CN-114683427-B - Auxiliary device

Abstract

The present invention provides an auxiliary device capable of automatically replacing a cutting tool and being mounted on a cutting device which has been delivered to a user at a later time. The auxiliary device connected to the cutting device includes a cutting tool storage unit that stores a plurality of cutting tools, a carry-in/out unit that carries in and out the cutting tools from the cutting tool storage unit, a Y-axis direction positioning unit that positions the carry-in/out unit at an operation position and a retreat position in a Y-axis direction with respect to the cutting tool storage unit, a Z-axis moving mechanism that moves the carry-in/out unit in the Z-axis direction, and an X-axis moving mechanism that moves the carry-in/out unit in the X-axis direction to act on the cutting tools mounted on a spindle of the cutting unit of the cutting device.

Inventors

• Temple teacher's Itou Kentaro
• Women's house soil excavation
• Matsuoka shintaro

Assignees

• 株式会社迪思科
• 株式会社迪思科

Dates

Publication Date

20260421

Application Date

20211227

Priority Date

20201228

Claims (7)

1. 1. An auxiliary device is connected with a cutting device, The cutting device comprises: A chuck table having a holding surface for holding a workpiece; a cutting unit to which a cutting tool for cutting a workpiece held by the chuck table is attached by a fixing nut; an X-axis feeding member for feeding the chuck table in the X-axis direction; a Y-axis feeding member for indexing the cutting unit in a Y-axis direction perpendicular to the X-axis direction, and A Z-axis feeding member for feeding the cutting unit in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, The holding surface is defined by the X-axis direction and the Y-axis direction, Wherein, the The auxiliary device has at least: A cutting tool storage unit that stores a plurality of cutting tools; A carry-in/out unit for carrying in and carrying out the cutting tool from the cutting tool storage unit; A Y-axis positioning unit for positioning the carry-in/out unit at an operating position and a retracted position in the Y-axis direction with respect to the cutting tool storage unit; A Z-axis moving mechanism for moving the carry-in and carry-out unit in the Z-axis direction, and An X-axis moving mechanism for moving the carry-in/out unit in an X-axis direction to align an X-axis direction position of a cutting tool attached to a spindle of the cutting unit with an X-axis direction position of a cutting tool carried out from the cutting tool storage unit by the carry-in/out unit, positioning the cutting tool carried out from the cutting tool storage unit by the carry-in/out unit at a position capable of being replaced with the cutting tool attached to the spindle of the cutting unit, The carry-in/out unit includes at least: A Z-axis extending in the Z-axis direction; a cutter holding part for holding the cutter by suction, and A fixing nut holding part for screwing or unscrewing the fixing nut with or from an external thread formed at the front end of the spindle, The carry-in/out unit has two tool holding portions for one of the fixing nut holding portions, The tool holding portion and the fixing nut holding portion are radially coupled to the Z-axis so that two of the tool holding portions are provided every other one of the fixing nut holding portions in the circumferential direction.
2. 2. The auxiliary device according to claim 1, wherein, The cutting tool storage unit includes: A drive gear having a first rotation shaft extending in a Y-axis direction; a driven gear separated from the driving gear in the Z-axis direction and having a second rotation axis extending in the Y-axis direction; An endless track wound around the driving gear and the driven gear, and And a support shaft extending in the Y-axis direction and disposed on the endless track at predetermined intervals, the support shaft being inserted into a central opening of the cutting tool to support the cutting tool.
3. 3. The auxiliary device according to claim 2, wherein, The auxiliary device can adjust the interval between the driving gear and the driven gear in the Z-axis direction, and can also adjust the length of the infinite track.
4. 4. The auxiliary device according to claim 1, wherein, The carrying-in/out unit is disposed in a frame slidably supported by a rail extending in the Y-axis direction disposed in the elevating table, and the frame is positioned in the working position and the retracted position in the Y-axis direction with respect to the cutting tool storage unit by the Y-axis direction positioning unit.
5. 5. The auxiliary device according to claim 4, wherein, The carry-in and carry-out unit is disposed in the first movable body, the first movable body is disposed in the frame, the first movable body is supported slidably in a state of being suspended on a first rail extending in the X-axis direction disposed at a lower portion of the second movable body, the second movable body is supported slidably in a state of being suspended on a second rail extending in the X-axis direction disposed at a top portion of the frame, and the carry-out and carry-in unit is configured to be movable in and out in the X-axis direction by the first movable body and the second movable body.
6. 6. The auxiliary device according to claim 5, wherein, A trimming plate accommodating portion for accommodating a trimming plate for trimming a cutting tool is disposed at the bottom of the frame, and a holding member for holding the trimming plate accommodated in the trimming plate accommodating portion is disposed on the first moving body.
7. 7. The auxiliary device according to claim 6, wherein, An end face correction jig housing portion is disposed at the bottom of the frame, and the end face correction jig housing portion houses an end face correction jig for trimming an outer peripheral end face of a mounting flange formed at a front end of a spindle of the cutting unit to support a back of a cutting tool, the end face correction jig being held by the holding member disposed on the first moving body.

