CN-114078735-B - Display device manufacturing apparatus and display device manufacturing method

Abstract

Disclosed are a display device manufacturing apparatus and a display device manufacturing method. In one embodiment, a display device manufacturing apparatus includes a vacuum chamber, a negative pressure forming portion that provides a negative pressure to the vacuum chamber, an electrostatic chuck disposed within the vacuum chamber, an electrostatic chuck moving portion that moves the electrostatic chuck in a first direction, a gas jetting portion that jets an inert gas into the vacuum chamber, and a laser etcher that irradiates laser light into the vacuum chamber.

Inventors

• JIN CHENGWAN
• JIN CHENGZHEN
• Zheng Jinglie
• WEI ZHENGUO
• PU ZAIHONG
• Cui Yingxu
• HAN DONGYUAN

Assignees

• 三星显示有限公司

Dates

Publication Date

20260512

Application Date

20210805

Priority Date

20200814

Claims (10)

1. 1. A display device manufacturing apparatus, comprising: A vacuum chamber; A negative pressure forming part for providing negative pressure to the vacuum chamber; An electrostatic chuck disposed within the vacuum chamber; An electrostatic chuck moving part moving the electrostatic chuck in a first direction; a gas injection part for injecting an inert gas for transporting charges and holes into the vacuum chamber, and A power supply device for supplying electrostatic charge to the electrostatic chuck in an on state and stopping supplying electrostatic charge to the electrostatic chuck in an off state, and The power supply device is turned on during a first period before the inert gas is injected and turned off during a second period after the inert gas is injected.
2. 2. The display device manufacturing apparatus according to claim 1, wherein, The gas jetting portion jets gas toward at least one of a side surface of the electrostatic chuck extending in the first direction and a side surface extending in a second direction intersecting the first direction.
3. 3. The display device manufacturing apparatus according to claim 1, wherein, The gas injection part is arranged on the inner side wall of the vacuum chamber.
4. 4. The display device manufacturing apparatus according to claim 1, wherein, The gas jetting portion is disposed on the electrostatic chuck and moves with the movement of the electrostatic chuck.
5. 5. The display device manufacturing apparatus according to claim 2, wherein, The object substrate is disposed on one surface of the electrostatic chuck, and the gas jetting section jets a gas to a boundary portion between a side surface of the electrostatic chuck and a side surface of the object substrate.
6. 6. The display device manufacturing apparatus according to claim 1, wherein, The display device manufacturing apparatus further includes: A gas supply section that supplies gas to the gas injection section; a first gas supply flow path connecting the gas injection part and the gas supply part, and And two or more control valves disposed in the first gas supply flow path.
7. 7. The display device manufacturing apparatus according to claim 1, wherein, The display device manufacturing apparatus further includes: a laser etching machine for irradiating laser to the interior of the vacuum chamber, The laser etcher is disposed below the vacuum chamber and faces the lower surface of the electrostatic chuck, and irradiates the laser in a manner inclined from the lower surface of the electrostatic chuck.
8. 8. The display device manufacturing apparatus according to claim 1, wherein, The display device manufacturing apparatus further includes: a laser etching machine for irradiating laser to the interior of the vacuum chamber, The electrostatic chuck comprises a laser through hole, the laser of the laser etching machine penetrates through the laser through hole, The laser etcher is disposed above the vacuum chamber and irradiates the laser vertically below the electrostatic chuck through the laser penetration hole.
9. 9. The display device manufacturing apparatus according to claim 1, wherein, The display device manufacturing apparatus further includes: A laser etching machine for irradiating laser to the inside of the vacuum chamber; moving glass arranged in the vacuum chamber to overlap with the laser etcher in the height direction, and And a glass moving unit that moves the moving glass in the first direction.
10. 10. A method of manufacturing a display device, comprising: A step of adsorbing a target substrate on the lower surface of an electrostatic chuck provided in a vacuum chamber; a step of forming a hole by irradiating laser light to at least one layer including a light emitting element of the target substrate; a step of ejecting nitrogen gas for transporting charges and holes to the electrostatic chuck and the target substrate, and A step of releasing the suction of the target substrate from the electrostatic chuck, Providing an electrostatic charge to the electrostatic chuck during a first period of time prior to spraying the nitrogen gas, and ceasing providing an electrostatic charge to the electrostatic chuck during a second period of time after spraying the nitrogen gas.

