Search

CN-114678332-B - ITO (indium tin oxide) patterning method, preparation method of display panel and display panel

CN114678332BCN 114678332 BCN114678332 BCN 114678332BCN-114678332-B

Abstract

The application relates to an ITO patterning method, a preparation method of a display panel and the display panel. The method comprises the steps of providing an organic glue layer, patterning the organic glue layer, forming a plurality of concave parts which are spaced from each other in an upper surface layer of the organic glue layer, depositing ITO materials on the organic glue layer, wherein the deposition thickness of the ITO materials is smaller than the depth of the concave parts, forming a first ITO film by the ITO materials deposited on the upper surface layer, forming a second ITO film by the ITO materials deposited in the concave parts, and isolating the first ITO film from the second ITO film. The method can improve productivity and reduce cost.

Inventors

  • LIU DA

Assignees

  • 合肥维信诺科技有限公司

Dates

Publication Date
20260505
Application Date
20220322

Claims (10)

  1. 1. A method for manufacturing a display panel, the method comprising: Providing a substrate provided with a pixel driving circuit, wherein the substrate comprises a main screen area, a secondary screen area and a transition area positioned between the main screen area and the secondary screen area, and the pixel driving circuit comprises a plurality of pixel circuits arranged in the main screen area and the transition area; An organic adhesive layer is laid on one side of the substrate provided with the pixel driving circuit; Patterning the organic adhesive layer, forming through holes which are communicated with the pixel circuits in a one-to-one correspondence manner in the organic adhesive layer, and forming concave parts which are communicated with the corresponding through holes in the upper surface layers of the organic adhesive layer positioned in the auxiliary screen area and the transition area; And depositing an ITO material on one side of the organic adhesive layer, which is far away from the pixel driving circuit, wherein the deposition thickness of the ITO material is smaller than the depth of the concave part, the ITO material deposited on the upper surface layer forms a first ITO film, the ITO material deposited in the concave part forms a second ITO film, and the first ITO film and the second ITO film are isolated, wherein a light-emitting unit positioned in the main screen area is electrically connected with a pixel circuit positioned in the main screen area through the first ITO film, and a light-emitting unit positioned in the auxiliary screen area and the transition area is electrically connected with the pixel circuit positioned in the transition area through one of the first ITO film and the second ITO film respectively.
  2. 2. The method of claim 1, wherein a cross-sectional area of the via in communication with the recess perpendicular to the opening direction is gradually reduced along the opening direction.
  3. 3. The method of claim 2, wherein the via in communication with the recess is inverted trapezoidal.
  4. 4. The method of claim 1, wherein the patterning the organic glue layer, forming vias in the organic glue layer, wherein the vias are in one-to-one correspondence with the pixel circuits, and forming recesses in an upper surface layer of the organic glue layer in the sub-screen region and the transition region, wherein the recesses are in communication with the corresponding vias, comprises: exposing the organic glue layer through a first mask, wherein the first mask comprises a plurality of opaque areas which are spaced from each other and light transmission areas which are positioned between the opaque areas; developing the organic adhesive layer, wherein a positive trapezoid concave part is formed in a region, opposite to the light-tight region, of the organic adhesive layer; exposing the organic glue layer through a second mask, wherein the second mask comprises a plurality of light-transmitting areas which are spaced from each other and light-proof areas which are positioned between the light-transmitting areas; and developing the organic adhesive layer, wherein the region of the organic adhesive layer opposite to the light-transmitting region forms an inverted trapezoid via hole.
  5. 5. The method of claim 1, wherein the depths of at least two of the depressions are different.
  6. 6. The method of claim 5, wherein the recess comprises at least a first recess and a second recess, the second recess having a depth greater than a depth of the first recess.
  7. 7. The method of claim 6, wherein the first recess and the second recess are formed by: exposing the organic adhesive layer through a mask, wherein the mask comprises a full-light-transmission area, a semi-light-transmission area and a non-light-transmission area, and the organic adhesive layer comprises negative photoresist; And developing the organic adhesive layer, wherein the first concave part is formed in the area, opposite to the semi-light-transmitting area, of the organic adhesive layer, and the second concave part is formed in the area, opposite to the non-light-transmitting area, of the organic adhesive layer.
  8. 8. The method of claim 6, wherein the first recess and the second recess are formed by: Patterning the organic adhesive layer, and forming a plurality of first concave parts which are spaced from each other in the organic adhesive layer; and etching part of the first concave part to form the second concave part.
  9. 9. The method of claim 1, wherein the ITO material is deposited to a thickness of 200-1000 angstroms.
  10. 10. A display panel, the display panel comprising: the substrate comprises a main screen area, a secondary screen area and a transition area positioned between the main screen area and the secondary screen area; the pixel driving circuit comprises a plurality of pixel circuits arranged in the main screen area and the transition area; The organic adhesive layer is positioned at one side of the substrate provided with the pixel driving circuit, through holes which are communicated with the pixel circuits in a one-to-one correspondence manner are formed in the organic adhesive layer, and concave parts which are communicated with the corresponding through holes are formed in the upper surface layers of the organic adhesive layer positioned in the auxiliary screen area and the transition area; the first ITO film is positioned on the upper surface layer; The second ITO film is positioned in the concave part, and the first ITO film and the second ITO film are isolated; The luminous layer group is located the organic glue film is equipped with one side of first ITO film, luminous layer group is including being located main screen district, vice screen district with a plurality of luminous units of transition district, be located main screen district's luminous unit pass through first ITO film with be located main screen district's pixel circuit electricity is connected, be located vice screen district with one of transition district's luminous unit respectively pass through first ITO film and second ITO film with be located the transition district the pixel circuit electricity is connected.

