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CN-115552783-B - Leveling device

CN115552783BCN 115552783 BCN115552783 BCN 115552783BCN-115552783-B

Abstract

The embodiment of the invention discloses a leveling device. The leveling device comprises a base, a cover shell, an end cover, a flexible hinge, at least three ceramic stacks, at least one ceramic stack and at least one ceramic end cover, wherein the cover shell is cylindrical and connected with the base, the cover shell and the base form a containing area, the end cover is arranged opposite to the base and is arranged on one side of the cover shell, which is away from the base, the flexible hinge is arranged in the containing area and clamped between the base and the end cover, the flexible hinge is arranged to be elastically deformed between the base and the end cover, the at least three ceramic stacks are arranged in the containing area and clamped between the base and the end cover, each ceramic stack is arranged to be deformed in the axial direction of the end cover after being electrified, at least three of the ceramic stacks are arranged along the circumferential direction of the end cover, the cover shell is used for limiting the end cover to move in a preset range in the axial direction of the cover, and the end cover is also used for limiting the end cover to move in a preset range in the radial direction of the cover. Compared with the prior art, the leveling device meets the requirements of bearing high load and large tangential force.

Inventors

  • HUANG XIAOSHAN
  • FU QIYONG
  • LIU RUDE

Assignees

  • 上海隐冠半导体技术有限公司

Dates

Publication Date
20260508
Application Date
20210416
Priority Date
20200605

Claims (16)

  1. 1. A leveling device, comprising: A base; the housing is cylindrical and is connected with the base, and the housing and the base form a containing area; the end cover is arranged opposite to the base and is arranged on one side of the housing, which is away from the base; The flexible hinge is arranged in the accommodating area and clamped between the base and the end cover, and the flexible hinge is arranged to be elastically deformable between the base and the end cover; at least three ceramic stacks disposed within the receiving area and sandwiched between the base and the end cap, each of the ceramic stacks being configured to deform in an axial direction of the end cap upon energization, wherein at least three of the ceramic stacks are disposed circumferentially of the end cap; The cover shell is used for limiting the movement of the end cover in a preset range in the axial direction of the cover shell and limiting the movement of the end cover in a preset range in the radial direction of the cover shell; The flexible hinge is cylindrical, each ceramic stack is arranged in the flexible hinge, and a plurality of hollowed-out parts extending along the circumferential direction are formed on the flexible hinge.
  2. 2. The leveling device of claim 1, wherein the housing comprises: the housing body is connected with the base and forms the accommodating area with the base; The at least three limiting mechanisms are arranged around the end cover along the periphery of the end cover and comprise a fixed component connected with the housing body, a first limiting component connected with the fixed component and a second limiting component connected with the fixed component, wherein the first limiting component is used for limiting the movement of the end cover in a preset range in the axial direction of the end cover, and the second limiting component is used for limiting the movement of the end cover in a preset range in the radial direction of the end cover.
  3. 3. The leveling device according to claim 2, wherein the side wall of the end cover is provided with an end cover limiting hole, the fixing component is provided with a fixing component limiting hole, the first limiting component is provided with a first end inserted into the end cover limiting hole and a second end inserted into the fixing component limiting hole, and the first end and the second end are arranged oppositely.
  4. 4. The leveling device of claim 3, wherein the first end is fixedly connected to the end cap limiting aperture and the second end is spaced from the aperture wall of the fixing assembly limiting aperture.
  5. 5. The leveling device of claim 3, wherein a gap is provided between the first end and a wall of the end cap limiting aperture, and the second end is fixedly connected to the fixing assembly limiting aperture.
  6. 6. A leveling device as defined in claim 3 wherein the first stop assembly is a pin.
  7. 7. The leveling device of claim 3, wherein the second stop assembly comprises: and the limiting piece is radially inserted into the fixing assembly, one end of the limiting piece is positioned between the housing body and the side wall of the end cover, and a gap exists between the limiting piece and the side wall of the end cover.
  8. 8. The leveling device of claim 7, wherein the second stop assembly further comprises: The fastener is inserted into the fixing assembly along the axial direction and abuts against the limiting piece.
  9. 9. The leveling device of any one of claims 2-8, wherein the end cap is rectangular; The limiting mechanisms are not less than four, and each side wall of the end cover is at least opposite to one limiting mechanism.
  10. 10. The leveling device of claim 2, wherein each of the stop mechanisms is disposed at equal angles in a circumferential direction.
  11. 11. The leveling device as in claim 1, wherein each leveling device further comprises an initial position adjustment mechanism disposed on the base; The initial position adjusting mechanism comprises a supporting plate which is arranged opposite to the base and used for bearing each ceramic stack, and an adjusting assembly which is arranged on the base and is used for adjusting the distance between the supporting plate and the base.
  12. 12. The leveling device of claim 11, wherein a side of the support plate facing the base is at least partially beveled; the adjustment assembly includes: The driven piece is arranged between the base and the supporting plate, and one side of the driven piece, facing the supporting plate, is provided with a guide inclined surface which is complementary with the inclined surface; and the driving piece drives the driven piece to move along the extending direction of the inclined plane.
  13. 13. The leveling device of claim 12, wherein the base is provided with a guide slot; The follower includes: the driven block is connected with the driving piece, and the guide inclined plane is arranged on the driven block; And the driven ball is arranged on the driven block and is used for moving along the guide groove when the driven block is driven by the driving piece.
  14. 14. The leveling device of claim 12, wherein the adjustment assembly further comprises: the connecting plate is connected with the driven piece; And the two ends of the biasing piece are respectively connected with the connecting plate and the base, and pull the connecting plate to bias along the movement direction deviating from the driven piece.
  15. 15. The leveling device of claim 11, wherein the adjustment assembly is provided in plurality.
  16. 16. The leveling device of claim 1, wherein each of the ceramic stacks is disposed at equal angles in a circumferential direction.

