CN-114670349-B - Cutting device

CN114670349BCN 114670349 BCN114670349 BCN 114670349BCN-114670349-B

Abstract

The invention provides a cutting device, which is provided with a cutting tool changing unit and can prevent other cutting tools from being carried into a cutting tool accommodating part in which the cutting tools are accommodated. The cutting tool is carried into the cutting tool storage unit which is determined by the storage determination means as not storing the cutting tool. This prevents the cutting tool from being carried into the cutting tool storage section in which the other cutting tools are stored.

Inventors

SATOSHI SAWAKI
Gong Tiantou

Assignees

株式会社迪思科

Dates

Publication Date: 20260505
Application Date: 20211220
Priority Date: 20201224

Claims (6)

1. A cutting device, comprising: a chuck table for holding a workpiece; a cutting unit which is provided with a cutting tool for cutting the workpiece held by the chuck table and can rotate, and A cutting tool changing unit for automatically loading and unloading the cutting tool mounted in the cutting unit, Wherein, the The cutting tool replacement unit has: a cutting tool storage having a plurality of cutting tool receiving portions for individually receiving the cutting tools, and A cutting tool carrying mechanism for carrying the cutting tool between the cutting tool storage and the cutting unit, The cutting tool storage device has a storage determination unit for determining whether or not another cutting tool is stored in the cutting tool storage portion, This determination can be performed only in a state where the cutting tool is positioned at a predetermined distance from the cutting tool storage portion, The cutting tool carrying mechanism carries the cutting tool into the cutting tool storage section which is determined not to store the other cutting tools by using the storage determination means.
2. The cutting device according to claim 1, wherein, The cutting device further comprises a control unit which controls the action of the cutting tool conveying mechanism, The storage determination unit includes: an illumination unit for irradiating the cutting tool storage unit with light, and An imaging element which receives light from the illumination unit and converts the light into an electrical signal, The control unit includes: A brightness calculation unit that calculates brightness from a portion corresponding to the cutting tool or the other cutting tool included in the image obtained by the imaging by the storage determination unit; A threshold value storage unit that stores a threshold value as a criterion for distinguishing a brightness of a portion corresponding to the other cutting tool included in an image obtained by the imaging of the storage determination unit in a state in which the other cutting tool is stored in the cutting tool storage unit from a brightness of a portion corresponding to the cutting tool included in an image obtained by the imaging of the storage determination unit in a state in which the other cutting tool is not stored in the cutting tool storage unit and the cutting tool is positioned at a predetermined distance from the cutting tool storage unit, and And a determination unit that compares the brightness calculated by the brightness calculation unit with the threshold stored in the threshold storage unit, thereby determining whether or not the cutting tool storage unit stores the other cutting tools.
3. The cutting device according to claim 2, wherein, The cutting tool has a recording unit which records one or both of the type and the characteristics of the cutting tool, The determination unit determines one or both of the type and the characteristic of the cutting tool based on a portion corresponding to the recording unit included in the image obtained by the image capturing by the storage determination unit.
4. The cutting device according to claim 2, wherein, The illumination section is a oblique illumination.
5. The cutting device according to claim 3, wherein, The illumination section is a oblique illumination.
6. The cutting device according to any one of claims 2 to 5, wherein, The cutting tool receiving portion is provided on the front surface of the transparent support member, The storage determination unit is disposed on the back side of the support member, The storage determination unit photographs the cutting tool or the other cutting tools through the support member.

Description

Cutting device Technical Field The present invention relates to a cutting device having a cutting tool changing unit for automatically attaching and detaching a cutting tool mounted in a cutting unit. Background A chip of a semiconductor device such as an IC (INTEGRATED CIRCUIT) or an LSI (LARGE SCALE Integration) is an indispensable structure for various electronic devices such as a mobile phone and a personal computer. Such a chip is generally manufactured by dividing a wafer having a large number of semiconductor devices formed on the front surface into individual regions including the individual semiconductor devices. The workpiece such as a wafer is divided by cutting the workpiece by a cutting device, for example. Such a cutting device generally includes a chuck table for holding a workpiece, and a cutting unit to which a cutting tool for cutting the workpiece held by the chuck table is rotatably attached. Then, the outer peripheral edge of the rotating cutting tool is brought into contact with the workpiece along the boundary of the region including the semiconductor device, whereby the workpiece is cut and divided into individual chips. The cutting tool wears due to cutting of the workpiece. Therefore, in such a cutting device, the cutting tool needs to be replaced periodically. In view of this, a cutting device having a cutting tool changing unit (cutting tool changing device) that automatically changes a cutting tool has been proposed (for example, see patent literature 1). Specifically, the cutting tool exchange unit includes a cutting tool holder (tool rack) having a plurality of cutting tool storage sections (tool storage units) each storing a cutting tool, and a cutting tool conveyance mechanism (guide unit, movable substrate, positioning unit, fastening nut attachment/detachment mechanism, and cutting tool attachment/detachment mechanism) that conveys the cutting tool between the cutting tool holder and the cutting unit. The used cutting tool is automatically transferred from the cutting tool storage to the cutting tool unit by the cutting tool transfer mechanism, and the unused cutting tool is automatically transferred from the cutting tool storage to the cutting tool unit. Patent document 1 Japanese patent laid-open No. 2007-105829 In a cutting device, the operator usually manually performs discarding of used cutting tools stored in a plurality of cutting tool storage units and/or replenishment of unused cutting tools into a plurality of cutting tool storage units. The cutting device is generally configured to detect an operation by an operator to grasp the storage conditions of used cutting tools and unused cutting tools in the plurality of cutting tool storage sections. However, if such an operation is performed by the operator in a state where some error occurs and the cutting device is temporarily stopped, the storage state of the cutting tool in the plurality of cutting tool storage portions may not be accurately grasped. Further, if such a situation cannot be accurately grasped by the cutting device, various problems may occur. For example, the cutting tool conveying mechanism may convey the used cutting tools into the cutting tool storage section storing the unused cutting tools. In this case, there is a possibility that two cutting tools collide with each other, and the cutting tool conveying mechanism or an unused cutting tool may be damaged. Disclosure of Invention In view of the above, an object of the present invention is to prevent a cutting tool from being carried into a cutting tool storage section in which another cutting tool is stored in a cutting device having a cutting tool replacement unit. The present invention provides a cutting device including a chuck table for holding a workpiece, a cutting unit to which a cutting tool for cutting the workpiece held by the chuck table is attached and which is rotatable, and a cutting tool changing unit for automatically attaching and detaching the cutting tool attached to the cutting unit, wherein the cutting tool changing unit includes a cutting tool storage having a plurality of cutting tool storage sections for individually storing the cutting tool, and a cutting tool conveying mechanism for conveying the cutting tool between the cutting tool storage and the cutting unit, the cutting tool storage having a storage determination unit for determining whether the cutting tool is stored in the cutting tool storage section, and the cutting tool conveying mechanism conveying the cutting tool to the cutting tool storage section determined not to store the cutting tool by using the storage determination unit. Preferably, the cutting device further includes a control unit that controls an operation of the cutting tool conveying mechanism, the housing determination unit includes an illumination portion that irradiates light to the cutting tool housing portion, and an imaging element that receives light in a state where the light is irradia