Description

ITO (indium tin oxide) patterning method, preparation method of display panel and display panel Technical Field The application relates to the technical field of display, in particular to an ITO (indium tin oxide) patterning method, a preparation method of a display panel and the display panel. Background The under-screen camera has become a trend, and with the development of display technology, the under-screen camera technology has appeared. The under-screen camera is to fully embed the front camera under the screen, so that a real full-screen can be realized. However, it is not difficult to place the front camera in the inner layer of the screen, and it is difficult to solve the problem of light transmission. In the conventional technology, a transparent lead, such as a thinner ITO film layer, is used to electrically connect a light emitting unit located in an under-screen image pickup area with a pixel circuit located outside the under-screen image pickup area, so as to increase the transmittance of the under-screen image pickup area. However, the number of ITO layers is generally more than two, and patterning of the ITO layers may limit the overall throughput and increase the cost. Disclosure of Invention Accordingly, it is desirable to provide an ITO patterning method, a display panel manufacturing method, and a display panel that can improve productivity and reduce cost. In a first aspect, the present application provides a method of patterning ITO. The method comprises the following steps: providing an organic adhesive layer; patterning the organic adhesive layer, and forming a plurality of concave parts which are spaced from each other in the upper surface layer of the organic adhesive layer; And depositing an ITO material on the organic adhesive layer, wherein the deposition thickness of the ITO material is smaller than the depth of the concave part, the ITO material deposited on the upper surface layer forms a first ITO film, the ITO material deposited in the concave part forms a second ITO film, and the first ITO film and the second ITO film are isolated. In the above-mentioned ITO patterning method, first provide an organic glue layer, and pattern the organic glue layer, offer a plurality of depressed portions that are spaced each other in the upper surface layer of the organic glue layer, deposit ITO material on the upper surface layer and form the first ITO film, deposit ITO material in the depressed portion and form the second ITO film, first ITO film and second ITO film keep apart, can utilize the special structure inside the organic glue layer, make thinner ITO material divide into first ITO film and second ITO film that keep apart each other automatically in thicker depressed portion corner, and the distribution area of depressed portion can be unanimous with the distribution area of patch cord, thereby reduce the patterning number of ITO rete, improve whole productivity, reduce implementation cost. In one embodiment, the cross-sectional area of the concave portion perpendicular to the opening direction is gradually increased along the opening direction; Preferably, the concave part is in a right trapezoid shape. The cross-sectional area of the concave part perpendicular to the opening direction is gradually increased along the opening direction, the whole upper surface is small, the lower surface is large, the included angle between the side wall and the bottom surface is an acute angle, the ITO material cannot be attached to the side wall, and the ITO material deposited inside and outside the concave part is automatically disconnected. In one embodiment, the depths of at least two of the recesses are different; Preferably, the recess comprises at least a first recess and a second recess, and the depth of the second recess is greater than the depth of the first recess. The depth of the concave part is different, ITO materials deposited in the concave part can be positioned on different planes, so that different wires can be formed, adjacent wires can be separated, the distance between the adjacent wires on the planes is reduced, and the wire design is facilitated. In one embodiment, the patterning the organic glue layer, forming a plurality of recesses spaced apart from each other in an upper surface layer of the organic glue layer, includes: exposing the organic adhesive layer through a mask, wherein the mask comprises a full-light-transmission area, a semi-light-transmission area and a non-light-transmission area, and the organic adhesive layer comprises negative photoresist; And developing the organic adhesive layer, wherein the first concave part is formed in the area, opposite to the semi-light-transmitting area, of the organic adhesive layer, and the second concave part is formed in the area, opposite to the non-light-transmitting area, of the organic adhesive layer. The negative photoresist is a soluble substance before illumination, and an insoluble substance is formed after illu