CN-115539598-B - Motion mechanism and motion system

Abstract

The invention provides a motion mechanism and a motion system, and relates to the field of precision motion. The motion mechanism comprises a first supporting component, a second supporting component and a flexible component, wherein the first supporting component can rotate relative to the second supporting component, one end of the flexible component is fixed to the first supporting component, the other end of the flexible component is rotationally connected with the second supporting component, and the flexible component can be elastically deformed in the rotating process. This motion and motion system through setting up flexible subassembly, at the rotatory in-process of first supporting component relative second supporting component, flexible subassembly takes place elastic deformation, can guarantee the assembly machinery zero position that first supporting component can be relative second supporting component when providing low rigidity high damping for first supporting component to flexible subassembly can be relative second supporting component is rotatory, can avoid the flexible subassembly to appear the damage, has guaranteed personnel and equipment's safety.

Inventors

• TIAN SHIWEI

Assignees

• 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所）

Dates

Publication Date

20260512

Application Date

20221009

Claims (8)

1. 1. The motion mechanism is characterized by comprising a first supporting component, a second supporting component and a flexible component, wherein the first supporting component can rotate relative to the second supporting component, one end of the flexible component is fixed on the first supporting component, the other end of the flexible component is rotationally connected with the second supporting component, and the flexible component is arranged to be elastically deformed in the rotating process; The flexible component comprises a first fixed part, a second fixed part, a pin shaft and a flexible piece, wherein the flexible piece is connected with the first fixed part and the second fixed part, The first fixing part is fixedly connected with the first supporting component, and the second fixing part is connected with the second supporting component through the pin shaft; the first support assembly comprises a first fixed block and a rotating shaft, the first fixed block is connected with the first fixed part, the rotating shaft penetrates through the first fixed block, and the rotating shaft can rotate to drive the first fixed block to rotate; the second supporting component comprises a second fixed block, the first fixed block comprises a concave part which is concave towards the inside of the first fixed block, a concave space is enclosed by the concave part, The second fixing block includes a protruding portion provided in the recess space, and the rotation shaft penetrates through both the recess portion and the protruding portion.
2. 2. The movement mechanism according to claim 1, wherein the second fixing portion includes a first fixing member, a second fixing member, and an engaging member, the first fixing member and the second fixing member being disposed at a distance from each other, the engaging member connecting both the first fixing member and the second fixing member, the flexible member being connected with the engaging member, The pin shaft penetrates through the first fixing piece and the second fixing piece, and a rolling bearing is sleeved on the pin shaft.
3. 3. The movement mechanism of claim 1, wherein the second support assembly further comprises a cross roller bearing, the cross roller bearing being nested about the rotational shaft, a side of the cross roller bearing being connected to the protruding portion.
4. 4. The motion mechanism of claim 1, wherein the first support assembly comprises a first air bearing mechanism and an air bearing decoupling portion, the air bearing decoupling portion comprising a first end and a second end opposite in a first direction, the first end being connected to the first air bearing mechanism, the second end being connected to the air bearing decoupling portion, the first air bearing mechanism being capable of forming an air film to support the air bearing decoupling portion and the first fixed block.
5. 5. The movement mechanism according to claim 4, wherein the air-floating decoupling portion includes a first plate, a second plate, and a connecting member connecting both the first plate and the second plate, the first plate being connected with the first air-floating mechanism, the second plate being connected with the first fixed block, the connecting member being capable of elastic deformation.
6. 6. The movement mechanism of claim 4, wherein the second support assembly further comprises a second air bearing mechanism, the second fixed block further comprises a body portion comprising first and second sides opposite in a second direction, the first side connected to the protruding portion, the second side connected to the second air bearing mechanism, the first direction perpendicular to the second direction, the second air bearing mechanism capable of forming an air film to support the second fixed block.
7. 7. The movement mechanism of claim 6, wherein the second support assembly further comprises a preload magnet coupled to the second side portion, The number of the second air floatation mechanisms is two, and the two second air floatation mechanisms are respectively arranged at two sides of the preload magnet in the first direction.
8. 8. A movement system comprising a drive mechanism and a movement mechanism according to any one of claims 1 to 7, the drive mechanism being coupled to the first support assembly to drive movement of the movement mechanism.

