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CN-115241664-B - Repair circuit of electric connection structure and control method thereof

CN115241664BCN 115241664 BCN115241664 BCN 115241664BCN-115241664-B

Abstract

The invention provides a repair circuit of an electric connection structure and a control method thereof, wherein the repair circuit of the electric connection structure comprises an electric connection module, M first data ends, M second data ends, a first control circuit module and a second control circuit module, each first data end is correspondingly connected with first ends of at least two electric connection structures one by one through at least two first switch units, and at least one electric connection structure is connected with at least two first data ends; each second data end is connected with the second ends of at least two electric connection structures in a one-to-one correspondence manner through at least two second switch units, and at least one electric connection structure is connected with at least two second data ends. Therefore, at least two electric connection structures are arranged between each first data end and the corresponding second data end, data transmission can be carried out, mutual standby among the electric connection structures is achieved, and reliability of data transmission is guaranteed.

Inventors

  • ZHANG JIARUI

Assignees

  • 长鑫存储技术有限公司

Dates

Publication Date
20260508
Application Date
20220705

Claims (13)

  1. 1. A repair circuit for an electrical connection structure, comprising: The electrical connection module comprises 1 st, 2 nd, N electrical connection structures, N being a positive integer greater than or equal to 3; The M first data ends are positioned on the first side of the electric connection module, each first data end is correspondingly connected with the first ends of at least two electric connection structures one by one through at least two first switch units, and at least one electric connection structure is connected with at least two first data ends; The M second data ends are positioned on the second side of the electric connection module, correspond to the M first data ends one by one, are connected with the second ends of at least two electric connection structures one by one through at least two second switch units, correspond to the connection relation between the M first data ends and the electric connection structures, and are connected with at least two second data ends, wherein M is a positive integer which is more than or equal to 2 and less than N; the first control circuit is used for respectively controlling the first switch units to be turned on or turned off according to the voltage change of the first end of each electric connection structure, and when one first switch unit connected with the same first data end is turned on, the other first switch units connected with the first data end are controlled to be turned off; The second control circuit is used for respectively controlling the on or off of each second switch unit according to the voltage change of the second end of each electric connection structure, and controlling the other second switch units connected with the second data end to be turned off when one second switch unit connected with the same second data end is turned on; Two adjacent first data ends are respectively connected with at least one same electric connection structure through the first switch units; two adjacent second data ends are respectively connected with at least one same electric connection structure through the second switch units; the first control circuit is configured to control the on or off of each first switch unit connected with each first data terminal; For each first data end, the first control circuit is used for controlling the first switch unit corresponding to the electric connection structure which is connected with the first control circuit and is in a normal working state and has a front sequence number in the unoccupied electric connection structure; the second control circuit is configured to control the on or off of each second switch unit connected with each second data terminal; and for each second data end, the second control circuit is used for controlling the second switch unit corresponding to the electric connection structure which is connected with the second control circuit and is in a normal working state and has a front sequence number in the unoccupied electric connection structure.
  2. 2. The repair circuit of an electrical connection structure according to claim 1, The 1 st first data end is connected with the first ends of the 1 st, the first and the second electric connection structures through R first switch units respectively; The i-th first data end is connected with the first end of the i-th, & gt, (i+R-1) electric connection structure through R first switch units respectively; The 1 st second data end is connected with the second ends of the 1 st, the first and the second electric connection structures through R second switch units respectively; The j-th second data end is connected with the second end of the j-th electric connection structure through R second switch units; wherein i is a positive integer greater than or equal to 2, j is a positive integer greater than or equal to 2, and R is a positive integer greater than or equal to 2.
  3. 3. The repair circuit of the electrical connection structure according to claim 2, wherein the first control circuit includes N discharge circuits and N first detection circuits, first ends of the N first detection circuits and the N discharge circuits are respectively connected to the first ends of the N electrical connection structures in a one-to-one correspondence, and a second end of each first detection circuit is connected to each first switch unit of the corresponding electrical connection structure; The second control circuit comprises N charging circuits and N second detection circuits, the first ends of the N second detection circuits and the N charging circuits are respectively connected with the second ends of the N electric connection structures in a one-to-one correspondence manner, and the second end of each second detection circuit is connected with each corresponding second switch unit of the electric connection structure; the charging circuit is used for charging the corresponding electric connection structure to a first voltage level, and the discharging circuit is used for discharging the corresponding electric connection structure to a second voltage level; The first detection circuit is used for generating a first control signal according to the voltage level change of the first end of the connected electric connection structure, and the first control signal is output by the second end of the first detection circuit and used for controlling the on or off of each first switch unit corresponding to the electric connection structure; The second detection circuit is used for generating a second control signal according to the voltage level change of the second end of the connected electric connection structure, and the second control signal is output by the second end of the second detection circuit and used for controlling the connection or disconnection of each second switch unit corresponding to the electric connection structure.
