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CN-116209926-B - Optical set and optical device

CN116209926BCN 116209926 BCN116209926 BCN 116209926BCN-116209926-B

Abstract

An optical set for an optical system constituting an external resonator including a laser light source for outputting laser light, the optical set including a base having a main surface, a light source holding portion provided on the main surface for holding the laser light source, and a holding portion provided on the main surface for holding the optical system, the holding portion having a reflector holding portion for holding a corner reflector, a 1 st opening member holding portion for holding a 1 st opening member, and a2 nd opening member holding portion for holding a2 nd opening member, the 1 st opening member holding portion being located closer to the reflector holding portion than an emission surface of the laser light source held by the light source holding portion.

Inventors

  • DOUGAKIUCHI TATSUO

Assignees

  • 浜松光子学株式会社

Dates

Publication Date
20260512
Application Date
20210617
Priority Date
20200923

Claims (10)

  1. 1. An optical kit for constituting an optical system including an external resonator of a laser light source outputting laser light, wherein, The optical set is provided with: A base including a main surface; a light source holding part provided on the main surface for holding the laser source, and A holding portion provided on the main surface for holding the optical system, The optical system includes: A corner reflector configured by a reflection type diffraction grating that diffracts laser light emitted from the laser light source and incident from a1 st direction and reflects diffracted light of 0 th order toward a2 nd direction intersecting the 1 st direction, and a mirror that reflects the diffracted light from the reflection type diffraction grating toward a3 rd direction different from the 1 st direction and the 2 nd direction, and A 1 st aperture member and a 2 nd aperture member arranged in the 3 rd direction in such a manner as to form optical apertures through which the diffracted light from the corner reflector sequentially passes, The holding portion has: a reflector holding portion for holding the corner reflector; a1 st opening member holding portion for holding the 1 st opening member, and A2 nd opening member holding portion for holding the 2 nd opening member, The reflector holding section includes a1 st mechanism capable of adjusting an optical axis of the diffracted light in each of the reflection type diffraction grating and the reflection mirror, The 1 st aperture member holding portion is located closer to the reflector holding portion side than an emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The 2 nd aperture member holding portion is located at a position on the opposite side of the reflector holding portion from the emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The optical system includes: A lens arranged between the laser source and the corner reflector, the laser light being input in the 1 st direction, and A 3 rd opening member arranged in such a manner as to form an optical opening through which the laser light passed through from the lens passes without the corner reflector, The laser light passing through the lens is incident on the reflection type diffraction grating, The holding portion has: a lens holding part for holding the lens, and A3 rd opening member holding portion for holding the 3 rd opening member, The reflector holding part comprises a 2 nd mechanism capable of holding the whole of the corner reflector in a rotatable manner along the main surface, The 1 st opening member holding portion and the lens holding portion are arranged in the 2 nd direction.
  2. 2. An optical kit for constituting an optical system including an external resonator of a laser light source outputting laser light, wherein, The optical set is provided with: A base including a main surface; a light source holding part provided on the main surface for holding the laser source, and A holding portion provided on the main surface for holding the optical system, The optical system includes: A corner reflector configured by a reflection type diffraction grating that diffracts laser light emitted from the laser light source and incident from a1 st direction and reflects diffracted light of 0 th order toward a2 nd direction intersecting the 1 st direction, and a mirror that reflects the diffracted light from the reflection type diffraction grating toward a3 rd direction different from the 1 st direction and the 2 nd direction, and A 1 st aperture member and a 2 nd aperture member arranged in the 3 rd direction in such a manner as to form optical apertures through which the diffracted light from the corner reflector sequentially passes, The holding portion has: a reflector holding portion for holding the corner reflector; a1 st opening member holding portion for holding the 1 st opening member, and A2 nd opening member holding portion for holding the 2 nd opening member, The reflector holding section includes a1 st mechanism capable of adjusting an optical axis of the diffracted light in each of the reflection type diffraction grating and the reflection mirror, The 1 st aperture member holding portion is located closer to the reflector holding portion side than an emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The 2 nd aperture member holding portion is located at a position on the opposite side of the reflector holding portion from the emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The laser source includes: A laser element for oscillating the laser light, and A cooling unit provided on the laser element on the opposite side of the emission surface of the laser beam, for cooling the laser element, The 2 nd opening member holding portion is located at a position closer to an opposite side of the reflector holding portion than the cooling portion in the 3 rd direction.
  3. 3. The optical package of claim 1, wherein, The 1 st mechanism can adjust the optical axis of the diffracted light by holding each of the reflection type diffraction grating and the reflecting mirror so as to be rotatable independently of each other about a rotation axis along the main surface.