Description

Display device manufacturing apparatus and display device manufacturing method Technical Field The present invention relates to a display device manufacturing apparatus and a display device manufacturing method. Background Various types of display devices are being marketed for displaying images, such as smart phones, tablet PCs, digital cameras, notebook computers, navigators, and smart televisions. Such a display device may be provided with an optical element such as a camera or an infrared sensor, and an optical hole may be formed so as to physically penetrate a part of the display device in order to receive light from the optical element. Disclosure of Invention The invention provides a display device manufacturing apparatus and a display device manufacturing method using the same, wherein residual charges on an electrostatic chuck and a substrate mounted on the electrostatic chuck can be easily removed. The problems of the present invention are not limited to the above-mentioned problems, and other technical problems not mentioned can be clearly understood by those skilled in the art from the following description. In one embodiment for solving the problems, a display device manufacturing apparatus includes a vacuum chamber, a negative pressure forming portion that provides a negative pressure to the vacuum chamber, an electrostatic chuck disposed within the vacuum chamber, an electrostatic chuck moving portion that moves the electrostatic chuck in a first direction, and a gas jetting portion that jets an inert gas into the vacuum chamber. The gas jetting portion may jet gas toward at least one of a side surface of the electrostatic chuck extending in the first direction and a side surface extending in a second direction intersecting the first direction. The gas jetting portion may be disposed on an inner side wall of the vacuum chamber. The gas jetting portion may be disposed on the electrostatic chuck and may move in response to movement of the electrostatic chuck. The target substrate may be disposed on one surface of the electrostatic chuck, and the gas jetting portion may jet a gas toward a boundary portion between a side surface of the electrostatic chuck and a side surface of the target substrate. The electrostatic chuck may further include a pressure lever for pressurizing the target substrate downward to separate at least a part of the target substrate from the lower surface of the electrostatic chuck, and the gas jetting portion may jet gas between the electrostatic chuck and the target substrate. The display device manufacturing apparatus may further include a gas supply portion that supplies a gas to the gas injection portion, and a first gas supply flow path that connects the gas injection portion and the gas supply portion. The display device manufacturing apparatus may further include two or more control valves disposed in the first gas supply flow path. The display device manufacturing apparatus may further include a laser etcher that irradiates laser light into the vacuum chamber. The laser etcher may be disposed under the vacuum chamber and irradiates laser light toward an underside of the electrostatic chuck. The laser etcher may irradiate the laser in a manner inclined to the lower surface of the electrostatic chuck. The laser etcher may vertically irradiate the laser to a lower surface of the electrostatic chuck. The laser etcher may be disposed above the vacuum chamber and irradiates laser light through the electrostatic chuck. The electrostatic chuck may include a laser through hole through which laser light of the laser etcher passes. The display device manufacturing apparatus may further include a moving glass disposed in the vacuum chamber so as to overlap the laser etcher in a height direction, and a glass moving part moving the moving glass in the first direction. An object substrate including a glass substrate and an active element layer formed on the glass substrate and including a light emitting element and a thin film transistor driving the light emitting element may be adsorbed on the lower surface of the electrostatic chuck, and the laser etcher may form a through hole penetrating the active element layer by removing the light emitting element and the thin film transistor. The pressure inside the vacuum chamber may be 100nPa to 100mPa. The display device manufacturing apparatus may further include a power supply device that supplies an electrostatic charge to the electrostatic chuck in an on state and stops supplying the electrostatic charge to the electrostatic chuck in an off state, the power supply device being turned on during a first period before the inert gas is injected and turned off during a second period after the inert gas is injected. The electrostatic chuck may include a plurality of gas injection holes disposed below the electrostatic chuck, and an internal flow path communicating with the plurality of gas injection holes. In one embodiment for solving t