CN-116047247-B - Probe card analyzer

CN116047247BCN 116047247 BCN116047247 BCN 116047247BCN-116047247-B

Abstract

The application discloses a probe card analyzer, which belongs to the field of semiconductor equipment and comprises a machine base, wherein the machine base is provided with a turnover plate for installing a probe card, the machine base is provided with a lifting mechanism for lifting the turnover plate and a rotating mechanism for rotating the turnover plate, a detection mechanism is arranged below the turnover plate and comprises a sensor group for contacting with a probe, the machine base is provided with an X-axis displacement mechanism, a Y-axis displacement mechanism and a Z-axis displacement mechanism for controlling the detection mechanism to move along a three-dimensional coordinate system, the detection mechanism is connected with the Z-axis displacement mechanism, a first amplifying observation piece is arranged above the turnover plate, and the machine base is provided with a position adjusting mechanism for enabling the first amplifying observation piece to slide. The application has the function of improving the detection efficiency of the probe.

Inventors

CHEN LIANG
LIU SHIWEN
QU GAOFENG

Assignees

深圳市森美协尔科技有限公司

Dates

Publication Date: 20260508
Application Date: 20220505
Priority Date: 20220302

Claims (3)

1. The probe card analyzer comprises a machine base (1), and is characterized in that the machine base (1) is provided with a turnover plate (2) for installing a probe card, the machine base (1) is provided with a lifting mechanism (3) for lifting the turnover plate (2) and a rotating mechanism (4) for driving the turnover plate (2) to rotate, the machine base (1) is positioned below the turnover plate (2) and is provided with a detection mechanism (8), the detection mechanism (8) comprises a sensor group for contacting with a probe, the machine base (1) is provided with an X-axis displacement mechanism, a Y-axis displacement mechanism and a Z-axis displacement mechanism (7) for controlling the detection mechanism (8) to move along a three-dimensional coordinate system, the detection mechanism (8) is connected with the Z-axis displacement mechanism (7), the machine base (1) is positioned above the turnover plate (2) and is provided with a first amplifying observation piece, and the machine base (1) is provided with a positioning mechanism (15) for enabling the first amplifying observation piece to slide; The lifting mechanism (3) comprises a lifting guide rail (31) arranged on the base (1), a lifting plate (34) connected with the lifting guide rail (31) in a sliding mode and a lifting driving piece used for driving the lifting plate (34) to slide, the rotating mechanism (4) is connected with the lifting plate (34), and the overturning plate (2) is connected with the rotating mechanism (4); The rotating mechanism (4) comprises a rotating arm (42) connected with the lifting plate (34) and a rotating seat (43) rotatably connected with the rotating arm (42), and the turnover plate (2) is connected with the rotating seat (43); The rotary arm (42) is provided with an installation cavity, the rotary seat (43) is provided with a rotary table (431) rotationally connected to the installation cavity, the rotary arm (42) is connected with a flexible cushion block (45), the flexible cushion block (45) is provided with a pin (452), the rotary seat (43) is provided with a sliding groove (432) for sliding connection of the pin (452), the sliding groove (432) is arranged along a rotation path of the rotary seat (43), the flexible cushion block (45) is provided with a positioning hole (453), and the rotary seat (43) is provided with a positioning ball (433) which is clamped in the positioning hole (453); the rotating arm (42) is provided with two opposite ends which are respectively connected with the turnover plate (2), one surface of the rotating seat (43) deviating from the rotating arm (42) is provided with a supporting table (44), and the supporting table (44) is connected with one surface of the turnover plate (2) deviating from a probe of the probe card; The detection mechanism (8) further comprises a detection mounting seat (81), the sensor group comprises a pressure sensor (84) and a conductivity sensor (85) which are mounted on the detection mounting seat (81), the contact of the pressure sensor (84) and the contact of the conductivity sensor (85) are both used for being in contact with a probe, and the detection mounting seat (81) is provided with a detection hole (82) for the contact of the pressure sensor (84) and the contact of the conductivity sensor (85) to extend out; The detection mounting seat (81) is provided with a second amplified observation piece, the second amplified observation piece is positioned between the pressure sensor (84) and the conductivity sensor (85), the detection mounting seat (81) is provided with an observation hole (83), and the second amplified observation piece observes the needle tip of the probe through the observation hole (83); The Y-axis displacement mechanism comprises a bottom plate (6) sliding along a Y axis, the Z-axis displacement mechanism (7) comprises an adjusting screw (72) rotatably mounted on the bottom plate (6), a Z-axis driving piece (71) for driving the adjusting screw (72) to rotate, an adjusting displacement block (73) in threaded connection with the adjusting screw (72), an adjusting sliding rail fixed on the bottom plate (6), an inclined surface supporting block (74) fixed on the adjusting displacement block (73) and connected with the adjusting sliding rail in a sliding manner, a fixing plate (75) fixed on the bottom plate (6), a lifting sliding block (76) connected with the fixing plate (75) in a sliding manner along the Z axis direction and an inclined surface lifting block (77) fixed on the lifting sliding block (76), an inclined surface of the inclined surface lifting block (77) is connected with an inclined surface of the inclined surface supporting block (74) in a sliding manner, and the detection mechanism (8) is mounted on the inclined surface lifting block (77); The probe card is fixedly arranged on the fixing ring (21), the probe faces upwards, the upper microscope (14) is used for checking the needle insertion condition of the probe on the probe card, the upper microscope (14) is removed after the checking is finished, the lifting driving piece is started to control the lifting plate (34) to lift, the turnover plate (2) is driven to lift, then the turnover plate (2) is controlled to rotate 180 degrees, the probe faces downwards, the lifting driving piece is started to control the turnover plate (2) to descend to the original position, the lower microscope (86), the pressure sensor (84) or the conductivity sensor (85) are aligned with the corresponding probe under the driving of the X-axis displacement mechanism and the Y-axis displacement mechanism, the appearance of the probe tip position is detected by the lower microscope (86), then the contact point of the pressure sensor (84) or the contact point of the conductivity sensor (85) is contacted with the probe under the driving of the Z-axis displacement mechanism (7), and the mechanical property or the conductivity of the probe is measured.
2. The probe card analyzer of claim 1, wherein the positioning mechanism (15) comprises a positioning slide rail (151), a moving block (152) slidably connected to the positioning slide rail (151), and a connecting assembly connected to the moving block (152), the positioning slide rail (151) extends in a direction parallel to a rotation axis of the flipping plate (2), and the first magnifying observation member is connected to the connecting assembly.
3. The probe card analyzer of claim 2, wherein the connection assembly comprises a fixed block (153) connected to the movable block (152), a guide rod (154) penetrating through and slidably connected to the fixed block (153), a connection block (155) connected to the guide rod (154), a lifting column (156) connected to the connection block (155), a lifting cylinder (157) sleeved and slidably connected to the lifting column (156), and a locking member screwed to the lifting cylinder (157) and abutted to a side wall of the lifting column (156), and the first magnifying observation member is connected with the lifting cylinder (157).

