CN-115877703-B - Rectangular wave pulse power supply full-load range control method and control system

CN115877703BCN 115877703 BCN115877703 BCN 115877703BCN-115877703-B

Abstract

The invention relates to a rectangular wave pulse power supply full-load range control method and a control system; the existing pulse power supply control scheme has the problem that the high-dynamic high-precision full-load range of the power supply in the high-end processing industry cannot meet the overshoot requirement, the method comprises the steps of 1 determining a rated amplitude, setting standard rectangular wave pulse, determining sampling frequency, 2 controlling a main circuit of the power supply to output pulse waveforms, 3 continuously sampling the pulse waveforms in real time, if the sampled signals are the amplitude values and are directly output, otherwise, outputting amplitude signals acquired last time until the current period is finished, 3.2 comparing the sampled signals with the rated amplitude values to obtain comparison errors, 3.3 adjusting the comparison errors and outputting continuous analog control quantity, 3.4 intercepting the continuous analog control quantity with the standard rectangular wave pulse in a logical AND mode, outputting pulse control signals, amplifying the pulse control signals and sending the pulse control signals to the main circuit of the power supply, 3.5 outputting the regulated pulse waveforms by the main circuit of the power supply, and 3.6 repeating the steps 3.1-3.5.

Inventors

LI HAIBO
BAI XIAOQING
GAO LEI
ZHANG LIN
FENG SHANGMIN

Assignees

西安爱科赛博电气股份有限公司

Dates

Publication Date: 20260508
Application Date: 20221123

Claims (9)

