Search

CN-114974896-B - Hollow structure magnetic field driven vacuum variable capacitor and radio frequency source matcher

CN114974896BCN 114974896 BCN114974896 BCN 114974896BCN-114974896-B

Abstract

The invention relates to the technical field of electronics, and discloses a hollow structure magnetic field driven vacuum variable capacitor and a radio frequency source matcher, which comprises a base, the top of base is connected with insulating shell, and metal casing is installed on insulating shell's top, is provided with the cavity insulating tube between base and the metal casing. In the invention, the drive coil is electrified in the hollow insulating tube, the coil generates magnetic field force under the action of current and is coupled with the permanent magnet fixed on the inner electrode of the vacuum capacitor, so that the movable electrode moves perpendicular to the current direction of the coil to change the relative area between the movable electrode and the fixed electrode, thereby changing the capacitance capacity.

Inventors

  • ZHANG DECAI

Assignees

  • 上海财盈半导体股份有限公司
  • 上海财盈半导体股份有限公司

Dates

Publication Date
20260421
Application Date
20220701
Priority Date
20220701

Claims (4)

  1. 1. The vacuum variable capacitor driven by the hollow structure magnetic field comprises a base (1) and is characterized in that the top end of the base (1) is connected with an insulating shell (2), a metal shell (3) is arranged at the top end of the insulating shell (2), and a hollow insulating tube (4) is arranged between the base (1) and the metal shell (3); The top end of the base (1) is connected with a fixed electrode (7), a movable electrode (6) is arranged above the fixed electrode (7), and the top of the movable electrode (6) is connected with a movable electrode current connecting sheet (5); The innermost ring of the movable electrode (6) is a permanent magnet (10), and a shielding layer (9) is arranged between the movable electrode (6) and the permanent magnet (10); the movable electrode (6) is driven above the fixed electrode (7) through a driving coil (8); The two ends of the hollow insulating tube (4) are respectively fixed with the base (1) and the metal shell (3), the central axis of the hollow insulating tube (4) is coincident with the central axis of the metal shell (3), the hollow insulating tube (4) is arranged in the movable electrode (6) in a penetrating way, a driving coil (8) is arranged in the hollow insulating tube (4), and an electric field shielding material layer is arranged on the inner wall of the hollow insulating tube (4); The hollow insulating tube (4) is fixedly arranged at the central axes of the base (1) and the metal shell (3), and the upper base (1), the insulating shell (2) and the metal shell (3) form a vacuum chamber outside the fixed electrode (7) and the movable electrode (6); The actuating range of the fixed electrode (7) and the movable electrode (6) is a vacuum chamber formed by the base (1), the insulating shell (2) and the metal shell (3), the bottom end of the fixed electrode (7) is fixedly connected with the base (1), and the central axis of the base (1) is overlapped with the central axis of the hollow insulating tube (4); the movable electrode (6) forms a lifting structure through the driving coil (8), the permanent magnet (10) and the fixed electrode (7), and the movable electrode (6) is uniformly distributed above the fixed electrode (7) at equal intervals.
  2. 2. The hollow structure magnetic field driven vacuum variable capacitor of claim 1, wherein the outer side wall of the movable electrode current connecting sheet (5) is in fit connection with the inner wall of a vacuum chamber consisting of the upper base (1), the insulating shell (2) and the metal shell (3).
  3. 3. The vacuum variable capacitor driven by the hollow structure magnetic field as claimed in claim 1, wherein the bottom end of the movable electrode current connecting sheet (5) is fixedly arranged with the top end of the movable electrode (6), and a plurality of groups of movable electrode current connecting sheets (5) are annularly equidistant with respect to the axis of the hollow insulating tube (4).
  4. 4. A radio frequency source matcher characterized by comprising the radio frequency source matcher with the hollow structure magnetic field driven vacuum variable capacitor as claimed in any one of claims 1-3.

