; the discharge pipeline is connected with the drain outlet of the filtering device and is used for discharging residual liquid generated after filtering by the filtering device; One end of the wetting pipeline is connected with the discharge pipeline and is used for prewetting the standby filter; The filter device comprises a first filter and a second filter, wherein the first filter and the second filter comprise a liquid inlet, a liquid outlet and a drain outlet, the liquid inlet of the first filter is connected with one end of the liquid supply pipeline, which is far away from the liquid supply source, the liquid outlet of the first filter is connected with the liquid inlet of the second filter, the liquid outlet of the second filter is connected with the spraying device, the drain outlet of the second filter is connected with the drain pipeline, and the filtration grade of the second filter is higher than that of the first filter.
9. 9. The liquid supply system as set forth in claim 8, wherein the other end of the wetting line is connected to the drain line, and the backup filter is connected to the wetting line.
10. 10. The liquid supply system as set forth in claim 8, wherein a filter holder is provided on the wetting tube for placing the spare filter.
11. 11. The liquid supply system as set forth in claim 8, wherein a valve is provided on the wetting conduit, the valve being provided at an end of the wetting conduit adjacent to the discharge conduit.
12. 12. The liquid supply system as set forth in claim 8, further comprising a recovery vessel connected to the drain line for recovering a residual liquid drained by the drain line.
13. 13. The fluid supply system of claim 8 wherein said fluid supply system further comprises a regulated pump coupled between said first filter and said second filter for delivering regulated power from said filtered fluid from said first filter to said second filter.
14. 14. The fluid supply system of claim 11 wherein the fluid supply system further comprises a delay coupled to the valve for closing the valve after a set time.
15. 15. The liquid supply system according to claim 12, wherein the other end of the wetting line is connected to the recovery container.
16. 16. The liquid supply system according to claim 8 to 15, further comprising a storage container connected to the liquid supply line between the liquid supply source and the filter device, the storage container being configured to store the liquid supplied from the liquid supply source.

Description

Filter wetting system and liquid supply system Technical Field The invention belongs to the field of integrated circuit manufacturing, and particularly relates to a filter wetting system of an organic solvent and a liquid supply system. Background Photolithography is a very important process in semiconductor manufacturing processes, which is the process of transferring a pattern on a reticle onto a substrate by means of a photoresist (also known as photoresist) under the influence of light. Various organic solvents such as photoresist, developing solution and the like are needed in the photoetching process, and if the organic solvents contain bubbles or particles and other impurities, the quality of the transferred pattern is reduced and even the pattern transfer is completely failed. Therefore, in the conventional liquid supply system for supplying an organic solvent in a photolithography process, it is necessary to remove impurities such as bubbles and particles contained in the organic solvent by using a filter. The materials of the filter are generally classified into hydrophilic materials and hydrophobic materials, and the filter of the hydrophobic materials is usually required to be pre-wetted before use, and only the filter which is sufficiently pre-wetted can be used for filtration. Because bubbles can be generated if the filter is not wetted or is insufficiently wetted, on one hand, the pressure of a spraying system is unstable, on the other hand, the bubbles can cause defects of a photoetching pattern along with the spraying of the photoresist on the surface of a substrate, and the product yield is affected, it is very important to pre-wet the filter made of the hydrophobic material before use. There is no specific pre-wetting device in the prior art. In order to prevent the filter from being polluted in the pre-wetting process, the corresponding standby filter is pre-wetted by using a liquid supply pipeline of the equipment in the prior art, but the pre-wetting time can be longer than 12 hours, and the output and the recovery time of the equipment are seriously affected. This is a significant waste for the very short and long lithographic apparatus, resulting in unnecessary manufacturing costs. Disclosure of Invention In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a filter wetting system and a liquid supply system, which are used for solving the problems of decreased output rate and increased production cost of equipment caused by pre-wetting a spare filter by using a liquid supply pipeline in the prior art. To achieve the above and other related objects, the present invention provides a filter wetting system, including a filter device, a drain line and a wetting line, wherein the filter device includes at least one filter, the drain line is connected to a drain of the filter device for draining a residual liquid generated after filtering by the filter device, and one end of the wetting line is connected to the drain line for prewetting a spare filter. Optionally, the filtering device comprises a filter, the filter comprises a liquid inlet, a liquid outlet and a drain outlet, and the liquid inlet, the liquid outlet and the drain outlet of the filter are in one-to-one correspondence with the liquid inlet, the liquid outlet and the drain outlet of the filtering device. In another alternative, the filtering device comprises a first filter and a second filter, the first filter and the second filter each comprise a liquid inlet, a liquid outlet and a drain outlet, the liquid inlet of the first filter corresponds to the liquid inlet of the filtering device, the liquid outlet of the first filter is connected with the liquid inlet of the second filter, and the drain outlet of the second filter is connected with the drain pipeline. In an alternative, the other end of the wetting line is connected to the discharge line, and the backup filter is connected to the wetting line. Optionally, a filter support is arranged on the wetting pipeline, and is used for placing the standby filter. Optionally, a valve is disposed on the wetting pipeline, and the valve is disposed at an end of the wetting pipeline adjacent to the discharge pipeline. Optionally, the filter wetting system further comprises a recovery vessel connected to the drain line for recovering the raffinate drained by the drain line. More optionally, the filter wetting system further comprises a delay coupled to the valve for closing the valve after a set time. In another alternative, the other end of the wetting conduit is connected to the recycling container. The invention further provides a liquid supply system which comprises a liquid supply pipeline, a filtering device, a spraying device, a discharge pipeline and a wetting pipeline, wherein one end of the liquid supply pipeline is connected to a liquid supply source, the filtering device comprises a liquid inlet, a liquid outlet and a dr