  4. 4. The repair circuit of the electrical connection structure according to claim 3, wherein the first control circuit comprises a plurality of first sub-control units connected to each of the first switch units in one-to-one correspondence, and the first sub-control units are used for controlling the on and off of the first switch units connected thereto; Each first data terminal corresponds to R first sub-control units, For the 1 st first data side, The 1 st first sub-control unit corresponding to the 1 st first data end is used for controlling the on or off of the 1 st first switch unit connected with the 1 st first sub-control unit according to the first control signal of the 1 st first detection circuit; the (m 1) first sub-control unit corresponding to the 1 st first data end is used for controlling the on or off of the first switch unit connected with the first control unit according to the first control signal of the m1 st first detection circuit and the output signal of the (m 1-1) first sub-control unit corresponding to the first control signal; for the m2 th first data side, The 1 st first sub control unit corresponding to the m2 nd first data end is used for controlling the on or off of the 1 st first switch unit connected with the first control unit according to the first control signal of the m2 nd first detection circuit and the output signal of the 1 st first sub control unit corresponding to the (m 2-1) th first data end; The m1 st first sub-control unit corresponding to the m2 nd first data end is used for controlling the on or off of the first switch unit connected with the first control signal of the (m 2+m1-1) th first detection circuit, the output signal of the (m 1-1) th first sub-control unit corresponding to the first control signal, and the output signal of the (m 1-1) th first sub-control unit corresponding to the (m 2-1) th first data end; the second control circuit comprises a plurality of second sub-control units which are connected with the second switch units in a one-to-one correspondence manner, and the second sub-control units are used for controlling the connection and disconnection of the second switch units connected with the second sub-control units; Each second data terminal corresponds to R second control units, For the 1 st second data side, The 1 st second sub-control unit corresponding to the 1 st second data end is used for controlling the on or off of the second switch unit connected with the 1 st second sub-control unit according to the second control signal of the 1 st second detection circuit; the (m 1) second sub-control unit corresponding to the (m 1) second data end is used for controlling the on or off of the second switch unit connected with the (m 1-1) second sub-control unit according to the second control signal of the (m 1) second detection circuit and the output signal of the (m 1-1) second sub-control unit; for the m2 th second data terminal, The 1 st second sub control unit corresponding to the m2 nd second data end is used for controlling the connection or disconnection of the second switch unit connected with the m2 nd second control unit according to the second control signal of the second detection circuit and the output signal of the 1 st second sub control unit corresponding to the (m 2-1) th second data end; the (m 1) th second sub control unit corresponding to the (m 2) th second data end is used for controlling the on or off of the second switch unit connected with the (m 2) th second data end according to the second control signal of the (m 2+m1-1) th second detection circuit, the output signal of the (m 1-1) th second sub control unit and the output signal of the (m 1-1) th second sub control unit of the (m 2-1) th second data end; wherein M1 is a positive integer greater than or equal to 2 and less than or equal to R, and M2 is a positive integer greater than or equal to 2 and less than or equal to M.
  5. 5. The repair circuit for an electrical connection according to claim 4, wherein, For the 1 st first data side, The 1 st first sub-control unit corresponding to the 1 st first data end comprises a first node, wherein the input end of the first node is connected with the output end of the 1 st first detection circuit, and the output end of the first node is used as the control end of the corresponding first switch unit; When m1 is smaller than R, the m1 st first sub-control unit corresponding to the 1 st first data end comprises a first and gate and a first or gate, the input end of the first and gate is respectively connected with the reverse signal of the output end of the first node and the output end of the m1 st first detection circuit, the output end of the first and gate is connected with the control end of the corresponding first switch unit, the input end of the first or gate is respectively connected with the output end of the first node and the output end of the first and gate, and the output end of the first or gate is used as the output end of the m1 st first sub-control unit; The R first sub-control unit corresponding to the 1 st first data end comprises a second AND gate and a second OR gate, wherein the input end of the second AND gate is respectively connected with the reverse signal of the output end of the first OR gate and the output end of the R first detection circuit, the output end of the second AND gate is connected with the control end corresponding to the first switch unit, the input end of the second OR gate is respectively connected with the output end of the first OR gate and the output end of the second AND gate, and the output end of the second OR gate is used as the output end of the R first sub-control unit corresponding to the 1 st first data end and is connected with the R first sub-control unit corresponding to the 2 nd first data end; When M2 is smaller than M, for the M2 th first data terminal, The 1 st first sub-control