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CN-111190034-B - Probe tester and carrier thereof

CN111190034BCN 111190034 BCN111190034 BCN 111190034BCN-111190034-B

Abstract

The invention discloses a probe tester and a carrier thereof. The carrying platform comprises a top seat, a base, a carrying seat, a first channel and a second channel, wherein the top seat comprises a downward adsorption plane, the base is positioned below the adsorption plane and comprises an exhaust pipe extending upwards, the carrying seat is positioned between the adsorption plane and the base and comprises an adsorption hole sleeved on the exhaust pipe and vertically penetrating through the carrying seat, the adsorption hole is arranged below the adsorption plane and faces the adsorption plane, the first channel is used for communicating a vacuum source with the adsorption hole, the second channel is used for communicating the vacuum source with the adsorption hole, the carrying seat can slide along the exhaust pipe, and the first channel is longer than the second channel. The probe tester adopting the carrier can avoid wafer or probe damage caused by the interaction of the probe and the wafer when the vacuum source fails in the process of testing the wafer.

Inventors

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Assignees

  • 长鑫存储技术有限公司

Dates

Publication Date
20260508
Application Date
20181114

Claims (12)

  1. 1. A carrier of a probe tester is characterized in that, Comprising the following steps: The top seat comprises a downward adsorption plane; the base is positioned below the adsorption plane and comprises an exhaust pipe which extends upwards; The bearing seat is positioned between the adsorption plane and the base and comprises an adsorption hole sleeved on the exhaust pipe and vertically penetrating through the bearing seat, and an adsorption port arranged below the adsorption plane and facing the adsorption plane; A first passage for communicating a vacuum source with the adsorption hole; And A second passage for communicating the vacuum source with the suction port; the bearing seat can slide along the exhaust pipe, and the first channel is longer than the second channel.
  2. 2. The carrier as claimed in claim 1, wherein, A throttle ring is arranged in the exhaust pipe.
  3. 3. The carrier as claimed in claim 1, wherein, The number of bends in the first channel is greater than the number of bends in the second channel.
  4. 4. The carrier as claimed in any one of claim 1 to 3, wherein, The top seat comprises an adsorption plate which is horizontally arranged and provided with a through hole, and the adsorption plane is the bottom surface of the adsorption plate; the bearing seat also comprises a base plate which is parallel to the adsorption plate and the middle part of which is aligned with the through hole; the adsorption ports are arranged in a plurality, and the adsorption ports are uniformly distributed on the edge of the substrate.
  5. 5. The carrier as claimed in claim 4, wherein, The bearing seat further comprises a boss protruding upwards from the middle of the base plate and inserted into the through hole, and the adsorption hole extends from the bottom surface of the base plate to the top surface of the boss; when the adsorption port is not on the adsorption plane, the top surface of the boss is higher than or flush with the top surface of the adsorption plate.
  6. 6. The carrier as claimed in claim 5, wherein, The through hole is a round hole, and the boss is a round table in clearance fit with the through hole.
  7. 7. The carrier as claimed in claim 4, wherein, The bearing seat comprises a plurality of adsorption pipes extending from the base plate to the adsorption plane; the adsorption port is a pipe orifice positioned at the top end of the adsorption pipe.
  8. 8. The carrier as claimed in claim 7, wherein, The carrier also comprises a spring sleeved on the adsorption tube; The spring is longer than the sorbent tube when uncompressed.
  9. 9. The carrier as claimed in claim 4, wherein, The top seat also comprises a plurality of side plates which extend downwards from the edge of the adsorption plate, The base and the bearing seat are contained in a plurality of box bodies enclosed by the side plates and the adsorption plates.
  10. 10. The carrier as claimed in claim 7, wherein, The base also comprises a base, and the exhaust pipe extends upwards from the top of the base.
  11. 11. The carrier as claimed in claim 10, wherein, The bottom of the base is provided with an extraction opening, and an extraction channel which is communicated with the extraction opening and the extraction pipe is also arranged in the base; the base plate is also provided with an air suction channel which vertically penetrates through the base plate; the carrier also comprises a first branch pipe, a second branch pipe and a main pipe, wherein one end of the first branch pipe is communicated with the air suction channel, one end of the second branch pipe is communicated with the air suction port, the other end of the main pipe is connected with the vacuum source, and the other ends of the main pipe are communicated with the first branch pipe and the second branch pipe; The first channel comprises an exhaust pipe, an exhaust channel, an exhaust opening, a second branch pipe and an inner cavity of the main pipeline, wherein the exhaust pipe, the exhaust channel, the exhaust opening, the second branch pipe and the inner cavity of the main pipeline are sequentially communicated, and the second channel comprises an adsorption pipe, an air suction channel, the first branch pipe and the inner cavity of the main pipeline, which are sequentially communicated.
  12. 12. A probe tester is characterized in that, A carrier comprising the carrier according to any one of claims 1 to 11.

