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CN-116013635-B - Height-adjustable induction coil for ICP equipment and adjusting method

CN116013635BCN 116013635 BCN116013635 BCN 116013635BCN-116013635-B

Abstract

The invention provides a height-adjustable induction coil for ICP equipment and an adjusting method, which belong to the technical field of semiconductor equipment, wherein the height-adjustable induction coil for ICP equipment comprises an outer coil and an inner coil which are arranged on a machine chamber cover plate of the ICP equipment, and the outer coil and the inner coil are respectively connected with the machine chamber cover plate through telescopic fixed columns; the telescopic fixing column comprises a threaded cap and a threaded column, wherein the upper end of the threaded cap is connected with a corresponding outer layer coil or inner layer coil, the lower end of the threaded cap is connected with the upper end of the threaded column in a threaded manner, and the lower end of the threaded column is rotatably connected with the machine chamber cover plate through an adjusting mechanism. The invention realizes the adjustment of the coil mounting height in real time without stopping the ICP equipment in the working process, thereby rapidly and accurately adjusting the current flowing through the radio frequency matcher and the induction coil.

Inventors

  • WANG XIONG

Assignees

  • 盛吉盛半导体科技(北京)有限公司

Dates

Publication Date
20260508
Application Date
20230117

Claims (7)

  1. 1. The height-adjustable induction coil for the ICP equipment comprises an outer layer coil and an inner layer coil which are arranged on a machine table chamber cover plate of the ICP equipment, and is characterized in that the outer layer coil and the inner layer coil are respectively connected with the machine table chamber cover plate through telescopic fixed columns; The telescopic fixing column comprises a threaded cap and a threaded column, wherein the upper end of the threaded cap is connected with a corresponding outer layer coil or inner layer coil, scales are arranged on the outer side surface of the threaded column along the length direction of the threaded cap, the lower end of the threaded cap is in threaded connection with the upper end of the threaded column, the lower end of the threaded column is rotatably connected with a machine chamber cover plate through an adjusting mechanism, and the adjusting mechanism is a manual adjusting mechanism or an electric adjusting mechanism; The outer layer coil and the inner layer coil are in cylindrical spiral lines, and each outer layer coil or each inner layer coil is connected with the chamber cover plate of the machine platform through a telescopic fixed column and grounded, and the other end of each outer layer coil or each inner layer coil is connected with a fixedly arranged radio frequency matcher through a connector; The outer layer coil and the inner layer coil are multi-thread multi-layer induction coils and are composed of a plurality of cylindrical spiral lines, each cylindrical spiral line is a coil, telescopic fixing columns and joints are respectively arranged at two ends of each cylindrical spiral line, the joints are located at the center of the coil, the telescopic fixing columns are located at positions far away from the center of the coil, and the telescopic fixing columns are uniformly distributed along the circumferential direction of the corresponding outer layer coil or inner layer coil.
  2. 2. A height adjustable induction coil for an ICP apparatus according to claim 1 wherein the upper and lower adjacent layers of coils of the multi-filar thread form are in insulated contact or connected by insulated connectors.
  3. 3. The height-adjustable induction coil for the ICP equipment according to any one of claims 1 to 2, wherein the adjusting mechanism is an electric adjusting mechanism and comprises a motor, a housing through hole is formed in a cover plate of a machine chamber, the lower end of a threaded column penetrates through the housing through hole to be connected with the motor, the height-adjustable induction coil further comprises a current sensor connected with a radio frequency matcher, the motor is connected with a control unit for controlling the motor to operate, and the control unit is provided with a reading module for reading signals of the current sensor, a data processing module for judging and analyzing, and an executing module for controlling the starting, stopping and rotating directions of the motor.
  4. 4. The height-adjustable induction coil for an ICP apparatus according to any one of claims 1 to 2 wherein the adjusting mechanism is a manual adjusting mechanism and the adjusting mechanism includes a set screw, a set screw hole is provided at a lower end of the threaded post, a mounting through hole is provided in the machine chamber cover plate, a lower end of the threaded post is closely attached to the machine chamber cover plate, and the set screw is screwed to the set screw hole through the mounting through hole in the machine chamber cover plate from bottom to top.
  5. 5. A height adjustable induction coil for an ICP apparatus according to claim 4 wherein a spacer is provided between the set screw and the platen chamber cover.
  6. 6. A method for adjusting a height-adjustable induction coil for an ICP apparatus, implemented by the height-adjustable induction coil for an ICP apparatus according to claim 3, comprising the steps of: Step S1, a corresponding relation table of current values and coil heights is formed in advance according to experiments and is stored in a data processing module of a control unit; step S2, a reading module of the control unit obtains a current value through a current sensor; Step S3, the data processing module of the control unit calculates the difference value between the current value and the target current value, and judges whether the difference value is smaller than or equal to the current allowable value, if so, the operation is not performed; And S4, if the step S3 is judged to be negative, the data processing module of the control unit obtains the height to be regulated according to the corresponding relation table of the current value and the coil height, and sends an instruction to the execution module of the control unit, and the execution module controls the start and stop and the rotation direction of the motor according to the instruction.
  7. 7. The method for adjusting a height-adjustable induction coil of an ICP apparatus according to claim 6, further comprising step S5 after step S4, and returning to step S2 after adjusting the telescopic fixed column after step S4 is completed.