unit corresponding to the m2 th first data end comprises a third AND gate, the input end of the third AND gate is respectively connected with the output end of the m2 nd first detection circuit and the output end of the 1 st first sub-control unit corresponding to the (m 2-1) th first data end, and the output end of the third AND gate is used as the output end of the 1 st first sub-control unit corresponding to the m2 nd first data end and is respectively connected with the control end of the corresponding first switch unit and the corresponding 2 nd first sub-control unit; When m1 is smaller than R, the m1 th first sub-control unit corresponding to the m2 th first data end includes a fourth and gate and a third or gate, the input end of the fourth and gate is respectively connected with the output end of the (m2+m1-1) th first detection circuit, the reverse signal of the output end of the corresponding (m 1-1) th first sub-control unit and the output end of the (m 1 st first sub-control unit corresponding to the (m 2-1) th first data end, the output end of the fourth and gate is respectively connected with the control end of the corresponding first switch unit and the third or gate, the input end of the third or gate is respectively connected with the output end of the corresponding (m 1-1) th first sub-control unit and the output end of the fourth and gate, and the output end of the third or gate is used as the output end of the m1 st first sub-control unit corresponding to the m2 nd first data end and is connected with the corresponding m1 st+1 th first sub-control unit; The input end of the fifth AND gate is respectively connected with the output end of the corresponding R-1 first sub control unit and the output end of the fifth AND gate, the output end of the fourth OR gate is used as the output end of the corresponding R-1 first sub control unit of the (m 2-1) th first data end and is connected with the control end of the corresponding first switch unit and the fourth OR gate, the input end of the fourth OR gate is connected with the output end of the corresponding R-1 first sub control unit and the output end of the fifth AND gate, and the output end of the fourth OR gate is used as the output end of the corresponding R-1 first sub control unit of the (m 2) th first data end and is connected with the R-1 first sub control unit of the (m 2+1) th first data end; for the mth first data terminal, The 1 st first sub-control unit corresponding to the M first data end comprises a sixth AND gate, the input end of the sixth AND gate is respectively connected with the output end of the M first detection circuit and the 1 st first sub-control unit corresponding to the (M-1) first data end, and the output end of the sixth AND gate is used as the output end of the 1 st first sub-control unit corresponding to the M first data end and is respectively connected with the control end of the corresponding first switch unit and the corresponding 2 nd first sub-control unit; When M1 is smaller than R, the mth 1 first sub-control unit corresponding to the mth first data end includes a seventh and fifth or gate, the input end of the seventh and gate is respectively connected with the output end of the (m+m1-1) -th first detection circuit, the inverse signal of the output end of the corresponding (M1-1) -th first sub-control unit and the mth 1-th first sub-control unit corresponding to the (M-1) -th first data end, the output end of the seventh and gate is respectively connected with the control end of the corresponding first switch unit and the fifth or gate, the input end of the fifth or gate is respectively connected with the output end of the corresponding (M1-1) -th first sub-control unit and the output end of the seventh and gate, and the output end of the fifth or gate is used as the output end of the mth 1 first sub-control unit corresponding to the mth first data end and is connected with the corresponding mth 1+1-th first sub-control unit; The input end of the eighth AND gate is respectively connected with the output end of the (R+M-1) th first detection circuit, the reverse signal of the output end of the corresponding R-1 th first sub control unit and the output end of the R first sub control unit of the M-1 th first data end, and the output end of the eighth AND gate is connected with the control end of the corresponding first switch unit; And for each second data end, the R second sub control units corresponding to the second data end have the same structure as the R first sub control units corresponding to the first data end corresponding to the second data end.
  6. 6. The repair circuit of the electrical connection structure according to claim 4, wherein when the mth first data terminal is connected to the mth second data terminal through the nth electrical connection structure, if N 'is smaller than N, the first and second switching units respectively connected through the N' +1 to nth electrical connection structures are turned off.
  7. 7. The repair circuit for an electrical connection according to claim 4, wherein, The first detection circuit comprises a first trigger and a first inverter, wherein the input end of the first inverter is used as the first end of the first detection circuit and is connected with the first end of the corresponding electric connection structure, the output end of the first inverter is connected with the clock input end of the first trigger, and the output end of the first trigger is used as the second end of the first detection circuit and is connected with each first switch unit and each first sub-control unit; the second detection circuit comprises a second trigger and a second inverter, wherein the input end of the second inverter is used as the first end of the second detection circuit and is connected with the corresponding second end of the electric connection structure, the output end of the second inverter is connected with the clock input end of the second trigger, and the output end of the second trigger is used as the second end of the second detection circuit and is connected with each second switching unit and each second control unit.
  8. 8. The repair circuit for an electrical connection according to claim 7, wherein, The first trigger is a rising edge trigger and responds to a rising edge signal to output a high-level signal; The second flip-flop is a rising edge flip-flop and outputs a high level signal in response to a rising edge signal.
