CN-112325558-B - Stage water cooling device and fault detection method thereof

CN112325558BCN 112325558 BCN112325558 BCN 112325558BCN-112325558-B

Abstract

The application relates to an objective table water cooling device and a fault detection method thereof, wherein the objective table water cooling device comprises a water tank, a first pipeline and a second pipeline, the water tank is provided with a water pumping port and a reflux port, the first pipeline comprises an extraction pipeline connected with the water pumping port, a cooling pipeline positioned in the objective table and a reflux pipeline connected with the reflux port of the water tank, the second pipeline is connected between the extraction pipeline and the reflux pipeline and is close to the water pumping port and the reflux port, the first pipeline and the water tank form a refrigeration circulation loop, and the second pipeline and the water tank form a test circulation loop; the fault detection method comprises the steps of opening a refrigeration circulation loop, closing a test circulation loop, obtaining a first flow value at a water pumping port and a second flow value of a backflow pipeline, closing the refrigeration circulation loop, opening the test circulation loop, obtaining a third flow value at the water pumping port, and judging the fault type according to the first flow value, the second flow value, the third flow value and the target flow value.

Inventors

LI YANBIN
ZHANG ZHIQIANG

Assignees

长鑫存储技术有限公司

Dates

Publication Date: 20260508
Application Date: 20190805

Claims (16)

