CN-115638959-B - High-precision compensator suitable for large-caliber high-gradient aspheric surface

CN115638959BCN 115638959 BCN115638959 BCN 115638959BCN-115638959-B

Abstract

The invention discloses a high-precision compensator suitable for a large-caliber high-gradient aspheric surface, which comprises a compensation lens and a field lens group, wherein the compensation lens and the field lens group are sequentially arranged along the same optical axis, the compensation lens is used for balancing the primary spherical aberration of the aspheric surface to be measured, the field lens group is used for imaging the compensation lens on the aspheric surface to be measured and balancing the advanced spherical aberration of the aspheric surface to be measured, and the field lens group comprises a first field lens and a second field lens which are sequentially arranged along the optical axis. The invention can realize high-precision detection of the aspheric surface and provides an effective initial structure for high-precision detection of the aspheric surface with the same difficulty and below.

Inventors

CHEN GUIPING
YANG CHUNLIN
OUYANG SHENG
ZHANG QINGHUA
WEN SHENGLIN
LI HAIBO
TANG CAIXUE
YAN HAO
JI BAOJIAN
DENG YAN
LI ANG

Assignees

中国工程物理研究院激光聚变研究中心

Dates

Publication Date: 20260512
Application Date: 20221014

Claims (2)

1. The high-precision compensator suitable for the large-caliber high-gradient aspheric surface is characterized by comprising a compensating lens and a field lens group, wherein the compensating lens and the field lens group are sequentially arranged along the same optical axis, the compensating lens is used for balancing the primary spherical aberration of the aspheric surface to be measured, and the field lens group is used for imaging the compensating lens on the aspheric surface to be measured and balancing the advanced spherical aberration of the aspheric surface to be measured; the focal length of the field lens set is , In the formula, 、、 And Respectively representing the focal length of the field lens set, the half caliber of the compensation lens, the radius of curvature of the vertex of the aspheric surface to be measured, the caliber of the aspheric surface to be measured and the distance from the field lens set to the center of curvature of the vertex of the aspheric surface to be measured; The focal length of the compensation mirror is , 、、 And Respectively representing the focal length of the compensation lens, the coefficient of the aspherical quadratic term to be measured, the vertical axis magnification of the field lens group and the combined magnification of the compensation lens and the field lens group, 、 The system is respectively in the form of a field lens group, a Saiden and a digital PW introduced by a compensation lens; the field lens group comprises a first field lens and a second field lens which are sequentially arranged along the optical axis; The curvature radiuses of the front surface and the rear surface of the compensating mirror are respectively as follows: ; ; The front and back surface curvature radiuses of the first field lens and the second field lens are the same, and the curvature radiuses are: ; ; In the formula, Respectively represent the curvature radius of the front surface and the back surface of the compensation mirror, Representing the radius of curvature of the front surfaces of the first and second field lenses, Representing the back surface curvature radius of the first field lens and the second field lens, n 11 、n 12 represents the front and back surface refractive indexes of the compensation lens, n 1 represents the front surface refractive indexes of the first field lens and the second field lens, and n 2 represents the back surface refractive indexes of the first field lens and the second field lens; The light-passing half aperture of the compensation lens is 155mm, the curvature radiuses of the front and rear surfaces of the compensation lens are 4512.735mm and-254.460 mm respectively, the curvature radiuses of the front and rear surfaces of the first field lens are 1314.578 mm-918.738 mm respectively, the curvature radiuses of the front and rear surfaces of the second field lens are 205.778mm and 197.298mm respectively, the distance between a laser point light source and the compensation lens is 1255.050mm, the distance between the compensation lens and the first field lens is 462.994mm, the distance between the first field lens and the second field lens is 71.037mm, the distance between the second field lens and an aspheric surface to be measured is 4601.359mm, and the thicknesses of the compensation lens, the first field lens and the second field lens are 80mm, 15mm and 32mm respectively.
2. The high-precision compensator suitable for the large-caliber high-gradient aspheric surface according to claim 1, wherein the compensating lens, the first field lens and the second field lens are spherical single lenses and are made of K9 glass.

