CN-115772707-B - Explosion-proof source bottle for diffusion process

CN115772707BCN 115772707 BCN115772707 BCN 115772707BCN-115772707-B

Abstract

The invention discloses an explosion-proof source bottle for a diffusion process, which comprises a source bottle body, an air inlet pipe and an air outlet pipe, wherein the air inlet pipe is connected with an automatic pressure valve capable of being automatically opened and closed according to the air pressure value in the source bottle body, the automatic pressure valve is vertically fixed on the upper wall of the source bottle body, and one end, in contact with the source bottle body, of the automatic pressure valve is communicated with the interior of the source bottle body. The invention not only can be automatically opened and closed according to the air pressure value in the source bottle body to avoid the danger caused by the explosion of the source bottle, but also can adjust the set pressure threshold value so as to be suitable for source bottle bodies made of different materials, and has the advantages of high safety, high practicability and strong universality.

Inventors

DU YUELONG
SONG DONG
PENG RUICHAO
Zhi Shaopeng

Assignees

江苏华恒新能源有限公司

Dates

Publication Date: 20260512
Application Date: 20221121

Claims (2)

1. The explosion-proof source bottle for the diffusion process comprises a source bottle body (1), an air inlet pipe (2) and an air outlet pipe (3), and is characterized in that the air inlet pipe (2) is connected with an automatic pressure valve (5) capable of being automatically opened and closed according to the air pressure value in the source bottle body (1), the automatic pressure valve (5) is vertically fixed on the upper wall of the source bottle body (1), and one end, in contact with the source bottle body (1), of the automatic pressure valve (5) is communicated with the interior of the source bottle body (1); The automatic pressure valve (5) comprises a piston pipe (6), a valve inlet air pipe (7) and a valve outlet air pipe (8), wherein the piston pipe (6) is hollow, the inner space of the piston pipe is a piston cavity (9), the valve inlet air pipe (7) is fixed on the side wall of the piston pipe (6) and is communicated with the piston cavity (9), the valve outlet air pipe (8) is fixed on the side wall of the piston pipe (6) and is communicated with the piston cavity (9), the valve inlet air pipe (7) and the valve outlet air pipe (8) are arranged on the same horizontal line, and the ends, far away from the piston cavity (9), of the valve inlet air pipe (7) and the valve outlet air pipe (8) are respectively communicated with the air inlet pipe (2); The device comprises a source bottle body (1), a piston cavity (9), a piston rod (10) capable of lifting and sliding, a first sealing plug (11) and a second sealing plug (12) which are fixed on the piston rod (10), wherein the first sealing plug (11) and the second sealing plug (12) can be tightly attached to the inner wall of the piston cavity (9) and are in sealing connection with the inner wall of the piston cavity; The upper end of the piston rod (10) penetrates through the upper wall of the piston tube (6) and is arranged above the piston tube (6), the upper end of the piston rod (10) is provided with a counterweight structure (14), and the gravity of the counterweight structure (14) can be adjusted; the counterweight structure (14) comprises a bearing frame (17), a plurality of weights (18) are arranged on the bearing frame (17), and the number of the weights (18) can be adjusted; The counterweight structure (14) comprises a counterweight bottle (15), and graduation lines (16) are arranged on the side wall of the counterweight bottle (15).
2. An explosion-proof source bottle for diffusion processes according to claim 1, characterized in that the lower end of the piston tube (6) is screwed with the upper wall of the source bottle body (1).

Description

Explosion-proof source bottle for diffusion process Technical Field The invention relates to the technical field of solar cell preparation, in particular to an explosion-proof source bottle for a diffusion process. Background The semiconductor industries of solar energy, integrated circuits and the like all need liquid POCl 3 to be used for phosphorus source diffusion to form PN junctions. The phosphorus source is placed in a diffusion source bottle. And (3) introducing N 2 into the liquid POCl 3 by using the POCl 3 in the source bottle, and introducing the gaseous POCl 3 into a diffusion furnace to complete the phosphorus diffusion process. If the source bottle explodes, POCl 3 in the source bottle leaks, and POCl 3 is colorless and transparent and has toxic liquid with pungent smell, if the source bottle breaks, water can generate violent reaction to generate H 3PO4 and HCl, and the reaction product is sprayed in a mist form, rapidly spreads around, and has high risk. The generated vaporous phosphoric acid and hydrochloric acid are toxic substances, and are irritating to respiratory tract, so that eyes can be burnt, permanent damage is caused, and skin can be seriously burnt when contacted. Phosphoric acid and hydrochloric acid are corrosive substances, and can corrode equipment, instruments and factory building facilities. However, if the air inlet and outlet pipelines are reversely connected, or the air inlet pressure of N 2 is too high, or the air outlet pipelines are blocked, the air pressure in the source bottle is too high, and the source bottle is exploded. In the prior art, an air inlet pipe of a source bottle cannot be automatically closed and opened according to the air pressure change in the source bottle. Disclosure of Invention Aiming at the technical defects, the invention aims to provide an explosion-proof source bottle for a diffusion process, and the automatic pressure valve can be automatically opened and closed according to the internal air pressure value of a source bottle body, so that the danger caused by source bottle explosion is avoided, and the set pressure threshold value can be adjusted, so that the explosion-proof source bottle is suitable for source bottle bodies made of different materials, has high safety, high practicability and strong universality. In order to solve the technical problems, the invention adopts the following technical scheme. The invention provides an explosion-proof source bottle for a diffusion process, which comprises a source bottle body, an air inlet pipe and an air outlet pipe, wherein the air inlet pipe is connected with an automatic pressure valve capable of being automatically opened and closed according to the air pressure value in the source bottle body, the automatic pressure valve is vertically fixed on the upper wall of the source bottle body, and one end, in contact with the source bottle body, of the automatic pressure valve is communicated with the interior of the source bottle body. Preferably, the automatic pressure valve comprises a piston pipe, a valve inlet pipe and a valve outlet pipe, wherein the piston pipe is hollow, the inner space of the piston pipe is a piston cavity, the valve inlet pipe is fixed on the side wall of the piston pipe and is communicated with the piston cavity, the valve outlet pipe is fixed on the side wall of the piston pipe and is communicated with the piston cavity, the valve inlet pipe and the valve outlet pipe are arranged on the same horizontal line, and the ends, far away from the piston cavity, of the valve inlet pipe and the valve outlet pipe are respectively communicated with the air inlet pipe. The piston cavity is internally provided with a piston rod capable of lifting and sliding, a first sealing plug and a second sealing plug which are fixed on the piston rod, the first sealing plug and the second sealing plug can be tightly clung to the inner wall of the piston cavity and are in sealing connection with the piston rod, the lower end of the first sealing plug is always positioned above the air inlet valve pipe and the air outlet valve pipe, the lower end of the second sealing plug is always positioned below the air inlet valve pipe and the air outlet valve pipe, the upper part of the second sealing plug can be positioned above or below the air inlet valve pipe and the air outlet valve pipe, and the lower wall of the second sealing plug is communicated with the inside of the source bottle body. Preferably, the upper end of the piston rod penetrates through the upper wall of the piston tube and is arranged above the piston tube, and the upper end of the piston rod is provided with a counterweight structure. Preferably, the counterweight structure comprises a bearing frame, a plurality of weights are arranged on the bearing frame, and the number of the weights can be adjusted. Preferably, the counterweight structure comprises a counterweight bottle, and scale marks are arranged on the side wall of the