1. A fault detection method for a stage water cooling device is characterized in that, The objective table water cooling device comprises: The water tank is provided with a water pumping port and a backflow port, the first pipeline comprises an extraction pipeline connected with the water pumping port, a cooling pipeline positioned in the object stage and a backflow pipeline connected with the backflow port of the water tank, the second pipeline is connected between the extraction pipeline and the backflow pipeline and is close to the water pumping port and the backflow port, the first pipeline and the water tank form a refrigeration circulation loop, and the second pipeline and the water tank form a test circulation loop; The fault detection method comprises the following steps: opening the refrigeration cycle loop, closing the test cycle loop, and obtaining a first flow value at the water pumping port and a second flow value of the backflow pipeline; closing the refrigeration cycle loop, opening the test cycle loop, and obtaining a third flow value at the water pumping port; And comparing the first flow value, the second flow value, the third flow value and the target flow value, and judging the fault type of the objective table water cooling device.
2. The fault detection method of claim 1, wherein the comparing the first flow value, the second flow value, the third flow value, and a target flow value, determining the stage water cooling device fault type, comprises: When the second flow value is smaller than the first flow value and smaller than the third flow value, judging that the objective table water cooling device is in fault and the pipeline is blocked; when the second flow value is less than the first flow value=the third flow value, judging that the stage water cooling device is in fault and the pipeline is broken; and when the third flow value is smaller than the target flow value, judging that the stage water cooling device fails and the power for extracting the refrigerating fluid is insufficient.
3. The fault detection method of claim 1, wherein the method further comprises: And when the failure of the objective table water cooling device is judged to be insufficient in power for extracting the refrigerating fluid, closing the refrigerating circulation loop, opening the test circulation loop, and increasing the power for extracting the refrigerating fluid until the newly acquired third flow value is equal to the target flow value.
4. The fault detection method of claim 1, further comprising, after said obtaining a first flow value at said water withdrawal port and a second flow value of said return conduit: comparing the second flow value with a target flow value; and when the second flow value is smaller than the target flow value, executing the steps of closing the refrigeration cycle loop and opening the test cycle loop.
5. The fault detection method of claim 1, wherein, The objective table water cooling device further comprises a first valve, a second valve and a third valve, wherein the first valve is arranged on the extraction pipeline, the connecting end of the second pipeline and the extraction pipeline is positioned between the first valve and the water pumping port, the second valve is arranged on the backflow pipeline, the connecting end of the second pipeline and the backflow pipeline is positioned between the second valve and the backflow port, and the third valve is arranged on the second pipeline; The opening of the refrigeration cycle loop and the closing of the test cycle loop comprise the steps of closing a third valve, and opening a first valve and a second valve; the steps of closing the refrigeration cycle loop and opening the test cycle loop include opening a third valve and closing the first valve and the second valve.
6. The fault detection method of claim 5, wherein, The objective table water cooling device further comprises a first flowmeter and a second flowmeter, wherein the first flowmeter is arranged on the extraction pipeline and is close to the water pumping port, the connecting end of the second pipeline and the extraction pipeline is positioned between the first valve and the first flowmeter, and the second flowmeter is arranged on the backflow pipeline and is close to a water outlet where the cooling pipeline outputs refrigerating fluid from the objective table; the method for obtaining the first flow value at the water pumping port and the second flow value of the return pipeline comprises the steps of obtaining the first flow value through the first flow meter and obtaining the second flow value through the second flow meter; the acquiring the third flow value at the pumping port comprises acquiring the third flow value through the first flow meter.
7. The fault detection method of claim 1, wherein the method further comprises: detecting a first temperature value of the refrigerating fluid output from the object stage by the cooling pipeline; and adjusting the temperature of the refrigerating fluid in the water tank according to the first temperature value of the refrigerating fluid.
8. The fault detection method of claim 7, wherein, The objective table water cooling device further comprises: The first temperature sensor is positioned on the return pipeline and close to a water outlet of the cooling pipeline for outputting the refrigerating fluid from the object stage, and is used for detecting a first temperature value of the refrigerating fluid output from the object stage by the cooling pipeline; A refrigeration assembly for regulating the temperature of the refrigerant liquid in the water tank; The detecting the first temperature value of the cooling liquid output from the stage by the cooling pipeline comprises detecting the first temperature value of the cooling liquid output from the stage by the first temperature sensor; the adjusting the temperature of the refrigerating fluid in the water tank according to the first temperature value of the refrigerating fluid comprises the following steps: when the first temperature value is larger than a preset temperature, controlling the refrigeration component to enhance the refrigeration capacity; and when the first temperature value is smaller than the preset temperature, controlling the refrigeration component to reduce the refrigeration capacity.
9. The fault detection method of claim 1, wherein the method further comprises: And detecting the resistance value of the refrigerating fluid, and judging whether the refrigerating fluid needs to be replaced according to the resistance value of the refrigerating fluid.
10. The fault detection method of claim 9, wherein, The objective table water cooling device further comprises a resistivity detector which is arranged on the backflow pipeline and is close to a water outlet where the cooling pipeline outputs refrigerating fluid from the objective table; The detecting the resistance value of the refrigerating fluid comprises detecting the resistance value of the refrigerating fluid through the resistivity detector.
11. An objective table water cooling device, comprising: The device comprises a water tank, a first pipeline and a second pipeline, wherein the first pipeline comprises an extraction pipeline connected with a water pumping port of the water tank, a cooling pipeline positioned in an objective table and a backflow pipeline connected with a backflow port of the water tank, the second pipeline is connected between the extraction pipeline and the backflow pipeline and is close to the water pumping port and the backflow port, the first pipeline and the water tank form a refrigeration circulation loop, and the second pipeline and the water tank form a test circulation loop; the driving assembly is arranged on the refrigeration cycle loop and the test cycle loop and used for controlling the on-off of the refrigeration cycle loop and the on-off of the test cycle loop; The control assembly is connected with the driving assembly and used for controlling the driving assembly to execute a first process and a second process separately, wherein the first process comprises the steps of opening the refrigeration circulation loop and closing the test circulation loop; and the flow detection assembly is arranged on the pumping pipeline and the reflux pipeline and is used for detecting a first flow value at the pumping port and a second flow value of the reflux pipeline during the first process and a third flow value at the pumping port during the second process.
12. The stage water cooling arrangement of claim 11, further comprising: The data acquisition component is connected with the flow detection component and is used for acquiring the first flow value, the second flow value and the third flow value; The analysis component is connected with the data acquisition component and used for acquiring the first flow value, the second flow value and the third flow value and comparing the first flow value, the second flow value, the third flow value and the target flow value to judge the fault type of the objective table water cooling device.
13. The stage water cooling apparatus according to claim 11, The driving assembly comprises a first valve, a second valve and a third valve, wherein the first valve is arranged on the extraction pipeline, the connecting end of the second pipeline and the extraction pipeline is positioned between the first valve and the water pumping port, the second valve is arranged on the backflow pipeline, the connecting end of the second pipeline and the backflow pipeline is positioned between the second valve and the backflow port, and the third valve is arranged on the second pipeline; The opening of the refrigeration cycle loop and the closing of the test cycle loop comprise the steps of closing a third valve, and opening a first valve and a second valve; the steps of closing the refrigeration cycle loop and opening the test cycle loop include opening a third valve and closing the first valve and the second valve.
14. The stage water cooling apparatus according to claim 13, The flow detection assembly comprises a first flow meter and a second flow meter, wherein the first flow meter is arranged on the pumping pipeline and is close to the pumping port, the connecting end of the second pipeline and the pumping pipeline is positioned between the first valve and the first flow meter, the second flow meter is arranged on the backflow pipeline and is close to a water outlet where the cooling pipeline outputs refrigerating fluid from the object stage, the first flow meter is used for detecting a first flow value at the pumping port during the first process and a third flow value at the pumping port during the second process, and the second flow meter is used for detecting a second flow value of the backflow pipeline during the first process.
15. The stage water cooling arrangement of claim 11, further comprising: the first temperature sensor is positioned on the return pipeline and close to a water outlet of the cooling pipeline, which is used for outputting a refrigerator from the object stage, and is used for detecting a first temperature value of the refrigerating fluid output from the object stage by the cooling pipeline; A refrigeration assembly for regulating the temperature of the refrigerant liquid in the water tank; and the temperature adjusting assembly is connected between the first temperature sensor and the refrigerating assembly and is used for acquiring the first temperature value and adjusting the refrigerating capacity of the refrigerating assembly according to the first temperature value.
16. The stage water cooling arrangement of claim 11, further comprising: the resistivity detector is arranged on the return pipeline and close to a water outlet of the cooling pipeline for outputting the refrigerating fluid from the objective table, and is used for detecting the resistance value of the cooling pipeline for outputting the refrigerating fluid from the objective table.