  9. 9. The repair circuit for an electrical connection according to claim 7, wherein, The first switch unit is conducted in response to the high-level signal output by the corresponding first sub-control unit; the second switch unit is conducted in response to the high-level signal output by the corresponding first sub-control unit.
  10. 10. The repair circuit for an electrical connection according to claim 7, wherein, The first detection circuit further comprises a first transistor, a first pole of the first transistor is connected with the input end of the first inverter, a second pole of the first transistor is grounded, and a grid electrode of the first transistor is connected with an inverted signal of the power-on signal; The second detection circuit further comprises a second transistor, a first electrode of the second transistor is connected with the input end of the second inverter, a second electrode of the second transistor is grounded, and a grid electrode of the second transistor is connected with a reverse signal of the power-on signal.
  11. 11. The repair circuit for an electrical connection according to claim 7, wherein, The reset end of the first trigger is connected with a power-on signal, and the first trigger is used for resetting the output end of the first trigger when the reset end of the first trigger receives the power-on signal; the reset end of the second trigger is connected with the power-on signal, and the second trigger is used for resetting the output end of the second trigger when the reset end of the second trigger receives the power-on signal.
  12. 12. The repair circuit of an electrical connection structure according to any one of claims 1 to 2, wherein the electrical connection structure is a through-silicon via structure, the M first data terminals and the first control circuit are disposed in a first semiconductor chip, and the M second data terminals and the second control circuit are disposed in a second semiconductor chip.
  13. 13. A repair circuit for an electrical connection structure, comprising: The electrical connection module comprises 1 st, 2 nd, N electrical connection structures, N being a positive integer greater than or equal to 3; The M first data ends are positioned on the first side of the electric connection module, each first data end is correspondingly connected with the first ends of at least two electric connection structures one by one through at least two first switch units, and at least one electric connection structure is connected with at least two first data ends; The M second data ends are positioned on the second side of the electric connection module, correspond to the M first data ends one by one, are connected with the second ends of at least two electric connection structures one by one through at least two second switch units, correspond to the connection relation between the M first data ends and the electric connection structures, and are connected with at least two second data ends, wherein M is a positive integer which is more than or equal to 2 and less than N; the first control circuit is used for respectively controlling the first switch units to be turned on or turned off according to the voltage change of the first end of each electric connection structure, and when one first switch unit connected with the same first data end is turned on, the other first switch units connected with the first data end are controlled to be turned off; The second control circuit is used for respectively controlling the on or off of each second switch unit according to the voltage change of the second end of each electric connection structure, and controlling the other second switch units connected with the second data end to be turned off when one second switch unit connected with the same second data end is turned on; Two adjacent first data ends are respectively connected with at least one same electric connection structure through the first switch units; two adjacent second data ends are respectively connected with at least one same electric connection structure through the second switch units; The 1 st first data end is connected with the first ends of the 1 st, the first and the second electric connection structures through R first switch units respectively; The i-th first data end is connected with the first end of the i-th, & gt, (i+R-1) electric connection structure through R first switch units respectively; The 1 st second data end is connected with the second ends of the 1 st, the first and the second electric connection structures through R second switch units respectively; The j-th second data end is connected with the second end of the j-th electric connection structure through R second switch units; Wherein i is a positive integer greater than or equal to 2, j is a positive integer greater than or equal to 2, and R is a positive integer greater than or equal to 2; The first control circuit comprises N discharge circuits and N first detection circuits, the first ends of the N first detection circuits and the N discharge circuits are respectively connected with the first ends of the N electric connection structures in a one-to-one correspondence manner, and the second end of each first detection circuit is connected with each first switch unit of the corresponding electric connection structure; The second control circuit comprises N charging circuits and N second detection circuits, the first ends of the N second detection circuits and the N charging circuits are respectively connected with the second ends of the N electric connection structures in a one-to-one correspondence manner, and the second end of each second detection circuit is connected with each corresponding second switch unit of the electric connection structure; the charging circuit is used for charging the corresponding electric connection structure to a first voltage level, and the discharging circuit is used for discharging the corresponding electric connection structure to a second voltage level; The first detection circuit is used for generating a first control signal according to the voltage level change of the first end of the connected electric connection structure, and the first control signal is output by the second end of the first detection circuit and used for controlling the on or off of each first switch unit corresponding to the electric connection structure; The second detection circuit is used for generating a second control signal according to the voltage level change of the second end of the connected electric connection structure, and the second control signal is output by the second end of the second detection circuit and used for controlling the connection or disconnection of each second switch unit corresponding to the electric connection structure.