Description

Height-adjustable induction coil for ICP equipment and adjusting method Technical Field The invention belongs to the technical field of semiconductor equipment, and particularly relates to a height-adjustable induction coil for ICP equipment and an adjusting method. Background In the prior art, in the process of generating plasma by using an ICP (Inductive Coupled Plasma, inductively coupled plasma) device, plasma is generally generated in a chamber gas by electromagnetic induction by using a radio frequency power supply, a radio frequency matcher and a multi-layer induction coil connected with the radio frequency matcher, wherein the magnitude of current passing through the radio frequency matcher and the coil is closely related to the installation height position of the coil. Therefore, in the ICP apparatus using the multi-layer induction coil, a mode of changing the installation height of the coil is generally adopted to control the magnitude of current flowing through the rf matcher and the coil under the same output power of the rf power supply. However, in the process of practical equipment, it is not practical to change the installation height of the coil in real time to adjust the current, because the multi-layer induction coil in the existing ICP equipment is of a fixed height, the structure is as shown in fig. 8, the outer layer coil 2 and the inner layer coil 3 are directly fixed through the existing fixing column A1, so that the distance between the lowest plane center point of the coil and the machine chamber cover plate 1 is fixed, when the radio frequency power supply outputs a certain power during the operation of the equipment, the current on the coil is also fixed and cannot be adjusted, and when the process needs a larger power, the radio frequency power supply power cannot be further improved due to the limitation of the radio frequency matcher and the coil current, and the process effect is affected. When the coil is required to be adjusted, the coil fixing column is required to be processed for a long time, and the coil can be adjusted to the required height, so that the coil is inconvenient to use and wastes time and labor. Disclosure of Invention Based on the problems existing in the prior art, the invention provides a height-adjustable induction coil for ICP equipment and an adjusting method thereof, which are a multilayer induction coil with adjustable mounting height and an adjusting method thereof, so that the current flowing through a radio frequency matcher and the multilayer induction coil under fixed power can be conveniently and real-timely adjusted in the working process of the equipment. According to a first aspect of the technical scheme of the invention, the invention provides a height-adjustable induction coil for ICP equipment, which comprises an outer coil and an inner coil which are arranged on a machine chamber cover plate of the ICP equipment, wherein the outer coil and the inner coil are respectively connected with the machine chamber cover plate through telescopic fixing columns, each telescopic fixing column comprises a threaded cap and a threaded column, the upper end of each threaded cap is connected with the corresponding outer coil or inner coil, scales are arranged on the outer side surface of each threaded column along the length direction of each threaded cap, the lower end of each threaded cap is in threaded connection with the upper end of each threaded column, the lower end of each threaded column is rotatably connected with the machine chamber cover plate through an adjusting mechanism, and the adjusting mechanism is a manual adjusting mechanism or an electric adjusting mechanism. Further, the outer layer coil and the inner layer coil are cylindrical spiral lines, one end of each outer layer coil or each inner layer coil is connected with the chamber cover plate of the machine table through the telescopic fixed column and grounded, the other end of each outer layer coil or each inner layer coil is connected with the fixedly arranged radio frequency matcher through a connector, and the outer layer coil and the inner layer coil are connected with the corresponding radio frequency matchers through the connectors. Further, the outer layer coil and the inner layer coil are multi-thread multi-layer induction coils and are composed of a plurality of cylindrical spiral lines, each cylindrical spiral line is a coil, telescopic fixing columns and joints are respectively arranged at two ends of each cylindrical spiral line, the joints are located at the center of the coil, the telescopic fixing columns are located at positions far away from the center of the coil, and the telescopic fixing columns are uniformly distributed along the circumferential direction of the corresponding outer layer coil or inner layer coil. Further, the coils of each layer which are adjacent up and down in the multi-thread shape are in insulating contact or are connected through insulat