CN-115404454-B - Substrate holder, substrate carrier, film forming system, and method for manufacturing electronic device

Abstract

The invention provides a substrate holder, a substrate carrier, a film forming system and a manufacturing method of an electronic device, wherein the substrate holder is used for conveying a substrate while simultaneously supporting a load in a shearing direction and a load in an adhesion direction. The substrate holder provided on a substrate carrier for holding and transporting a substrate in the vertical direction downward has a 1 st elastic layer having an adhesion surface to which the substrate is adhered, a 2 nd elastic layer adhered to a support member on the substrate carrier side, the amount of displacement of the support member with respect to a predetermined amount of force in a direction parallel to the adhesion surface being larger than that of the 1 st elastic layer, and an intermediate layer disposed between the 1 st elastic layer and the 2 nd elastic layer, the intermediate layer having a rigidity higher than that of each of the 1 st elastic layer and the 2 nd elastic layer.

Inventors

• ARAI YUTAKA
• FUJIMURA HIDEHIKO
• Tsuda taketo
• OSHIMA YOSHITO
• Shimomura yoshihito
• YAMAMOTO MASAKI
• HONDA ATSUO
• Komuro yoshitami
• GUAN YIQING

Assignees

• 佳能特机株式会社

Dates

Publication Date

20260508

Application Date

20220520

Priority Date

20210527

Claims (17)

1. 1. A substrate holder provided on a substrate carrier for holding and transporting a substrate vertically downward, The substrate holder has: A 1 st elastomer layer having an adhesion surface to adhere to the substrate; a 2 nd elastomer layer adhered to the support member on the substrate carrier side, the displacement amount of the force with respect to a predetermined magnitude in a direction parallel to the adhesion surface being larger than that of the 1 st elastomer layer, and An intermediate layer disposed between the 1 st and 2 nd elastomer layers and having a higher rigidity than each of the 1 st and 2 nd elastomer layers.
2. 2. The substrate holder according to claim 1, wherein, The 1 st and 2 nd elastomer layers are composed of the same material.
3. 3. The substrate holder according to claim 1, wherein, The 1 st and 2 nd elastomer layers are elastomers composed of fluororubber.
4. 4. The substrate holder according to claim 1, wherein, The thickness of the 1 st elastomer layer in the lamination direction is smaller than the thickness of the 2 nd elastomer layer in the lamination direction.
5. 5. The substrate holder according to claim 1, wherein, The intermediate layer is stainless steel.
6. 6. The substrate holder according to claim 1, wherein, The rigidity of at least one of the 1 st elastomer layer and the 2 nd elastomer layer with respect to a shearing force is in the range of 10 to 30[ N/mm ].
7. 7. A substrate carrier for holding and transporting a substrate to be placed thereon, characterized in that, The substrate holder according to any one of claims 1 to 6, wherein the substrate holder is provided at a plurality of positions on the substrate holding surface of the substrate carrier.
8. 8. A film forming system, characterized in that, the film forming system includes: The substrate carrier of claim 7, and And a film forming device for performing film forming treatment on the substrate held by the substrate holder.
9. 9. A method of manufacturing an electronic device, the method comprising: A step of holding a substrate by the substrate carrier according to claim 7; A step of performing a film forming process on the substrate held by the substrate holder, and And a step of peeling the substrate after the film formation treatment from the adhesion surface.
10. 10. A substrate holder provided on a substrate carrier for holding and transporting a substrate vertically downward, The substrate holder has: A 1 st elastomer layer having an adhesion surface to adhere to the substrate; A2 nd elastomer layer adhered to the support member on the substrate carrier side and thicker than the 1 st elastomer layer, and An intermediate layer disposed between the 1 st and 2 nd elastomer layers and having a higher rigidity than each of the 1 st and 2 nd elastomer layers.
11. 11. The substrate holder according to claim 10, wherein, The 1 st and 2 nd elastomer layers are composed of the same material.
12. 12. The substrate holder according to claim 10, wherein, The 1 st and 2 nd elastomer layers are elastomers composed of fluororubber.
13. 13. The substrate holder according to claim 10, wherein, The intermediate layer is stainless steel.
14. 14. The substrate holder according to claim 10, wherein, The rigidity of at least one of the 1 st elastomer layer and the 2 nd elastomer layer with respect to a shearing force is in the range of 10 to 30[ N/mm ].
15. 15. A substrate carrier for holding and transporting a substrate to be placed thereon, characterized in that, The substrate holder according to any one of claims 10 to 14, being provided at a plurality of positions on the substrate holding surface of the substrate carrier.
16. 16. A film forming system, characterized in that, the film forming system includes: the substrate carrier of claim 15, and And a film forming device for performing film forming treatment on the substrate held by the substrate holder.
17. 17. A method of manufacturing an electronic device, the method comprising: A step of holding a substrate by the substrate carrier according to claim 15; A step of performing a film forming process on the substrate held by the substrate holder, and And a step of peeling the substrate after the film formation treatment from the adhesion surface.

