CN-115933223-B - Ultrafast tunable spatial phase modulator for 6G communication and method of manufacture

CN115933223BCN 115933223 BCN115933223 BCN 115933223BCN-115933223-B

Abstract

The application is applicable to the field of modulation devices and provides an ultrafast tunable spatial phase modulator for 6G communication and a manufacturing method thereof. The tunable spatial phase modulator is used for receiving terahertz waves and is used for a terahertz wave modulation device, the terahertz wave modulation device comprises a field source, the field source can generate an action field acting on the tunable spatial phase modulator, the tunable spatial phase modulator comprises a base body and a modulation part arranged on the base body, the modulation part comprises a sub-wavelength structural member and a modulation layer, the sub-wavelength structural member is arranged on the base body in a spiral disc arrangement along the direction from approaching to far from the base body, the highest height of the sub-wavelength structural member is equal to the center wavelength of the terahertz waves, the modulation layer is arranged on the surface of the sub-wavelength structural member far from the base body, and the modulation layer is used for receiving the terahertz waves and the action field and modulating the phase of the terahertz waves. The sub-wavelength structural member can be used for modulating the wave band of the terahertz wave in a wider range.

Inventors

Wang renheng
PENG ZHONGZE
ZHANG MIN
QIAN ZHENGFANG
SUN YILING
Xiong Keyu
SONG QI

Assignees

深圳大学

Dates

Publication Date: 20260508
Application Date: 20221208

Claims (9)

1. An ultrafast tunable spatial phase modulator for 6G communication, characterized in that the tunable spatial phase modulator is adapted to receive terahertz waves and to be used in a terahertz wave modulation device comprising a field source (300), the field source (300) being capable of generating an action field acting on the tunable spatial phase modulator; The tunable spatial phase modulator comprises a base body (100) and a modulating part arranged on the base body (100), wherein the refractive index of the base body (100) is different from that of light, the modulating part comprises a sub-wavelength structural member (200) and a modulating layer, the sub-wavelength structural member (200) comprises a plurality of structural members (210), the structural members (210) are arranged on the base body (100) in a spiral disc mode, the height of one structural member (210) in two adjacent structural members (210) is smaller than that of the other structural member (210), the linear distance between the surface of the sub-wavelength structural member (200) away from the base body (100) and the surface of the base body (100) close to the sub-wavelength structural member (200) is equal to the center wavelength of terahertz waves, and the modulating layer is arranged on the surface of the sub-wavelength structural member (200) away from the base body (100) and is used for receiving the terahertz waves and the active terahertz waves.
2. The ultrafast tunable spatial phase modulator for 6G communication, as recited in claim 1, wherein the plurality of structures (210) is 4N, N is a positive integer of 1 or more, the height of each of the structures (210) gradually increases along the first direction, and the structure (210) having the lowest height among the 4N structures (210) is disposed adjacent to the structure (210) having the highest height.
3. The ultrafast tunable spatial phase modulator for 6G communication according to claim 2, wherein a height difference between two adjacently disposed ones (210) of the 4N ones (210) is 6% -25% of a height of the highest one (210) of the 4N ones (210).
4. The ultra-fast tunable spatial phase modulator for 6G communication according to claim 1, wherein a plurality of the structures (210) are each a bar-shaped body vertically disposed on the base body (100).
5. The ultra-fast tunable spatial phase modulator for 6G communication according to claim 1, wherein said field of action is an optical field, said modulation layer is made of a exor semi-metal, or, The action field is a magnetic field, and the modulation layer is made of a magnetic control material.
6. The ultra-fast tunable spatial phase modulator for 6G communication according to claim 1, further comprising an electrode layer disposed between the sub-wavelength structure (200) and the modulation layer, the electrode layer being disposed on a surface of the sub-wavelength structure (200) remote from the housing (100), the modulation layer being disposed on a surface of the electrode layer remote from the sub-wavelength structure (200), the electrode layer being for electrical connection with an external power source to form an electric field for modulating the terahertz wave phase, the electric field being formed as an action field.
7. Ultra-fast tunable spatial phase modulator for 6G communication according to claim 1, wherein a plurality of said modulation sections are provided, a plurality of said modulation sections being arranged at intervals on said housing (100), at least part of said modulation sections of said plurality being arranged to receive said action field.
8. A tunable spatial phase modulator manufacturing method for manufacturing the tunable spatial phase modulator according to any one of claims 1 to 7, the manufacturing method comprising: Manufacturing the sub-wavelength structural member (200) on the base body (100) by adopting a 3D printing technology; the modulation layer is deposited on a surface of the sub-wavelength structure (200) remote from the housing (100).
9. The method of manufacturing a tunable spatial phase modulator according to claim 8, wherein the modulation layer is deposited on the surface of the sub-wavelength structure (200) remote from the housing (100) by magnetron sputtering, chemical vapor deposition, physical vapor deposition, vacuum evaporation or molecular beam epitaxy.

