CN-115729049-B - High-speed cooperative processing system and method for motion control data

CN115729049BCN 115729049 BCN115729049 BCN 115729049BCN-115729049-B

Abstract

The invention provides a high-speed cooperative processing system and method for motion control data, wherein the high-speed cooperative processing system for motion control data comprises a main control card, a motion control card, an optical fiber interface card, a sensor acquisition card and a case, wherein the case is provided with a back plate, the main control card, the motion control card and the optical fiber interface card are inserted on the back plate and are interconnected through a back plate bus, FPGA modules are arranged in the sensor acquisition card, the optical fiber interface card and the motion control card, and a front end calculation module is arranged in the FPGA modules of the sensor acquisition card, the optical fiber interface card or the motion control card and is used for front end calculation to obtain front end calculation data. According to the invention, the front-end computing module is arranged in the FPGA module, so that the computing time consumption is shortened, the servo period is shortened, and the motion control data processing speed is further improved.

Inventors

Jing Wenyang
Guo Linchong
CHEN DAN

Assignees

上海微电子装备（集团）股份有限公司

Dates

Publication Date: 20260508
Application Date: 20210831

Claims (19)

1. A high-speed cooperative processing system for motion control data is characterized by comprising a main control card, a motion control card, an optical fiber interface card, a sensor acquisition card and a case, wherein, The machine case is provided with a back plate, and the main control card, the motion control card and the optical fiber interface card are inserted on the back plate and are interconnected through a back plate bus; the main control card is responsible for controlling and dispatching the whole system; The sensor acquisition card converts sensor data into optical fiber signals and transmits the optical fiber signals to the optical fiber interface card through communication optical fibers; the optical fiber interface card forwards the optical fiber signals of the sensor acquisition card to the motion control card through internal synchronization; The sensor acquisition card, the optical fiber interface card and the motion control card are respectively provided with an FPGA module, and a front end calculation module is arranged in the FPGA module of the sensor acquisition card, the optical fiber interface card or the motion control card and is used for front end calculation to acquire front end calculation data; The FPGA module of the motion control card processes the optical fiber signals forwarded by the optical fiber interface card to obtain the front-end calculation data, and the DSP module performs filtering and control algorithm calculation on the front-end calculation data according to system configuration to obtain servo control data.
2. The motion control data high-speed co-processing system of claim 1, further comprising a data acquisition card for acquiring servo control data of a previous servo cycle and converting it into a fiber optic signal and transmitting the fiber optic signal to the fiber optic interface card via a communication fiber.
3. The motion control data high-speed co-processing system of claim 1, wherein said sensor acquisition card comprises an ADC analog-to-digital conversion module, a first FPGA module, and a fiber optic communication interface module, wherein, The ADC module converts the sensor data into digital signals; the first FPGA module is respectively connected with the ADC module and the optical fiber communication interface module and is used as a data channel for transmitting the digital signal to the optical fiber communication interface; the optical fiber communication interface converts the digital signal into an optical fiber signal and transmits the optical fiber signal to the optical fiber interface card.
4. The motion control data high-speed co-processing system of claim 2, wherein said fiber optic interface card comprises a fiber optic communication module and a second FPGA module, wherein, The optical fiber communication module receives the optical fiber signals transmitted by the sensor acquisition card or the data acquisition card; the second FPGA module is connected with the optical fiber communication module and used as a data channel.
5. The motion control data high-speed co-processing system of claim 4, wherein the fiber interface card further comprises an internal synchronization bus module disposed on the back plane, the internal synchronization bus module receiving data signals of other chassis and implementing synchronization control of servo cycles of the respective chassis.
6. The motion control data high-speed co-processing system of claim 2, wherein said motion control card comprises a clock module, a third FPGA module, said DSP module, and a program cure module, wherein, The third FPGA module is connected with the backboard bus through the VME interface module, processes the optical fiber signal forwarded by the optical fiber interface card, and transmits the processed data to the DSP module; The DSP module is connected with the third FPGA module, acquires the data processed by the third FPGA module through a PCIe interface module, and performs filtering and calculation of a control algorithm on the processed data transmitted by the third FPGA module according to system configuration to acquire the servo control data; the clock module is connected with the third FPGA module and provides a clock signal for the third FPGA module; The program solidifying module is connected with the third FPGA module and is composed of FLASH chips and used for storing the running programs of the third FPGA module and the DSP module, and the running programs can be automatically loaded after the third FPGA module and the DSP module are powered on.
7. The motion control data high-speed co-processing system as recited in claim 6, wherein said third FPGA module comprises a data input module and a data cache module, wherein, The data input module receives the optical fiber signals forwarded by the optical fiber interface card and converts, synthesizes and analyzes the optical fiber signals; The data buffer module is composed of a block random access memory in the third FPGA module, and maps the register space of the PCIe interface module for the DSP module to read data through the PCIe interface module.