Description

High-precision compensator suitable for large-caliber high-gradient aspheric surface Technical Field The invention relates to the technical field of aspheric optical wavefront detection, in particular to a high-precision compensator suitable for a large-caliber high-gradient aspheric surface. Background Currently, the aspheric surface detection of large caliber and high gradient is usually realized by using equal wave surface comparison, and the method needs a standard surface with the same caliber, so that the high-precision detection is difficult to realize. The non-spherical normal zero compensation test can realize that a small wave front tests a large wave front, which provides possibility for realizing high-precision detection of a large-caliber non-spherical surface. One of the keys for realizing the Offner compensation detection of the aspheric surfaces is to design a group of compensation lens groups aiming at the tested aspheric surfaces, the initial structure of the reliable and correct compensation lens groups is a basis for successfully realizing the optimization of system optical design software, and the accuracy requirement of the initial structure is higher for the aspheric surfaces with large caliber and high gradient due to the poor stability of the compensation system. Therefore, how to provide a high-precision compensator suitable for large-caliber high-gradient aspheric surfaces is a problem to be solved by those skilled in the art. Disclosure of Invention In view of the above, the invention provides a high-precision compensator suitable for large-caliber high-gradient aspheric surfaces, which can realize high-precision detection of the aspheric surfaces. In order to achieve the above purpose, the present invention adopts the following technical scheme: The high-precision compensator suitable for the large-caliber high-gradient aspheric surface comprises a compensating lens and a field lens group, wherein the compensating lens and the field lens group are sequentially arranged along the same optical axis, the compensating lens is used for balancing the primary spherical aberration of the aspheric surface to be measured, and the field lens group is used for imaging the compensating lens on the aspheric surface to be measured and balancing the advanced spherical aberration of the aspheric surface to be measured; the focal length of the field lens set is Wherein, f ' Field of technology 、h Tonifying device 、R Non-ferrous metal 、D Non-ferrous metal and l' Field of technology respectively represent the focal length of the field lens set, the half caliber of the compensation lens, the radius of curvature of the vertex of the aspheric surface to be tested, the caliber of the aspheric surface to be tested and the distance from the field lens set to the center of curvature of the vertex of the aspheric surface to be tested; The focal length of the compensation mirror is F' Tonifying device 、K、m Field of technology and m respectively represent focal length of the compensation lens, coefficient of aspherical quadratic term to be measured, vertical axis magnification of the field lens group, combined magnification of the compensation lens and the field lens group, and P Field of technology 、P Tonifying device is respectively in form of the field lens group, the Saiden and the number PW introduced by the compensation lens. Preferably, the field lens group includes a first field lens and a second field lens sequentially disposed along the optical axis. Preferably, the compensation lens, the first field lens and the second field lens are spherical single lenses, and are made of K9 glass. Preferably, the radii of curvature of the front and rear surfaces of the compensating mirror according to the light propagation direction are respectively as follows: R11＝2(n-1)f' Tonifying device R12＝-2(n-1)f' Tonifying device The front and back surface curvature radiuses of the first field lens and the second field lens are the same, and the curvature radiuses are: R Single field 1＝2(n-1)f' Field of technology R Single field 2＝2(n-1)f' Field of technology Wherein R 11、R12 represents the curvature radius of the front and rear surfaces of the compensation lens, R Single field 1 represents the curvature radius of the front surfaces of the first field lens and the second field lens, R Single field 2 represents the curvature radius of the rear surfaces of the first field lens and the second field lens, and n is the refractive index of the K9 glass material. Preferably, the half aperture of the compensating mirror is 155mm. Preferably, the radius of curvature of the front and rear surfaces of the compensation lens is 4512.735mm, -254.460mm respectively, the radius of curvature of the front and rear surfaces of the first field lens is 1314.578mm, -918.738mm respectively, the radius of curvature of the front and rear surfaces of the second field lens is 205.778mm and 197.298mm respectively, the distance between the