Description

Ultrafast tunable spatial phase modulator for 6G communication and method of manufacture Technical Field The application belongs to the technical field of modulation devices, and particularly relates to an ultrafast tunable spatial phase modulator for 6G communication and a manufacturing method thereof. Background Terahertz waves refer to electromagnetic waves having a frequency in the range of 0.1THz to 0.3THz, and a wavelength approximately in the range of 0.03 to 3mm, between microwaves and infrared. In the technical field of terahertz waves, a terahertz wave modulation device is a core component for applying terahertz waves, and can regulate and control the amplitude, the phase and the polarization of the terahertz waves. However, the terahertz modulator in the prior art method can modulate terahertz waves only in a certain band range, and cannot modulate terahertz waves in a wider band range. Disclosure of Invention The embodiment of the application aims to provide an ultrafast tunable spatial phase modulator for 6G communication and a manufacturing method thereof, aiming at solving the technical problem that terahertz waves cannot realize modulation in a wider range in the prior art. In order to achieve the above object, according to one aspect of the present application, there is provided an ultrafast tunable spatial phase modulator for 6G communication, the tunable spatial phase modulator being configured to receive a terahertz wave and being configured for a terahertz wave modulation device including a field source capable of generating an action field acting on the tunable spatial phase modulator, the tunable spatial phase modulator including a housing having a refractive index different from that of light and a modulation section provided on the housing, the modulation section including a sub-wavelength structure and a modulation layer, the sub-wavelength structure being arranged on the housing in a spiral disk arrangement in a direction from approaching to separating from the housing, a linear distance between a surface of the sub-wavelength structure remote from the housing and a surface of the housing near the sub-wavelength structure being equal to a center wavelength of the terahertz wave, the modulation layer being provided on a surface of the sub-wavelength structure remote from the housing, the modulation layer being configured to receive the terahertz wave and the action field to modulate a phase of the terahertz wave. Optionally, the sub-wavelength structure comprises a plurality of structures arranged in a spiral disc on the base, and a height of one of the two adjacently arranged structures is smaller than a height of the other structure. Optionally, the plurality of structures is 4N, N is a positive integer greater than or equal to 1, and the height of each structure is gradually increased along the first direction, and the structure with the lowest height among the 4N structures is adjacent to the structure with the highest height. Alternatively, the ratio of the height difference between two adjacently disposed structures out of the 4N structures to the height of the highest structure out of the 4N structures is 6% -25%. Optionally, the plurality of structures are all vertically arranged on the base body. Optionally, the acting field is an optical field, the modulation layer is made of exor semi-metal, or the acting field is a magnetic field, and the modulation layer is made of magnetic control material. Optionally, the tunable spatial phase modulator further includes an electrode layer disposed between the sub-wavelength structure and the modulation layer, the electrode layer is disposed on a surface of the sub-wavelength structure away from the base, the modulation layer is disposed on a surface of the electrode layer away from the sub-wavelength structure, the electrode layer is electrically connected to an external power source to form an electric field for modulating the phase of the terahertz wave, and the electric field is formed as an action field. Optionally, the plurality of modulation parts are arranged on the seat body at intervals, and at least part of the plurality of modulation parts are used for receiving the action field. According to another aspect of the present application, there is provided a tunable spatial phase modulator manufacturing method for manufacturing the tunable spatial phase modulator described above, the manufacturing method comprising: manufacturing a sub-wavelength structural member on the seat body by adopting a 3D printing technology; and depositing a modulation layer on the surface of the sub-wavelength structural member, which is far away from the base. Optionally, a modulating layer is deposited on the surface of the sub-wavelength structure remote from the housing by magnetron sputtering, chemical vapor deposition, physical vapor deposition, vacuum evaporation, or molecular beam epitaxy. Compared with the prior art, the ultra-fast tunable