CN-114388388-B - Laser annealing device and laser annealing method

CN114388388BCN 114388388 BCN114388388 BCN 114388388BCN-114388388-B

Abstract

The invention provides a laser annealing device and a laser annealing method. The laser annealing device comprises a galvanometer module, a focusing module and a uniform light shaping module, wherein the galvanometer module comprises a galvanometer, a laser beam entering the galvanometer module changes an emergent position through rotation of the galvanometer, the focusing module focuses the laser beam emergent from the galvanometer module, the uniform light shaping module has at least one degree of freedom, and the position of the uniform light shaping module on the degree of freedom is changed to adjust the image quality of the light spot. The position of the dodging shaping module on the degree of freedom is adjusted, so that the image quality of the light spots is convenient to adjust, and the phenomena of light spot deformation and image quality deterioration caused by the change of the scanning angle of the vibrating mirror can be improved. The laser annealing method improves the laser annealing effect by adjusting the image quality of the light spots of each view field point.

Inventors

LIU YA
ZHOU WEI
LI YUNFENG
SU HAIYE
LUO WEN

Assignees

上海微电子装备（集团）股份有限公司

Dates

Publication Date: 20260505
Application Date: 20201020

Claims (8)

1. A laser annealing apparatus, comprising: The galvanometer module comprises a galvanometer, and the outgoing position of the laser beam incident to the galvanometer module is changed through the rotation of the galvanometer; the focusing module is used for focusing the laser beam emitted from the galvanometer module and forming a light spot on a focal plane; The device comprises a light homogenizing and shaping module, a light homogenizing and shaping module and a control unit, wherein the light homogenizing and shaping module is provided with at least one degree of freedom, the image quality of the light spots is adjusted by changing the position of the light homogenizing and shaping module in the degree of freedom, the control unit is used for adjusting the position of the light homogenizing and shaping module in each degree of freedom, the light spots of an edge view field are compensated by adjusting the position of the light homogenizing and shaping module in each degree of freedom, the light spots of the edge view field and a center view field are identical in shape, the light homogenizing and shaping module is provided with a first degree of freedom translating along a first direction and/or a second degree of freedom translating along a second direction perpendicular to the first direction, and the light spots of the edge view field are compensated by controlling the control unit to adjust the eccentric amount of the light homogenizing and shaping module in the first direction and/or the second direction respectively, and a plane formed by the first direction and the second direction is perpendicular to the direction of the laser beams incident on the light homogenizing and shaping module.
2. The laser annealing apparatus according to claim 1, wherein the leveling shaping module has a third degree of freedom that rotates about a first direction and/or a fourth degree of freedom that rotates about a second direction perpendicular to the first direction.
3. The laser annealing apparatus according to claim 1, wherein the light homogenizing and shaping module further comprises a lens holder, the diffractive optical unit is disposed on the lens holder and moves along with the movement of the lens holder, the adjustment unit comprises a plurality of adjustment members connected to the lens holder, and each of the adjustment members adjusts the position of the diffractive optical unit in one degree of freedom by adjusting the position of the lens holder.
4. The laser annealing apparatus of claim 3, wherein the adjustment assembly comprises an adjustment jackscrew.
5. The laser annealing apparatus according to claim 1, wherein said laser annealing apparatus comprises: the industrial personal computer is connected with the uniform-light shaping module, the industrial personal computer is provided with an image quality compensation control system, and the adjusting unit adjusts the positions of the diffraction optical units on each degree of freedom under the control of the image quality compensation control system, so that the image quality of the light spots is adjusted.
6. The laser annealing apparatus according to claim 1, wherein the galvanometer module includes two galvanometers, and wherein at least one of the galvanometers changes a rotation angle under control of a motor such that the laser beam reflected by the two galvanometers forms a spot at a focal plane after being focused by the focusing module.
7. The laser annealing apparatus according to claim 1, further comprising: and the field lens module is used for adjusting the size of the light spot and/or adjusting the numerical aperture of the laser beam incident on the field lens module.
8. A laser annealing method characterized by performing laser annealing using the laser annealing apparatus according to any one of claims 1 to 7, the laser annealing method comprising: Providing a laser beam, and enabling the laser beam to irradiate the surface of a workpiece through a light homogenizing and shaping module, a galvanometer module and a focusing module to form a light spot, wherein the light homogenizing and shaping module has at least one degree of freedom, and the position of the light spot traverses each view field point in the annealing range of the surface of the workpiece by adjusting the scanning angle of the galvanometer module; Evaluating the image quality of the light spots formed at each field point, changing the position of the light homogenizing module in the degree of freedom according to the evaluation result to ensure that the image quality of the light spots meets the requirement, recording and storing the adjustment amount corresponding to each field point, and And performing laser annealing, wherein the positions of the dodging shaping modules are synchronously adjusted by selecting corresponding adjustment amounts according to the positions of the view field points so as to compensate the image quality of the light spots formed by the view field points.