8. The motion control data high-speed co-processing system of claim 7, wherein the data input module comprises a QSFP optical module, an FPGA serial-to-parallel conversion IP core, and a protocol parsing sub-module, The QSFP optical module is used for converting the optical fiber signals forwarded by the optical fiber interface card into high-speed differential serial signals for processing by the FPGA serial-parallel conversion IP core; the FPGA serial-parallel conversion IP core is used for sampling, aligning and decoding the high-speed differential serial signals to form parallel data; And the protocol analysis submodule analyzes the type and the specific data of the frames of the parallel data according to the communication protocol frame format.
9. The motion control data high-speed co-processing system of claim 2, wherein said front-end computation module comprises a parameter buffer register, a data buffer register, a linear correction sub-module, and a systolic matrix sub-module, wherein, The parameter buffer register is used for registering initial input data acquired by the data acquisition card or the sensor acquisition card, and the sensor data or servo control data of the last servo period are used as the initial input data; the linear correction sub-module is used for carrying out linear correction on the initial input data; The pulsation matrix submodule is used for preprocessing the corrected initial input data to obtain front-end calculation data; The data buffer register is used for buffering the front-end calculation data.
10. The motion control data high-speed co-processing system as recited in claim 9, wherein said pulsation matrix sub-module is comprised of a plurality of PE multiply-accumulate computing units, and each of said PE multiply-accumulate computing units comprises a floating-point multiplier, a floating-point adder to delay a register, wherein, The floating point multiplier is used for floating point number multiplication operation; The floating point adder is used for floating point number addition operation; The delay register is used for timing sequence matching.
11. The motion control data high-speed co-processing system according to claim 2, wherein when the front-end computing module is disposed in the FPGA module of the motion control card, the front-end computing module is respectively connected with the data input module and the data cache module, and the front-end computing module computes and acquires front-end computing data according to the data transmitted by the data input module, and transmits the front-end computing data to the data cache module, and the DSP module reads the front-end computing data through the PCIe interface module, and performs computation of filtering and control algorithms on the front-end computing data, so as to acquire servo control data.
12. The motion control data high-speed co-processing system of claim 1, wherein the master control card is a PowerPC board card running a Vxworks operating system.
13. The high-speed collaborative processing method for the motion control data is characterized by comprising the following steps of: Acquiring initial input data by adopting a data acquisition card or a sensor acquisition card, and converting the initial input data into optical fiber signals; Receiving the optical fiber signal through an optical fiber interface card, and forwarding the optical fiber signal to a motion control card through internal synchronization; Processing and calculating according to the data transmitted by the optical fiber interface card to obtain servo control data; the method comprises the steps of acquiring servo control data, and acquiring the servo control data by a front-end computing step, wherein the front-end computing step is realized in an FPGA module of the sensor acquisition card, the optical fiber interface card or the motion control card; wherein the servo control data is acquired in the following manner: and processing the optical fiber signals forwarded by the optical fiber interface card to obtain the front-end calculation data, and performing filtering and calculation of a control algorithm on the front-end calculation data by a DSP module of the motion control card according to system configuration to obtain the servo control data.
14. The method of high-speed collaborative processing of motion control data according to claim 13, wherein said front-end computing step includes: performing linear correction on the initial input data through a linear correction sub-module; and preprocessing the corrected initial input data through the pulsation matrix sub-module to obtain front-end calculation data.
15. The method of claim 14, wherein the data format of the initial input data is an unsigned integer matrix X, and the step of linearly correcting the initial input data by a linear correction sub-module comprises: Will be Conversion to floating point numbers Wherein Is the first in the X matrix Line 1 Data of columns, an , =1,2,3; System configuration parameter k, calculating floating point number multiplication ; System configuration parameter m, calculating floating point number addition 。
16. The method for high-speed collaborative processing of motion control data according to claim 15, wherein the step of preprocessing the corrected initial input data by the pulsation matrix sub-module includes calculating a matrix multiplication Z=Y×A, where Z is a front end calculation result, Y= 。
17. The method of claim 14, wherein the data format of the initial input data is an unsigned integer matrix X, and the step of linearly correcting the initial input data by a linear correction sub-module comprises: Estimating quantization errors of the integer matrix X, and determining the number of bits of the fixed point number; system configuration parameters Calculating fixed point number multiplication Wherein Is the first in the X matrix Line 1 Fixed point numbers corresponding to the data of the columns; system configuration parameters Calculating fixed point addition 。
18. The method of high-speed collaborative processing of motion control data according to claim 17 wherein the step of preprocessing corrected initial input data by a pulsation matrix sub-module includes: system configuration parameters Computing matrix multiplication Wherein For the front-end calculation result, ; The calculation result is processed Converted to floating point numbers.
19. The method of high-speed collaborative processing of motion control data according to claim 13, wherein said front-end computing step includes: System configuration parameters A, k and m, calculation Wherein An unsigned integer matrix that is initial input data; ; M is a matrix with each element being M, and Z is a front end calculation result.

