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CN-115803844-B - Electrostatic deflection converging type energy analyzer, imaging type electron spectrum device, reflection imaging type electron spectrum device, and spin vector distribution imaging device

CN115803844BCN 115803844 BCN115803844 BCN 115803844BCN-115803844-B

Abstract

The present invention provides an electrostatic deflection convergence type energy analyzer having a wide receiving angle and a high two-dimensional convergence performance, capable of imaging a two-dimensional real space image or emission angle distribution, and capable of two-dimensional convergence and imaging under a deflection of 90 DEG with respect to an incident direction. One or more outer electrodes and a plurality of inner electrodes are disposed along the shape colors of two rotating bodies formed on the inner and outer sides of the common rotation axis. Wherein the inner surface of the outer electrode is tapered with a diameter decreasing toward both ends, and the outer surface of the inner electrode is tapered with a diameter decreasing toward both ends. An electron input hole and an electron output hole are formed at the outer electrodes at both ends of the rotation shaft, respectively. Voltages for acceleration and deceleration of electrons are applied to the outer electrode and the inner electrode in proportion to energy of the incident electrons. A voltage is applied to one or more electrodes other than the inner electrodes at both ends, the voltage being a voltage obtained by converting the energy of electrons into an acceleration voltage by a factor of 2 or more based on the potential of the outer electrode on which the input holes are formed.

Inventors

  • MATSUDA HIROYUKI
  • MATSUI FUMIHIKO

Assignees

  • 大学共同利用机关法人自然科学研究机构

Dates

Publication Date
20260508
Application Date
20210709
Priority Date
20200709

Claims (19)

