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CN-112846744-B - Pendulum valve positioning jig assembly and semiconductor processing equipment

CN112846744BCN 112846744 BCN112846744 BCN 112846744BCN-112846744-B

Abstract

The invention discloses a pendulum valve positioning jig assembly and semiconductor processing equipment, belongs to the technical field of semiconductor vacuum equipment mounting jigs, and is designed for solving the problems of poor mounting precision and the like of the existing valve body. The positioning jig assembly for the pendulum valve comprises a positioning dial, wherein a plurality of positioning rings which are concentrically arranged and a center point marking part which is positioned at the center of each positioning ring are arranged on the positioning dial, and the distance between any two adjacent positioning rings is equal. The pendulum valve positioning jig assembly and the semiconductor processing equipment can judge whether the installation is qualified or not by whether the center of the positioning dial is aligned with the center of the valve body, if the center of the positioning dial is not aligned with the center of the valve body, the installation of the pendulum valve is deviated and needs to be adjusted, and the condition that the installation of the pendulum valve is deviated due to the experience difference of operators is avoided by adjusting the pendulum valve to be accurate.

Inventors

  • ZHANG XIANG
  • GONG XIN
  • ZHENG FENCHENG
  • LIN JINLONG

Assignees

  • 长鑫存储技术有限公司

Dates

Publication Date
20260508
Application Date
20191112

Claims (6)

  1. 1. The semiconductor processing equipment comprises a pendulum valve and is characterized by also comprising a pendulum valve positioning jig assembly; The semiconductor processing equipment comprises a chamber (3), wherein the chamber (3) is communicated to a reaction gas storage device through an air inlet pipe (31), a carrying platform (5) for carrying a silicon wafer (4) is arranged in the chamber (3), the chamber (3) is connected to a turbine pump (6) through a chamber pipeline (32), and a pendulum valve assembly is arranged between the chamber (3) and the turbine pump (6); The pendulum valve positioning jig assembly comprises a positioning dial (1), wherein a plurality of positioning rings (11) which are concentrically arranged and a center point identification part (12) which is positioned at the center of each positioning ring (11) are arranged on the positioning dial (1), and the distance between any two adjacent positioning rings (11) is equal; The positioning dial (1) is fixed on the fixed frame (24); The annular fixed frame (24) is positioned above the valve body (21); the pendulum valve positioning jig assembly further comprises an automatic deviation compensation device for detecting the position deviation of the pendulum valve in real time and automatically compensating The automatic deviation compensation device includes: a position sensor (15) for detecting the position deviation of the pendulum valve in real time; a control device in signal connection with the position sensor (15), and A driving device (23) which is in signal connection with the control device and is in driving connection with the pendulum valve; The control device can control the driving device (23) to drive the pendulum valve to swing according to the position deviation detected by the position sensor (15) so as to perform position compensation.
  2. 2. The semiconductor processing apparatus according to claim 1, wherein a positioning indication portion (211) is provided on the center of the valve body (21), the positioning indication portion (211) coinciding with the center point indication portion (12).
  3. 3. The semiconductor processing apparatus according to any one of claims 1 to 2, wherein the valve body (21) is the same size as the positioning dial (1).
  4. 4. The semiconductor processing apparatus according to claim 1, wherein two positioning lines (13) perpendicular to each other are further provided on the positioning dial (1), and a plurality of graduation marks (14) are provided on at least one of the positioning lines (13).
  5. 5. The semiconductor processing apparatus according to claim 4, wherein the graduation mark (14) has a graduation accuracy of 2mm.
  6. 6. The semiconductor processing apparatus according to claim 1, wherein the number of the position sensors (15) is two, and the detection directions of the two position sensors (15) are perpendicular.

Description

Pendulum valve positioning jig assembly and semiconductor processing equipment Technical Field The invention relates to the technical field of semiconductor vacuum equipment mounting jigs, in particular to a pendulum valve positioning jig assembly and semiconductor processing equipment comprising the same. Background A pendulum valve is a valve structure for controlling the opening of a pipe, and is generally provided in a semiconductor device. Specifically, the pendulum valve comprises a flaky valve body and a columnar swing rod, and the driving device can drive the swing rod to carry the valve body to do pendulum motion. The pendulum motion is that the valve body makes fan-shaped motion around a datum point on the pendulum rod, so that the area of the valve body in a pipeline is changed, the ratio value of the open area to the closed area in the pipeline is changed, and the opening of the pipeline is adjusted. The pendulum valve has a high requirement on whether the center of the valve body coincides with the pipeline axis (the connecting line of the centers of all radial sections of the pipeline) during installation, because if the pendulum valve is initially deviated from the center of the valve body, the error is large during the subsequent adjustment of the opening of the pipeline. In the prior art, an installer needs to judge whether the valve body is arranged at the central position through touch and vision, is greatly influenced by subjective consciousness and experience of an individual, has large installation error, easily deviates from the position of the valve body, and causes poor installation accuracy of the pendulum valve. Disclosure of Invention The invention aims to provide a pendulum valve positioning jig assembly which is convenient for quickly and accurately installing a valve body. Another object of the present invention is to provide a rapid and accurate semiconductor processing apparatus for valve body installation. In order to achieve the purpose, on one hand, the invention adopts the following technical scheme: The utility model provides a pendulum valve positioning jig subassembly, includes the location calibrated scale, be provided with a plurality of concentric setting's location rings and be located on the location calibrated scale the central point sign portion of location ring center department, arbitrary adjacent two interval between the location ring equals. In particular, two mutually perpendicular positioning lines are further arranged on the positioning dial, and a plurality of scale marks are arranged on at least one positioning line. In particular, the scale precision of the scale mark is 2mm. In particular, the pendulum valve positioning jig assembly further comprises an automatic deviation compensation device for detecting the position deviation of the pendulum valve in real time and automatically compensating. The automatic deviation compensation device comprises a position sensor, a control device and a driving device, wherein the position sensor is used for detecting the position deviation of the pendulum valve in real time, the control device is in signal connection with the position sensor, the driving device is in signal connection with the control device and is in driving connection with the pendulum valve, and the control device can control the driving device to drive the pendulum valve to swing according to the position deviation detected by the position sensor so as to conduct position compensation. In particular, the number of the position sensors is two, and the detection directions of the two position sensors are perpendicular. On the other hand, the invention adopts the following technical scheme: The semiconductor processing equipment comprises the pendulum valve and the pendulum valve positioning jig assembly. In particular, a positioning marking part is arranged on the center of the valve body of the pendulum valve, and the positioning marking part is overlapped with the center point marking part. In particular, the semiconductor processing equipment comprises a chamber, wherein the chamber is communicated to a reaction gas storage device through an air inlet pipe, a carrying platform for carrying a silicon wafer is arranged in the chamber, the chamber is connected to a turbine pump through a chamber pipeline, and a pendulum valve is arranged between the chamber and the turbine pump. In particular, the valve body is the same size as the positioning dial. The positioning dial of the pendulum valve positioning jig assembly is provided with a plurality of positioning circular rings which are concentrically arranged and a center point identification part which is positioned at the center of the positioning circular rings, whether the installation is qualified or not is judged through whether the center of the positioning dial is aligned with the center of the valve body, if the center of the positioning dial is not aligned with the center of the valve bo