Description

High-speed cooperative processing system and method for motion control data Technical Field The invention relates to the technical field of semiconductors, in particular to a high-speed collaborative processing system and method for motion control data. Background The photoetching machine is a key device for IC manufacture, and with the development and progress of the photoetching machine and the photoetching process technology thereof, the control system of the photoetching machine workbench has higher and higher requirements on parallel calculation, complex motion control algorithm, real-time control and the like. For the motion control data processing of the workpiece stage of the lithography machine, only a DSP (DIGITAL SIGNAL Processor) is generally used as a motion control calculation Processor, which causes heavy burden and long time, and the motion control data processing speed is low, so that the servo period and the control precision are affected. For example, in the prior art, a high-speed large-data-volume information processing system is proposed, and an IMU (Inertial Measurement Unit )/GPS (global positioning system)/starlight three-combination navigation algorithm is implemented by a combination scheme of a multi-core DSP and an FPGA (Field-Programmable gate array). However, for high-end lithographic apparatus, the data processing capacity of 12500M/min is calculated using only the DSP, and the servo period requirement cannot be met. For another example, the prior art also provides an embedded navigation information processor based on a DSP and an FPGA, and the DSP and the FPGA are combined to form the embedded navigation processor to realize acquisition, processing, output and other control of navigation data. However, only one half-duplex EMIF interface is arranged between the DSP and the FPGA, and FLASH (FLASH memory), SDRAM (Synchronous DYNAMIC RAM) and the FPGA are mounted at the same time, so that the data interaction rate between the DSP and the FPGA is limited, the navigation data processing is totally carried out by DPS, the FPGA is only responsible for a data channel, and the computing performance is not fully exerted. Therefore, there is an urgent need for a motion control data high-speed collaborative processing system and method for a lithographic apparatus to increase a motion control data processing speed, reduce a DSP computation amount, and shorten a servo period. Disclosure of Invention The invention aims to provide a high-speed collaborative processing system and method for motion control data, which are used for reducing the calculated amount of a DSP module, shortening the calculation time consumption, shortening the servo period and further improving the processing speed of the motion control data. To achieve the above and other objects, the present invention provides a motion control data high-speed co-processing system, comprising a main control card, a motion control card, an optical fiber interface card, a sensor acquisition card and a chassis, wherein, The case is provided with a back plate, and the main control card, the motion control card and the optical fiber interface card are inserted on the back plate and are interconnected through the back plate bus; the main control card is responsible for controlling and dispatching the whole system; The sensor acquisition card converts sensor data into optical fiber signals and transmits the optical fiber signals to the optical fiber interface card through communication optical fibers; the optical fiber interface card forwards the optical fiber signals of the sensor acquisition card to the motion control card through internal synchronization; the motion control card processes and calculates according to the optical fiber signals forwarded by the optical fiber interface card to acquire servo control data; The sensor acquisition card, the optical fiber interface card and the motion control card are respectively provided with an FPGA module, and a front end calculation module is arranged in the FPGA module of the sensor acquisition card, the optical fiber interface card or the motion control card and is used for front end calculation to acquire front end calculation data. Optionally, in the motion control data high-speed co-processing system, the system further includes a data acquisition card, configured to acquire the servo control data of the previous servo period, convert the servo control data into an optical fiber signal, and transmit the optical fiber signal to the optical fiber interface card through a communication optical fiber. Optionally, in the motion control data high-speed co-processing system, the sensor acquisition card includes an ADC analog-to-digital conversion module, a first FPGA module, and an optical fiber communication interface module, where, The ADC module converts the sensor data into digital signals; the first FPGA module is respectively connected with the ADC module and the optical fiber communi