CN-115758042-B - Method for detecting filtration efficiency of ultra-efficient filter

CN115758042BCN 115758042 BCN115758042 BCN 115758042BCN-115758042-B

Abstract

The invention relates to a method for detecting the filtration efficiency of an ultra-efficient filter, which comprises the steps of establishing a filtration efficiency calculation equation containing unknown coefficients for the ultra-efficient filter of a model to be detected, wherein the filtration efficiency calculation equation is used for representing the relation between the filtration efficiency of a selected local area in a filtration plane of the ultra-efficient filter and the overall filtration efficiency of the ultra-efficient filter, conducting multiple experiments on the ultra-efficient filter of the model to be detected to obtain filtration efficiency data of the selected local area in the filtration plane of the ultra-efficient filter and overall filtration efficiency data of the ultra-efficient filter, solving the unknown coefficients by utilizing the data obtained by the experiments to determine a filtration efficiency calculation equation, and detecting the filtration efficiency of the selected local area in the filtration plane of the ultra-efficient filter to be detected, and calculating the overall filtration efficiency of the ultra-efficient filter to be detected by utilizing the filtration efficiency calculation equation. The invention can improve the speed and accuracy of filter efficiency detection.

Inventors

SHEN WEIDONG
LIANG FENGFEI
SUN JIYONG
WU CHENWEI
CHEN JIAN

Assignees

江苏苏净集团有限公司
苏州苏净仪器自控设备有限公司

Dates

Publication Date: 20260505
Application Date: 20221124

Claims (10)

1. A method for detecting the filtration efficiency of an ultra-efficient filter is used for detecting the filtration efficiency of any type of ultra-efficient filter and is characterized in that a filtration efficiency calculation equation containing unknown coefficients is established for the ultra-efficient filter of a type to be detected, and the filtration efficiency calculation equation is used for representing the relation between the filtration efficiency of a selected local area in a filtration plane of the ultra-efficient filter and the overall filtration efficiency of the ultra-efficient filter; performing multiple experiments on the ultra-efficient filter of the model to be detected to obtain filtering efficiency data of a selected local area in a filtering plane of the ultra-efficient filter and overall filtering efficiency data of the ultra-efficient filter in each experiment, and solving the unknown coefficient by using the data obtained by the experiments to further determine the filtering efficiency calculation equation; Dividing the filtering plane of the ultra-efficient filter of the model to be detected into p subareas, calculating efficiency deviation coefficients representing the filtering efficiency of the subareas and the overall filtering efficiency deviation condition of the ultra-efficient filter according to each subarea, sequencing the efficiency deviation coefficients according to a sequence from small to large to obtain an efficiency deviation coefficient sequence, selecting the subareas corresponding to the first q efficiency deviation coefficients in the efficiency deviation coefficient sequence as the selected local area, wherein p is an integer greater than or equal to 2, q is an integer greater than or equal to 1, and q < p.
2. The method for detecting the filtration efficiency of an ultra-efficient filter according to claim 1, wherein the efficiency deviation factor K Deltan ＝K n 2 *K posn of the nth sub-area is represented by n, where n is the number of the sub-area, K n is the local efficiency factor of the nth sub-area, and K posn is the position deviation factor of the nth sub-area.
3. The method for detecting the filtration efficiency of an ultra-efficient filter as claimed in claim 2, wherein K n ＝(f n -f All )/f All ,f n is the filtration efficiency value of the nth sub-region, and f All is the overall filtration efficiency value of the ultra-efficient filter.
4. The method for detecting the filtration efficiency of an ultra-efficient filter according to claim 2, wherein K posn ＝50％*k XPosn +50％*k YPosn ,k XPosn represents the deviation of the nth sub-area from the center of the filtration plane of the ultra-efficient filter in the X direction, and K YPosn represents the deviation of the nth sub-area from the center of the filtration plane of the ultra-efficient filter in the Y direction.
5. The method for detecting the filtration efficiency of an ultra-efficient filter as claimed in claim 4, wherein k XPosn 、k YPosn has a value range of 0 to 1.
6. The method for detecting the filtration efficiency of an ultra-efficient filter according to claim 5, wherein k XPosn 、k YPosn is obtained by interpolation according to the deviation from the center of the nth sub-region to the center or the edge of the filtration plane of the ultra-efficient filter in the X direction and the Y direction.
7. The method of detecting the filtration efficiency of an ultra-efficient filter according to claim 6, wherein g sub-regions are provided from an edge of the filtration plane of the ultra-efficient filter in the X direction to the center, and an nth sub-region is an nth sub-region from the edge of the filtration plane of the ultra-efficient filter in the X direction to the center, and k XPosn =1.0X (r/g), and h sub-regions are provided from an edge of the filtration plane of the ultra-efficient filter in the Y direction to the center, and an nth sub-region is an nth sub-region from the edge of the filtration plane of the ultra-efficient filter in the Y direction to the center, and k YPosn =1.0X (s/h).
8. The method for detecting the filtration efficiency of an ultra-efficient filter according to claim 1, wherein the filtration efficiency calculation equation is: Wherein Y is the overall filtration efficiency of the super-efficient filter, i is the number of the selected subregion, x i is the filtration efficiency of the selected ith subregion, and k i is the coefficient corresponding to the selected ith subregion.
9. The method for detecting the filtration efficiency of the ultra-efficient filter according to claim 1, wherein p sub-areas formed by dividing the filtration plane of the ultra-efficient filter are distributed in an array of a plurality of rows and a plurality of columns.
10. The method for detecting the filter efficiency of an ultra-efficient filter according to claim 1, wherein the equation set is linked with the data obtained by the experiment based on the filter efficiency containing the unknown coefficient, the equation set is converted into a coefficient matrix, the coefficient matrix is transformed to obtain a ladder matrix, and the value of the unknown coefficient is obtained by solving.

