CN-116062468-B - Method and device for adjusting space position and product relative position of module suction nozzle

CN116062468BCN 116062468 BCN116062468 BCN 116062468BCN-116062468-B

Abstract

The invention discloses a method and a device for adjusting the spatial position and the relative position of a module suction nozzle, wherein the method for adjusting the spatial position of the module suction nozzle comprises the steps of obtaining standard position information of a target suction nozzle; acquiring a first detection image and a second detection image of a suction nozzle to be adjusted; determining first position information and second position information of the suction nozzle to be adjusted according to the first detection image and the second detection image respectively; according to the standard position information, the first position information and the second position information, the position of the suction nozzle to be adjusted is adjusted, so that the suction nozzle to be adjusted and the target suction nozzle are arranged at intervals and correspond to each other in position.

Inventors

Zhao Tongyin
DAI BINYU

Assignees

苏州华兴源创科技股份有限公司

Dates

Publication Date: 20260512
Application Date: 20230222

Claims (10)

1. The method for adjusting the spatial position of the module suction nozzle is characterized by comprising the following steps: acquiring standard position information of a target suction nozzle; The method comprises the steps of acquiring a first detection image and a second detection image of a suction nozzle to be adjusted, wherein the suction nozzle to be adjusted comprises a first side face and a second side face which are perpendicular to each other, the first detection image points to the first side face imaged on an imaging plane, and the second detection image points to the second side face imaged on the imaging plane after reflection; Determining first position information and second position information of the suction nozzle to be adjusted according to the first detection image and the second detection image respectively; According to the standard position information, the first position information and the second position information, the position of the suction nozzle to be adjusted is adjusted, so that the suction nozzle to be adjusted and the target suction nozzle are arranged at intervals and correspond to each other in position; the step of acquiring the first detection image and the second detection image of the suction nozzle to be adjusted specifically includes: Turning on a second light source, turning off a first light source, reflecting light rays of the second light source by the first side, generating projections representing at least the outline of the first side on the imaging plane, and generating the first detection image; The step of acquiring the first detection image and the second detection image of the suction nozzle to be adjusted specifically includes: Turning on a first light source, turning off a second light source, reflecting light of the first light source by the second side surface, and reflecting the reflected light to the imaging plane at the optical module to generate a second detection image; the method for adjusting the position of the suction nozzle to be adjusted so that the suction nozzle to be adjusted and the target suction nozzle are arranged at intervals and the positions of the suction nozzle to be adjusted correspond to each other comprises the following steps: Sequentially adjusting the positions of all the suction nozzles to be adjusted, so that all the suction nozzles to be adjusted and the target suction nozzle are positioned at the same position in the first direction, and the distances between two adjacent suction nozzles in the second direction are equal; wherein the first direction is perpendicular to the second side, and the second direction is parallel to the first side.
2. The method of claim 1, wherein the second direction is parallel to both the first side and the second side.
3. The method for adjusting the spatial position of a module nozzle according to claim 1, wherein the step of obtaining the standard position information of the target nozzle specifically comprises: Acquiring a first target image and a second target image of the target suction nozzle, wherein the target suction nozzle comprises a first target side surface and a second target side surface which are perpendicular to each other, the first target image points to the first target side surface of the target suction nozzle imaged on an imaging plane, and the second target image points to the second target side surface of the target suction nozzle imaged on the imaging plane after reflection; Determining first target position information and second target position information of the target suction nozzle according to the first target image and the second target image respectively; And obtaining the standard position information of the target suction nozzle according to the first target position information and the second target position information.
4. The method for adjusting the spatial position of a nozzle according to claim 1, wherein the determining the first position information and the second position information of the nozzle to be adjusted according to the first detection image and the second detection image, respectively, specifically comprises: obtaining the extension length of the first side face in the first direction as the first position information according to the first detection image; And calculating the plane center coordinate of the second side surface serving as the second position information according to the second detection image, wherein the second side surface is an end surface for taking and placing a product on the suction nozzle to be adjusted.
5. The utility model provides a module suction nozzle spatial position adjusting device which characterized in that includes: The camera is used for providing an imaging plane, and acquiring a first detection image and a second detection image on the imaging plane, wherein the first detection image points to a first side surface of a suction nozzle to be adjusted, and the second detection image points to a second side surface of the suction nozzle to be adjusted; the optical module is used for reflecting light on the second side surface of the suction nozzle to be adjusted; The light source is used for matching with the camera, imaging the first side face on an imaging plane, and imaging the second side face reflected by the optical module on the imaging plane, wherein the first side face and the second side face are mutually perpendicular; The processing module is used for acquiring standard position information of a target suction nozzle, determining first position information and second position information of the suction nozzle to be adjusted according to the first detection image and the second detection image, and adjusting the position of the suction nozzle to be adjusted according to the standard position information, the first position information and the second position information, so that the suction nozzle to be adjusted and the target suction nozzle are arranged at intervals and correspond to each other in position; the camera acquires a second detection image when the first light source is lighted, and acquires the first detection image when the second light source is lighted; The optical module is arranged between the first light source and the suction nozzle to be adjusted and between the second light source and the suction nozzle to be adjusted, a first included angle is formed between the extending direction of projection of the optical module on a third plane and the extending direction of projection of the light emitting plane of the first light source on the third plane, a first optical surface, close to the first light source, of the optical module is configured as a light transmission surface, a first optical surface, close to the suction nozzle to be adjusted, of the optical module is configured as a reflecting surface, and the area of the reflecting surface is larger than the projection area of the first side surface on the plane where the reflecting surface is located.
6. The device according to claim 5, wherein the first light source is a surface light source, and the light emitting plane of the first light source is parallel to the second side surface, and the second light source is a surface light source, and the light emitting plane of the second light source is parallel to the first side surface.
7. The modular nozzle spatial position adjustment apparatus of claim 5, wherein the first included angle is 45 degrees and the imaging plane is parallel to the first side surface.
8. A method for adjusting the relative position of a product, comprising: the method for adjusting the spatial position of a modular nozzle according to any one of claims 1 to 4, wherein the spatial position of at least one modular nozzle is adjusted; A first calibration image and a second calibration image are obtained at a first calibration position and a second calibration position respectively, wherein the first calibration image points to a first calibration surface of a calibration plate and a product to be adjusted, the second calibration image points to a second calibration surface of the calibration plate and a module suction nozzle, and the first calibration surface and the second calibration surface are the same surface or are parallel to each other; Determining the position coordinate difference of the module suction nozzle and the product to be adjusted according to the first calibration image and the second calibration image; and adjusting the position of the product to be adjusted and/or the module suction nozzle according to the position coordinate difference, so that the position coordinate difference is reduced.
9. The method for adjusting a relative position of a product according to claim 8, wherein the first calibration surface and the second calibration surface are two parallel surfaces on the calibration plate, a first camera for acquiring the first calibration image is disposed on a side of the first calibration surface away from the second calibration surface, and a second camera for acquiring the second calibration image is disposed on a side of the second calibration surface away from the first calibration surface, and the adjusting the position of the product to be adjusted and/or the module suction nozzle to reduce the position coordinate difference specifically includes: and moving the product to be adjusted to be close to the module suction nozzle until the imaging center of the product to be adjusted in the first calibration image is aligned with the imaging center of the module suction nozzle in the second calibration image.
10. The method of claim 9, wherein after the acquiring the first calibration image and the second calibration image at the first calibration position and the second calibration position, respectively, the method further comprises: And adjusting the relative positions of the first camera and the second camera in the first direction according to the definition of the first calibration image and the second calibration image.