Description

Substrate holder, substrate carrier, film forming system, and method for manufacturing electronic device Technical Field The invention relates to a substrate holder, a substrate carrier, a film forming system, and a method for manufacturing an electronic device. Background In recent years, in FPD (Flat Panel Display) industry, a method of improving production efficiency by dividing a large glass substrate called a mother glass into a plurality of glass substrates for each display is utilized. In this method, on the premise that a single panel size is subjected to imposition (japanese) as needed, for example, a base glass having one side exceeding 2m is subjected to a manufacturing process such as film formation and divided to be processed into a product. In general, the thickness of the base glass is smaller than several millimeters, and it is an important problem to treat the base glass while preventing breakage and processing failure in various steps such as conveyance and film formation. As a method for transporting the sample glass in the manufacturing process, there is a method of transporting the sample glass integrally with a substrate supporting member (substrate carrier). As a method for holding a base glass using a substrate carrier, there are generally a method of supporting an outer peripheral portion by a clamping mechanism or the like, a method of using an electrostatic chuck, a method of using magnetic attraction, a method of using an adhesive member such as an adhesive pad, and the like. By holding the base glass with the substrate carrier using the adhesive member, the base glass can be made compact without requiring a power source or the like, and the process such as film formation can be performed while suppressing the influence of magnetic force or the like. Patent document 1 discloses that the deflection is eliminated so that the support portion W2 of the thin-plate workpiece W is supported by the substrate carrier 1000 and the non-support portion W1 is suspended in a state of being adhered by the adhesion member 2000, thereby holding the thin-plate workpiece W in a planar state. Prior art literature Patent literature Patent document 1 International publication No. 2012/117509 Disclosure of Invention Problems to be solved by the invention Here, in order to maintain uniformity of film formation, the adhesive member may be disposed discretely at a border (frame area) of a imposition (japanese) while avoiding an image display area. In such a case, when the large screen size is imposed from the base glass, glass deflection is unavoidable in the center portion of the large screen, and a large shear force parallel to the surface of the glass acts as a load on the adhesive member disposed in the frame region. Further, when the temperature increases in the process accompanied by film formation or the like, the shear load (Japanese patent application No. せ) of the adhesive member may be insufficient, and the base glass may be peeled off from the substrate carrier, which may cause a problem in production. Therefore, for conveyance of the sample glass in a series of manufacturing process cycles, it is necessary to reduce the shearing force acting on the adhesive member or to increase the shear direction resistant load (shear direction adhesive force) of the adhesive member. The present invention aims to provide a technique for conveying a substrate while simultaneously achieving both a shear-direction load-resistant load and an adhesion-resistant load. Means for solving the problems In order to solve the above problems, a substrate holder according to the present invention is provided on a substrate carrier for holding and transporting a substrate vertically downward, and includes: A 1 st elastomer layer having an adhesion surface to adhere to the substrate; a 2 nd elastomer layer adhered to the support member on the substrate carrier side, the displacement amount of the force with respect to a predetermined magnitude in a direction parallel to the adhesion surface being larger than that of the 1 st elastomer layer, and An intermediate layer disposed between the 1 st and 2 nd elastomer layers and having a higher rigidity than each of the 1 st and 2 nd elastomer layers. In order to solve the above problems, a substrate holder according to the present invention is provided on a substrate carrier for holding and transporting a substrate vertically downward, and includes: A 1 st elastomer layer having an adhesion surface to adhere to the substrate; A2 nd elastomer layer adhered to the support member on the substrate carrier side and thicker than the 1 st elastomer layer, and An intermediate layer disposed between the 1 st and 2 nd elastomer layers and having a higher rigidity than each of the 1 st and 2 nd elastomer layers. ADVANTAGEOUS EFFECTS OF INVENTION According to the substrate holding device of the present invention, a technique for conveying a substrate while simultaneously satisfying both a s