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CN-115598932-B - Air-floating lifting mechanism of marble precision workbench

CN115598932BCN 115598932 BCN115598932 BCN 115598932BCN-115598932-B

Abstract

The invention discloses an air-floating lifting mechanism of a marble precise workbench, which comprises a cylinder body, wherein the upper end of the cylinder body is fixedly connected with a top cover, the side wall of the top cover is fixedly connected with a first connecting port, the first connecting port is positioned in the top cover, the lower surface of the top cover is provided with a first air outlet, the first air outlet is communicated with the first connecting port, a piston, the piston and the top cover form a first air chamber, a second air chamber is formed between the piston and the cylinder body, the first air chamber is communicated with the first air outlet, the second connecting port is positioned on the side wall of the cylinder body, the upper surface of the cylinder body is fixedly connected with a second air outlet, and the second air outlet is communicated with the second connecting port and the second air chamber. Through above parts, first air chamber makes marble platform rise with the second air chamber, and first air outlet makes everywhere rise unanimously go on with the second air outlet, and makes the speed of rising comparatively steady through steady structure, can not produce vibrations.

Inventors

  • ZHOU JIANJUN
  • WU JIE
  • LIU WEI
  • ZHOU QI

Assignees

  • 三河建华高科有限责任公司

Dates

Publication Date
20260508
Application Date
20220928

Claims (9)

  1. 1. The air floatation lifting mechanism of the marble precise workbench is characterized by comprising a cylinder body (1), wherein the upper end of the cylinder body (1) is fixedly connected with a top cover (2), the side wall of the top cover (2) is fixedly connected with a first connecting port (3), the first connecting port (3) is positioned in the top cover (2), a first air outlet (4) is formed in the lower surface of the top cover (2), and the first air outlet (4) is communicated with the first connecting port (3); The piston (5), the piston (5) and the top cover (2) form a first air chamber (6), a second air chamber (7) is formed between the piston (5) and the cylinder body (1), and the first air chamber (6) is communicated with the first air outlet (4); The second connecting port (8), the said second connecting port (8) locates at sidewall of the cylinder block (1), the upper surface of the said cylinder block (1) fixedly connects with the second air outlet (9), the said second air outlet (9) communicates with second connecting port (8), second air chamber (7); Steady structure (10), steady structure (10) include band pulley (101), friction wheel (102), stretching strap (103), the fixed surface of stretching strap (103) and band pulley (101) is connected, the one end and cylinder body (1) fixed connection of band pulley (101) are kept away from to stretching strap (103), the side surface rotation of friction wheel (102) is connected with movable block (104).
  2. 2. The air floatation lifting mechanism of the marble precision workbench according to claim 1, wherein an air floatation cushion (14) is fixedly connected below the piston (5), and the stable structure (10) is positioned inside the air floatation cushion (14).
  3. 3. The marble precision workbench air floatation lifting mechanism according to claim 1, wherein a first sealing ring (11) and a second sealing ring (12) are sequentially and fixedly connected to the inner wall of the cylinder body (1), the first sealing ring (11) is in contact with the lower section side wall of the piston (5), and the second sealing ring (12) is in contact with the middle section side wall of the piston (5).
  4. 4. The air floatation lifting mechanism of the marble precision workbench according to claim 1, wherein a third sealing ring (13) is fixedly connected to the side wall of the upper section of the piston (5), and the third sealing ring (13) is in contact with the inner wall of the top cover (2).
  5. 5. The air floatation lifting mechanism of the marble precision workbench according to claim 1, wherein the piston (5) is three-section stepped cylindrical, and the first air outlet (4) and the second air outlet (9) are vertically arranged.
  6. 6. The air floatation lifting mechanism of the marble precision workbench according to claim 1, wherein the supporting rings (15) are fixedly connected to the inside of the top cover (2), and the number of the supporting rings (15) is three.
  7. 7. The marble precision workbench air floatation lifting mechanism according to claim 1, wherein a first through hole (16) is formed in the edge of the top cover (2) at an equal angle, a first bolt (17) is arranged at the first through hole (16), and the top cover (2) is fixedly connected with a marble platform (18) through the first bolt (17).
  8. 8. The marble precision workbench air floatation lifting mechanism according to claim 1, wherein a second through hole (19) is formed in the edge of the top cover (2) at an equal angle, the second through hole (19) penetrates downwards, a second bolt (20) is arranged at the second through hole (19), and the top cover (2) is fixedly connected with the cylinder body (1) through the second bolt (20).
  9. 9. The air floatation lifting mechanism of the marble precision workbench according to claim 2, wherein a third bolt (21) is arranged at the lower end of the air floatation pad (14), and the air floatation pad (14) is fixedly connected with the piston (5) through the third bolt (21).