1. The full-load range control method of the rectangular wave pulse power supply is characterized by comprising the following steps of: Step 1, determining a rated amplitude given signal output by a power supply, setting a standard rectangular wave pulse width and a period given signal, and determining a sampling frequency, wherein the sampling frequency is required to be met in one period of a pulse power supply, and at least one group of pulse amplitude data can be acquired; step 2, starting control 2.1 Starting a power supply main loop (1), and collecting the output of the power supply main loop (1) to obtain a sampling signal; 2.2, comparing the sampled signal obtained in the step 2.1 with a rated amplitude given signal output by a power supply after the sampled signal is maintained in amplitude, so as to obtain a comparison error; 2.3, after the comparison error in the step 2.2 is regulated by a PI or PID regulator, outputting a continuous analog control quantity; 2.4 intercepting the continuous analog control quantity obtained in the step 2.3 and the standard rectangular wave pulse given signal in the step 1 in a logical AND mode, outputting a pulse control signal, and sending an amplified driving signal of the pulse control signal to a power supply main loop (1); 2.5 the power supply main loop (1) outputs pulse waveform after receiving the driving signal in the step 2.4; step3, loop control 3.1, Continuously sampling the pulse waveform output by the power supply main loop (1) in real time to obtain a sampling signal, directly outputting if the sampling signal is the amplitude value in the pulse output period, otherwise, outputting the sampling signal of the amplitude value acquired last time until the current period is ended; 3.2, comparing the sampling signal output in the step 3.1 with a rated amplitude given signal output by a power supply to obtain a comparison error; 3.3, after the comparison error is regulated by a PI or PID regulator, outputting a continuous analog control quantity; Intercepting the continuous analog control quantity obtained in the step 3.3 and the standard rectangular wave pulse given signal in the step 1 in a logical AND mode, outputting a pulse control signal, and sending an amplified driving signal of the pulse control signal to a power supply main loop (1); 3.5 after the power main loop (1) receives the driving signal, outputting the regulated pulse waveform; and 3.6, repeating the steps 3.1-3.5, and controlling the full load range of the rectangular wave pulse power supply in real time.
2. In order to realize the full-load range control method of the rectangular wave pulse power supply, which is disclosed in claim 1, the full-load range control system of the rectangular wave pulse power supply comprises a power supply main loop (1) and is characterized by further comprising a control circuit (2); The control circuit (2) comprises a pulse sampling circuit (26), an amplitude holding circuit (21), an error comparing circuit (22), a PID or PI regulating circuit (23), a pulse control signal interception circuit (24), a pulse amplitude given circuit (28), a standard pulse given circuit (27) and a driving circuit (25); The output end of the pulse sampling circuit (26) is connected with the input end of the power supply main loop (1), the output end of the pulse sampling circuit (26) is connected with the input end of the amplitude maintaining circuit (21), the output end of the amplitude maintaining circuit (21) is connected with the first input end of the error comparison circuit (22), the output end of the error comparison circuit (22) is connected with the input end of the PID or PI regulating circuit (23), the output end of the PID or PI regulating circuit (23) is connected with the first input end of the pulse control signal intercepting circuit (24), the output end of the pulse control signal intercepting circuit (24) is connected with the input end of the driving circuit (25), the output end of the driving circuit (25) is connected with the control end of the switching tube (13) in the power supply main loop (1), the output end of the standard pulse giving circuit (27) is connected with the second input end of the pulse control signal intercepting circuit (24) for sending standard rectangular wave pulse to the pulse control signal intercepting circuit (24), and the output end of the pulse giving circuit (28) is connected with the second input end of the error comparison circuit (22) for sending rated pulse amplitude to the power supply main loop (1); The pulse sampling circuit (26) samples the output of the power supply main circuit (1), the sampling signal is output to the amplitude holding circuit (21), the amplitude holding circuit (21) outputs the received sampling signal to the error comparison circuit (22) after the amplitude holding, the error comparison circuit (22) compares the received sampling signal with the rated amplitude, the error comparison circuit outputs the comparison error to the PID or PI regulating circuit (23), the PID or PI regulating circuit (23) regulates the received comparison error, the continuous analog control quantity is output to the pulse control signal intercepting circuit (24), the pulse control signal intercepting circuit (24) intercepts the received continuous analog control quantity and the standard rectangular wave pulse in a logic AND mode, the pulse control signal is output to the driving circuit (25), the driving circuit (25) amplifies the received pulse control signal, and then outputs the driving signal to the control end of the switching tube (13) in the power supply main circuit (1) to control the power supply main circuit (1) to output the pulse waveform.
3. The full load range control system of a square wave pulse power supply according to claim 2, wherein: The amplitude holding circuit (21) is realized by a digital circuit or an analog circuit.
4. A full load range control system for a square wave pulse power supply as defined in claim 3, wherein: The amplitude maintaining circuit (21) is realized by adopting an analog circuit and comprises a second diode (211), a second resistor (212) and a second capacitor (213); The anode of the second diode (211) is connected with the output end of the pulse sampling circuit (26), the cathode of the second diode (211) is connected with one end of the second capacitor (213), the other end of the second capacitor (213) is grounded, the second resistor (212) is connected with the second capacitor (213) in parallel, and the cathode of the second diode (211) is connected with the first input end of the error comparison circuit (22).
5. A full load range control system for a square wave pulse power supply according to any one of claims 2-4, wherein: the pulse control signal intercepting circuit (24) adopts a second MOS tube, the G level of the second MOS tube is connected with the output end of the standard pulse given circuit (27), the D level of the second MOS tube is connected with the output end of the PID or PI regulating circuit (23), and the S level of the second MOS tube is connected with the input end of the driving circuit (25).
6. The full load range control system of a square wave pulse power supply according to claim 5, wherein: the pulse sampling circuit (26) is an operational amplifier or a current Hall, the non-inverting input end of the operational amplifier or the current Hall is connected with one end of the sampling resistor (16), the inverting input end of the operational amplifier or the current Hall is connected with the other end of the sampling resistor (16), and the output end of the operational amplifier or the current Hall is connected with the anode of the second diode (211).
7. The full-load range control system of the rectangular wave pulse power supply of claim 6, wherein the PID/PI regulating circuit comprises a PI circuit and a D circuit, the input end of the PI circuit is connected with the output end of the error comparison circuit, the output end of the PI circuit is connected with the D stage of the second MOS tube, and the D circuit is connected with the PI circuit in parallel.
8. The full-load range control system of a rectangular wave pulse power supply according to claim 7, wherein said control circuit (2) further comprises an auxiliary power supply circuit; The auxiliary power supply circuit is used for providing working power for the pulse sampling circuit (26), the amplitude holding circuit (21), the error comparing circuit (22), the PID or PI regulating circuit (23), the pulse control signal interception circuit (24), the pulse amplitude given circuit (28), the standard pulse given circuit (27) and the driving circuit (25).
9. The full load range control system of a square wave pulse power supply according to claim 8, wherein: The driving circuit (25) comprises a first resistor and a third resistor; One end of the first resistor is connected with the S level of the second MOS tube, and the other end of the first resistor is connected with the G level of the switching tube (13) in the power supply main loop (1); one end of the third resistor is connected with one end of the first resistor, and the other end of the third resistor is grounded.

