CN-113808803-B - Hybrid magnet structure

CN113808803BCN 113808803 BCN113808803 BCN 113808803BCN-113808803-B

Abstract

The invention provides a hybrid magnet structure, which comprises two oppositely arranged diode magnet assemblies, wherein each diode magnet assembly comprises a permanent magnet, two iron cores and a movable magnetic field shunt element. The hybrid magnet structure focuses the charged particle beam at different positions by applying a variable gradient magnetic field in the horizontal or vertical direction of the charged particle beam. The invention achieves the purpose of focusing the charged particle beam by passing the charged particle beam through a gradient magnetic field established between two diode magnet assemblies. In addition, the size of the gradient magnetic field can be changed by adjusting the gap between the movable magnetic field shunt element and the permanent magnet, so as to control the particle beam size of charged particle beams with different energies or masses in a certain axial direction.

Inventors

HUANG QINGXIANG
Zhan Zhiquan
CHEN HUIHUANG
ZHU YUNLIANG

Assignees

汉辰科技股份有限公司

Dates

Publication Date: 20260505
Application Date: 20210513
Priority Date: 20200617

Claims (9)

1. A hybrid magnet structure for focusing a charged particle beam moving in a Z-axis direction, the hybrid magnet structure comprising: a first diode magnet assembly disposed in the XY plane, comprising: A first permanent magnet having a first N-terminal, a first S-terminal, a first inner side surface and a first outer side surface opposite to the first inner side surface, wherein the first N-terminal and the first S-terminal are disposed in a straight line direction parallel to the X-axis, the first inner side surface and the first outer side surface are located between the first N-terminal and the first S-terminal, and the first inner side surface is disposed to face the moving path of the charged particle beam; a first core including a first covering section and a first extending section connected to each other, the first covering section covering the first N-terminal, the first extending section extending from the first covering section to protrude from the first inner side; A second core including a second covering section and a second extending section connected to each other, the second covering section covering the first S-terminal, the second extending section extending from the second covering section to protrude from the first inner side surface, and The first permanent magnet comprises a first permanent magnet, a first magnetic conduction element movably arranged on the first outer side surface of the first permanent magnet, and a second diode magnet component coplanar with the first diode magnet component and comprising: A second permanent magnet having a second N-pole, a second S-pole, a second inner side and a second outer side opposite to the second inner side, the second N-pole and the second S-pole being disposed in another straight line direction parallel to the X-axis, the second inner side and the second outer side being disposed between the second N-pole and the second S-pole, the second inner side being disposed to face the moving path of the charged particle beam and to face the first inner side of the first permanent magnet; A third core including a third coverage area section and a third extension section connected to each other, the third coverage area section covering the second S-terminal, the third extension section extending from the third coverage area section to protrude from the second inner side, and the third extension section and the first extension section being disposed in a direction parallel to the Y-axis; A fourth core including a fourth covering section and a fourth extending section connected to each other, the fourth covering section covering the second N-terminal, the fourth extending section extending from the fourth covering section to protrude from the second inner side surface and being disposed in another linear direction parallel to the Y-axis, and The second magnetic conduction element is movably arranged on the second outer side face of the second permanent magnet.
2. The hybrid magnet structure according to claim 1, wherein a distance between the first extension section and the third extension section along the Y-axis direction is equal to a distance between the second extension section and the fourth extension section along the Y-axis direction.
3. The hybrid magnet structure according to claim 2, wherein a distance between the first extension section and the second extension section along the X-axis direction is equal to a distance between the third extension section and the fourth extension section along the X-axis direction.
4. The hybrid magnet structure according to claim 3, wherein the first extension section and the third extension section have a distance DY1 along the Y-axis direction, the second extension section and the fourth extension section also have a distance DY1 along the Y-axis direction, the first extension section and the second extension section have a distance DX1 along the X-axis direction, the third extension section and the fourth extension section also have a distance DX1 along the X-axis direction, and DY1 is larger than DX1.
5. The hybrid magnet structure according to claim 4, wherein the first permanent magnet has a width WX in the X-axis direction, the second permanent magnet has a width WX in the X-axis direction, and DX1 is smaller than WX.
6. The hybrid magnet structure according to claim 1, wherein the first extension section and the third extension section have a distance DY2 along the Y-axis direction, the second extension section and the fourth extension section have a distance DY2 along the Y-axis direction, the first extension section and the second extension section have a distance DX2 along the X-axis direction, the third extension section and the fourth extension section have a distance DX2 along the X-axis direction, and DY2 is smaller than DX2.
7. The hybrid magnet structure according to claim 6, wherein the first permanent magnet has a width WX in the X-axis direction, the second permanent magnet has a width WX in the X-axis direction, and DX2 is greater than WX.
8. A hybrid magnet structure according to any one of claims 1 to 7, wherein the outer surfaces of the first permanent magnet and the second permanent magnet are coated with a graphite layer.
9. The hybrid magnet structure according to any one of claims 1 to 7, wherein the outer surfaces of the first permanent magnet and the second permanent magnet are plated with a titanium nitride layer.

