CN-115026691-B - Grinding device

Abstract

The invention provides a grinding device. Which properly manages the margins of the grinding tool. The grinding device includes a chuck table for holding a workpiece, a grinding unit for grinding the workpiece held by the chuck table by a grinding tool fixed to a grinding wheel, a grinding feed mechanism for lifting the grinding unit, a reading unit for reading the thickness of the abutment recorded in a recording medium recording the thickness of the abutment of the grinding wheel, an abutment thickness storage unit for storing the thickness of the abutment read by the reading unit, and a detection unit for detecting the mount surface and the lower surface of the grinding tool of the grinding wheel mounted on the mount by lowering the grinding unit by the grinding feed mechanism.

Inventors

• GAKOSONOJIRO

Assignees

• 株式会社迪思科

Dates

Publication Date

20260505

Application Date

20220301

Priority Date

20210305

Claims (1)

1. 1.A grinding device, wherein, The grinding device comprises: a chuck table for holding a workpiece by holding the workpiece; a grinding unit for mounting a grinding wheel having a grinding tool annularly arranged on a lower surface of a base on a mounting base connected to a lower end of a main shaft, and grinding a workpiece with the grinding tool; a grinding feed mechanism for lifting and lowering the grinding unit in a direction perpendicular to the holding surface; a control unit; A reading section that reads a thickness of the abutment recorded in a recording medium in which at least the thickness of the abutment of the grinding wheel is recorded; a base thickness storage unit for storing the thickness of the base read by the reading unit, and A detection unit configured to detect a mounting surface of the mount by lowering the grinding unit by the grinding feed mechanism in a state where the grinding wheel is not mounted on the mount, and detect a lower surface of the grinding tool of the grinding wheel mounted on the mount by lowering the grinding unit by the grinding feed mechanism in a state where the grinding wheel is mounted on the mount, The control unit includes: A mounting surface height storage unit for storing the height of the grinding unit when the grinding unit is lowered by the grinding feed mechanism and the mounting surface of the mount is detected by the detection unit; A grinding tool lower surface height storage section for storing the height of the grinding unit when the grinding unit is lowered by the grinding feeding mechanism after the grinding wheel is mounted on the mounting base and the lower surface of the grinding tool is detected by the detecting section, and And a grinding tool margin calculating section that calculates a margin of the grinding tool by subtracting the thickness of the abutment stored in the abutment thickness storing section from a difference between the height stored in the mounting surface height storing section and the height stored in the grinding tool lower surface height storing section.

Description

Grinding device Technical Field The present invention relates to a grinding device. Background The grinding device performs grinding of the workpiece by bringing a grinding tool disposed in a ring shape on the lower surface of a base of a grinding wheel into contact with the upper surface of the workpiece held by a holding surface of a chuck table while rotating the grinding wheel of a grinding unit. In the grinding process, the grinding unit is first lowered at a high speed toward the workpiece to a height position of the grinding unit immediately before the lower surface of the grinding tool and the upper surface of the workpiece come into contact with each other, then the lowering speed of the grinding unit is changed to a speed suitable for grinding the workpiece, and the grinding unit is lowered again to grind the workpiece. Thus, the processing time is shortened. In order to perform grinding of a workpiece, it is necessary to identify in advance the height position of the grinding unit when the lower surface of the grinding tool is in contact with the upper surface of the workpiece by the grinding device. Therefore, as shown in patent document 1, before the grinding process is performed, an installation (set up) operation is performed in which the origin position, which is the height position of the grinding unit in the case where the holding surface of the chuck table is brought into contact with the lower surface of the grinding tool, is stored in the grinding device. The height position of the grinding unit, which is stored in the origin position of the grinding apparatus by the setting operation and rises according to the thickness of the workpiece, is identified as the height position of the grinding unit when the lower surface of the grinding tool is in contact with the upper surface of the workpiece. When the grinding tool wears a certain amount due to the grinding process, the grinding wheel is replaced. Conventionally, the amount of wear of a grinding wheel worn by grinding is subtracted from the remaining amount of the grinding wheel just after replacement, which is measured by a vernier caliper or the like, to calculate the current remaining amount of the grinding wheel, and when the calculated current remaining amount of the grinding wheel is lower than a predetermined value, the grinding wheel is replaced. Patent document 1 Japanese patent application laid-open No. 2012-135853 However, an error occurs between the margin of the grinding wheel measured by an operator or the like using a vernier caliper or the like immediately after the grinding wheel is replaced and the actual margin of the grinding wheel. Therefore, there is a case where the grinding tool is left without residue and grinding is continued, and the workpiece is ground by the base of the grinding wheel, and the workpiece is damaged. Or, although the grinding wheel remains in practice, it is judged that the grinding wheel is used up, and the worker is prompted to replace the grinding wheel. That is, it is difficult to use the grinding wheel up to the limit at which the grinding wheel is used up due to an error in the measurement of the remaining amount of the grinding wheel. Disclosure of Invention Accordingly, an object of the present invention is to provide a grinding apparatus capable of effectively utilizing a grinding tool by recognizing the remaining amount of the grinding tool. According to the present invention, there is provided a grinding apparatus including a chuck table for holding a workpiece by holding the workpiece in a face thereof, a grinding unit for mounting a grinding wheel having a grinding wheel disposed in a ring shape on a lower surface of the base on a mount base connected to a lower end of a spindle, grinding the workpiece by the grinding wheel, a grinding feed mechanism for elevating the grinding unit in a direction perpendicular to the holding surface, a control unit, a reading unit for reading a thickness of the base recorded in a recording medium having at least a thickness of the base of the grinding wheel recorded therein, a base thickness storage unit for storing a thickness of the base read by the reading unit, and a detecting unit for lowering the grinding unit by the grinding feed mechanism, whereby the detecting unit detects a mounting surface of the mount base and a lower surface of the grinding wheel mounted on the mount base, the control unit including a mounting surface height storage unit for storing the grinding unit lowered by the grinding unit in a direction perpendicular to the holding surface, a grinding unit height storage unit for calculating a difference between the grinding unit and the mounting surface height of the mount base and the grinding unit when the grinding unit is lowered by the grinding unit is detected by the grinding feed mechanism, and a surface height of the grinding unit is calculated from the height of the mount surface height storage unit and the grinding un