Description

Rectangular wave pulse power supply full-load range control method and control system Technical Field The invention relates to a rectangular wave pulse power supply, in particular to a rectangular wave pulse power supply full-load range control method and a control system. Background The pulse power supply is a pulse wave with a certain width and a certain frequency, which is output as a single or continuous power supply, can be a voltage source or a current source, is generally used in the industries of semiconductor laser, micro-arc oxidation and the like, and outputs a waveform as shown. The output of the power supply requires approximately rectangular pulse waves in a full load range (namely from light load to full load), namely: 1. The pulse rising period is rapid and forward without overshoot, and the pulse falling period is rapid and reverse without overshoot; 2. the faster and better the pulse rising and falling edge speed is; 3. Smooth and stable without overshoot during pulse discharge, high precision requirement of the platform value and small ripple wave; 4. The pulse frequency, pulse width and platform value are continuously adjustable, and the waveforms in the range from light load to full load are required to be approximate to rectangular waves. The pulse power supply with closed loop control is commonly used in the market, the output pulse quantity is directly sampled in real time, the sampled pulse quantity is compared with a rectangular pulse given waveform, the comparison error is regulated through PI or PID, and the power supply output is controlled, but because the PI or PID has the defects of delay (integral effect) or overshoot (differential effect) on the pulse error response, the power supply output pulse waveform quality is poor, and the same set of control parameters are difficult to adapt to the requirement of no overshoot of the full-load range output waveform. The current mature commercial topology of the power supply mainly comprises two schemes of a multi-path staggered parallel BUCK switching technology and an energy storage capacitor linear discharging technology, wherein the former is suitable for a high-power pulse power supply, the latter is mainly used for a low-power pulse power supply, in a control strategy, the pulse errors are directly modulated by PI (proportional integral) or PID (proportional integral derivative), a proportional link P in PID control can quickly respond to the errors, an integral link I can eliminate steady-state errors, and a derivative link D can respond to the quick change errors but is easy to overshoot. The differential link D is easy to generate overshoot at the rising and falling edges of the pulse when responding to the rectangular pulse error, and the characteristics can cause the following two problems when the PI or PID regulator is applied to the pulse type power supply control: 1. The pulse waveform of the power supply output is difficult to control to be similar to a rectangular wave, the rising and falling high slope of the pulse and no overshoot are a pair of contradictory requirements, the control loop gain needs to be increased to improve the rising and falling slope of the pulse, and the excessive control loop gain inevitably causes overshoot or control loop oscillation. If the control loop gain is reduced, the waveform overshoot can be suppressed to some extent, but the pulse rise and fall slope is not satisfactory. 2. Under the same set of control loop parameters, only a compromise balance design of rising slope and falling slope and overshoot in a very narrow load range can be realized, and the requirements of high slope and no overshoot in a full load range from light load to full load can not be realized. Based on the two problems, a pulse power supply for directly performing PI or PID modulation control strategy on pulse errors is adopted in the market, rising and falling slopes are in the level of tens of A/ms to a few A/mu s, the power supply cannot realize the requirement of no overshoot in the full load range, and the problem of waveform overshoot in light load always exists. At present, some high-end high-precision processing industries, such as semiconductor pulse laser power supplies, have requirements on rising and falling slopes of output pulse currents to be more than hundreds of A/mu s, waveform overshoot easily causes laser semiconductor damage, and the existing control strategy for directly performing PI or PID modulation on pulse errors does not meet the requirements on no overshoot in the high-dynamic high-precision full-load range of the power supplies in the high-end processing industries. Disclosure of Invention The invention aims to solve the problem that the existing pulse power supply control scheme cannot meet the overshoot-free requirement of a high-dynamic high-precision full-load range of a power supply in the high-end processing industry, and provides a rectangular wave pulse power supply full-lo