CN-115564821-B - Positioning method, detection method and detection system

CN115564821BCN 115564821 BCN115564821 BCN 115564821BCN-115564821-B

Abstract

The positioning method comprises the steps of detecting at least two adjacent reference points on the surface of an object to be detected, obtaining first coordinate information under a corresponding first coordinate system of a first area to be detected, obtaining a conversion relation between the first coordinate system and the second coordinate system, and obtaining second coordinate information of the first area to be detected and other areas to be detected under the second coordinate system according to the conversion relation, the first coordinate information of the first area to be detected under the first coordinate system and a periodic distribution rule of the area to be detected. Due to the fact that the detection of the limited reference points is carried out, the positioning speed of the to-be-detected area can be improved, accurate positioning of the to-be-detected point can be achieved according to the coordinate information of the to-be-detected area under the second coordinate system, and therefore rapid and high-precision detection of the to-be-detected area of the to-be-detected object can be achieved.

Inventors

CHEN LU
Zu Jiancheng
MA YANZHONG
ZHANG SONG

Assignees

深圳中科飞测科技股份有限公司

Dates

Publication Date: 20260508
Application Date: 20210630

Claims (15)

1. A positioning method for positioning a region to be measured in an object to be measured, comprising: providing a detection device having a first coordinate system; Providing an object to be detected, wherein the object to be detected is provided with a second coordinate system, the surface of the object to be detected is provided with a reference point, the reference point is a point which can be identified by the detection equipment, and the object to be detected comprises a plurality of periodically arranged areas to be detected; The method comprises the steps of carrying out initial positioning treatment on a region to be detected, obtaining an initial arrangement direction of the region to be detected and a first reference point coordinate of a first reference point under a first coordinate system, searching a second reference point and a third reference point by detection equipment according to the first reference point coordinate, the initial arrangement direction and an arrangement period of the region to be detected, and obtaining reference point coordinate information of the second reference point and the third reference point under the first coordinate system, wherein the first reference point is positioned near a center point of an object to be detected; Acquiring a first extending direction of a first to-be-measured area and a first size of the first to-be-measured area in the first extending direction according to the first reference point coordinate and the second reference point coordinate, and acquiring a second extending direction of the first to-be-measured area and a second size of the first to-be-measured area in the second extending direction according to the first reference point coordinate and the third reference point coordinate; acquiring a conversion relation between the first coordinate system and the second coordinate system; And acquiring second coordinate information of the first to-be-detected area and other to-be-detected areas in the second coordinate system according to the conversion relation, the first coordinate information of the first to-be-detected area in the first coordinate system and the periodic distribution rule of the to-be-detected areas.
2. The positioning method according to claim 1, wherein the edge of the object to be measured is provided with a reference mark, a line between the reference mark and a center point of the object to be measured represents a direction of a coordinate axis of the second coordinate system, and the center point of the object to be measured represents an origin position of the second coordinate system; The step of carrying out initial positioning processing on the region to be detected and obtaining the initial arrangement direction of the region to be detected and the reference point coordinates of the first reference point under the first coordinate system comprises the following steps: scanning the edge of the object to be detected to obtain edge contour information of the object to be detected; Acquiring the position coordinates of the center point of the object to be detected and the reference mark under a first coordinate system according to the edge profile; And acquiring the initial arrangement direction of the region to be measured according to the center point of the object to be measured and the position coordinates of the reference mark under a first coordinate system.
3. The positioning method according to claim 1 or 2, wherein the regions to be measured of the object to be measured are arranged in a periodic array, and the initial arrangement direction of the regions to be measured includes a first arrangement direction and a second arrangement direction; the step of searching other reference points by the detection equipment according to the reference point coordinates, the initial arrangement direction and the arrangement period of the to-be-detected area, and obtaining the reference point coordinate information of the other reference points under the first coordinate system comprises the following steps: acquiring a next reference point adjacent to the first reference point in the first arrangement direction as a second reference point through the detection equipment, and acquiring a second reference point coordinate of the second reference point in the first coordinate system; Acquiring, by the detection device, a next reference point adjacent to the first reference point in the second arrangement direction As a third reference point and obtaining a third reference point coordinate of the third reference point in the first coordinate system.
4. The positioning method according to claim 2, wherein the step of acquiring a conversion relation between the first coordinate system and the second coordinate system includes: and acquiring a conversion relation between the first coordinate system and the second coordinate system according to the center point of the object to be detected and the position coordinates of the reference mark under the first coordinate system.
5. The positioning method according to claim 1, wherein the step of acquiring reference point coordinate information of at least two adjacent reference points in the object under test in the first coordinate system using the detection apparatus includes: acquiring an image of the surface of an object to be detected; And acquiring reference point coordinate information of at least two adjacent reference points under the first coordinate system according to the acquired image of the surface of the object to be detected.
6. The positioning method of claim 1, wherein the number of the first reference point, the second reference point and the third reference point are each a plurality, the number of the first reference point coordinates, the second reference point coordinates and the third reference point coordinates are each a corresponding number of the plurality, the first extension direction, the second extension direction, the first dimension and the second dimension are each a corresponding number of the plurality; The step of obtaining the first extending direction of the first to-be-measured area and the first dimension of the first to-be-measured area in the first extending direction comprises the steps of obtaining the median value of a plurality of first extending directions as the first extending direction of the first to-be-measured area; The step of obtaining the second extending direction of the first to-be-measured area and the second dimension of the first to-be-measured area in the second extending direction comprises the steps of obtaining the median value of a plurality of second extending directions to serve as the second extending direction of the first to-be-measured area, and obtaining the median value of a plurality of second dimensions to serve as the second dimension of the first to-be-measured area in the second extending direction.