Description

Repair circuit of electric connection structure and control method thereof Technical Field The present disclosure relates to, but is not limited to, a repair circuit for an electrical connection structure and a control method thereof. Background With the continued development of integrated circuits, as semiconductor process devices progress to the nanometer level, it is increasingly difficult to further utilize feature size reduction to increase integration, and three-dimensional stacked memory devices are another possible form of integration enhancement. In a stacked memory device, electrical connection is usually realized between semiconductor chips of each layer through silicon vias (Through Silicon Via, TSVs), the TSVs are prone to failure in the manufacturing and bonding processes, the TSV failure tends to affect communication connection between the chips, and in order to ensure normal communication between the semiconductor chips, spare through silicon vias are usually provided to prevent signal transmission through the spare through silicon vias when some through silicon vias are damaged. The semiconductor chips of the laminated memory device are difficult to carry out bidirectional data transmission through the silicon through holes, the performance of the laminated memory device is limited, the standby silicon through holes are easy to lose effectiveness due to short circuit conditions, and in addition, the redundant design is caused by the excessive number of the standby silicon through holes, so that the structural compactness of the semiconductor chips is influenced. Disclosure of Invention The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of the claims. The present disclosure provides a repair circuit of an electrical connection structure and a control method thereof. According to a first aspect of embodiments of the present disclosure, there is provided a repair circuit of an electrical connection structure, including: The electrical connection module comprises 1 st, 2 nd, N electrical connection structures, N being a positive integer greater than or equal to 3; The M first data ends are positioned on the first side of the electric connection module, each first data end is correspondingly connected with the first ends of at least two electric connection structures one by one through at least two first switch units, and at least one electric connection structure is connected with at least two first data ends; The M second data ends are positioned on the second side of the electric connection module, correspond to the M first data ends one by one, are connected with the second ends of at least two electric connection structures one by one through at least two second switch units, correspond to the connection relation between the M first data ends and the electric connection structures, and are connected with at least two second data ends, wherein M is a positive integer which is more than or equal to 2 and less than N; the first control circuit is used for respectively controlling the first switch units to be turned on or turned off according to the voltage change of the first end of each electric connection structure, and when one first switch unit connected with the same first data end is turned on, the other first switch units connected with the first data end are controlled to be turned off; And the second control circuit is used for respectively controlling the on or off of each second switch unit according to the voltage change of the second end of each electric connection structure, and controlling the other second switch units connected with the second data end to be turned off when one second switch unit connected with the same second data end is turned on. In some embodiments of the present disclosure, two adjacent first data terminals are respectively connected to at least one identical electrical connection structure through the first switch unit; two adjacent second data terminals are respectively connected to at least one identical electric connection structure through the second switch units. In some embodiments of the disclosure, the 1 st first data terminal is connected to the first terminals of the 1 st, the first terminal of the R electrical connection structures through R first switch units, respectively; The i-th first data end is connected with the first end of the i-th, & gt, (i+R-1) electric connection structure through R first switch units respectively; The 1 st second data end is connected with the second ends of the 1 st, the first and the second electric connection structures through R second switch units respectively; The j-th second data end is connected with the second end of the j-th electric connection structure through R second switch units; wherein i is a positive integer greater than or equal to 2, j is a positive integer greater than or equal to 2, and R is a