Description

Method for detecting filtration efficiency of ultra-efficient filter Technical Field The invention relates to a method for detecting the filtration efficiency of an ultra-efficient filter. Background The ultra-high efficiency filter is mainly used for capturing particles with the particle size of 0.1 μm or less, and is mainly used for various application occasions such as high-end manufacturing, aerospace, semiconductors, precise instruments and equipment, nuclear energy and the like. In the traditional filter efficiency measuring and calculating process, the whole filter needs to be scanned to obtain the whole efficiency, so that time and labor are consumed, and the improvement of the whole detection efficiency is not facilitated. Disclosure of Invention The invention aims to improve a method for rapidly and accurately detecting the filtration efficiency of an ultra-efficient filter. In order to achieve the above purpose, the invention adopts the following technical scheme: Establishing a filtration efficiency calculation equation containing unknown coefficients for the ultra-efficient filter of any model to be detected, wherein the filtration efficiency calculation equation is used for representing the relation between the filtration efficiency of a selected local area in the filtration plane of the ultra-efficient filter and the overall filtration efficiency of the ultra-efficient filter; performing multiple experiments on the ultra-efficient filter of the model to be detected to obtain filtering efficiency data of a selected local area in a filtering plane of the ultra-efficient filter and overall filtering efficiency data of the ultra-efficient filter in each experiment, and solving the unknown coefficient by using the data obtained by the experiments to further determine the filtering efficiency calculation equation; Dividing the filtering plane of the ultra-efficient filter of the model to be detected into p subareas, calculating efficiency deviation coefficients representing the filtering efficiency of the subareas and the overall filtering efficiency deviation condition of the ultra-efficient filter according to each subarea, sequencing the efficiency deviation coefficients according to a sequence from small to large to obtain an efficiency deviation coefficient sequence, selecting the subareas corresponding to the first q efficiency deviation coefficients in the efficiency deviation coefficient sequence as the selected local area, wherein p is an integer greater than or equal to 2, q is an integer greater than or equal to 1, and q < p. The efficiency deviation coefficient K Deltan＝Kn2*Kposn of the nth sub-region, wherein n is the number of the sub-region, K n is the local efficiency factor of the nth sub-region, and K posn is the position deviation factor of the nth sub-region. K n＝(fn-fAll)/fAll,fn is the filtration efficiency value of the nth sub-region, and f All is the overall filtration efficiency value of the ultra-efficient filter. K posn＝50％*kXPosn+50％*kYPosn,kXPosn represents the deviation of the nth sub-region from the center of the filtering plane of the ultra-efficient filter in the X direction, and K YPosn represents the deviation of the nth sub-region from the center of the filtering plane of the ultra-efficient filter in the Y direction. The value range of k XPosn、kYPosn is 0-1. And according to the deviation between the center of the nth sub-region and the center or edge of the filtering plane of the ultra-efficient filter in the X direction and the Y direction, interpolating to obtain k XPosn、kYPosn. Let k XPosn = 1.0X (r/g) and let Y-direction edge-to-center of the filter plane of the ultra-efficient filter share h sub-regions, and let n-th sub-region be the s-th sub-region in the Y-direction edge-to-center of the filter plane of the ultra-efficient filter, k YPosn = 1.0X (s/h). The filtration efficiency calculation equation is: Wherein Y is the overall filtration efficiency of the super-efficient filter, i is the number of the selected subregion, x i is the filtration efficiency of the selected ith subregion, and k i is the coefficient corresponding to the selected ith subregion. And dividing the filtering plane of the ultra-high efficiency filter to form p subregions which are distributed in an array mode of a plurality of rows and a plurality of columns. And calculating an equation based on the filtering efficiency containing the unknown coefficient, linking the equation set by using the data obtained by the experiment, converting the equation set into a coefficient matrix, carrying out transformation on the coefficient matrix, solving a ladder matrix, and finally solving to obtain the value of the unknown coefficient. Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages that the speed and the accuracy of the efficiency detection of the filter can be improved. Drawings FIG. 1 is a schematic view showing the div