7. The positioning method according to claim 6, wherein any straight line is selected as a reference straight line, and the first extending direction is represented by a first included angle between a connecting line between the first reference point and the second reference point and the reference straight line; the second extending direction is characterized by adopting a second included angle between a connecting line between the first reference point and the third reference point and the reference straight line, wherein the median value of the plurality of second extending directions is the average value, the middle value or the weighted average value of the plurality of second included angles; the first dimension is a first distance between the first reference point and the second reference point The median value is an average value, a median value or a weighted average value of the plurality of first distances; the second dimension is a second distance between the first reference point and the third reference point, and the median of the second dimension is an average value, a median value or a weighted average value of a plurality of the second distances.
8. The positioning method of claim 1, wherein the reference point comprises a center point of a feature, the feature having an edge line; the step of obtaining the reference point coordinates of the reference point in the first coordinate system comprises: Detecting a plurality of points of the characteristic structure edge line to obtain coordinates of the plurality of points of the characteristic structure edge under the first coordinate system; Fitting the characteristic structure edge line according to the coordinates of a plurality of points of the characteristic structure edge in the first coordinate system to obtain a fitted edge line; and acquiring the coordinates of the reference point under the first coordinate system according to the fitted edge line.
9. The positioning method according to claim 8, wherein the feature is a grating-shaped mark, a cross-shaped mark, or an annular mark; or the reference point is the corner point of the to-be-detected area.
10. The method according to claim 1, wherein the object surface has feature points, and the step of acquiring the conversion relation between the first coordinate system and the second coordinate system comprises acquiring feature point measurement coordinates of at least one feature point in the first coordinate system by using the detection device; acquiring feature point design coordinates of the at least one feature point under the second coordinate system; and obtaining the conversion relation between the first coordinate system and the second coordinate system according to the characteristic point measurement coordinates and the characteristic point design coordinates.
11. The positioning method according to claim 10, wherein the edge of the object to be measured is provided with a reference mark, and the at least one feature point comprises a center point of the object to be measured and a position of the reference mark; The step of acquiring the feature point measurement coordinates of at least one feature point in the first coordinate system by using the detection device comprises the following steps: scanning the edge of the object to be detected to obtain edge contour information of the object to be detected; and acquiring a characteristic point measurement coordinate of the center point of the object to be detected and the reference mark under a first coordinate system according to the edge profile.
12. The positioning method of claim 10, wherein the translation relationship comprises at least one of a translational relationship and a rotational relationship.
13. The positioning method according to claim 1, wherein the step of obtaining second coordinate information of the first to-be-measured area and other to-be-measured areas in the second coordinate system according to the conversion relation, the first coordinate information of the first to-be-measured area in the first coordinate system, and the periodic distribution rule of the to-be-measured areas includes: acquiring second coordinate information of the first to-be-measured area under the second coordinate system according to the conversion relation and the first coordinate information of the first to-be-measured area under the first coordinate system; acquiring second coordinate information of other areas to be measured under the second coordinate system according to the second coordinate information of the first area to be measured under the second coordinate system and the periodic distribution rule of the areas to be measured; or according to the first coordinate information of the first to-be-measured area under the first coordinate system and the periodic distribution rule of the to-be-measured area, acquiring the first coordinates of other to-be-measured areas under the first coordinate system, and according to the first coordinate information of the first to-be-measured area and other to-be-measured areas under the first coordinate system and the conversion relation, acquiring the second coordinate information of the first to-be-measured area and other to-be-measured areas under the second coordinate system.
14. A method of detection comprising: Providing an object detection device, the object detection device having a third coordinate system; acquiring second target coordinate information of a region to be measured of the object to be measured in the second coordinate system by adopting the positioning method according to any one of claims 1 to 13; acquiring a target conversion relation between the third coordinate system and the second coordinate system; acquiring third target coordinate information of the region to be measured under the third coordinate system according to the target conversion relation and the second target coordinate information; And after the target detection equipment locates the region to be detected according to the third target coordinate information, detecting the region to be detected through the target detection equipment to acquire the physical information of the region to be detected.
15. A detection system, comprising: a to-be-measured area positioning module, adapted to use the positioning method according to any one of claims 1 to 13 to obtain second target coordinate information of the to-be-measured area under a second coordinate system; the conversion relation acquisition module acquires a target conversion relation between a third coordinate system and the second coordinate system; the target coordinate acquisition module is suitable for acquiring third target coordinate information of the region to be detected under the third coordinate system according to the target conversion relation and the second target coordinate information; And the target detection equipment is provided with the third coordinate system and is suitable for positioning the region to be detected according to the third target coordinate information, detecting the region to be detected and acquiring the physical information of the region to be detected.

