CN-116129427-B - Method and device for extracting image contour of scanning electron microscope based on design layout

CN116129427BCN 116129427 BCN116129427 BCN 116129427BCN-116129427-B

Abstract

The application provides a scanning electron microscope image contour extraction method, a device, electronic equipment and a computer readable storage medium based on a design layout, wherein the method comprises the steps of extracting a first scanning electron microscope image contour of a scanning electron microscope image under the condition that the scanning electron microscope image of a region to be detected is acquired; the method comprises the steps of adjusting the outline of a first scanning electron microscope image based on the scanning electron microscope image to generate a second scanning electron microscope image outline, aligning the second scanning electron microscope image outline with a design layout to generate an alignment result, adjusting the outline of the second scanning electron microscope image based on the alignment result to generate a third scanning electron microscope image outline, and extracting outline information of the third scanning electron microscope image outline. The application can effectively improve the fineness of the image contour of the scanning electron microscope.

Inventors

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东方晶源微电子科技（北京）有限公司

Dates

Publication Date: 20260505
Application Date: 20221222

Claims (20)

1. The scanning electron microscope image contour extraction method based on the design layout is characterized by comprising the following steps of: Under the condition that a scanning electron microscope image of a region to be detected is acquired, extracting a first scanning electron microscope image contour of the scanning electron microscope image; adjusting the first scanning electron microscope image contour based on the scanning electron microscope image to generate a second scanning electron microscope image contour; aligning the image outline of the second scanning electron microscope with the design layout to generate an alignment result; adjusting the second scanning electron microscope image contour based on the alignment result to generate a third scanning electron microscope image contour; Extracting contour information of the third scanning electron microscope image contour; wherein the adjusting the first sem image profile based on the sem image to generate a second sem image profile includes: Comparing the scanning electron microscope image with the first scanning electron microscope image outline to generate a comparison result; acquiring the positions of points of the outline with redundant connection under the condition that the comparison result is that the outline with redundant connection exists in the outline of the first scanning electron microscope image; the connection between the points is removed based on the positions of the points, and the second scanning electron microscope image profile is generated.
2. The method for extracting a contour of a scanning electron microscope image based on a design layout according to claim 1, wherein the adjusting the contour of the second scanning electron microscope image based on the alignment result to generate a third scanning electron microscope image contour comprises: And adjusting the graph line information in the second scanning electron microscope image outline based on the alignment result to generate the third scanning electron microscope image outline, wherein the graph line information comprises at least one of the interval between the graph line and the second scanning electron microscope image and the width of the graph line.
3. The design layout-based scanning electron microscope image contour extraction method as defined in claim 1, wherein after said aligning said second scanning electron microscope image contour with the design layout to generate an alignment result, said method further comprises: and performing electron beam defect detection based on the alignment result to obtain a defect detection result.
4. The design layout-based scanning electron microscope image contour extraction method as defined in claim 1, wherein after said aligning said second scanning electron microscope image contour with the design layout to generate an alignment result, said method further comprises: and carrying out automatic measurement based on the alignment result to obtain an automatic measurement result.
5. The method for extracting a contour of a scanning electron microscope image based on a design layout according to claim 1, wherein the extracting a first scanning electron microscope image contour of the scanning electron microscope image in a case of acquiring the scanning electron microscope image of a region to be detected comprises: And extracting the first scanning electron microscope image contour at the subpixel level of the scanning electron microscope image under the condition that the scanning electron microscope image of the region to be detected is acquired.
6. The method for extracting a contour of a scanning electron microscope image based on a design layout according to claim 1, wherein aligning the contour of the second scanning electron microscope image with the design layout to generate an alignment result comprises: Converting the second scanning electron microscope image contour into the second scanning electron microscope image contour with the same design layout format; And aligning the converted image outline of the second scanning electron microscope with a preset original design layout to obtain an alignment result.
7. The method for extracting a scanning electron microscope image contour based on a design layout according to claim 6, wherein aligning the converted second scanning electron microscope image contour with a preset original design layout to obtain an alignment result comprises: and aligning the converted second scanning electron microscope image outline with the preset original design layout, and acquiring the alignment result based on a preset pattern similarity index, wherein the pattern similarity index is used for representing the alignment degree between the second scanning electron microscope image outline and the design layout.
8. The method for extracting image contour of a scanning electron microscope based on a design layout as defined in claim 6, wherein said design layout is said design layout in a GDSII stream format.
