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CN-113358564-B - Material conveying system, automatic crown block, track deviation detection device and method

CN113358564BCN 113358564 BCN113358564 BCN 113358564BCN-113358564-B

Abstract

The invention relates to a material conveying system, an automatic crown block, a track deviation detecting device and a method, wherein the track deviation detecting device comprises a vibration detector. The vibration detector is arranged on the vehicle body of the automatic crown block, and is used for being electrically connected with the controller of the material conveying system, acquiring vibration amplitude information when the automatic crown block runs on the track to be tested, and transmitting the vibration amplitude information when the automatic crown block runs on the track to be tested to the controller. Due to the fact that the vibration detector is arranged on the vehicle body of the automatic crown block, the vibration detector can synchronously sense vibration amplitude information in the process that the automatic crown block runs on a track to be detected, and timely transmits the vibration amplitude information to the controller, so that the defect of track gap can be timely and accurately detected, manual detection in the conventional technology is not needed, the detection efficiency is greatly improved, the degree of automation is higher, and the maintenance cost is greatly lower.

Inventors

  • QIN XIAOFENG

Assignees

  • 长鑫存储技术有限公司

Dates

Publication Date
20260508
Application Date
20210707

Claims (9)

  1. 1. The track deviation detection method of the material conveying system is characterized in that the material conveying system comprises an automatic crown block, a controller and a track to be detected, and the automatic crown block runs on the track to be detected; the automatic crown block comprises a track deviation detection device and a vehicle body, wherein the track deviation detection device is arranged on the vehicle body, and the track deviation detection device comprises: The vibration detector is arranged on the automatic crown block, is electrically connected with the controller of the material conveying system, and is used for acquiring vibration amplitude information when the automatic crown block runs on the track to be detected and transmitting the vibration amplitude information to the controller; The distance measuring instrument is arranged on the automatic crown block and is electrically connected with the controller, and the distance measuring instrument is used for acquiring the distance information from the distance measuring instrument to the surface of the track to be measured and transmitting the distance information to the controller; The controller is used for acquiring distance information detected by the distance meter when the vibration amplitude information is larger than a first set value, and judging whether the track to be detected has a broken difference defect or not according to the distance information; the track deviation detection method comprises the following steps: acquiring vibration amplitude information when the automatic crown block runs on the track to be tested; When the vibration amplitude information is larger than the first set value, acquiring distance information detected by the distance meter, and judging whether the track to be detected has a fault tolerance defect according to the distance information; When the vibration amplitude information is not greater than the first set value, indicating that the track to be tested has no fault tolerance defect; The step of judging whether the track to be tested has the break defect according to the distance information specifically comprises the following steps: Sequentially acquiring a plurality of distance information through a range finder in a set time period when the vibration amplitude information detected by the vibration detector is larger than a first set value; obtaining a distance deviation value according to the maximum distance value and the minimum distance value determined by the plurality of distance information; when the interval deviation value is larger than a second set value, indicating that the track to be tested has a fault tolerance defect; And when the interval deviation value is not larger than a second set value, indicating that the track to be tested has no break defect.
  2. 2. The method for detecting the track break difference according to claim 1, wherein the vibration detector is arranged on a front traveling liner of the automatic crown block, and the distance meter is arranged on a rear traveling liner of the automatic crown block.
  3. 3. The method for detecting the track break difference according to claim 1, wherein the vibration detector is arranged on a rear side running lining plate, a front gearbox, a rear gearbox or a hanging bracket of the automatic crown block, and the distance measuring instrument is arranged on a front side running lining plate, a front gearbox, a rear gearbox or a hanging bracket of the automatic crown block.
  4. 4. The track deviation detecting method according to claim 1, wherein the number of the distance meters is two, and the detecting ends of the two distance meters are arranged in one-to-one correspondence with the two track beams of the track to be detected.
  5. 5. The track break detection method according to claim 1, wherein the installation positions of the vibration detector on the automated crown block are respectively the same in distance from two track beams of the track to be detected.
  6. 6. The method for detecting the track break difference according to claim 1, wherein the distance meter comprises a bracket and a detection end arranged on the bracket, the bracket is arranged on the automatic crown block, and the detection end is arranged on the upper surface of the track to be detected.
  7. 7. The method for detecting the track break difference according to claim 1, wherein the vibration detectors are a plurality of, and the vibration detectors are respectively arranged at a plurality of different positions on the automatic crown block in a one-to-one correspondence manner.
  8. 8. The track deviation detecting method according to claim 1, wherein the controller is further electrically connected to a power mechanism of the automated crown block, and the controller is configured to control the power mechanism of the automated crown block to stop operating when it is determined that the deviation value of the track to be detected exceeds a preset threshold.
  9. 9. The method for detecting the track deviation according to claim 1, wherein the material conveying system further comprises an alarm, the controller is further electrically connected with the alarm, and the controller is used for controlling the alarm to act when judging that the deviation value of the track to be detected exceeds a preset threshold value.