Description

Probe tester and carrier thereof Technical Field The present invention relates generally to a technique for testing wafers, and more particularly to a probe tester and a carrier therefor. Background The wafer needs to be tested before being packaged into a complete chip to screen out bad wafers, thereby reducing the packaging cost. The probe tester is used for testing the electrical performance of the unpackaged wafer. The probe tester comprises a carrier and probes. The carrier is used for carrying the wafer. The probe is an interface of the tester to the wafer. Probes are typically provided with a plurality of probes that are in direct contact with a plurality of pads on a wafer simultaneously to direct electrical signals. The electrical properties of the wafer are obtained by analyzing the electrical signals by test instruments on the probe tester. The wafer is fixed on the carrier by vacuum adsorption, and the tip of the probe is inserted onto the bonding pad of the wafer from the upper side of the wafer after the probe is lowered. If the vacuum suction device is abnormal at this time so that the vacuum suction is released, the wafer may float upward and/or move to one side under the pressing of the probe, thereby causing damage to the probe and/or the wafer. The above information disclosed in the background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known to a person of ordinary skill in the art. Disclosure of Invention In the summary, a series of concepts in a simplified form are introduced, which will be further described in detail in the detailed description. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter. It is a primary object of the present invention to overcome at least one of the above-mentioned drawbacks of the prior art, and to provide a carrier of a probe tester, which includes a top base including a downward suction plane, a base located below the suction plane and including an upward-extending suction tube, a carrier located between the suction plane and the base and including a suction hole sleeved on the first suction tube and vertically penetrating the carrier, and a suction port located below the suction plane and facing the suction plane, a first channel for communicating a vacuum source with the suction hole, and a second channel for communicating the vacuum source with the suction port, wherein the carrier is slidable along the suction tube, and the first channel is longer than the second channel. According to one embodiment of the invention, a throttle ring is arranged in the exhaust pipe. According to one embodiment of the invention, the number of bends of the first channel is greater than the number of bends of the second channel. According to one embodiment of the invention, the top seat comprises an adsorption plate which is horizontally arranged and provided with through holes, the adsorption plane is the bottom surface of the adsorption plate, the bearing seat further comprises a substrate which is parallel to the adsorption plate and the middle part of the substrate is aligned with the through holes, the adsorption ports are arranged in a plurality, and the adsorption ports are uniformly distributed at the edge of the substrate. According to one embodiment of the invention, the bearing seat further comprises a boss protruding upwards from the middle of the base plate and inserted into the through hole, the adsorption hole extends from the bottom surface of the base plate to the top surface of the boss, and when the adsorption port is not in the adsorption plane, the top surface of the boss is higher than or flush with the top surface of the adsorption plate. According to one embodiment of the invention, the through hole is a round hole, and the boss is a round table in clearance fit with the through hole. According to one embodiment of the invention, the bearing seat comprises a plurality of adsorption pipes extending from the base plate to the adsorption plane, and the adsorption ports are pipe orifices positioned at the top ends of the adsorption pipes. According to one embodiment of the invention, the carrier further comprises a spring sleeved on the adsorption tube, and the spring is longer than the adsorption tube when not compressed. According to one embodiment of the present invention, the top base further includes a plurality of side plates extending downward from edges of the adsorption plate, and the base and the bearing base are both accommodated in a case enclosed by the plurality of side plates and the adsorption plate. According to one embodiment of the invention, the base further comprises a base, and the exhaust pipe extends upwards from the top of the base. According to one emb