CN-115809975-B - Detection method, processor and detection equipment

CN115809975BCN 115809975 BCN115809975 BCN 115809975BCN-115809975-B

Abstract

The application discloses a detection method. The detection method is used for detecting a sample, the sample comprises a plurality of local areas, the local image is provided and is an image of one local area of the sample, the image acquisition operation to be processed is respectively carried out on each local area of the sample to generate an image to be processed, the image acquisition operation to be processed comprises the steps of taking the local image as the image to be processed, judging whether the local image comprises the image of the area to be detected of the sample or not, and if the result of the first judging is that the image of the area to be detected of the sample is included in the local image, identifying the area to be detected, acquiring detection information of a target to be detected in the area to be detected, and after the image acquisition operation to be processed, splicing the plurality of images to be processed to generate a complete image of the sample. The application also discloses a processor and detection equipment.

Inventors

CHEN LU
Pu Pengtao
ZHANG PENGBIN
ZHANG SONG

Assignees

深圳中科飞测科技股份有限公司

Dates

Publication Date: 20260512
Application Date: 20210914

Claims (10)

1. A method of detecting a sample, the sample comprising a plurality of localized regions, the method comprising: the method comprises the steps of providing a local image, wherein the local image is an image of a local area of a sample, the local image is obtained by collecting each local area by an image collecting device, and the area of the local area is smaller than or equal to the visual field range of the image collecting device; Performing a to-be-processed image acquisition operation on each local area of the sample to generate a to-be-processed image, wherein the to-be-processed image acquisition operation comprises: Taking the local image as an image to be processed; judging whether the local image comprises an image of a region to be detected of the sample or not, and Under the condition that the result of the first judging processing is an image of a to-be-detected area including a sample in the local image, carrying out identification processing on the to-be-detected area, and acquiring detection information of a to-be-detected target in the to-be-detected area; After the image acquisition operation to be processed, stitching a plurality of images to be processed to generate a complete image of the sample, wherein the image acquisition operation comprises the steps of alternatively reserving images to be stitched for the same area in at least two images to be processed when the images to be processed comprise images of the same area of the sample, reserving images of one area to be stitched when only one image to be processed comprises images of one area of the sample, stitching all the images to be stitched of the sample to generate the complete image of the sample; The method comprises the steps of carrying out integral association processing on the detection information and an integral image, and enabling an image area of a target to be detected in the integral image to correspond to the detection information of the target to be detected, wherein the integral association processing comprises the steps of obtaining the image area of the target to be detected in the integral image according to the position information of the target to be detected, and marking the detection information on the image area of the target to be detected in the integral image.
2. The method according to claim 1, wherein the image acquisition operation for the second time and after the second time further comprises: Judging whether the image to be processed formed by the image acquisition operation to be processed contains the region to be detected acquired in the previous image acquisition operation step; If yes, taking the region to be detected, which is the same as the region to be detected in the current image acquisition operation, in the previous image acquisition operation to be processed as a common region to be detected, carrying out local association processing on detection information of the common region to be detected and a local image of the current image acquisition operation to be processed, and carrying out local association processing on the detection information of the common region to be detected and the local image of the current image acquisition operation to be processed And if not, executing the identification processing on the to-be-detected area.
3. The method according to claim 1, wherein the detection information includes one or a combination of the presence or absence of an object to be detected, the position of the object to be detected, and a geometric parameter of the object to be detected, the object to be detected including a defect, a thin film, or a hole.
4. The method according to claim 1, wherein the performing a judgment process on the partial image to judge whether the partial image includes an image of a region to be inspected of a sample includes: Determining an indication range of the local image according to the position and the view field of the image acquisition device when the local image is acquired, wherein the local image is an image formed according to the indication range of the sample; Judging whether the indication range intersects with the position of the region to be detected on the sample or not; If so, determining an image of the region to be inspected including the sample in the partial image, and If not, determining the image of the region to be detected of the sample not included in the local image.
5. The method of detection according to claim 1, wherein the method of detection further comprises: placing said sample on a carrier means The image acquisition device acquires the relative position relationship between the image acquisition device and the bearing device when acquiring the partial images, and generates an acquisition path according to a plurality of corresponding relative position relationships when acquiring a plurality of partial images; The providing of the partial image includes relative movement along the acquisition path by the image acquisition device and the carrier device and acquisition of the partial image by the image acquisition device.
6. A processor for processing an image of a sample, the sample comprising a plurality of localized areas, the processor comprising: The input module is used for providing a local image, wherein the local image is an image of a local area of the sample, the local image is obtained by collecting the local area by the image collecting device, and the area of the local area is smaller than or equal to the visual field range of the image collecting device; The image acquisition module to be processed is used for respectively executing image acquisition operation to be processed on each local area of the sample to generate an image to be processed, and comprises: A setting unit configured to take the partial image as an image to be processed; a judging unit for judging whether the local image includes the image of the region to be inspected of the sample or not by judging the local image, and The identification unit is used for carrying out identification processing on the to-be-detected area and acquiring detection information of a to-be-detected object in the to-be-detected area when the first judgment processing result is an image of the to-be-detected area including the sample in the partial image; the splicing module is used for splicing a plurality of images to be processed to generate a complete image of the sample, and comprises a first retaining unit, a second retaining unit and a splicing unit, wherein the first retaining unit alternatively retains images to be spliced formed on the images of the same area in at least two images to be processed when the images of the at least two images to be processed comprise the images of the same area of the sample; The whole correlation module is used for carrying out correlation processing on the detection information and the whole image after a plurality of images to be processed are spliced to generate a complete image of the sample, so that an image area of a target to be detected in the whole image corresponds to the detection information of the target to be detected, wherein the whole correlation processing comprises the steps of acquiring the image area of the target to be detected in the whole image according to the position information of the target to be detected, and labeling the detection information on the image area of the target to be detected in the whole image.
7. The processor of claim 6, wherein the partial images comprising images of the region to be inspected of the sample are a plurality of; The judging unit is also used for judging whether the image to be processed formed by the image acquisition operation to be processed contains the region to be detected acquired in the previous image acquisition operation step; The image acquisition module to be processed further comprises a processing unit, wherein the processing unit is used for taking a region to be detected, which is the same as a region to be detected in the image acquisition operation to be processed in the current time, in the previous image acquisition operation to be processed as a common region to be detected; and the identification unit is also used for executing the identification processing on the region to be detected if not.
8. The processor of claim 6, wherein the determination unit comprises: The determining subunit is used for determining the indication range of the local image according to the position and the view field of the image acquisition device when the local image is acquired, wherein the local image is an image formed according to the indication range of the sample; the judging subunit is used for judging whether the indication range intersects with the position of the to-be-detected area on the sample or not, if so, determining the image of the to-be-detected area including the sample in the local image, and if not, determining the image of the to-be-detected area not including the sample in the local image.
9. A detection apparatus for detecting a sample, the sample comprising a plurality of localized areas, the detection apparatus comprising: an image acquisition device for acquiring a partial image of each partial region of the sample, and A processor as claimed in any one of claims 6 to 8.
10. The apparatus of claim 9, wherein the sample is placed on a carrier, and the processor further comprises an acquisition module for acquiring a relative positional relationship between the image acquisition device and the carrier when the partial images are acquired, and generating an acquisition path according to the corresponding plurality of relative positional relationships when the plurality of partial images are acquired; The input module is specifically used for enabling the image acquisition device and the bearing device to move relatively along the acquisition path, and acquiring the local image by the image acquisition device.

