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CN-116068848-B - Photomask detection system and method

CN116068848BCN 116068848 BCN116068848 BCN 116068848BCN-116068848-B

Abstract

The disclosure provides a photomask detection system and method, and relates to the technical field of semiconductors. The photomask detecting system comprises a photomask thickness measuring device, a bar code reading device and a calibrating device, wherein the photomask thickness measuring device comprises a plurality of sensor modules which are arranged side by side and used for measuring the thickness of a photomask, the bar code reading device is arranged opposite to the photomask thickness measuring device and used for reading bar codes on the photomask to obtain thickness information of the photomask, the calibrating device comprises a calibrating rod and an electromagnet, the calibrating rod comprises a calibrating rod and a calibrating base, the electromagnet is arranged corresponding to the bottom of the calibrating base, and the calibrating device is used for calibrating the bar code reading device. The photomask detecting system provided by the disclosure can prevent the photomask with abnormal thickness from entering the machine and protect the machine device when the photomask bar code is read abnormally or a new photomask enters the machine by arranging the photomask thickness measuring device, and can realize automatic calibration of the bar code reading device by arranging the calibrating device, thereby saving the machine updating time and improving the calibrating rate.

Inventors

  • LIANG XUEYU

Assignees

  • 长鑫存储技术有限公司

Dates

Publication Date
20260508
Application Date
20211103

Claims (16)

  1. 1. A method for inspecting a photomask, comprising: providing a photomask thickness measuring device, wherein the photomask thickness measuring device comprises a plurality of sensor modules which are arranged side by side, the thickness of the photomask is measured by using the sensor modules, and the total scanning length of the plurality of sensor modules which are arranged side by side is larger than or equal to the width of the photomask; providing a bar code reading device, utilizing the bar code reading device to read a bar code on a photomask, calling a preset database, and judging whether the bar code is contained in the database; Providing a calibration device, wherein the calibration device comprises a calibration rod and an electromagnet, the calibration rod comprises a calibration rod and a calibration base, the electromagnet is correspondingly arranged at the bottom of the calibration base, and the calibration device is used for automatically calibrating the bar code reading device when the bar code reading device reads the bar code abnormally; the method comprises the steps of judging whether the bar code is contained in a database or not, starting a mask thickness measuring device to measure the thickness of a mask and obtain the maximum thickness value of the mask if the bar code of the mask is not contained in the database, allowing the mask to enter a machine if the maximum thickness value of the mask is smaller than a preset threshold value, prohibiting the mask from entering the machine if the maximum thickness value of the mask is larger than or equal to the preset threshold value, setting authority information for the mask, and updating the bar code information and the authority information of the mask into the database; If the bar code reading device fails to read the bar code on the photomask, starting the calibration device and starting the photomask thickness measuring device, wherein the photomask thickness measuring device measures the thickness of the photomask, the calibration device calibrates the bar code reading device, and the bar code reading device after calibration re-reads the bar code on the photomask.
  2. 2. The method of claim 1, wherein, The calibrating the bar code reader comprises: Starting a power supply to enable the electromagnet to be electrified; the electromagnet after power is obtained pushes the calibration base to control the calibration rod to move, so that the top end of the calibration rod presses a calibration button on the bar code reading device to calibrate the bar code reading device; After the calibration is kept for a preset time, the power supply is disconnected, the electromagnet is powered off, and the calibration rod is reset under the action of the spring.
  3. 3. The method of claim 1, wherein, The measuring the thickness of the photomask by using the sensor module comprises: The sensor module measures the distance between the sensor module and the mechanical arm to obtain a first distance; Moving the photomask by using the mechanical arm to enable the photomask to pass through an irradiation area of the photomask thickness measuring device, and measuring the distance between the sensor module and the top surface of the photomask by using the sensor module to obtain a second distance; And calculating to obtain a difference value between the first distance and the second distance, wherein the difference value is the thickness of the photomask.
  4. 4. A reticle inspection system for performing the reticle inspection method of any one of claims 1-3, comprising: A photomask thickness measuring device, which comprises a plurality of sensor modules arranged side by side, the sensor modules are used for measuring the thickness of the photomask, and the total scanning length of the plurality of sensor modules arranged side by side is larger than or equal to the width of the photomask; the bar code reading device is arranged opposite to the photomask thickness measuring device and is used for reading a bar code on the photomask to acquire thickness information of the photomask; The calibration device comprises a calibration rod and an electromagnet, wherein the calibration rod comprises a calibration rod and a calibration base, the electromagnet is correspondingly arranged at the bottom of the calibration base, and the calibration device is used for automatically calibrating the bar code reading device when the bar code reading device reads the bar code abnormally.
  5. 5. The reticle inspection system of claim 4, wherein, The calibration rod is connected to the top surface of the calibration base.
  6. 6. The reticle inspection system of claim 4, wherein, The bar code reader also includes a calibration button, and the calibration lever calibrates the bar code reader by contacting the calibration button.
  7. 7. The reticle inspection system of claim 4, wherein, The photomask detection system further comprises a power supply, wherein the power supply adopts a voltage stabilizing chip, and the power supply provides voltage for the electromagnet so that the polarity is generated after the electromagnet is electrified.
  8. 8. The reticle inspection system of claim 6, wherein, The diameter of the calibration rod is smaller than or equal to the diameter of the calibration button.
  9. 9. The reticle inspection system of claim 4, wherein, The shape of the calibration base and the shape of the electromagnet comprise circles, and the diameter of the calibration base is equal to that of the electromagnet.
  10. 10. The reticle inspection system of claim 4, wherein, The polarity of the calibration base is the same as the polarity of the electromagnet after the electromagnet is electrified.
  11. 11. The reticle inspection system of claim 4, wherein, The calibration base is in non-contact connection with the electromagnet.
  12. 12. The reticle inspection system of claim 4, wherein, The calibrating device further comprises a spring, and the spring penetrates through the calibrating rod.
  13. 13. The reticle inspection system of claim 12, wherein, The length of the spring is equal to the length of the calibration rod.
  14. 14. The reticle inspection system of claim 4, wherein, The calibrating device further comprises a fixed baffle plate, a through hole is formed in the fixed baffle plate, and the calibrating rod penetrates through the through hole.
  15. 15. The reticle inspection system of claim 14, wherein, The fixed baffle plate is arranged at the top of the calibration rod.
  16. 16. The reticle inspection system of claim 4, wherein, The sensor module includes a reflective photosensor.