Description

Stage water cooling device and fault detection method thereof Technical Field The invention relates to the field of semiconductor equipment of an objective table, in particular to an objective table water cooling device and an objective table water cooling device fault detection method. Background In the process of manufacturing semiconductor devices, the substrate to be processed is usually required to be placed on a special stage for operation, and because heat is usually generated in the process, the product yield is affected by excessive heat, so a set of stage water cooling devices are generally configured to control the temperature of the stage. The objective table water cooling device circularly conveys the refrigerating fluid to the objective table through the pipeline, and takes away part of heat of the objective table through the refrigerating fluid, so that the temperature of the objective table is stable. In the working process of the objective table water cooling device, under normal conditions, the refrigerating fluid in the pipeline circularly flows according to the set target flow value. However, the stage water cooling apparatus may have some failures after long-term use, for example, the actual flow value of the refrigerant liquid detected by the flowmeter installed in the pipe may deviate from the target flow value, and flow abnormality may occur. However, the existing objective table water cooling device can only detect flow abnormality, but cannot identify specific reasons causing flow abnormality, and cannot quickly check the abnormality. Disclosure of Invention Based on the above, the application provides a novel objective table water cooling device and a fault detection method of the objective table water cooling device, aiming at the technical problem that the specific cause of abnormal flow cannot be identified when the abnormal flow of the refrigerating fluid is detected by the conventional objective table water cooling device. A fault detection method of a stage water cooling device, The objective table water cooling device comprises: The water tank is provided with a water pumping port and a backflow port, the first pipeline comprises an extraction pipeline connected with the water pumping port, a cooling pipeline positioned in the object stage and a backflow pipeline connected with the backflow port of the water tank, the second pipeline is connected between the extraction pipeline and the backflow pipeline and is close to the water pumping port and the backflow port, the first pipeline and the water tank form a refrigeration circulation loop, and the second pipeline and the water tank form a test circulation loop; The fault detection method comprises the following steps: opening the refrigeration cycle loop, closing the test cycle loop, and obtaining a first flow value at the water pumping port and a second flow value of the backflow pipeline; closing the refrigeration cycle loop, opening the test cycle loop, and obtaining a third flow value at the water pumping port; And comparing the first flow value, the second flow value, the third flow value and the target flow value, and judging the fault type of the objective table water cooling device. According to the fault detection method for the objective table water cooling device, two pipelines are arranged in the water cooling device, wherein the first pipeline and the water tank form a refrigeration circulation loop for objective table heat dissipation, and the second pipeline and the water tank form a test circulation loop. In the normal working process of the objective table water cooling device, only the refrigeration circulation loop is opened, the test circulation loop is in a closed state, the refrigeration liquid circularly flows in the first pipeline according to a preset target flow value, and the temperature of the objective table is controlled. Once the flow of the objective table water cooling device is abnormal, the flow of the refrigerating fluid in the refrigerating circulation loop is smaller, the first flow value of the refrigerating fluid at the water pumping port in the period and the second flow value of the refrigerating fluid in the loop pipeline can be obtained by opening the refrigerating circulation loop and closing the test circulation loop, and the third flow value of the refrigerating fluid at the water pumping port in the period can be obtained by closing the refrigerating circulation loop and opening the test circulation loop. The reasons for the abnormal flow include insufficient power of the water pump, blockage of the pipeline, breakage of the pipeline and the like, and under different conditions, the reasons for the abnormal flow can be analyzed by comparing the first flow value, the second flow value, the third flow value and the target flow value. In one embodiment, the comparing the first flow value, the second flow value, the third flow value, and the target flow value, and determining the