Description

Hollow structure magnetic field driven vacuum variable capacitor and radio frequency source matcher Technical Field The invention belongs to the technical field of electronics, and particularly relates to a hollow structure magnetic field driven vacuum variable capacitor and a radio frequency source matcher with the hollow structure magnetic field driven vacuum variable capacitor. Background In the current electronic field, the vacuum capacitor is widely applied to an oscillating circuit and impedance matching of high-power radio frequency, and plasma coating process, etching and plasma cleaning process in the semiconductor industry, and the capacitance value is adjustable, the vacuum capacitor works in a high-frequency high-power electromagnetic field environment and has high process requirements, so that the vacuum capacitor is generally high in price and is a key semiconductor equipment part, and markets and technologies are monopoly by Japanese manufacturers and Switzerland manufacturers. The adjustable vacuum capacitor consists of a stator disc, a rotor disc, an electrode ring, a porcelain tube, a rotary screw rod, a guide sleeve, a positioning nut, a conductor corrugated tube, a rotary screw rod, a sleeve, a metal shell, a fixed rod and the like, the prior variable vacuum capacitor is tested and adjusted by adding an electric bridge at two sides of an insulator of the shell, the screw rod is regulated to drive the movable electrode to act, so that the bellows is compressed or stretched to change the relative area between the movable electrode and the fixed electrode, the current capacitance is displayed through the change of the bridge value of the test instrument, the conductor bellows is the current path of the movable electrode, and the movable electrode can be moved while vacuum is sealed. The adjustable vacuum capacitor in the current market has the following disadvantages in the use process: 1. And the rotating screw rod is worn, namely, the screw rod screw needs to be frequently rotated due to the change of capacitance, so that the rotating screw rod and the positioning nut are seriously worn, the screw rod clearance is increased, the capacitance value is inaccurately adjusted, and the screw thread is easy to slide and damage. 2. Elastic fatigue of the corrugated pipe, namely continuous reciprocating motion during the operation of the corrugated pipe, is easy to cause elastic fatigue of the corrugated pipe, and cracks are generated on the surface of the corrugated pipe, so that the vacuum environment is damaged, the insulating performance is reduced, and ignition is easy to generate between capacitors to damage. 3. The adjusting time is overlong, when the semiconductor is manufactured, the manufacturing time is required to be strictly controlled, particularly on the advanced process below 14nm, the matching speed is required to be adjusted in millisecond level, and when the capacitance value of the capacitor is adjusted, the traditional vacuum variable capacitance screw mechanical rotation adjusting mode is slow in action and overlong in matching time, so that the production efficiency and the yield of the semiconductor chip are low, and the application requirement cannot be met. Disclosure of Invention (One) solving the technical problems Aiming at the defects of the prior art, the invention provides the hollow structure magnetic field driven vacuum variable capacitor and the radio frequency source matcher, the use of a rotating screw rod and a corrugated pipe is canceled, breakthroughs are made in the aspects of performance, structure, function and the like, and the hollow structure magnetic field driven vacuum variable capacitor has the characteristics of high speed, high response, high matching accuracy, prolonged service life, long-term stability of vacuum degree sealing and small volume, and solves the problems proposed by the background art. (II) technical scheme The hollow structure magnetic field driving vacuum variable capacitor comprises a base, wherein the top end of the base is connected with an insulating shell, the top end of the insulating shell is provided with a metal shell, and a hollow insulating tube is arranged between the base and the metal shell; The top end of the base is connected with a fixed electrode, a movable electrode is arranged above the fixed electrode, and the top of the movable electrode is connected with a movable electrode current connecting sheet; The innermost ring of the movable electrode is a permanent magnet, and a shielding layer is arranged between the movable electrode and the permanent magnet; The movable electrode is driven by a driving coil above the fixed electrode. Preferably, the two ends of the hollow insulating tube are respectively fixed with the base and the metal shell, the central axis of the hollow insulating tube coincides with the central axis of the metal shell, the hollow insulating tube penetrates through the movable electrode, a