CN-115038876-B - Vacuum pump and controller

Abstract

The invention provides a vacuum pump and a controller for controlling the vacuum pump, which can inspect and replace a temperature adjusting mechanism at a proper time, prevent unexpected stop and the like, and inhibit maintenance cost. The present invention is a vacuum pump (10) for discharging gas from an exhaust device, characterized by comprising a temperature adjustment mechanism for setting a predetermined portion of the vacuum pump (10) to a predetermined temperature, an output control mechanism (205) for operating the temperature adjustment mechanism, and an information output mechanism (210) for outputting information on the opening/closing of the temperature adjustment mechanism obtained from the output control mechanism (205).

Inventors

• Shen Mei Ying Fu

Assignees

• 埃地沃兹日本有限公司

Dates

Publication Date

20260512

Application Date

20210210

Priority Date

20200219

Claims (3)

1. 1. A vacuum pump for exhausting gas from an exhaust device, characterized in that, The device is provided with: a temperature adjusting mechanism for setting a predetermined portion of the vacuum pump to a predetermined temperature; an output control means for operating the temperature adjustment means; A cumulative count interval measurement unit that calculates an on-hold interval time, an off-hold interval time, and a cycle interval time that is a sum of the on-hold interval time and the off-hold interval time of the temperature adjustment mechanism based on the information on the on/off of the temperature adjustment mechanism obtained from the output control mechanism, and further calculates an on-hold interval time in which the averaging process is performed, an off-hold interval time in which the averaging process is performed, and a cycle interval time in which the averaging process is performed that is a sum of the on-hold interval time in which the averaging process is performed and the off-hold interval time in which the averaging process is performed; A recording means for recording the on/off maintaining interval time, the off maintaining interval time, and the cycle interval time of the temperature adjusting means obtained from the cumulative count interval measuring unit; an information output means for outputting the ON-maintaining interval time for which the averaging process is performed, the OFF-maintaining interval time for which the averaging process is performed, and the cycle interval time for which the averaging process is performed, which are obtained from the cumulative count interval measuring unit, The accumulated count interval measuring unit calculates an ON/OFF maintaining interval time of T2-T1 obtained by subtracting the time T1 from the time T2, a OFF maintaining interval time of T3-T2 obtained by subtracting the time T2 from the time T3, and a cycle interval time of T3-T1 obtained by subtracting the time T1 from the time T3 when the time T2 is closest to the time T2 and the time T2 obtained by subtracting the time T1 from the time T3 is set to T1 when the time T1 is closest to the time T1 after the time T1 is set to T2 when the time T2 is closest to the time T1, Further, calculate The last n-1 ON-maintaining intervals recorded in the recording means are added to the ON-maintaining interval time of the T2-T1, and the total of the ON-maintaining intervals is divided by n to perform the averaging process, The closing maintaining interval time of the T3-T2 is added to the last n-1 closing maintaining interval time recorded in the recording mechanism, and the sum of the closing maintaining interval time is divided by n to perform the averaging process, and The period interval time of the averaging process is obtained by adding the last n-1 period intervals recorded in the recording means to the period interval time of the T3-T1, and dividing the total of the period interval times by n.
2. 2. The vacuum pump according to claim 1, wherein, The information output means outputs information on the number of times the temperature adjustment means is turned on or off as information on the turning on/off of the temperature adjustment means.
3. 3. A controller for controlling a vacuum pump main body for discharging a gas from an exhaust device, The vacuum pump main body is provided with a temperature adjusting mechanism for making a predetermined portion of the vacuum pump main body have a predetermined temperature, The controller includes: an output control unit for operating the temperature adjustment mechanism; A cumulative count interval measurement unit that calculates an on-hold interval time, an off-hold interval time, and a cycle interval time that is a sum of the on-hold interval time and the off-hold interval time of the temperature adjustment mechanism based on the information on the on/off of the temperature adjustment mechanism obtained from the output control unit, and further calculates an on-hold interval time in which the averaging process is performed, an off-hold interval time in which the averaging process is performed, and a cycle interval time in which the averaging process is performed that is a sum of the on-hold interval time in which the averaging process is performed and the off-hold interval time in which the averaging process is performed; A recording means for recording the on/off maintaining interval time, the off maintaining interval time, and the cycle interval time of the temperature adjusting means obtained from the cumulative count interval measuring unit; An information output unit configured to output the on-hold interval time during which the averaging process is performed, the off-hold interval time during which the averaging process is performed, and the cycle interval time during which the averaging process is performed, which are obtained from the cumulative count interval measurement unit, The accumulated count interval measuring unit calculates an ON/OFF maintaining interval time of T2-T1 obtained by subtracting the time T1 from the time T2, a OFF maintaining interval time of T3-T2 obtained by subtracting the time T2 from the time T3, and a cycle interval time of T3-T1 obtained by subtracting the time T1 from the time T3 when the time T2 is closest to the time T2 and the time T2 obtained by subtracting the time T1 from the time T3 is set to T1 when the time T1 is closest to the time T1 after the time T1 is set to T2 when the time T2 is closest to the time T1, Further, calculate The last n-1 ON-maintaining intervals recorded in the recording means are added to the ON-maintaining interval time of the T2-T1, and the total of the ON-maintaining intervals is divided by n to perform the averaging process, The closing maintaining interval time of the T3-T2 is added to the last n-1 closing maintaining interval time recorded in the recording mechanism, and the sum of the closing maintaining interval time is divided by n to perform the averaging process, and The period interval time of the averaging process is obtained by adding the last n-1 period intervals recorded in the recording means to the period interval time of the T3-T1, and dividing the total of the period interval times by n.