  4. 4. The optical package of claim 2, wherein, The 1 st mechanism can adjust the optical axis of the diffracted light by holding each of the reflection type diffraction grating and the reflecting mirror so as to be rotatable independently of each other about a rotation axis along the main surface.
  5. 5. The optical kit of any one of claim 1-4, wherein, The reflector holding section further includes a3 rd mechanism that holds the reflection type diffraction grating so that the reflection type diffraction grating does not rotate along the main surface, and holds the reflecting mirror so that the reflecting mirror independently rotates along the main surface.
  6. 6. The optical kit of any one of claim 1-4, wherein, The reflector holding section further includes a 4 th mechanism that movably holds the corner reflector in the 2 nd direction.
  7. 7. The optical package of claim 5 wherein, The reflector holding section further includes a 4 th mechanism that movably holds the corner reflector in the 2 nd direction.
  8. 8. An optical device, wherein, The device is provided with: The optical kit of any one of claims 1-7; the laser source is held by the light source holding unit; The corner reflector, it keeps in the said reflector keeps the department; the 1 st opening member held in the 1 st opening member holding portion, and The 2 nd opening member is held by the 2 nd opening member holding portion.
  9. 9. An optical device constituting an optical system including an external resonator of a laser light source outputting laser light, wherein, The optical device is provided with: A light source holding part provided on a predetermined surface of the optical device for holding the laser light source, and A holding portion provided on the predetermined surface for holding the optical system, The optical system includes: A corner reflector configured by a reflection type diffraction grating that diffracts laser light emitted from the laser light source and incident from a1 st direction and reflects diffracted light of 0 th order toward a2 nd direction intersecting the 1 st direction, and a mirror that reflects the diffracted light from the reflection type diffraction grating toward a3 rd direction different from the 1 st direction and the 2 nd direction, and A 1 st aperture member and a 2 nd aperture member arranged in the 3 rd direction in such a manner as to form optical apertures through which the diffracted light from the corner reflector sequentially passes, The holding portion includes: a reflector holding portion for holding the corner reflector; a1 st opening member holding portion for holding the 1 st opening member, and A2 nd opening member holding portion for holding the 2 nd opening member, The reflector holding section includes a1 st mechanism capable of adjusting an optical axis of the diffracted light in each of the reflection type diffraction grating and the reflection mirror, The 1 st aperture member holding portion is located closer to the reflector holding portion side than an emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The 2 nd aperture member holding portion is located at a position on the opposite side of the reflector holding portion from the emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The optical system includes: A lens arranged between the laser source and the corner reflector, the laser light being input in the 1 st direction, and A 3 rd opening member arranged in such a manner as to form an optical opening through which the laser light passed through from the lens passes without the corner reflector, The laser light passing through the lens is incident on the reflection type diffraction grating, The holding portion has: a lens holding part for holding the lens, and A3 rd opening member holding portion for holding the 3 rd opening member, The reflector holding part comprises a2 nd mechanism capable of holding the whole of the corner reflector in a rotatable manner along the prescribed surface, The 1 st opening member holding portion and the lens holding portion are arranged in the 2 nd direction.
  10. 10. An optical device constituting an optical system including an external resonator of a laser light source outputting laser light, wherein, The optical device is provided with: A light source holding part provided on a predetermined surface of the optical device for holding the laser light source, and A holding portion provided on the predetermined surface for holding the optical system, The optical system includes: A corner reflector configured by a reflection type diffraction grating that diffracts laser light emitted from the laser light source and incident from a1 st direction and reflects diffracted light of 0 th order toward a2 nd direction intersecting the 1 st direction, and a mirror that reflects the diffracted light from the reflection type diffraction grating toward a3 rd direction different from the 1 st direction and the 2 nd direction, and A 1 st aperture member and a 2 nd aperture member arranged in the 3 rd direction in such a manner as to form optical apertures through which the diffracted light from the corner reflector sequentially passes, The holding portion includes: a reflector holding portion for holding the corner reflector; a1 st opening member holding portion for holding the 1 st opening member, and A2 nd opening member holding portion for holding the 2 nd opening member, The reflector holding section includes a1 st mechanism capable of adjusting an optical axis of the diffracted light in each of the reflection type diffraction grating and the reflection mirror, The 1 st aperture member holding portion is located closer to the reflector holding portion side than an emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The 2 nd aperture member holding portion is located at a position on the opposite side of the reflector holding portion from the emission surface of the laser light source held by the light source holding portion in the 3 rd direction, The laser source includes: A laser element for oscillating the laser light, and A cooling unit provided on the laser element on the opposite side of the emission surface of the laser beam, for cooling the laser element, The 2 nd opening member holding portion is located at a position closer to an opposite side of the reflector holding portion than the cooling portion in the 3 rd direction.

