CN-115555707-B - Laser processing device and laser processing method

CN115555707BCN 115555707 BCN115555707 BCN 115555707BCN-115555707-B

Abstract

A laser processing apparatus includes a support unit that supports an object including a glass substrate, a light source that emits laser light, a first optical unit that imparts astigmatism to the laser light, a second optical unit that condenses the laser light in a first direction perpendicular to an optical axis of the laser light in a first region and condenses the laser light in a second direction perpendicular to the optical axis and the first direction in a second region on a downstream side of the first region, a moving unit that relatively moves the second optical unit with respect to the support unit, an imaging unit that acquires an image of a modified region, and a control unit that controls the moving unit so as to relatively move each of the plurality of astigmatism to the laser light in the first region of the glass substrate in the second direction, and outputs an image of the modified region in association with each of the plurality of astigmatism.

Inventors

Oyaizu Masayoshi
Kyomoto Yusuke

Assignees

浜松光子学株式会社

Dates

Publication Date: 20260508
Application Date: 20220628
Priority Date: 20210630

Claims (7)

1. A laser processing apparatus, wherein, A laser processing apparatus for forming a modified region on a glass substrate by irradiating a target object including the glass substrate with laser light, The laser processing device is provided with: a support unit that supports the object; a light source that emits the laser light; A first optical unit that imparts astigmatism to the laser light emitted from the light source; A second optical unit that condenses the laser beam to which the astigmatism has been imparted by the first optical unit in a first region in a first direction perpendicular to an optical axis of the laser beam, and in a second region downstream of the first region in a traveling direction of the laser beam in a second direction perpendicular to the optical axis and the first direction; a moving part that relatively moves the second optical part with respect to the supporting part; an imaging unit for acquiring an image of the modified region, and A control unit that controls the first optical unit so that the laser light is given to each of a plurality of astigmatism that are different from each other as the astigmatism, controls the moving unit so that the first region of the glass substrate moves relatively in the second direction, and outputs the image of the modified region acquired by the imaging unit in association with each of the plurality of astigmatism.
2. The laser processing apparatus according to claim 1, wherein, The first optic is a spatial light modulator, The control unit inputs a signal indicating each of a plurality of astigmatism patterns corresponding to each of the plurality of astigmatism into the spatial light modulator.
3. The laser processing apparatus according to claim 2, wherein, Each of the plurality of astigmatic patterns is an astigmatic pattern in which a value obtained by dividing a width of the first area in the second direction by a width of the first area in the first direction is different from each other.
4. The laser processing apparatus according to any one of claim 1 to 3, wherein, The control unit includes a display unit that displays the image of the modified region acquired by the imaging unit in association with each of the plurality of astigmatism.
5. The laser processing apparatus according to any one of claims 1 to 4, wherein, The control unit includes an input receiving unit that receives an input of any one of the plurality of astigmatism as a laser processing condition.
6. A laser processing method, wherein, Is a processing method for forming a modified region on a glass substrate by irradiating a target object including the glass substrate with laser light, The laser processing method includes: A first step of sequentially applying the laser light to each of a plurality of astigmatism different from each other to obtain an image of the modified region formed on the glass substrate by irradiation of the laser light to which each of the plurality of astigmatism is applied, and A second step of associating the image of the modified region with each of the plurality of astigmatism, In the first step, the laser light to which each of the plurality of astigmatism is applied is condensed in a first region in a first direction perpendicular to an optical axis of the laser light, condensed in a second region on a downstream side of the first region in a traveling direction of the laser light in a second direction perpendicular to the optical axis and the first direction, and relatively moved in the second direction on the glass substrate.
7. The laser processing method as claimed in claim 6, wherein, The method further includes a third step of setting any one of the plurality of astigmatism of the image associated with the modified region as a laser processing condition.

Description

Laser processing device and laser processing method Technical Field The present disclosure relates to a laser processing apparatus and a laser processing method. Background A laser processing apparatus is known in which a modified region is formed in an object by irradiating the object with laser light (for example, refer to japanese patent application laid-open No. 2011-051011). The laser processing apparatus may include a support portion for supporting an object, a light source for emitting laser light, a spatial light modulator for modulating the laser light emitted from the light source, and a condensing portion for condensing the laser light modulated by the spatial light modulator. Disclosure of Invention In the laser processing apparatus as described above, a modified region may be formed on a glass substrate along each of a plurality of lines by irradiating a laser beam to an object including the glass substrate along each of the plurality of lines. In such a case, it is important to ensure sufficient bending strength for a plurality of chips (chips) obtained by cutting an object including a glass substrate along each of a plurality of lines. However, even if the laser processing conditions are such that a sufficient bending strength can be secured for a certain laser processing apparatus, if the laser processing conditions are applied to another laser processing apparatus of the same specification as the laser processing apparatus, a sufficient bending strength may not be secured. The present disclosure aims to provide a laser processing apparatus and a laser processing method capable of securing sufficient bending strength for a plurality of chips obtained by cutting an object including a glass substrate. The laser processing device according to one aspect of the present disclosure is a laser processing device for forming a modified region on a glass substrate by irradiating a target object including the glass substrate with laser light, and includes a support portion for supporting the target object, a light source for emitting the laser light, a first optical portion for imparting astigmatism to the laser light emitted from the light source, a second optical portion for focusing the laser light to which the astigmatism has been imparted by the first optical portion in a first direction perpendicular to an optical axis of the laser light and in a second direction perpendicular to the optical axis and the first direction on a second region on a downstream side of the first region in a traveling direction of the laser light, a moving portion for relatively moving the second optical portion with respect to the support portion, an imaging portion for acquiring an image of the modified region, and a control portion for controlling the first optical portion so that each of a plurality of astigmatism different from each other is imparted to the laser light as astigmatism, controlling the moving portion so as to relatively move in the first region of the glass substrate along the second direction, and outputting an image of the modified region acquired by the imaging portion in association with each of the plurality of astigmatism. The laser processing method according to one aspect of the present disclosure is a laser processing method for forming a modified region on a glass substrate by irradiating a target object including the glass substrate with laser light, and includes a first step of sequentially applying laser light to each of a plurality of astigmatism different from each other, acquiring an image of the modified region, the modified region being formed on the glass substrate by irradiation of the laser light to which each of the plurality of astigmatism is applied, and a second step of associating the image of the modified region with each of the plurality of astigmatism, wherein the laser light to which each of the plurality of astigmatism is applied is condensed in a first region in a first direction perpendicular to an optical axis of the laser light, is condensed in a second region on a downstream side of the first region in a traveling direction of the laser light in a second direction perpendicular to the optical axis and the first direction, and relatively moving the first region along the second direction on the glass substrate. Drawings Fig. 1 is a structural diagram of a laser processing apparatus according to an embodiment. Fig. 2 is a cross-sectional view of a portion of the spatial light modulator shown in fig. 1. Fig. 3 is a plan view of a glass substrate as an object of an embodiment. Fig. 4 is a diagram showing an astigmatic pattern displayed in the spatial light modulator shown in fig. 1. Fig. 5 is a view showing an optical path of laser light to which astigmatism is imparted by the spatial light modulator shown in fig. 1. Fig. 6 is a diagram showing the shape of a first region of laser light to which astigmatism is imparted by the spatial light modulator shown in fig. 1. Fig