Description

Motion mechanism and motion system Technical Field The application relates to the field of precision motion, in particular to a motion mechanism and a motion system. Background In the high-precision high-speed high-real-time multi-degree-of-freedom motion platform, the three-degree-of-freedom motion requirements of X, Y and Rz are needed, the low rigidity and high damping are needed in the Rz direction aiming at the high-real-time requirement motion mechanism, at present, a steel flexible piece is generally arranged in the existing motion mechanism, the low rigidity and the high damping are realized through the deformation of the steel flexible piece, however, the steel flexible piece is influenced by the fatigue of the steel flexible piece, the steel flexible piece has the risk of fracture, and personnel and equipment are damaged. Disclosure of Invention In view of this, the application provides a motion mechanism and a motion system, by arranging the flexible component, the flexible component is elastically deformed in the process of rotating the first support component relative to the second support component, so that the first support component can be ensured to be in a mechanical zero position relative to the second support component while low rigidity and high damping are provided for the first support component, the flexible component can be rotated relative to the second support component, damage to the flexible component can be avoided, and safety of personnel and equipment is ensured. According to an aspect of the present application, there is provided a movement mechanism comprising a first support assembly, a second support assembly and a flexible assembly, the first support assembly being rotatable relative to the second support assembly, one end of the flexible assembly being fixed to the first support assembly, the other end of the flexible assembly being in rotational connection with the second support assembly, the flexible assembly being arranged to be elastically deformable during said rotation. Preferably, the flexible component comprises a first fixing part, a second fixing part, a pin shaft and a flexible piece, wherein the flexible piece is connected with the first fixing part and the second fixing part, the first fixing part is fixedly connected with the first supporting component, and the second fixing part is connected with the second supporting component through the pin shaft. Preferably, the second fixing part comprises a first fixing piece, a second fixing piece and a connecting piece, the first fixing piece and the second fixing piece are arranged at intervals, the connecting piece is connected with the first fixing piece and the second fixing piece, the flexible piece is connected with the connecting piece, the pin shaft penetrates through the first fixing piece and the second fixing piece, and the pin shaft is sleeved with a rolling bearing. Preferably, the first support assembly comprises a first fixing block and a rotating shaft, the first fixing block is connected with the first fixing portion, the rotating shaft penetrates through the first fixing block, and the rotating shaft can rotate to drive the first fixing block to rotate. Preferably, the second support assembly includes a second fixing block, the first fixing block includes a concave portion concave toward an inside of the first fixing block, a concave space is defined by the concave portion, the second fixing block includes a convex portion disposed in the concave space, and the rotation shaft penetrates through both the concave portion and the convex portion. Preferably, the second support assembly further comprises a cross roller bearing sleeved on the rotating shaft, and a side portion of the cross roller bearing is connected with the protruding portion. Preferably, the first support assembly includes a first air floating mechanism and an air floating decoupling portion, the air floating decoupling portion includes a first end and a second end opposite in a first direction, the first end is connected with the first air floating mechanism, the second end is connected with the air floating decoupling portion, and the first air floating mechanism is capable of forming an air film to support the air floating decoupling portion and the first fixing block. Preferably, the air-floating decoupling portion comprises a first plate, a second plate and a connecting piece, the connecting piece is connected with the first plate and the second plate, the first plate is connected with the first air-floating mechanism, the second plate is connected with the first fixed block, and the connecting piece can be elastically deformed. Preferably, the second support assembly further includes a second air floating mechanism, the second fixing block further includes a main body portion including a first side portion and a second side portion opposite in a second direction, the first side portion is connected with the protruding portion