CN-115360071-B - Tantalum tube insulating part structure of hollow cathode ion source neutralizer

CN115360071BCN 115360071 BCN115360071 BCN 115360071BCN-115360071-B

Abstract

The invention discloses a hollow cathode ion source neutralizer tantalum tube insulating part structure, which utilizes an additional insulation distance to be added on the outer wall of a reaction part of a hollow cathode tantalum tube, so that the effective discharge area of the hollow cathode tantalum tube and a keeper shell is reduced, and further, the ignition working energy of the hollow cathode neutralizer is enabled to be fully acted on the port of the hollow cathode tantalum tube, thereby reducing the energy required by ignition and arc striking, reducing the gas demand, and comprising the keeper shell (1), the hollow cathode tantalum tube (2) and an insulation small ceramic part (3), wherein a tantalum tube insulating tube (4) is further arranged on the outer wall of the near insulation small ceramic part (3) of the hollow cathode tantalum tube (2), and a groove (5) is arranged on the tantalum tube insulating tube (4).

Inventors

LU CHENG
WANG WEI
ZHANG YONGJUN
ZHANG ZHIQIANG

Assignees

成都国泰真空设备有限公司
成都国泰真空设备有限公司

Dates

Publication Date: 20260421
Application Date: 20220823
Priority Date: 20220823

Claims (3)

1. The tantalum tube insulating part structure of the hollow cathode ion source neutralizer comprises a keeper shell (1), a hollow cathode tantalum tube (2) and an insulating small ceramic part (3), and is characterized in that a tantalum tube insulating tube (4) is further arranged on the outer wall of the hollow cathode tantalum tube (2) close to the insulating small ceramic part (3), and a groove (5) is formed in the tantalum tube insulating tube (4); The grooves (5) on the tantalum tube insulating tube (4) are provided with multiple stages, wherein each stage of grooves (5) are formed by inwards concave circumference of the tantalum tube insulating tube (4), and the grooves (5) of each stage are parallel to each other; The width of the groove (5) is larger than or equal to the depth of the groove (5), and the ratio of the depth of the groove (5) to the distance between the bottom of the groove (5) and the inner wall of the tantalum tube insulating tube (4) is 1:1-4.
2. The structure of the tantalum tube insulator of the hollow cathode ion source neutralizer of claim 1, wherein the length of the tantalum tube insulator (4) is 2/3~3/4 of the length of the reaction part of the hollow cathode tantalum tube (2).
3. The structure of the hollow cathode ion source neutralizer tantalum tube insulator according to claim 1, wherein the tantalum tube insulator (4) is made of ceramic materials.

Description

Tantalum tube insulating part structure of hollow cathode ion source neutralizer Technical Field The invention relates to the technical field of plasma coating equipment, in particular to a tantalum tube insulating part structure of a hollow cathode ion source neutralizer. Background As shown in fig. 1, the hollow cathode tantalum tube 2 and the keeper housing 1 in the prior art can work normally only by using an insulating small ceramic piece 3, and the part between the insulating small ceramic piece 3 and the end of the hole core cathode tantalum tube 2 is called a reaction part, so that most of the area of the hollow cathode tantalum tube 2 corresponds to the exposure of the keeper housing 1, and in operation, if the air pressure of the keeper chamber is in an ionization area, the reaction part of the keeper housing 1 and the hollow cathode tantalum tube 2 can be discharged in multiple points, because in most cases when the hollow cathode tantalum tube 2 is used, the hollow cathode tantalum tube 2 is expected to work at the inner hollow tube wall, and in addition, in the case of starting by using the hollow cathode, the hollow cathode tantalum tube 2 and the keeper housing 1 are in a momentary high-voltage pulse condition, and in case of excessive exposure of the surface, the hollow cathode tantalum tube 2 and the keeper housing 1 can be discharged in multiple points in the starting process, so that the starting is unstable. In addition, the working temperature of the hollow cathode tantalum tube 2 can lead to the volatilization of the tantalum material during the working, and a layer of nano-scale sputtering conductive film can be formed on the surface of the existing small insulating ceramic piece 3 after the volatilization, so that the short circuit between the hollow cathode tantalum tube 2 and the keeper shell 1 can be caused, and the service life is shortened. Disclosure of Invention The invention aims to design a hollow cathode ion source neutralizer tantalum tube insulating part structure, and an insulation distance is additionally increased on the outer wall of a reaction part of a hollow cathode tantalum tube, so that the effective discharge area of the hollow cathode tantalum tube and a keeper shell is reduced, and further, the ignition working energy of the hollow cathode neutralizer is enabled to be fully acted on the end opening of the hollow cathode tantalum tube, so that the energy required by ignition and arc striking is reduced, and the gas demand is also reduced. The invention is realized by the following technical scheme that the hollow cathode ion source neutralizer tantalum tube insulating part structure comprises a keeper shell, a hollow cathode tantalum tube and an insulating small ceramic part, wherein a tantalum tube insulating tube is further arranged on the outer wall of the hollow cathode tantalum tube, which is close to the insulating small ceramic part, and a groove is arranged on the tantalum tube insulating tube. Further, in order to better realize the structure of the tantalum tube insulating part of the hollow cathode ion source neutralizer, the structure is particularly adopted that a groove on the tantalum tube insulating part is provided with multiple stages. Further, in order to better realize the tantalum tube insulating part structure of the hollow cathode ion source neutralizer, the invention particularly adopts the arrangement structure that the grooves of each stage are formed by inwards concave circumference of the tantalum tube insulating tube, and the grooves of each stage are parallel to each other. Further, in order to better realize the structure of the tantalum tube insulating part of the hollow cathode ion source neutralizer, the arrangement structure is particularly adopted, wherein the width of the groove is larger than or equal to the depth of the groove. Further, in order to better realize the tantalum tube insulating part structure of the hollow cathode ion source neutralizer, the arrangement structure is particularly adopted, wherein the ratio of the depth of the groove to the distance between the groove bottom and the inner wall of the tantalum tube insulating tube is 1:1-4. Further, in order to better realize the structure of the hollow cathode ion source neutralizer tantalum tube insulator, the structure is particularly adopted that the length of the tantalum tube insulator tube occupies 2/3~3/4 of the length of the hollow cathode tantalum tube reaction part. Further, in order to better realize the structure of the tantalum tube insulating part of the hollow cathode ion source neutralizer, the tantalum tube insulating part is particularly provided with the following structure that the tantalum tube insulating part is made of ceramic materials. Compared with the prior art, the invention has the following advantages: The insulation degree of the hollow cathode tantalum tube and the keeper shell can be improved under the help of the multistage gro