Description

Photomask detection system and method Technical Field The present disclosure relates to the field of semiconductor technology, and in particular, to a photomask inspection system and method. Background In the semiconductor manufacturing process, the photolithography process is an important step in the semiconductor device manufacturing process, the photolithography process is to use exposure and development to draw an aggregate pattern structure on a photoresist, then the pattern on a photomask is transferred onto a substrate through an etching process, while the photolithography equipment is essential technological equipment for realizing the photolithography process, is core equipment for producing a large-scale integrated circuit, and the normal operation of the photolithography equipment is a precondition for ensuring the semiconductor process. In the existing lithography equipment, before a photomask enters a photomask storage unit of the lithography equipment, a machine bar code reading device reads a bar code on the photomask to acquire related information of the photomask, and the authority of the photomask is judged according to the related information; in addition, in the prior art, when the machine bar code reading device is abnormal in reading, the device stops running to calibrate the device, and usually, manual calibration is adopted, so that the calibration rate is low and the calibration time is long. It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art. Disclosure of Invention The present disclosure is directed to overcoming the above-mentioned shortcomings of the prior art and providing a system and method for detecting a photomask. Other features and advantages of the present disclosure will be apparent from the following detailed description, or may be learned in part by the practice of the disclosure. According to one aspect of the present disclosure, there is provided a reticle inspection apparatus, the apparatus comprising: A photomask thickness measuring device, which comprises a plurality of sensor modules arranged side by side, the sensor module is used for measuring the thickness of the photomask; the bar code reading device is arranged opposite to the photomask thickness measuring device and is used for reading a bar code on the photomask to acquire thickness information of the photomask; The calibration device comprises a calibration rod and an electromagnet, wherein the calibration rod comprises a calibration rod and a calibration base, the electromagnet is correspondingly arranged at the bottom of the calibration base, and the calibration device is used for calibrating the bar code reading device. In some embodiments of the disclosure, the calibration rod is attached to the top surface of the calibration base based on the foregoing. In some embodiments of the disclosure, based on the foregoing, the bar code reading device further comprises a calibration button, the calibration lever calibrates the bar code reading device by contacting the calibration button. In some embodiments of the disclosure, based on the foregoing solution, the mask inspection system further includes a power supply, where the power supply uses a voltage stabilizing chip, and the power supply provides a voltage to the electromagnet, so that the electromagnet generates polarity after being powered. In some embodiments of the disclosure, based on the foregoing, the diameter of the calibration rod is less than or equal to the diameter of the calibration button. In some embodiments of the disclosure, based on the foregoing, the calibration base and the electromagnet each comprise a circular shape, and the diameter of the calibration base is equal to the diameter of the electromagnet. In some embodiments of the disclosure, based on the foregoing scheme, the polarity of the calibration base is the same as the polarity of the electromagnet after power is applied. In some embodiments of the disclosure, based on the foregoing solution, the calibration base is in non-contact connection with the electromagnet. In some embodiments of the disclosure, based on the foregoing, the calibration device further comprises a spring that is threaded onto the calibration rod. In some embodiments of the disclosure, based on the foregoing, the length of the spring is equal to the length of the calibration rod. In some embodiments of the disclosure, based on the foregoing solution, the calibration device further includes a fixed baffle, a through hole is formed in the fixed baffle, and the calibration rod is disposed through the through hole. In some embodiments of the disclosure, based on the foregoing, the fixed baffle is disposed on top of the calibration rod. In some embodiments of the disclosure, based on the f