9. The method for extracting image contour of a scanning electron microscope based on a design layout according to claim 3, wherein said performing electron beam defect detection based on said alignment result to obtain a defect detection result comprises: and detecting electron beam defects of different layers of the design layout based on the alignment result to obtain a defect detection result, wherein the different layers at least comprise at least one of a connecting layer, a metal layer and a polysilicon layer between the layers.
10. The method for extracting a contour of a scanning electron microscope image based on a design layout according to claim 1, wherein after comparing the scanning electron microscope image with the contour of the first scanning electron microscope image, the method further comprises: acquiring the positions of points with incomplete connection of the profiles under the condition that the comparison result shows that the profiles of the first scanning electron microscope image have the incomplete connection; And connecting the points based on the positions of the points to generate the second scanning electron microscope image profile.
11. The method for extracting a contour of a scanning electron microscope image based on a design layout according to claim 1, wherein adjusting the contour of the second scanning electron microscope image based on the alignment result to generate a third scanning electron microscope image contour comprises: expanding and/or corroding the second scanning electron microscope image profile based on the alignment result to generate the third scanning electron microscope image profile.
12. A scanning electron microscope image contour extraction device based on a design layout, the device comprising: the first extraction module is used for extracting a first scanning electron microscope image contour of the scanning electron microscope image under the condition that the scanning electron microscope image of the area to be detected is acquired; The first adjusting module is used for adjusting the first scanning electron microscope image contour based on the scanning electron microscope image to generate a second scanning electron microscope image contour; the alignment module is used for aligning the image outline of the second scanning electron microscope with the design layout to generate an alignment result; The second adjusting module is used for adjusting the second scanning electron microscope image contour based on the alignment result to generate a third scanning electron microscope image contour; the second extraction module is used for extracting contour information of the third scanning electron microscope image contour; The first adjustment module comprises a comparison unit for comparing the scanning electron microscope image with the first scanning electron microscope image outline to generate a comparison result, a first acquisition unit for acquiring positions of points of the outline with redundant connection when the comparison result is that the outline with redundant connection exists in the first scanning electron microscope image outline, and a removal unit for removing the connection between the points based on the positions of the points to generate the second scanning electron microscope image outline.
13. The image contour extraction device of a scanning electron microscope based on a design layout according to claim 12, wherein the second adjusting module is configured to adjust the image line information in the image contour of the second scanning electron microscope based on the alignment result to generate a third image contour of the scanning electron microscope, and wherein the image line information includes at least one of a distance between the image line and the image of the second scanning electron microscope and a width of the image line.
14. The layout-based scanning electron microscope image profile extraction apparatus of claim 12, further comprising: And the detection module is used for carrying out electron beam defect detection based on the alignment result to obtain a defect detection result.
15. The layout-based scanning electron microscope image profile extraction apparatus of claim 12, further comprising: and the measuring module is used for automatically measuring based on the alignment result to obtain an automatic measuring result.
16. The image contour extraction device of a scanning electron microscope based on a design layout according to claim 12, wherein the first extraction module is configured to extract the first image contour of the scanning electron microscope at a subpixel level of the scanning electron microscope image in a case where the scanning electron microscope image of the region to be detected is acquired.
17. The layout-based scanning electron microscope image profile extraction device of claim 12, wherein the alignment module is configured to convert the second scanning electron microscope image profile into the second scanning electron microscope image profile in the same format as the layout; And aligning the converted image outline of the second scanning electron microscope with a preset original design layout to obtain an alignment result.
18. The device for extracting image contour of scanning electron microscope based on design layout according to claim 17, wherein the aligning module is configured to align the converted second image contour of scanning electron microscope with the preset original design layout and obtain the aligning result based on a preset graph similarity index, wherein the graph similarity index is used for representing the aligning degree between the second image contour of scanning electron microscope and the design layout.
19. The scanning electron microscope image contour extraction device based on a design layout as defined in claim 17, wherein said design layout is a design layout of GDSII stream format.
20. The image contour extraction device of a scanning electron microscope based on a design layout according to claim 14, wherein the detection module is configured to detect electron beam defects of different layers of the design layout based on the alignment result to obtain the defect detection result, and the different layers at least include at least one of a connection layer between layers, a metal layer, and a polysilicon layer.