Description

Positioning method, detection method and detection system Technical Field The present invention relates to the field of semiconductor detection technologies, and in particular, to a positioning method, a detection method, and a detection system. Background Along with the development of modern industry, precision machining is used in more and more fields, and meanwhile, the precision of machining is also required more and more. In order to meet the requirement of processing precision and improve the qualification rate of processed samples, the processing process and the processed products need to be tested for morphology distortion frequently so as to ensure that the distortion is in a tolerable range. In precision-machining distortion detection applications, it is often desirable to detect the height, film thickness, or line width of a set measurement point (e.g., at a critical location) of an object under test. In the prior art, the detection of the to-be-detected point is realized by scanning a large area range of the surface of the to-be-detected object. When the number of points to be detected is small, the method greatly reduces the detection efficiency. Only detecting the to-be-detected point can effectively improve the detection efficiency, however, in the detection process of the specific to-be-detected point, accurate positioning is required to be carried out on the to-be-detected point so as to ensure the detection precision. In the prior art, the specific position on the surface of the object to be detected is difficult to position, so that the detection speed is low, and the accuracy is poor. Disclosure of Invention The invention solves the problem of providing a positioning method, a detection method and a detection system, which can improve the speed and the accuracy of positioning a region to be detected. In order to solve the above problems, an embodiment of the present invention provides a positioning method for positioning a region to be measured in an object to be measured, the method including: providing a detection device having a first coordinate system; Providing an object to be detected, wherein the object to be detected is provided with a second coordinate system, and the surface of the object to be detected is provided with a reference point which is a point identifiable by the detection equipment; acquiring reference point coordinate information of at least two adjacent reference points in the object to be detected under the first coordinate system by adopting the detection equipment; Acquiring first coordinate information of a first to-be-measured area corresponding to at least two reference points in the first coordinate system according to the coordinate information of the reference points of the at least two adjacent reference points in the first coordinate system and the position corresponding relation between the to-be-measured area and the reference points; acquiring a conversion relation between the first coordinate system and the second coordinate system; And acquiring second coordinate information of the first to-be-detected area and other to-be-detected areas in the second coordinate system according to the conversion relation, the first coordinate information of the first to-be-detected area in the first coordinate system and the periodic distribution rule of the to-be-detected areas. Optionally, the object to be measured includes a plurality of periodically arranged regions to be measured, and the at least two adjacent reference points include a first reference point; the step of acquiring the coordinate information of the reference points of at least two adjacent reference points in the object to be detected under the first coordinate system by adopting the detection equipment comprises the following steps: carrying out initial positioning treatment on the region to be detected, and obtaining the initial arrangement direction of the region to be detected and a first reference point coordinate of a first reference point under a first coordinate system; And searching other reference points by the detection equipment according to the first reference point coordinates, the initial arrangement direction and the arrangement period of the to-be-detected area, and acquiring reference point coordinate information of the other reference points under the first coordinate system. Optionally, the edge of the object to be measured is provided with a reference mark, a connecting line of the reference mark and the center point of the object to be measured represents the direction of a coordinate axis of the second coordinate system, and the center point of the object to be measured represents the origin position of the second coordinate system; The step of carrying out initial positioning processing on the region to be detected and obtaining the initial arrangement direction of the region to be detected and the reference point coordinates of the first reference point under the first