Description

Auxiliary device Technical Field The present invention relates to an auxiliary device connected to a cutting device. Background A wafer divided by a plurality of intersecting lines to be divided and having a plurality of devices such as ICs and LSIs formed on the front surface thereof is divided into device chips by a dicing apparatus, and the divided device chips are used for electric devices such as mobile phones and personal computers. The cutting device comprises a chuck table having a holding surface for holding a wafer, a cutting unit to which a cutting tool for cutting the wafer held by the chuck table is attached by a fixing nut, an X-axis feeding member for feeding the chuck table in the X-axis direction, a Y-axis feeding member for indexing the cutting unit in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feeding member for cutting the cutting unit in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, wherein the holding surface is defined by the X-axis direction and the Y-axis direction, and the wafer can be divided into individual device chips with high accuracy. The present inventors have also proposed an automatic replacement device capable of automatically replacing a cutting tool attached to a cutting unit (see, for example, patent document 1). Patent document 1 Japanese patent laid-open No. 2007-98536 However, there is a problem in that it is difficult to mount the automatic replacement device to the cutting device which has been delivered to the user at a later time. Disclosure of Invention It is therefore an object of the present invention to provide an auxiliary device which is capable of automatically replacing a cutting tool and which can be installed at a later date in a cutting device which has been delivered to a user. The present invention provides an auxiliary device connected to a cutting device, the cutting device including a chuck table having a holding surface for holding a workpiece, a cutting unit to which cutting tools for cutting the workpiece held by the chuck table are attached by a fixing nut, an X-axis feeding member for feeding the chuck table in an X-axis direction, a Y-axis feeding member for indexing the cutting unit in a Y-axis direction perpendicular to the X-axis direction, and a Z-axis feeding member for feeding the cutting unit in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, the holding surface being defined by the X-axis direction and the Y-axis direction, wherein the auxiliary device includes a cutting tool storage unit for storing a plurality of cutting tools, an carry-in/out unit for carrying out and in the cutting tools from the cutting tool storage unit, a Y-axis direction positioning unit for positioning the carry-in unit in an operation position and a retreat position in the Y-axis direction relative to the cutting tool storage unit, a Z-axis moving mechanism for moving the carry-in/out unit in the X-axis direction, and a moving mechanism for moving the carry-in/out unit in the X-axis direction relative to the cutting tool storage unit. Preferably, the cutting tool storage unit includes a drive gear having a first rotation axis extending in a Y-axis direction, a driven gear separated from the drive gear in a Z-axis direction and having a second rotation axis extending in the Y-axis direction, an endless track wound around the drive gear and the driven gear, and a support shaft extending in the Y-axis direction and disposed at predetermined intervals on the endless track, the support shaft being inserted into a central opening of the cutting tool to support the cutting tool. Preferably, the auxiliary device is capable of adjusting the interval in the Z-axis direction of the driving gear and the driven gear, and is also capable of adjusting the length of the endless track. Preferably, the carry-in and carry-out unit includes a Z-axis extending in a Z-axis direction, a tool holding portion radially coupled to the Z-axis and holding the cutting tool, and a fixing nut holding portion screwing or unscrewing the fixing nut to or from an external thread formed at a front end of the spindle, and the carry-in and carry-out unit includes two tool holding portions for one fixing nut holding portion. Preferably, the carry-in/out unit is disposed in a frame slidably supported by a rail extending in the Y-axis direction disposed in the elevating table, and the frame is positioned in the operating position and the retracted position in the Y-axis direction with respect to the cutting tool storage unit by the Y-axis direction positioning unit. Preferably, the carry-in and carry-out unit is disposed in the first movable body, the first movable body is disposed in the frame, the first movable body is supported slidably in a state of being suspended on a first rail extending in the X-axis direction disposed at a lower portion of the second movable body, the second movable bo