Description

Method and device for extracting image contour of scanning electron microscope based on design layout Technical Field The application relates to the field of image contour extraction, in particular to a scanning electron microscope image contour extraction method and device based on a design layout and electronic equipment. Background In the current chip production process, with the continuous advancement of chip production technology nodes, defects generated in production are smaller and smaller, and electron beam defect detection is particularly important. Currently, conventional electron beam defect detection mainly adopts a chip-to-chip (Die to Die) detection mode, however, the mode is not designed for systematic defects and aperiodic region beams, and the defect rate is detected in an excessive way depending on the alignment effect between a detection image and a reference image. In order to cope with these problems, electron beam defect detection methods based on design layout are becoming more and more important. The existing scanning electron microscope image contour extraction scheme is shown in fig. 1, wherein a scanning electron microscope (Scanning Electron Microscope, SEM) image of a region to be detected is firstly collected based on an electron beam defect detection device, then an SEM image contour is extracted by a first algorithm (such as a gradient algorithm), the SEM image contour is adjusted based on the SEM image, and finally the SEM image contour is output. The prior art performs contour extraction based entirely on SEM image information, so contour extraction depends entirely on SEM image quality. When the image quality is good, a good contour can be easily extracted, and when the image quality is poor (edge blurring, uneven brightness and the like), the extracted contour is often incomplete, so that the application range of the contour is narrow. Therefore, how to improve the definition of the image profile of the scanning electron microscope is a technical problem that needs to be solved by those skilled in the art. Disclosure of Invention The application aims to provide a scanning electron microscope image contour extraction method, a device and electronic equipment based on a design layout, which can effectively improve the fineness of the scanning electron microscope image contour. According to a first aspect of the present application, there is provided a scanning electron microscope image contour extraction method based on a design layout, the method comprising: Under the condition that a scanning electron microscope image of a region to be detected is acquired, extracting a first scanning electron microscope image contour of the scanning electron microscope image; Adjusting the first scanning electron microscope image contour based on the scanning electron microscope image to generate a second scanning electron microscope image contour; aligning the image contour of the second scanning electron microscope with the design layout to generate an alignment result; adjusting the second scanning electron microscope image contour based on the alignment result to generate a third scanning electron microscope image contour; contour information of the third scanning electron microscope image contour is extracted. Optionally, adjusting the second sem image profile based on the alignment result to generate a third sem image profile, including: And adjusting the graphic line information in the second scanning electron microscope image contour based on the alignment result to generate a third scanning electron microscope image contour, wherein the graphic line information comprises at least one of the interval between the graphic line and the second scanning electron microscope image and the width of the graphic line. Optionally, after aligning the second scanning electron microscope image contour with the design layout to generate an alignment result, the method further includes: And performing electron beam defect detection based on the alignment result to obtain a defect detection result. Optionally, after aligning the second scanning electron microscope image contour with the design layout to generate an alignment result, the method further includes: and carrying out automatic measurement based on the alignment result to obtain an automatic measurement result. Optionally, in the case of acquiring a scanning electron microscope image of the area to be detected, extracting a first scanning electron microscope image contour of the scanning electron microscope image includes: Under the condition that the scanning electron microscope image of the area to be detected is acquired, a first scanning electron microscope image contour at the sub-pixel level of the scanning electron microscope image is extracted. Optionally, aligning the second scanning electron microscope image contour with the design layout to generate an alignment result, including: Converting the second scanning electron micro