Description

Optical set and optical device Technical Field The present invention relates to an optical kit and an optical device. Background Non-patent document 1 describes an external cavity quantum cascade laser system. The laser system includes a quantum cascade laser, a collimator lens collimating a laser beam from the quantum cascade, a diffraction grating reflecting 0 th order diffraction light of the laser beam from the collimator lens toward a prescribed direction, and a mirror further reflecting 0 th order diffraction light from the diffraction grating. The diffraction grating and the mirror are mounted on a common rotatable platform. So that the reflection surface of the diffraction grating and the extension line of the reflection surface of the reflector are tightly crossed at the rotation axis of the platform. Prior art literature Non-patent literature Non-patent literature 1：R.Wysocki1,R.Lewicki,R.F.Curl,F.K.Tittel,L.Diehl,F.Capasso,M.Troccoli,G.Hofler,D.Bour,S.Corzine,R.Maulini,M.Giovannini,J.Faist"Widely tunable mode-hop free external cavity quantumcascade lasers for high resolution spectroscopy and chemical sensing( widely tunable mode-hopping free external cavity quantum cascade laser for high resolution spectroscopy and chemical sensing) "Applied PhysicsB, september 2008,Volume 92,Issue 3,pp305-311 Disclosure of Invention Problems to be solved by the invention By adopting the above-described configuration of the laser system, the position and direction of the output laser beam can be fixed during the tuning of the wavelength. In such an operation of the laser system, if the position and direction of the output light deviate when the user switches the laser source for changing the wavelength band, etc., the optical system of the subsequent stage needs to be adjusted in accordance with the deviation. Therefore, it is possible that the laser system side also requires restoration of the position and direction of the outgoing light after the exchange of the laser light sources. However, it is not easy to perform fine adjustment for setting the external resonator and also perform optical axis adjustment of the emitted light. Further, in the case where the diffraction grating is required to be simultaneously exchanged corresponding to the exchanged laser light source, a strict alignment requirement for fixing the position and direction of the output light at the time of completing the tuning process of the wavelength is also required, and the adjustment is still difficult to be performed. In addition, this adjustment is particularly difficult to perform in the case of processing invisible light such as infrared light as in non-patent document 1. The invention aims to provide an optical kit and an optical device capable of easily adjusting the position and direction of output light. Means for solving the problems The optical set of the present invention is an optical set for constituting an optical system including an external resonator of a laser light source outputting laser light, comprising a base including a main surface, a light source holding portion provided on the main surface for holding the laser light source, and a holding portion provided on the main surface for holding the optical system, the optical system comprising a corner reflector constituted by a reflection type diffraction grating which diffracts laser light incident from a1 st direction and reflects diffracted light of a 0 nd order toward a2 nd direction intersecting the 1 st direction, and a mirror which reflects diffracted light from the reflection type diffraction grating toward a 3 rd direction different from the 1 st direction and the 2 nd direction, and a1 st opening member and a2 nd opening member arranged in the 3 rd direction in such a manner as to form an optical opening through which diffracted light from the corner reflector sequentially passes, the holding portion comprising a reflector holding portion for holding the corner reflector, the 1 st opening member holding portion for holding the 1 st opening member, and the 2 nd opening member holding portion for holding the 2 nd opening member, the reflector holding portion being capable of holding the diffracted light of the laser light of the diffraction grating being positioned on the side of the light source on the opposite side of the light source from the 1 st opening holding portion in the optical axis of the light source holding portion being positioned on the opposite side of the light source holding portion to the 3 rd opening of the light source holding the light source from the light source. By using this optical set, the position and direction of the output light can be adjusted as follows. That is, first, the corner reflector is held in the reflector holding portion. Then, the light intensity of the diffracted light passing through the optical opening of the 1 st opening member via the corner reflector is monitored, and at the same time, the optical axis of the di