CN-113979114-B - Substrate conveying device and substrate conveying method

Abstract

The present invention relates to a substrate conveying device and a substrate conveying method, and provides a substrate conveying device and the like capable of suppressing the situation that the delivery of a substrate cannot be performed. The substrate transfer device (100) is provided with a transfer arm (63) having a1 st suction unit (65) for sucking and holding the 1 st surface of a substrate, a moving unit (64) for moving the transfer arm (63), and a table (72) on which the substrate is placed. The stage (72) has a2 nd suction part (73) which is provided so as to protrude from the upper surface of the stage (72) and which sucks and holds the 2 nd surface of the substrate, which is opposed to the 1 st surface. When the substrate held by one of the transfer arm (63) and the table (72) is transferred to the other, the 1 st suction part (65) is moved to a position facing the 2 nd suction part (73) by the moving part (64).

Inventors

• Tsuji pool filial piety literary composition

Assignees

• 松下知识产权经营株式会社

Dates

Publication Date

20260512

Application Date

20210714

Priority Date

20200727

Claims (4)

1. 1. A substrate conveying device is provided with: A transport arm having a1 st suction part for sucking and holding the 1 st surface of the substrate; a moving part for moving the carrying arm, and A stage on which the substrate is placed, The stage has a2 nd adsorption part protruding from the upper surface of the stage for adsorbing and holding the 2 nd surface of the substrate opposite to the 1 st surface, When the substrate held by one of the transfer arm and the table is transferred to the other, the 1 st suction part is moved to a position opposed to the 2 nd suction part by the moving part, The substrate conveying device further comprises a control part for controlling the adsorption force of the 1 st adsorption part and the 2 nd adsorption part, When the substrate held by the transfer arm is placed on the table, the control unit reduces the suction force of the 1 st suction unit on the substrate, and then causes the 2 nd suction unit to suck and hold the substrate.
2. 2. The substrate handling apparatus according to claim 1, wherein, When the transfer arm is made to adsorb and hold the substrate placed on the table, the control unit reduces the adsorption force of the 2 nd adsorption unit on the substrate, and then makes the 1 st adsorption unit adsorb and hold the substrate.
3. 3. The substrate handling apparatus according to claim 1 or 2, wherein, The transport arm holds the flexible substrate by sucking the first surface 1 of the substrate.
4. 4. A substrate handling method comprising: step 1, the 1 st surface of the substrate is adsorbed and held by a1 st adsorption part of the carrying arm; a2 nd step of holding the substrate by sucking a2 nd surface of the substrate facing the 1 st surface by a2 nd suction unit provided in a stage, and A step 3 of transferring the substrate held by the transfer arm to the stage, In the 3 rd step, the 1 st suction unit is moved to a position facing the 2 nd suction unit, the suction force of the 1 st suction unit to the substrate is reduced, and the 2 nd suction unit is then caused to suck and hold the substrate, whereby the substrate held by the transfer arm is transferred to the table.

Description

Substrate conveying device and substrate conveying method Technical Field The present invention relates to a substrate conveying device and a substrate conveying method. Background Conventionally, there are component press-bonding lines that perform a plurality of steps including a step of attaching ACFs (Anisotropic Conductive Film, anisotropic conductive films) as anisotropic conductive members as adhesive members to end portions of substrates of display panels such as liquid crystal panels or organic EL (Electro Luminescence ) panels, and a step of thermocompression bonding electronic components such as driving circuits to the substrates via the ACFs. In such a component press line, a substrate transport apparatus is used that holds (supports) and transports a substrate between a plurality of apparatuses that perform respective steps (see, for example, patent document 1). Patent document 1 discloses a substrate holding device having a substrate holding plate on which a substrate is placed, and a protruding portion for holding the substrate by sucking the substrate is provided on a main surface of the substrate holding plate. Accordingly, in order to hold the substrate by the protruding portion, the substrate is not in contact with the substrate holding plate surface, and thus the substrate is not easily damaged. Prior art literature Patent literature Patent document 1 Japanese patent laid-open No. 2008-210965 In the case where the substrate is flexible, for example, an organic EL panel, if a protruding portion that protrudes from the surface of a stage on which the substrate is placed and that attracts the substrate is provided on the stage, the substrate may be deformed at the attracting position. In addition, for example, when a substrate is transported to a table by a transport arm, the substrate may be deflected by stress applied to the substrate at the time of transfer. Since the suction portion for sucking the substrate cannot properly contact the substrate and cannot suck the substrate if the protruding portion is provided on the stage, there are cases where the transfer of the substrate between the transfer arm and the stage cannot be performed. Disclosure of Invention Problems to be solved by the invention The invention provides a substrate conveying device capable of suppressing the impossibility of substrate delivery. Means for solving the problems The substrate transfer apparatus according to one embodiment of the present invention includes a transfer arm having a1 st suction portion for sucking and holding a1 st surface of a substrate, a moving portion for moving the transfer arm, and a table on which the substrate is placed, the table having a2 nd suction portion provided so as to protrude from an upper surface of the table, the 2 nd suction portion being provided so as to suck and hold a2 nd surface of the substrate, the 2 nd suction portion being opposed to the 1 st surface, and the 1 st suction portion being moved to a position opposed to the 2 nd suction portion by the moving portion when the substrate held on one of the transfer arm and the table is transferred to the other one. The substrate transfer method according to one embodiment of the present invention includes a1 st step of holding a1 st surface of a substrate by suction by a1 st suction unit provided in a transfer arm, a2 nd step of holding a2 nd surface of the substrate facing the 1 st surface by suction by a2 nd suction unit provided in a table, and a 3 rd step of transferring the substrate held by one of the transfer arm and the table to the other, wherein in the 3 rd step, the 1 st suction unit is moved to a position facing the 2 nd suction unit, and then the substrate held by the one is transferred to the other. The general and specific aspects may be implemented by a system, a method, an integrated circuit, a computer program, a computer-readable CD-ROM, or any combination of the system, the method, the integrated circuit, the computer program, and the storage medium. Effects of the invention According to the present invention, it is possible to provide a substrate conveying device and the like capable of suppressing a situation in which the transfer of a substrate is impossible. Drawings Fig. 1 is a plan view showing a component mounting line according to an embodiment. Fig. 2 is a schematic diagram for explaining a flow of mounting components in the component mounting line according to the embodiment. Fig. 3 is a block diagram showing a configuration of a substrate transport apparatus according to an embodiment. Fig. 4 is a cross-sectional view showing a substrate holding portion provided in the substrate transport apparatus according to the embodiment. Fig. 5 is a schematic configuration diagram for explaining a suction mechanism provided in the substrate transport apparatus according to the embodiment. Fig. 6 is a cross-sectional view for explaining deformation of a substrate caused by holding the substrate by a tab