Description

Probe card analyzer Technical Field The application relates to the field of semiconductor equipment, in particular to a probe card analyzer. Background With the continuous progress of semiconductor technology, the functions and quality of semiconductor devices are gradually improved, and in the semiconductor technology, a wafer is critical, the wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, and the quality of the wafer determines the quality of a semiconductor chip, so that the wafer needs to be detected in the wafer production, and a probe card is used for detecting the wafer. The needles of the probe card are contacted with the wafer electrode to perform electrical test, thereby screening out defective products of the chip. The probe card analyzer is a key instrument in the manufacturing process of the probe card, and is used for detecting the relative position relation between the needles of the probe card, the diameter and the conductivity of the needle tip and the pressure of the needle tip when the probe card is manufactured, and in addition, the surface of the probe is worn after the probe card is pricked into a wafer for many times, so that the accuracy of testing the wafer by the probe is affected. Therefore, in order to maintain the effect of the probe, the probe card needs to be subjected to corresponding performance detection, and the probe card can be normally used after the detection is qualified. At present, the detection of the probe is usually performed by observing the appearance of the probe, namely, the detection of the relative position relationship between the needles by a microscope, and detecting the performance of the probe, namely, the detection of the data such as the pressure and the conductivity of the tip of the probe by controlling the contact of a sensor to move relatively to the probe, so that the appearance detection equipment and the performance detection equipment are required to detect corresponding items respectively, the probe card is required to be installed and removed on different detection equipment, and the operation is complex. Disclosure of Invention In order to improve the detection efficiency of the probe, the application provides a probe card analyzer. The application provides a probe card analyzer which adopts the following technical scheme: The utility model provides a probe card analysis appearance, includes the frame, the frame is provided with the upset board that is used for installing the probe card, the frame is provided with and is used for making the elevating system that the upset board goes up and down and is used for making the rotary mechanism of upset board, the frame is located the upset board below is provided with detection mechanism, detection mechanism is including the sensor group that is used for with the probe contact, the frame is provided with and is used for control detection mechanism follows X axle displacement mechanism, Y axle displacement mechanism and the Z axle displacement mechanism that three-dimensional coordinate system removed, detection mechanism connects in Z axle displacement mechanism, the frame is located the upset board top is provided with first magnification observation piece, the frame is provided with and is used for supplying first magnification observation piece slides's positioning mechanism. Through adopting above-mentioned technical scheme, when installing the probe card, the probe sets up, not only be convenient for install, can utilize the first observation spare that enlarges to inspect the condition of inserting needles of probe on the probe card moreover, then elevating system risees the turnover plate, leave the rotatory space of confession turnover plate, rotatory turnover plate of rotary mechanism makes the probe down, positioning mechanism makes the rise and the rotation of turnover plate not receive the hindrance of first observation spare that enlarges, elevating system resets the turnover plate again, Z axle displacement mechanism drives the sensor group and risees and contact with the probe, utilize the performance data of sensor group survey probe, X axle displacement mechanism and Y axle displacement mechanism drive the sensor group detect different probes, thereby only can detect a plurality of items to the probe through a piece of equipment, and realize the quick switch of detection item through upset and lift, improve detection efficiency. Optionally, the elevating system including set up in the elevating guide of frame, slip connect in the lifter plate of elevating guide and be used for the drive the lifter plate slides the lift driving piece, rotary mechanism connect in the lifter plate, the upset board connect in rotary mechanism. Through adopting above-mentioned technical scheme, lifting guide provides the guide effect, and the lifter plate realizes the lift of upset board under the drive of lift driving piece, leaves the rotatory space of confe