CN-114038988-B - Design and manufacturing method of stretchable formable thermoelectric device based on high-performance film material

Abstract

The invention relates to a design and a preparation method of a stretchable formable thermoelectric device based on a high-performance film material, which comprises the steps of firstly cutting a regular array pattern of a paper-cut structure on a substrate film material, then depositing a high-performance p-type thermoelectric material and an n-type thermoelectric material on the substrate in sequence, and then depositing an electrode material to connect the p-type thermoelectric material and the n-type thermoelectric material in series. According to the thin film thermoelectric device based on the paper-cut structure, the two-dimensional plane structure can be converted into the three-dimensional structure under the action of external force, so that the heat conduction in the device is converted into the vertical direction from the direction in the plane, the temperature difference between a heat source and the environment is utilized to the maximum extent, and the power generation performance of the device is improved. Due to the three-dimensional network structure characteristics of the device, the cold end of the device can perform effective heat exchange with the environment without introducing an additional heat dissipation module. The device has flexible structural design and strong compatibility of preparation process links, and has important application prospect in the field of wearable self-power supply.

Inventors

• ZHU WEI
• GUO ZHANPENG
• DENG YUAN
• ZHANG QINGQING
• HU SHAOXIONG

Assignees

• 北京航空航天大学

Dates

Publication Date

20260505

Application Date

20211109

Claims (7)

1. 1. The preparation method of the stretchable formable thermoelectric device based on the high-performance film material is characterized by comprising the following steps of: (1) Cutting a regular array pattern of a paper cutting structure on a substrate film material; (2) Depositing a p-type thermoelectric material on the substrate cut in the step (1), and then depositing an n-type thermoelectric material; Depositing electrode material on the thin film material after depositing thermoelectric material to connect the p-type thermoelectric material and the n-type thermoelectric material in series; The structural parameters of the array pattern of the paper-cut structure comprise cutting length x, cutting interval y, cutting interval z, characteristic angle theta and tensile strain epsilon; the relationship between the characteristic angle θ and the tensile strain ε is as follows: When the characteristic angle reaches the maximum value, the tensile strain also reaches a peak epsilon MAX ; Epsilon MAX is calculated by the following formula: Wherein R 1 = x/y,R 2 = x/z; The relation between the projected effective area A and the geometric area A 0 of the array pattern of the paper-cut structure is expressed as follows: 。
2. 2. the method of producing a stretchable formable thermoelectric device based on a high performance thin film material according to claim 1, wherein in step (1), the base thin film material is a flexible substrate.
3. 3. The method for producing a stretchable and formable thermoelectric device based on a high-performance thin film material according to claim 1, wherein in the step (1), the cutting means is femtosecond laser cutting.
4. 4. The method of manufacturing a stretchable formable thermoelectric device based on high performance thin film materials according to claim 1, wherein the cutting length at one end is x/2 and the cutting interval at the other end is y/2 along the same column direction.
5. 5. The method for producing a stretchable formable thermoelectric device based on a high-performance thin film material according to claim 1, wherein in the step (2), the p-type thermoelectric material is Sb 2 Te 3 and the n-type thermoelectric material is Bi 2 Te 3 .
6. 6. The method for manufacturing a stretchable formable thermoelectric device based on high performance thin film materials according to claim 5, wherein the deposition of the p-type thermoelectric material and the n-type thermoelectric material is performed by using a mask assisted magnetron sputtering deposition method.
7. 7. The method for producing a stretchable formable thermoelectric device based on a high-performance thin film material according to claim 1, wherein in the step (2), the electrode material is a Cu/Ti electrode material.

Description

Design and manufacturing method of stretchable formable thermoelectric device based on high-performance film material The invention belongs to the technical field of thin film thermoelectric devices, and particularly relates to a design of a stretchable formable thermoelectric device based on a high-performance thin film material and a preparation method thereof. Background With the advent of the 5G era, network transmission technology has been rapidly developed, and people hope to link all information of human bodies through various sensors, so as to realize 'networking of human bodies', and monitor the physical health and behaviors of the human bodies in real time. It is predicted that as the population ages, the demand for electronic skin devices and chips will become greater and greater in establishing wireless health monitoring, and by 2025, its global market is predicted to reach $ 17 billion. However, how to continuously and stably supply power to microelectronic devices in the internet of things is a big problem, and the application development of the thermoelectric generator (TEGs) is just one of the most promising solutions. Most conventional thermoelectric devices are rigid, and the energy conversion efficiency on non-planar heat sources is too low to be suitable for wearable applications. Therefore, there is a need to develop a lightweight TEGs with stretching and/or deformation capabilities that allows good thermal contact with non-planar heat sources without affecting its power generation performance. In order to achieve the aim, the organic thermoelectric material with high flexibility has great application prospect, however, the thermoelectric performance of the material is poor (ZT value and conductivity are low), and the power generation performance of the device is limited. Therefore, the use of high performance inorganic thermoelectric materials is a reasonable solution in order to obtain flexibility TEGs for excellent output performance. However, conventional inorganic thermoelectric materials have prevented their use in flexible thermoelectric devices due to mechanical rigidity and fragility. A direct and effective solution is to integrate n-type and p-type thermoelectric legs of a block together by using flexible electrodes such as serpentine electrodes and liquid metal, and to package the blocks by using a stretchable elastic matrix, so that a device for realizing integration of rigid high-performance inorganic materials has ductility. In indoor environments, the temperature difference between the skin of a human body and the environment is usually about 10 ℃, however, because the thermal resistance of the device in the direction of the temperature gradient is smaller, the temperature difference established on the thermoelectric material is only 1-2 ℃, which severely limits the power output of TEGs under the actual use condition. In addition, the film TEGs manufactured on the flexible substrate can be easily attached to the surface of the skin due to the advantages of small volume, light weight, flexibility and the like, and can generate electricity by using the body temperature. However, such devices are usually in-plane structures, and the heat flow of the devices is transmitted along the plane, which is perpendicular to the actual temperature gradient direction, so that the heat absorption and dissipation structures of the devices must be designed, which introduces additional interface thermal resistance to reduce the power generation efficiency of the devices, and which also increases the weight and volume of the devices, which is unfavorable for wearable applications. Therefore, how to achieve good thermal contact between the device and the heat source, and simultaneously, the heat transmission direction of the film TEGs is the same as the temperature difference gradient direction under the actual use condition, which is important for the wearable application of the thermoelectric device. Zhou et al report a flexible TEG with "leaves" that can directly exchange heat with the environment without the need for an additional heat sink module, but this "leaf" structure TEG is not malleable and is difficult to maintain during movement (ADVANCED SCIENCE 2021,2004947,1-9). Similarly, a stretchable TEG of a "music-like high" structure has recently been reported in which the prepared planar thermoelectric device units are vertically aligned and electrically connected using a liquid metal. But it stretches or bends only in one direction and cannot conform to complex body surfaces (SCIENCE ADVANCES 2021,7, (7), 1-9). Disclosure of Invention In order to solve the problems in the prior art, the invention provides a design of a stretchable formable thermoelectric device based on a high-performance film material and a preparation method thereof. The stretchable and formable thermoelectric device is a three-dimensional stretchable film TEG based on a paper-cut structure, and can integrate an ine