Description

Air-floating lifting mechanism of marble precision workbench Technical Field The invention relates to the technical field of jacking mechanisms, in particular to an air floatation jacking mechanism of a marble precision workbench. Background The workbench part is the core part of the photoetching machine, and the workbench of the photoetching machine mainly carries workpieces such as silicon wafers or glass substrates and the like to synchronously move along with the mask table under the objective lens and finish accurate exposure work. The stability of the motion of the workbench has a certain influence on the positioning accuracy of the optical components, the precise sensors and other components arranged on the workbench, so that the development of the precise jacking air floatation mechanism ensures that the workbench does not contact and vibrate during maintenance, and is the basic guarantee for developing a high-precision photoetching machine. The existing working platform for the photoetching machine has a working platform which moves on a horizontal plane, but does not have a working platform capable of being lifted. When the working platform is overhauled and tested, the precision influence of the working platform caused by overhauling and testing cannot be guaranteed. Disclosure of Invention The invention aims to at least solve one of the technical problems in the prior art and provide an air floatation lifting mechanism of a marble precision workbench, wherein a marble platform is lifted by a first air chamber and a second air chamber, lifting of each part is consistent by a first air outlet and a second air outlet, lifting speed is stable by a stable structure, and vibration is avoided. The invention further provides the air floatation lifting mechanism of the marble precision workbench, which comprises a cylinder body, wherein the upper end of the cylinder body is fixedly connected with a top cover, the side wall of the top cover is fixedly connected with a first connecting port, the first connecting port is positioned in the top cover, the lower surface of the top cover is provided with a first air outlet, the first air outlet is communicated with the first connecting port, a piston forms a first air chamber with the top cover, a second air chamber is formed between the piston and the cylinder body and is communicated with the first air outlet, a second connecting port is positioned on the side wall of the cylinder body, the upper surface of the cylinder body is fixedly connected with a second air outlet, the second air outlet is communicated with the second connecting port and the second air chamber, the stable structure comprises a belt pulley, a friction wheel and a pull belt, the surface of the pull belt pulley is fixedly connected with one end of the pull belt, which is far away from the belt pulley, of the cylinder body is fixedly connected with a movable block in a rotating manner. Through above parts, first air chamber makes marble platform rise with the second air chamber, and first air outlet makes everywhere rise unanimously go on with the second air outlet, and makes the speed of rising comparatively steady through steady structure, can not produce vibrations. According to the air floatation lifting mechanism of the marble precision workbench, provided by the invention, the air floatation pad is fixedly connected below the piston, and the stable structure is positioned in the air floatation pad. Through the components, a corresponding friction structure can be formed between the stable structure and the air floatation pad, so that the air floatation pad can resist movement. According to the air floatation lifting mechanism of the marble precision workbench, provided by the invention, the inner wall of the cylinder body is sequentially and fixedly connected with the first sealing ring and the second sealing ring, the first sealing ring is contacted with the side wall of the lower section of the piston, and the second sealing ring is contacted with the side wall of the middle section of the piston. By means of the above components, the sliding components can be sealed so that they can be supported pneumatically. According to the air floatation lifting mechanism of the marble precision workbench, provided by the invention, the side wall of the upper section of the piston is fixedly connected with the third sealing ring, and the third sealing ring is in contact with the inner wall of the top cover. By the above components, the connection of the piston can be sealed, thereby completing the separation of the two air chambers. According to the air floatation lifting mechanism of the marble precision workbench, the piston is three-section stepped cylindrical, and the first air outlet and the second air outlet are vertically arranged. Through above parts, make first air outlet and second air outlet form the sagging power, the in-process that rises finely tunes rising to keep rising steady.