Description

Material conveying system, automatic crown block, track deviation detection device and method Technical Field The invention relates to the technical field of semiconductor manufacturing, in particular to a material conveying system, an automatic crown block and a track deviation detection device and method. Background Conventional Automated Material Handling Systems (AMHS) include an Automated overhead transport vehicle (Overhead Hoist Transfer, OHT) and a track along which the wheels of the Automated overhead transport vehicle move back and forth for handling wafers. Wherein, the automatic crown block runs on the rails for a period of time, especially after 3 years of use, the joint position of two adjacent rails is easy to have a fault that the height of the end surface of one rail is higher or lower than that of the other rail. When the running wheel of the automatic crown block passes through the track with the defect of the break difference, the running wheel can be worn greatly, so that the service life is greatly reduced. Generally, maintenance personnel are required to check and maintain the track break-even condition regularly, and usually, the maintenance personnel stand on mobile equipment, manually adopt a ruler to compare and detect the flatness of the butt joint parts of adjacent tracks, and visually judge the break-even result according to the flatness. However, the running distance of the automatic material handling system is often large, for example, 100m, 1000m, 10000m, 20000m, etc., i.e., the number of required rails is large (usually hundreds or thousands), i.e., the number of butt joints of adjacent rails to be inspected is large. Namely, the track breakage checking and maintaining workload is large, large manpower and material resources are required to be consumed, and the maintenance cost is high. Disclosure of Invention Based on the above, it is necessary to overcome the defects of the prior art, and to provide a material conveying system, an automatic crown block, a track gap detection device and a method, which can timely and accurately detect the track gap defect, and has the advantages of higher detection efficiency, higher automation degree and lower maintenance cost. The technical scheme is that the track deviation detecting device comprises a vibration detector, wherein the vibration detector is arranged on an automatic crown block and is electrically connected with a controller of a material conveying system, and the vibration detector is used for acquiring vibration amplitude information when the automatic crown block runs on a track to be detected and transmitting the vibration amplitude information to the controller. The rail break difference detection device is characterized in that the vibration detector is arranged on the vehicle body of the automatic crown block, the vibration detector can synchronously sense vibration amplitude information in the process of running on the rail to be detected, and the vibration amplitude information is timely transmitted to the controller, so that the rail break difference defect can be timely and accurately detected, manual detection in the prior art is not needed, the detection efficiency is greatly improved, the degree of automation is higher, and the maintenance cost is greatly lower. In one embodiment, the track deviation detecting device further comprises at least one distance meter, wherein the distance meter is arranged on the automatic crown block and is electrically connected with the controller, and the distance meter is used for acquiring distance information from the distance meter to the surface of the track to be detected and transmitting the distance information to the controller. In one embodiment, the vibration detector is arranged on a front side traveling liner plate of the automatic crown block, and the distance measuring instrument is arranged on a rear side traveling liner plate of the automatic crown block. In one embodiment, the vibration detector is arranged on a rear side walking lining plate, a front gearbox, a rear gearbox or a hanging bracket of the automatic crown block, and the range finder is arranged on a front side walking lining plate, a front gearbox, a rear gearbox or a hanging bracket of the automatic crown block. In one embodiment, the number of the distance meters is two, and the detection ends of the two distance meters are arranged in one-to-one correspondence with the two track beams of the track to be detected. In one embodiment, the installation positions of the vibration detector on the automatic crown block are respectively the same in distance from two track beams of the track to be tested. In one embodiment, the range finder comprises a bracket and a detection end arranged on the bracket, wherein the bracket is arranged on the automatic crown block, and the detection end is arranged on the upper surface of the track to be detected. In one embodiment, the vibration detectors are arranged