  1. 1. An electrostatic deflection convergence type energy analyzer is characterized by comprising A plurality of outer electrodes and a plurality of inner electrodes arranged along the shape of two rotating bodies respectively formed at the inner side of a common rotating shaft and the outer side surrounding the inner side; no gate electrode is used on the electron orbit, Wherein the inner surface shape of the outer electrode is a shape decreasing in diameter toward the entrance hole and a shape decreasing in diameter toward the exit hole, The outer surface shape of the inner electrode is a shape in which the diameter of the incident hole is reduced, a rod shape extending toward the incident hole is formed, or the diameter of the end portion on the incident hole side is increased, and the diameter of the exit hole is reduced, a rod shape extending toward the exit hole is formed, or the diameter of the end portion on the exit hole side is increased, wherein the voltage applying means is a voltage applied to the inner electrode except the inner electrodes at both ends, and the voltage is a voltage obtained by converting the energy of electrons into a converted acceleration voltage 2 times or more of the acceleration voltage based on the potential of the outer electrode on which the incident hole is formed; and applying a voltage to each electrode at a predetermined incidence angle between the central orbit and the rotation axis, so that electrons incident from the incidence hole are converged at a predetermined emission angle between the central orbit and the rotation axis to the position of the emission hole.
  2. 2. The electrostatic deflection focused energy analyzer of claim 1, wherein: The inner surface shape of the outer electrode and the outer surface shape of the inner electrode are symmetrical with respect to a plane perpendicularly intersecting a midpoint of a line connecting the incident hole and the exit hole.
  3. 3. The electrostatic deflection focused energy analyzer of claim 1, wherein: The shape of the inner surface of the outer electrode that becomes smaller toward the entrance hole diameter is a cone, a torus, or a ring, and the shape of the inner surface of the outer electrode that becomes smaller toward the exit hole diameter is a cone, a torus, or a ring, The outer surface shape of the inner electrode that becomes smaller toward the entrance hole diameter is a tapered or toroidal shape or a stepped shape that becomes smaller toward the entrance hole diameter, and the outer surface shape of the inner electrode that becomes smaller toward the exit hole diameter is a tapered or toroidal shape or a stepped shape that becomes smaller toward the exit hole diameter.
  4. 4. The electrostatic deflection focused energy analyzer of claim 1, wherein: The voltage applied to one or more inner electrodes other than the inner electrodes at both ends is set to a voltage 10 to 50 times the converted acceleration voltage obtained by converting the energy of electrons into the acceleration voltage.
  5. 5. The electrostatic deflection focused energy analyzer of claim 4, wherein: The voltage applied to one or more outside electrodes other than the outside electrodes at both ends is 10 times or less the converted acceleration voltage.
  6. 6. The electrostatic deflection focused energy analyzer of claim 1, wherein: The deflection angle is 90 °.
  7. 7. The electrostatic deflection focused energy analyzer of claim 1, wherein: the deflection angle is any one of 45 °, 60 °, 120 °, 135 ° and 150 °.
  8. 8. The electrostatic deflection focused energy analyzer of claim 1, wherein: the deflection angle is greater than 45 ° and less than 90 °, or greater than 90 ° and less than 180 °.
  9. 9. The electrostatic deflection focused energy analyzer of claim 1, wherein: the inner electrode is divided into two parts so that electrons on the central orbit can pass through the rotation axis, By varying the voltage conditions applied to the electrodes, it is controlled whether the central track passes through the rotation axis, thereby switching whether there is a deflection of the electrons exiting from the exit aperture.
  10. 10. The electrostatic deflection focused energy analyzer of claim 1, wherein: wherein the rotating body is a rotating body having a rotation angle of 90 DEG to 180 DEG, and is provided with a compensation electrode for compensating an electric field at the cutting surface.
  11. 11. An imaging-type electronic spectrum device, characterized in that: An electron spectrometer using the electrostatic deflection converging energy analyzer according to claim 1, comprising an input lens, wherein the incidence hole is provided on a lens axis, the lens axis and the rotation axis are provided at the predetermined incidence angle, and electrons emitted from a sample are received and emitted to the incidence hole; a projection lens, wherein the exit hole is provided on a projection lens axis, the projection lens axis and the rotation axis are provided at the specified exit angle, and electrons deflected and converged by the electrostatic deflection convergence type energy analyzer are received from the exit hole; and a detector for detecting electrons transmitted through the projection lens.
  12. 12. A reflection imaging type electron spectrum device, characterized in that: An electron spectrometer using the electrostatic deflection converging energy analyzer according to claim 1, comprising an input lens, wherein the input lens is provided with the incident hole, the lens axis and the rotation axis are provided at the predetermined incident angle, and electrons emitted from a sample are received and emitted to the incident hole; A reflecting mirror disposed on the output hole of the energy analyzer and perpendicular to the rotation axis; A projection lens in which the incident hole is provided on a projection lens axis, the projection lens axis and the rotation axis are provided at the prescribed incident angle, and electrons deflected and converged by the electrostatic deflection convergence type energy analyzer and then deflected and converged again after being reflected by the reflecting mirror are received from the incident hole; and a detector for detecting electrons transmitted through the projection lens.
  13. 13. A spin vector distribution imaging apparatus is provided with The electrostatically deflected convergent type energy analyzer of claim 6; An input lens in which the incidence hole is provided on an input lens axis, the lens axis and the rotation axis being provided at the prescribed incidence angle, electrons emitted from a sample being received and emitted toward the incidence hole; An electrostatic lens in which the exit hole is provided on an electrostatic lens axis, the electrostatic lens axis and the rotation axis being provided at the specified exit angle, electrons deflected and converged by the electrostatic deflection convergence type energy analyzer being received from the exit hole; The two-dimensional rotating filter is arranged on the electrostatic lens shaft at the outgoing side of the electrostatic lens; And a projection lens receiving electrons reflected by the rotating filter and a detector detecting electrons transmitted through the projection lens.
  14. 14. A spin vector distribution imaging apparatus is provided with The electrostatically deflected convergent type energy analyzer of claim 6; An input lens in which the incidence hole is provided on a lens axis, the lens axis and the rotation axis being provided at the prescribed incidence angle, electrons emitted from a sample are received and emitted toward the incidence hole; A two-dimensional spin filter disposed in the exit aperture of the electrostatic deflection converging energy analyzer and perpendicular to the rotation axis; a projection lens in which the incidence hole is provided on a projection lens axis, the projection lens axis and the rotation axis are provided at the prescribed incidence angle, and electrons deflected and converged by the electrostatic deflection convergence type energy analyzer and deflected and converged again after being reflected by the two-dimensional spin filter are received from the incidence hole; and a detector for detecting electrons transmitted through the projection lens.
  15. 15. A spin vector distribution imaging apparatus is provided with The electrostatic deflection focused energy analyzer of claim 9; An input lens in which the incidence hole is provided on a lens axis, the lens axis and the rotation axis being provided at the prescribed incidence angle, electrons emitted from a sample are received and emitted toward the incidence hole; An electrostatic lens in which the exit hole is provided on an electrostatic lens axis, the electrostatic lens axis and the rotation axis being provided at the specified exit angle, electrons deflected and converged by the electrostatic deflection convergence type energy analyzer being received from the exit hole; a two-dimensional spin filter disposed on an electrostatic lens axis on an outgoing side of the electrostatic lens; A1 st projection lens receiving electrons reflected by the spin filter and a1 st detector detecting electrons transmitted through the 1 st projection lens; a2 nd projection lens in which the exit hole is provided on a projection lens axis, the projection lens axis and the rotation axis being provided at the specified exit angle, electrons converged by the electrostatic deflection convergence type energy analyzer without deflection being received from the exit hole; and a 2 nd detector for detecting electrons transmitted through the 2 nd projection lens.
  16. 16. A spin vector distributed imaging apparatus, characterized by: In the spin vector distribution imaging apparatus according to claim 13, the electrostatic deflection convergence type energy analyzer having a deflection angle of 90 ° is replaced with an apparatus composed of a combination of a plurality of electrostatic deflection convergence type energy analyzers according to claim 7.
  17. 17. The spin vector distribution imaging apparatus according to claim 13, comprising a spin rotator provided inside or outside at least one of the input lens and the electrostatic lens, and rotated by 90 DEG in a plane perpendicular to each lens axis.
  18. 18. A spin vector distribution imaging apparatus is provided with The electrostatic deflection convergence type energy analyzer of claim 9 having a deflection angle of 90 °; An input lens in which the incidence hole is provided on an input lens axis, the lens axis and the rotation axis being provided at the prescribed incidence angle, electrons emitted from a sample being received and emitted toward the incidence hole; An electrostatic lens in which the exit hole is provided on an electrostatic lens axis, the electrostatic lens axis and the rotation axis being provided at the specified exit angle, electrons deflected and converged by the electrostatic deflection convergence type energy analyzer being received from the exit hole; The two-dimensional rotating filter is arranged on the electrostatic lens shaft at the outgoing side of the electrostatic lens; And a projection lens receiving electrons reflected by the rotating filter and a detector detecting electrons transmitted through the projection lens.
  19. 19. A spin vector distributed imaging apparatus, characterized by: The spin vector distribution imaging apparatus according to claim 13, wherein the electrostatic deflection converging type energy analyzer having a deflection angle of 90 ° is replaced with an apparatus composed of a combination of the electrostatic deflection converging type energy analyzers according to claim 1 having a plurality of deflection angles set to 45 ° to 150 °.