Description

Leveling device Cross reference to related applications This patent application claims priority from chinese patent application No. 2020105066621 entitled "leveling device" filed on 5 th month 6 of 2020, which is incorporated herein by reference in its entirety. Technical Field The invention relates to the technical field of manufacturing of semiconductor equipment, in particular to a leveling device. Background In recent years, with the continuous development of semiconductor technology and precision optical technology, the precision and load of a precision motion stage are improved year by year so as to be suitable for the continuous improvement of product requirements. Such as lithographic apparatus, chip manufacturing hosts, and electron microscope viewing tables. The technology of the piezoelectric ceramic motion platform is also continuously and iteratively updated. In the prior art, the leveling mechanism comprises a linear motor drive, a piezoelectric motor drive and the like, and the pre-tightening mode comprises spring pre-tightening, flexible hinge pre-tightening and the like. For example, patent CN101004555 employs three sets of adjuster assemblies for adjustment, wherein the adjustment rods use linear motors. However, the adjusting mode has a complex structure, cannot be suitable for high-load and large-tangential-force working conditions, and cannot bear impact load. For another example, patent CN102854751 uses three sets of parallel reeds to perform the pretension, and by this pretension mode, the adjustment difficulty of the consistency of the initial position of the spring is large, only the unidirectional pretension can be borne, the impact load cannot be borne, and the tangential stiffness is poor. Therefore, the existing leveling mechanism has the defects that the existing leveling mechanism cannot be suitable for working conditions with small load and small tangential force, cannot bear impact load and the like. Disclosure of Invention It is an aim of embodiments of the present invention to provide a levelling device such that it meets the requirements of being able to withstand high loads and large tangential forces. In order to solve the above technical problems, an embodiment of the present invention provides a leveling device, including: A base; the housing is cylindrical and is connected with the base, and the housing and the base form a containing area; the end cover is arranged opposite to the base and is arranged on one side of the housing, which is away from the base; The flexible hinge is arranged in the accommodating area and clamped between the base and the end cover, and the flexible hinge is arranged to be elastically deformable between the base and the end cover; at least three ceramic stacks disposed within the receiving area and sandwiched between the base and the end cap, each of the ceramic stacks being configured to deform in an axial direction of the end cap upon energization, wherein at least three of the ceramic stacks are disposed circumferentially of the end cap; the cover shell is used for limiting the movement of the end cover in a preset range in the axial direction of the cover shell and limiting the movement of the end cover in a preset range in the radial direction of the cover shell. Compared with the prior art, the embodiment of the invention is provided with the base, the cover, the end cover, the flexible hinge and at least three ceramic stacks, wherein the cover is cylindrical and is connected with the base, the cover and the base form the accommodating area, the flexible hinge and the ceramic stacks are arranged in the accommodating area, the cover enables the end cover to move in the radial direction and the axial direction only within a preset range, when the leveling device receives a larger tangential force, the end cover transmits force to the limiting mechanism, the limiting mechanism is supported by the cover base, the larger tangential force received by the end cover is counteracted, and the end cover can normally work under the action of the larger tangential force, so that the leveling device can bear larger load and has larger application range. The flexible hinge and the ceramic stacks are arranged in the accommodating area and clamped between the base and the end cover, the end cover is enabled to have pretightening force in the axial direction by the flexible hinge, the end cover is always in a stressed stable state, the ceramic stacks are at least three and are arranged along the circumferential direction of the end cover, deformation is generated in the axial direction of the ceramic stacks, the end cover is driven to be capable of being stably pitching in the direction facing or deviating from the base, and therefore the leveling device can stably work. In one embodiment, the housing comprises: the housing body is connected with the base and forms the accommodating area with the base; The at least three limiting mechanisms are arrang