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CN-112053928-B - Faraday cup assembly, ion implantation device and use method thereof

CN112053928BCN 112053928 BCN112053928 BCN 112053928BCN-112053928-B

Abstract

The present disclosure provides a faraday cup assembly, an ion implantation apparatus, and methods of use thereof, relating to the field of semiconductor technology. The Faraday cup assembly includes a base, a Faraday cup, a guard ring, and a plurality of connectors. The base is provided with a mounting surface provided with a mounting groove, the bottom surface of the mounting groove is provided with at least one mounting hole, the Faraday cup is annular and is arranged on the bottom surface of the mounting groove, the Faraday cup is provided with a circular cup cavity extending along the circumferential direction, the cup cavity is provided with an open end facing the top of the mounting groove, the bottom of the cup cavity is provided with a plurality of fixing holes uniformly distributed along the circumferential direction, the protection ring is arranged on the mounting surface and shields the mounting groove, the projection of the protection ring at the open end covers the cup cavity, the protection ring is provided with a plurality of circular arc slits distributed along the circumferential direction, and the slits and the fixing holes meet the following conditions: Wherein n is the number of slits, c is the circumference of the circumference where the slits are located, L is the arc length of the slits, and m is the number of fixing holes. The connecting piece is detachably connected to the mounting hole and penetrates through the fixing hole opposite to the mounting hole.

Inventors

  • WANG DONG

Assignees

  • 长鑫存储技术有限公司

Dates

Publication Date
20260508
Application Date
20190605

Claims (11)

  1. 1. A faraday cup assembly, comprising: the base is provided with a mounting surface, the mounting surface is provided with a mounting groove, and the bottom surface of the mounting groove is provided with at least one mounting hole; the Faraday cup is in a circular ring shape and is arranged on the bottom surface of the mounting groove, the Faraday cup is provided with a circular ring-shaped cup cavity extending along the circumferential direction, the cup cavity is provided with an opening end facing the top of the mounting groove, the bottom of the cup cavity is provided with a plurality of fixing holes uniformly distributed along the circumferential direction, and each mounting hole is opposite to one fixing hole; The protection ring is arranged on the mounting surface and shields the mounting groove and is coaxially arranged with the Faraday cup, the projection of the opening end of the protection ring covers the cup cavity, the protection ring is provided with a plurality of circular arc-shaped slits which are uniformly distributed in the circumferential direction, the slits are communicated with the cup cavity, and the slits and the fixing holes meet the following conditions: wherein n is the number of the slits, c is the circumference of the slits, L is the arc length of the slits, and m is the number of the fixing holes; the connecting piece is detachably connected to the mounting hole and penetrates through the fixing hole opposite to the mounting hole.
  2. 2. A faraday cup assembly according to claim 1, wherein the slit and the fixation hole further fulfil the following condition: m=2n。
  3. 3. a faraday cup assembly according to claim 1, wherein the connector has external threads and is threadedly connected with the corresponding mounting hole.
  4. 4. A faraday cup assembly according to claim 1, wherein the faraday cup assembly further comprises: the connectors are arranged at the bottom of the cup cavity, are distributed along the circumferential direction, and the central angles of two adjacent connectors are identical to the central angles of two adjacent fixing holes.
  5. 5. A faraday cup assembly according to claim 1, wherein the number of slits is four and the number of fixing holes is eight.
  6. 6. A faraday cup assembly according to any of claims 1-5, wherein the faraday cup assembly further comprises: The distance measuring device is arranged on the surface of the protection ring, close to the Faraday cup, and is positioned in the cup cavity, and the distance measuring device is positioned between two adjacent slits and is used for detecting the distance between the distance measuring device and the bottom of the cup cavity; and the processing device is connected with the distance measuring device and is used for outputting a reminding signal when the distance between the distance measuring device and the bottom of the cup cavity is greater than a threshold value.
  7. 7. A faraday cup assembly according to claim 6, wherein the faraday cup assembly further comprises: And the alarm device is connected with the processing device and is used for sending out an alarm when receiving the reminding signal.
  8. 8. A faraday cup assembly according to any of claims 1-5, wherein the faraday cup assembly further comprises: and the shielding piece is detachably arranged on the surface of the protection ring, which is far away from the Faraday cup, and is used for shielding at least one slit.
  9. 9. A faraday cup assembly according to claim 8, wherein the material of the shield comprises at least one of aluminum, silicon carbide.
  10. 10. An ion implantation apparatus comprising a faraday cup assembly as defined in any of claims 1-9.
  11. 11. A method for using an ion implantation device, the ion implantation apparatus of claim 10, the using method is characterized by comprising the following steps: detecting the distance between the protection ring and the bottom of the cup cavity; when the distance between the protection ring and the cup cavity is greater than a threshold value, the connecting piece is detached from the mounting hole; Rotating the Faraday cup, wherein the rotation angle is integral multiple of the included angle between the centers of two adjacent fixed holes; and re-connecting the connecting piece to the mounting hole.