Description

Method and device for adjusting space position and product relative position of module suction nozzle Technical Field The invention relates to the technical field of workpiece grabbing equipment, in particular to a method and a device for adjusting the space position and the relative position of a product of a module suction nozzle. Background A pick-and-place nozzle module (PNP) station in semiconductor sorters and related equipment typically includes a plurality of nozzles. Before the module is used for taking materials, the distance and the height among the plurality of suction nozzles are firstly adjusted, the adjustment is generally realized through manual verification, specifically, the suction nozzles are firstly inserted into the limiting round holes, and the position adjustment of the plurality of suction nozzles is completed according to the difference value between the center coordinates of the round holes and the center coordinates of the images on the premise that the centers of the default suction nozzles and the centers of the round holes are coaxial. The method has the following defects that firstly, the suction nozzle needs human intervention to be inserted into the limit round hole, and the manual operation tends to lead to low automation degree and precision of equipment. Secondly, the front end of the suction nozzle is made of flexible materials, and a certain objective error can be introduced when the suction nozzle is inserted into the limiting round hole. Disclosure of Invention One of the objectives of the present invention is to provide a method for adjusting the spatial position of a module suction nozzle, so as to solve the technical problems of large error rate and low automation degree of manual adjustment in the prior art. One of the objectives of the present invention is to provide a device for adjusting the spatial position of a module nozzle. One of the objectives of the present invention is to provide a method for adjusting the relative position of a product. In order to achieve one of the above objects, the invention provides a method for adjusting a spatial position of a module suction nozzle, which comprises the steps of obtaining standard position information of a target suction nozzle, obtaining a first detection image and a second detection image of the suction nozzle to be adjusted, wherein the suction nozzle to be adjusted comprises a first side face and a second side face which are perpendicular to each other, the first detection image points to the first side face of an imaging plane, the second detection image points to the second side face of the imaging plane after being reflected and imaged, determining the first position information and the second position information of the suction nozzle to be adjusted according to the first detection image and the second detection image, and adjusting the position of the suction nozzle to be adjusted according to the standard position information, the first position information and the second position information, so that the suction nozzle to be adjusted and the target are arranged at intervals and correspond to each other. As a further improvement of an embodiment of the invention, the suction nozzles to be adjusted comprise at least two suction nozzles, the step of adjusting the positions of the suction nozzles to be adjusted so that the suction nozzles to be adjusted are arranged at intervals with the target suction nozzle and the positions of the suction nozzles to be adjusted correspond to each other specifically comprises the step of sequentially adjusting the positions of each suction nozzle to be adjusted so that all suction nozzles to be adjusted are positioned at the same position with the target suction nozzle in a first direction and the distances between two adjacent suction nozzles in a second direction are equal, wherein the first direction is perpendicular to the second side face, and the second direction is parallel to the second side face. As a further development of an embodiment of the invention, the second direction is parallel to both the first side and the second side. According to the invention, a first target image and a second target image of the target suction nozzle are acquired, wherein the target suction nozzle comprises a first target side face and a second target side face which are perpendicular to each other, the first target image points to the first target side face of the target suction nozzle imaged on an imaging plane, the second target image points to the second target side face of the target suction nozzle imaged on the imaging plane after reflection, first target position information and second target position information of the target suction nozzle are determined according to the first target image and the second target image respectively, and standard position information of the target suction nozzle is acquired according to the first target position information and the second