Description

Laser annealing device and laser annealing method Technical Field The invention relates to the field of laser annealing, in particular to a laser annealing device and a laser annealing method. Background Laser annealing refers to a processing method in which a workpiece is annealed by a laser. Compared with the traditional baking annealing, the laser annealing has better controllability for the annealing range and can reach the set temperature in a shorter time, and is widely applied to various annealing occasions, and the workpiece subjected to the laser annealing treatment can be made of substrates such as silicon, glass, ceramic, metal and the like. The laser annealing device comprises a light source module and a galvanometer module, wherein a laser beam emitted by the light source module irradiates the galvanometer module, is reflected by two galvanometers in the galvanometer module, and irradiates the surface of a workpiece to form light spots through a focusing mirror (such as a flat field focusing mirror) matched with the galvanometer module, wherein the galvanometer in the galvanometer module rotates along a corresponding axis under the drive of a motor, so that the light spots move in an annealing range of the surface of the workpiece (namely, the galvanometer scanning) to change the positions of the light spots so as to realize the purpose of annealing the surface of the workpiece. However, it is found that in the annealing process of the laser annealing device, due to the change of the scanning angle of the galvanometer, the problem of unstable image quality of light spots exists at different positions within the view field range, and especially, the light spots formed in the edge view field are easy to generate inclined deformation due to the difference of the scanning angle of the galvanometer, so that the image quality does not meet the process requirement. Further, it has been found that distortion of the focusing mirror in the laser annealing apparatus is also likely to cause problems such as deformation of a spot formed on the surface of a workpiece and poor image quality, and affects the laser annealing effect. Disclosure of Invention The invention provides a laser annealing device, which aims to improve the phenomena of light spot deformation and image quality deterioration caused by the change of a scanning angle of a vibrating mirror and improve the laser annealing efficiency and the annealing effect. The invention further provides a laser annealing method. In one aspect, the present invention provides a laser annealing apparatus comprising: The galvanometer module comprises a galvanometer, and the outgoing position of the laser beam incident to the galvanometer module is changed through the rotation of the galvanometer; the focusing module is used for focusing the laser beam emitted from the galvanometer module and forming a light spot on a focal plane; The dodging shaping module is provided with at least one degree of freedom, and the image quality of the light spots is adjusted by changing the position of the dodging shaping module in the degree of freedom. Optionally, the light homogenizing and shaping module has a first degree of freedom translating along a first direction and/or a second degree of freedom translating along a second direction perpendicular to the first direction, and a plane formed by the first direction and the second direction is perpendicular to a laser beam direction entering the light homogenizing and shaping module. Optionally, the light homogenizing and shaping module has a third degree of freedom rotating with the first direction as an axis, and/or a fourth degree of freedom rotating with a second direction perpendicular to the first direction as an axis, and a plane formed by the first direction and the second direction is perpendicular to the direction of the laser beam incident on the light homogenizing and shaping module. Optionally, the dodging module includes a diffractive optical unit and an adjustment unit for adjusting the position of the diffractive optical unit in each degree of freedom. Optionally, the dodging shaping module further includes a lens base, the diffractive optical unit is disposed on the lens base and moves along with the movement of the lens base, the adjusting unit includes a plurality of adjusting components connected with the lens base, and each adjusting component adjusts the position of the diffractive optical unit on a degree of freedom by adjusting the position of the lens base. Optionally, the adjustment assembly includes an adjustment jack. Optionally, the laser annealing device includes: the industrial personal computer is connected with the uniform-light shaping module, the industrial personal computer is provided with an image quality compensation control system, and the adjusting unit adjusts the positions of the diffraction optical units on each degree of freedom under the control of the image quality compensation co