Description

Faraday cup assembly, ion implantation device and use method thereof Technical Field The disclosure relates to the technical field of semiconductors, and in particular relates to a faraday cup assembly, an ion implantation device and a use method of the ion implantation device. Background In the semiconductor field, ion implantation technology is widely used, which introduces impurities that change conductivity into the wafer to improve product performance. Currently, an ion implantation apparatus is generally used to generate an ion beam and bombard a wafer, wherein in order to detect the incident intensity of ions, the ion beam is generally introduced into a faraday cup, and a current change is detected through the faraday cup, thereby determining the incident intensity of the ion beam. However, the ion beam strikes the same area of the Faraday cup for a long time, and the area can be thinned or even penetrated, so that the measured current of the Faraday cup is inaccurate, the electrical property of the wafer is deviated, and the product yield is affected. The cost is high if the faraday cup is frequently inspected and replaced. It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art. Disclosure of Invention The present disclosure aims to overcome the defects of the prior art, and provide a faraday cup assembly, an ion implantation device and a method for using the ion implantation device, which can reduce cost and improve product yield. According to one aspect of the present disclosure, there is provided a faraday cup assembly comprising: the base is provided with a mounting surface, the mounting surface is provided with a mounting groove, and the bottom surface of the mounting groove is provided with at least one mounting hole; the Faraday cup is in a circular ring shape and is arranged on the bottom surface of the mounting groove, the Faraday cup is provided with a circular ring-shaped cup cavity extending along the circumferential direction, the cup cavity is provided with an opening end facing the top of the mounting groove, the bottom of the cup cavity is provided with a plurality of fixing holes uniformly distributed along the circumferential direction, and each mounting hole is opposite to one fixing hole; The protection ring is arranged on the mounting surface and shields the mounting groove and is coaxially arranged with the Faraday cup, the projection of the opening end of the protection ring covers the cup cavity, the protection ring is provided with a plurality of circular arc-shaped slits which are uniformly distributed in the circumferential direction, the slits are communicated with the cup cavity, and the slits and the fixing holes meet the following conditions: wherein n is the number of the slits, c is the circumference of the slits, L is the arc length of the slits, and m is the number of the fixing holes; the connecting piece is detachably connected to the mounting hole and penetrates through the fixing hole opposite to the mounting hole. In an exemplary embodiment of the present disclosure, the slit and the fixing hole further satisfy the following condition: m=2n。 In one exemplary embodiment of the present disclosure, the connection member has an external thread and is screw-coupled with the corresponding mounting hole. In an exemplary embodiment of the present disclosure, the faraday cup assembly further comprises: the connectors are arranged at the bottom of the cup cavity, are distributed along the circumferential direction, and the central angles of two adjacent connectors are identical to the central angles of two adjacent fixing holes. In an exemplary embodiment of the present disclosure, the number of the slits is four, and the number of the fixing holes is eight. In an exemplary embodiment of the present disclosure, the faraday cup assembly further comprises: The distance measuring device is arranged on the surface of the protection ring, close to the Faraday cup, and is positioned in the cup cavity, and the distance measuring device is positioned between two adjacent slits and is used for detecting the distance between the distance measuring device and the bottom of the cup cavity; and the processing device is connected with the distance measuring device and is used for outputting a reminding signal when the distance between the distance measuring device and the bottom of the cup cavity is greater than a threshold value. In an exemplary embodiment of the present disclosure, the faraday cup assembly further comprises: And the alarm device is connected with the processing device and is used for sending out an alarm when receiving the reminding signal. In an exemplary embodiment of the present disclosure, the faraday cup assembly further comprises: and the shiel