Description

Vacuum pump and controller Technical Field The invention relates to a vacuum pump and a controller. Background In the exhaust treatment in a vacuum chamber provided in a semiconductor device such as a CVD apparatus, a vacuum pump is generally used, and in particular, a turbo molecular pump is often used because of its low residual gas content and easy maintenance. In the manufacturing process of a semiconductor, there is a process of applying various process gases to a substrate of the semiconductor, and a turbo molecular pump is used not only when the chamber of the semiconductor device is evacuated but also when the process gases are exhausted from the chamber. However, the process gas may be introduced into the chamber at a high temperature in order to improve the reactivity. In this case, the temperature of the discharged process gas decreases and the pressure increases, so that the gas is sublimated to become a solid and a product is precipitated. That is, the process gas is sublimated in the turbo molecular pump, and the solid product adheres to the turbo molecular pump and gradually accumulates, so that the pump flow path is narrowed, and the performance of the turbo molecular pump may be lowered. To solve such a problem, conventionally, a turbo molecular pump is incorporated with a heater or the like whose energization state is switched by a relay, and thereby a portion where deposits are likely to be deposited is heated to a predetermined temperature. At this time, as shown in fig. 8 (a system configuration diagram of a conventional vacuum pump (turbo molecular pump)), the temperature of the turbo molecular pump is measured by a TMS temperature measuring unit connected to a TMS temperature sensor, and the measured value is compared with a set temperature to control the output to a heater or the like. On the other hand, if the temperature of the turbo molecular pump increases due to heat diffusion from a heater or the like, the electronic circuit incorporated therein is affected. Further, as the temperature increases, there is a possibility that the magnetic force of the permanent magnet used for the motor of the rotary body of the pump decreases and the electromagnet winding is disconnected, so that a water cooling pipe is disposed around them, and the flow of the cooling water is controlled by a valve or the like (for example, refer to patent document 1). As described above, there is a conventional vacuum pump in which a temperature adjustment mechanism (heater, relay, water cooling pipe, valve, etc.) for setting a predetermined portion of the vacuum pump to a predetermined temperature is incorporated. Patent document 1 Japanese patent laid-open No. 2003-148379. However, such a vacuum pump has conventionally been notified of a high-temperature overheat abnormality, a warning, a temperature rise abnormality, a low-temperature abnormality, a disconnection/short-circuit abnormality, or the like by comparison of a measured value and an allowable temperature measured by the TMS temperature measuring unit by means of a protection function processing unit shown in fig. 8, but there are cases where the relay and the lifetime of the valve (the number of times of opening/closing, the time of opening/closing) are not considered, and the use is continued until malfunction occurs. If the relay or the valve is in failure, the vacuum pump may be abnormally at a high temperature or a low temperature, and as a result, some kind of failure may occur, and the vacuum pump may be suddenly stopped. When the vacuum pump is stopped during operation, for example, the quality of a semiconductor during manufacture may be affected, but in order to prevent such unexpected stoppage of the vacuum pump, a relay or a valve may be periodically replaced and applied regardless of the operation frequency. However, replacement of the relay or valve which does not actually reach the life causes an increase in maintenance cost. Disclosure of Invention In view of the above, an object of the present invention is to provide a vacuum pump and a controller for controlling the vacuum pump, which can check and replace a temperature adjustment mechanism for setting a predetermined portion of the vacuum pump to a predetermined temperature at an appropriate timing, thereby preventing unexpected stoppage or the like from occurring, and also can suppress maintenance costs. The present invention is a vacuum pump for discharging gas from an exhaust apparatus, comprising a temperature adjustment mechanism for setting a predetermined portion of the vacuum pump to a predetermined temperature, an output control mechanism for operating the temperature adjustment mechanism, and an information output mechanism for outputting information on the opening/closing of the temperature adjustment mechanism, the information being obtained from the output control mechanism. Preferably, in such a vacuum pump, the information output means outputs information on the num