Description

Detection method, processor and detection equipment Technical Field The present application relates to the field of industrial detection technologies, and in particular, to a detection method, a processor, and a detection device. Background When detecting defects on a wafer, an image of each defect is sometimes required to be checked according to different requirements, and an overall image of the wafer is sometimes required to be checked. Because it is impossible for any defect detection device to capture an entire image of a wafer at one time due to the limitation of the field of view of the camera, it is generally necessary to capture each defect one by one in order to obtain an image of each defect, and it is generally necessary to scan each portion of the wafer separately and then stitch the portions after scanning in order to obtain an entire image of the wafer. Therefore, in the actual inspection process, in order to obtain an image of each defect and obtain an overall image of the wafer, at least two scanning operations are required to be performed on the entire area of the wafer, respectively, resulting in low inspection efficiency. Disclosure of Invention The embodiment of the application provides a detection method, a processor and detection equipment. The detection method according to the embodiment of the present application is for detecting a sample including a plurality of local areas, and includes: providing a local image, the local image being an image of a local region of the sample; Performing a to-be-processed image acquisition operation on each local area of the sample to generate a to-be-processed image, wherein the to-be-processed image acquisition operation comprises: Taking the local image as an image to be processed; judging whether the local image comprises an image of a region to be detected of the sample or not, and Under the condition that the result of the first judging processing is an image of a to-be-detected area including a sample in the local image, carrying out identification processing on the to-be-detected area, and acquiring detection information of a to-be-detected target in the to-be-detected area; And after the image to be processed acquiring operation, splicing a plurality of images to be processed to generate a complete image of the sample. In some embodiments, before stitching the plurality of images to be processed to generate the complete image of the sample, the image acquisition operation to be processed further includes performing local association processing on the detection information and a local image, so that an image area of a target to be detected in the local image corresponds to the detection information of the target to be detected; Or after the plurality of images to be processed are spliced to generate the complete image of the sample, the detection method further comprises the step of carrying out overall association processing on the detection information and the overall image, so that the image area of the object to be detected in the overall image corresponds to the detection information of the object to be detected. In some embodiments, the partial image of the region image to be inspected including the sample is a plurality of partial images, and the image acquisition operation to be processed for the second time and after the second time further comprises: Judging whether the image to be processed formed by the image acquisition operation to be processed contains the region to be detected acquired in the previous image acquisition operation step; If yes, taking the region to be detected, which is the same as the region to be detected in the current image acquisition operation, in the previous image acquisition operation to be processed as a common region to be detected, carrying out the local association processing on the detection information of the common region to be detected and the local image of the current image acquisition operation to be processed, and And if not, executing the identification processing on the detection area. In some embodiments, the local association processing comprises obtaining an image area of the object to be detected in the local image according to the position information of the object to be detected; the overall association processing comprises the steps of obtaining an image area of the object to be detected in the overall image according to the position information of the object to be detected, and labeling the detection information in the image area of the object to be detected in the overall image. In some embodiments, the detection information includes one or a combination of the presence of the object to be detected, the position of the object to be detected, and the geometric parameters of the object to be detected, wherein the object to be detected includes a defect, a film, or a hole. In some embodiments, the determining the partial image to determine whether the partial image includes an image