Description

Hybrid magnet structure Technical Field The present invention relates to a hybrid magnet structure, and more particularly, to a hybrid magnet structure suitable for ion implantation technology. Background Currently, in the field of ion implantation technology, a Dipole magnet (Dipole magnet) and a quadrupole magnet (composed of two Dipole magnets) are manufactured by winding a coil around an iron core, and a gradient magnetic field is formed between the two Dipole magnets, and a charged particle beam (e.g., an ion beam) is converged (focused) in a specific axial direction by the gradient magnetic field, as described in taiwan TW I679669 and taiwan TW I640999. The nature of this gradient magnetic field is that the magnetic field at the center of the field is zero and the magnetic field magnitude increases in some axial direction (e.g., the Y-axis direction) away from the center of the field. In operation, the center of the charged particle beam is passed through the field center of the gradient magnetic field, so that the magnetic field experienced by the charged particles located at the center of the charged particle beam will be zero, thereby maintaining the original path. The magnetic field experienced by the charged particles that are offset from the center of the charged particle beam in the Y-axis direction is not zero, and the magnetic force applied thereto by the experienced magnetic field causes them to approach toward the center (field center) of the charged particle beam, thereby achieving the purpose of converging (focusing) the charged particle beam. Conventional quadrupoles are operated by varying the current through the coils to vary the magnitude of the gradient magnetic field, thereby focusing the charged particle beam passing through the magnetic field. The control of the gradient magnetic field through the magnitude of the coil current has the problems of (1) consuming additional power, increasing the carbon footprint of the processed product and also increasing the processing cost, (2) having a large leakage magnetic field and easily affecting the magnetic field strength of the adjacent magnet, (3) having insulation materials of the coil releasing gas when overheated, affecting or contaminating the vacuum chamber, and (4) having limited degree of change of the magnetic field. Disclosure of Invention The invention provides a hybrid magnet structure for focusing a charged particle beam moving along a Z-axis direction, which comprises a first diode magnet assembly and a second diode magnet assembly which are arranged in a coplanar manner. The first diode magnet assembly comprises a first permanent magnet, a first iron core, a second iron core and a first magnetic conduction element. The first permanent magnet has a first N-terminal, a first S-terminal, a first inner side surface and a first outer side surface opposite to the first inner side surface. The first N-terminal and the first S-terminal are arranged in a straight line direction parallel to the X-axis. The first inner side surface and the first outer side surface are positioned between the first N-terminal and the first S-terminal, and the first inner side surface is configured to face the moving path of the charged particle beam. The first iron core comprises a first coverage area section and a first extension section which are connected with each other, wherein the first coverage area section covers the first N-terminal, and the first extension section extends from the first coverage area section to protrude out of the first inner side surface. The second iron core comprises a second coverage section and a second extension section which are connected with each other, wherein the second coverage section covers the first S-terminal, and the second extension section extends from the second coverage section to protrude out of the first inner side surface. The first magnetic conduction element is movably arranged on the first outer side surface of the first permanent magnet. The second diode magnet assembly comprises a second permanent magnet, a third iron core, a fourth iron core and a second magnetic conduction element. The second permanent magnet has a second N-terminal, a second S-terminal, a second inner side, and a second outer side opposite to the second inner side. The second N-terminal and the second S-terminal are arranged in another straight line direction parallel to the X-axis. The second inner side surface and the second outer side surface are positioned between the second N-terminal and the second S-terminal, and the second inner side surface is configured to face the moving path of the charged particle beam and to face the first inner side surface of the first permanent magnet. The third iron core comprises a third coverage area section and a third extension section which are connected with each other, the third coverage area section covers the second S terminal, the third extension section extends from the third coverag