CN-114908321-B - Substrate conveying device, film forming device, control method and film forming method

Abstract

The invention provides a conveying device, a film forming device, a control method and a film forming method for inhibiting the substrate from bending during conveying. The conveying device for supporting both sides of a conveying body and conveying the conveying body is provided with a1 st conveying roller for supporting the left side of the conveying body in the conveying direction and conveying the conveying body, a 2 nd conveying roller for supporting the right side of the conveying body in the conveying direction and conveying the conveying body, a detection member for detecting a deviation of the posture of the conveying body relative to a reference, and a control member for independently controlling the 1 st conveying roller and the 2 nd conveying roller to correct the deviation detected by the detection member.

Inventors

• SUSHIHARA TOMOKAZU

Assignees

• 佳能特机株式会社

Dates

Publication Date

20260508

Application Date

20220126

Priority Date

20210208

Claims (9)

1. 1. A conveyor that supports both sides of a conveyor body and conveys the conveyor body, comprising: a1 st conveying roller that supports the left side of the conveying body in the conveying direction and conveys the conveying body; A2 nd conveying roller that supports the right side of the conveying body in the conveying direction and conveys the conveying body; a detection member for detecting a deviation of the posture of the transport body with respect to a reference, and A control unit that independently controls the 1 st conveying roller and the 2 nd conveying roller to correct the offset detected by the detection unit, The detecting means monitors the power consumption of the servo motors of the 1 st conveying roller and the 2 nd conveying roller, The control means determines a deviation of the posture of the transport body from a reference based on the power consumption, and sets control values for the servo motors of the 1 st transport roller and the 2 nd transport roller.
2. 2. The delivery device of claim 1, wherein the delivery device comprises a plurality of delivery elements, The control means calculates target values of rotational speeds of the 1 st conveying roller and the 2 nd conveying roller, respectively, based on the detection result of the detection means, and sets control values for the 1 st conveying roller and the 2 nd conveying roller so as to reach the target values.
3. 3. The delivery device of claim 1, wherein the delivery device comprises a plurality of delivery elements, The control means determines a deviation of the posture of the transport body from a reference based on a difference between timings at which power consumption of servo motors of the 1 st transport roller and the 2 nd transport roller increases.
4. 4. The delivery device of claim 1, wherein the delivery device comprises a plurality of delivery elements, The control means determines a deviation of the posture of the transport body with respect to a reference based on a difference between the power consumption of the servo motors of the 1 st transport roller and the 2 nd transport roller at a predetermined time point.
5. 5. The delivery device of claim 1, wherein the delivery device comprises a plurality of delivery elements, The conveyor further includes side rollers disposed laterally of the conveying path of the conveyor, and configured to abut against the conveyor conveyed by the 1 st conveying roller and the 2 nd conveying roller to change a conveying direction of the conveyor.
6. 6. A film forming apparatus is characterized by comprising: the conveyor according to claim 1 to 5, and An evaporation source for evaporating a film-forming material on a transport body transported by the transport device.
7. 7. A film forming apparatus is characterized by comprising: the conveyor according to claim 1 to 5, and And an alignment device that performs alignment of the carrier conveyed by the conveying device with the mask.
8. 8. A control method of a conveying apparatus for conveying a conveying body, comprising: a detection step of detecting a deviation of the posture of the transport body with respect to a reference, and A control step of independently controlling a1 st conveying roller that conveys the conveying body toward a left side in a conveying direction of the conveying body and a2 nd conveying roller that conveys the conveying body toward a right side in the conveying direction to correct the deviation detected in the detection step, In the detecting step, power consumption of servo motors of the 1 st conveying roller and the 2 nd conveying roller is monitored, In the control step, a deviation of the posture of the transport body from a reference is determined based on the power consumption, and control values of the servo motors for the 1 st transport roller and the 2 nd transport roller are set.
9. 9. A film forming method comprising: a step of conveying the conveying body by controlling the conveying device by the control method according to claim 8, and And a film forming step of forming a film while conveying the conveying body.

Description

Substrate conveying device, film forming device, control method and film forming method Technical Field The invention relates to a substrate conveying device, a film forming device, a control method and a film forming method. Background In the manufacture of an organic EL display, an organic material is formed on a substrate on which TFTs (thin film transistors) are formed. As a method for forming an organic material, vacuum vapor deposition is mainly used, and a method of forming a film of a vapor deposition material from below and upward on a substrate with a TFT formed facing downward is used. A plurality of panel regions may be arranged on a substrate on which TFTs are formed, and may be referred to as a mother glass. In recent years, since the size of a base glass has been increased, an in-line film forming method of forming a film while moving a substrate has been studied from a conventional film forming method in a state where a glass substrate is stationary (patent document 1). Prior art literature Patent literature Patent document 1 Japanese patent application laid-open No. 2014-141706 Disclosure of Invention Problems to be solved by the invention However, in the in-line film forming system, it is difficult to perform film formation while conveying only the glass substrate, and it is necessary to load the glass substrate on a tray having a mask function and convey the glass substrate. In the inline film forming method, a side roller that functions as a guide is provided for the purpose of suppressing a meandering during conveyance. There are problems that particles are generated by contact with the side rollers, and that the substrate and the tray are deviated. In view of the above problems, an object of the present invention is to suppress warpage of a substrate during conveyance. Means for solving the problems In order to solve the above problems, according to the present invention, a conveyor device for supporting and conveying both sides of a conveyor body includes: a1 st conveying roller that supports the left side of the conveying body in the conveying direction and conveys the conveying body; A2 nd conveying roller that supports the right side of the conveying body in the conveying direction and conveys the conveying body; a detection member for detecting a deviation of the posture of the transport body with respect to a reference, and And a control unit that independently controls the 1 st conveying roller and the 2 nd conveying roller to correct the offset detected by the detection unit. In order to solve the above-described problems, according to the present invention, a control method is a control method of a conveying apparatus for conveying a conveying body, the control method including: a detection step of detecting a deviation of the posture of the transport body with respect to a reference, and And a control step of independently controlling a1 st conveying roller that conveys the conveying body toward a left side in a conveying direction of the conveying body and a2 nd conveying roller that conveys the conveying body toward a right side in the conveying direction so as to correct the deviation detected in the detection step. ADVANTAGEOUS EFFECTS OF INVENTION This can suppress the warpage of the substrate during conveyance. Drawings Fig. 1 is a schematic diagram showing an example of a production line according to the present embodiment. Fig. 2 is a diagram showing an example of a substrate transported by the transport device according to the present embodiment. Fig. 3 is a view showing another example of a substrate transported by the transport device according to the present embodiment. Fig. 4 is a diagram showing an example of processing executed by the control device according to the present embodiment. Fig. 5 is a diagram showing an example of a method for estimating the posture of a substrate by a posture detection sensor. Fig. 6 (a) and 6 (B) are diagrams showing an example of a change in power consumption of a plurality of servomotors. Fig. 7 is a diagram showing a method of suppressing the warpage of a substrate by the conveying device according to the present embodiment. Detailed Description Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The following embodiments do not limit the invention according to the claims. Although the plurality of features are described in the embodiments, not necessarily all of the plurality of features are essential to the invention, and a plurality of features may be arbitrarily combined. In the drawings, the same or similar structures are denoted by the same reference numerals, and redundant description thereof is omitted. < Embodiment 1 > An example of the production line of the present embodiment will be described with reference to fig. 1. In the production line shown in fig. 1, the glass substrate 7 is put in from the substrate input section 11. The glass substrate 7 is placed in the substr