Description

Electrostatic deflection converging type energy analyzer, imaging type electron spectrum device, reflection imaging type electron spectrum device, and spin vector distribution imaging device Technical Field The present invention relates to photoelectron spectroscopy devices such as UPS (ultraviolet electron spectroscopy), XPS (X-ray photoelectron spectroscopy), ARPES (angular resolved photoelectron spectroscopy), auger electron spectroscopy devices, photoelectron diffraction devices, photoelectron microscopes, and spin polarization analysis devices. Background In electronic spectroscopy devices, sensitivity is one of the most important properties as is energy resolution. In measuring photoelectrons or auger electrons, if a signal is weak and almost submerged in noise, it is necessary to measure by greatly increasing the accumulation time to obtain a sufficient SN ratio (signal to noise ratio). However, not only is the measurement not performed efficiently, but there are also many cases where the continuous measurement time has to be limited due to the limitation of the time of use of the irradiation facility or the duration of the excitation light source. In addition, in a sample such as an organic material that is susceptible to radiation damage or that may change with time, measurement over a long period of time is hindered, and in many cases, a weak signal is not sufficiently captured. In addition, it is known to use advanced doping techniques for the investigation of new semiconductor or superconducting materials, even very small amounts of dopants can cause significant material changes. Capturing weak signals from such dopants is of paramount importance for the development of new materials. In the electron spectroscopic apparatus, in addition to measuring the energy distribution of electrons emitted from the sample, the emission angle distribution may also be measured. The composition information of the element can be obtained in the measurement of the energy distribution, and the composition or electronic state information in the depth direction can be obtained in the measurement of the emission angle distribution. In addition, because of conservation of momentum in the in-plane direction of the sample during the photoelectron emission process, momentum information of electrons in the substance can be obtained by measuring the kinetic energy and emission angle of the photoelectrons. By irradiating the sample with ultraviolet rays or X-rays, adjusting the energy to the valence band, measuring the kinetic energy and emission angle distribution of photoelectrons, the band structure of the substance can be evaluated, and the properties of the substance can be basically determined. In addition, in the photoelectrons emitted from the inner case, when the kinetic energy reaches several hundred eV or more, a strong peak called a forward focusing peak occurs in the direction in which the photoelectron emitting atoms and scattering atoms around them are connected. By measuring this peak in a wide angle range, the situation of the atomic arrangement around a specific atom can be directly captured. The distance between atoms may be calculated from the diameter of the diffraction ring formed around the forward focusing peak. As described above, by measuring the emission angle distribution using an electron spectrometer, it is possible to obtain atomic-level detailed information which is difficult to obtain by other analysis methods, and it is a very powerful method for developing new materials or studying unknown physical property expression mechanisms. However, although the electrostatic hemispherical energy analyzer (hereinafter referred to as CHA) widely used has a high energy resolution, the input lens has a small acceptance angle, and is difficult to use for two-dimensional photoelectron spectroscopy or atomic structure analysis that obtains an emission angle distribution over a large solid angle. Further, a coaxial cylindrical mirror type energy analyzer (hereinafter referred to as CMA) widely used mainly for auger electron spectroscopy is widely known as an analyzer having a large receiving solid angle, but the incident angle is still insufficient when the analysis is performed. Here, a two-dimensional spherical mirror analyzer (non-patent document 1) having a receiving angle of ±60° has been developed, and measurement of the energy band dispersion structure (non-patent documents 2 and 3) and measurement of the atomic arrangement structure (non-patent documents 4 and 5) have been performed for various samples. Although the energy resolution of the analyzer is improved stepwise by the improvement, sufficient resolution is not available for more detailed analysis such as analysis by decomposing chemical shift structures. Accordingly, a spherical aberration correction lens having a reception angle of ±45° to ±50° (patent documents 1 and 2, non-patent documents 6 and 7) was invented, and an attempt was made to