Search

CN-116221151-B - Turbo-molecular pump blade, turbine rotor and turbo-molecular pump

CN116221151BCN 116221151 BCN116221151 BCN 116221151BCN-116221151-B

Abstract

The invention relates to the technical field of turbomolecular pumps, in particular to a turbomolecular pump blade, a turbine rotor and a turbomolecular pump. The turbine molecular pump blade comprises a blade body, wherein the pressure surface and the suction surface of the blade body are curved surfaces, the thickness of the blade body gradually decreases from the root to the top, the thickness of the blade at the root of the blade body is 3.5mm-4.5mm, the thickness of the blade at the top of the blade body is 1.5mm-2.5mm, the inlet angle of the blade body is 25-35 degrees, the outlet angle of the blade body is 40-50 degrees, and the blade inclination angle of the blade body is 0-20 degrees. The design is smaller inlet angle and larger outlet angle, and can improve the capturing capability, the discharging capability and the reverse backflow preventing capability of the pumped body. Under the condition that other parameters are the same, the pumping speed and the compression ratio of the turbomolecular pump can be improved, and the pumping capacity of the turbomolecular pump under the low-pressure working condition can be greatly improved.

Inventors

  • WEN FUQIANG
  • ZHANG LIANG
  • CHEN LIN

Assignees

  • 北京中科九微科技有限公司

Dates

Publication Date
20260508
Application Date
20211203

Claims (9)

  1. 1. The turbomolecular pump blade is characterized in that the pressure surface (1) and the suction surface (2) of the blade body are curved surfaces, the thickness of the blade body gradually decreases from the root to the top, the thickness of the blade at the root of the blade body is 3.5mm-4.5mm, the thickness of the blade at the top of the blade body is 1.5mm-2.5mm, the inlet angle (3) of the blade body is 25-35 degrees, the outlet angle (4) of the blade body is 40-50 degrees, the blade inclination angle (5) of the blade body gradually increases from the inlet end to the outlet end, the blade inclination angle (5) of the inlet end of the blade body is 0 degrees, the blade inclination angle (5) of the outlet end of the blade body is 10-20 degrees, and the blade inclination angle of the outlet end of the blade body gradually increases from 10 degrees to 20 degrees from the root of the blade body to the top of the blade body.
  2. 2. The turbomolecular pump blade of claim 1 wherein the blade thickness of the blade body root is 4mm and the blade thickness of the blade body tip is 2mm.
  3. 3. A turbomolecular pump blade according to claim 1 or 2, characterized in that the inlet angle (3) of the blade body is 30 ° and the outlet angle (4) of the blade body is 45 °.
  4. 4. The turbine rotor is characterized by comprising an air extraction section, a transition section and a compression section which are sequentially connected, wherein multistage blades are axially arranged on the air extraction section, the transition section and the compression section; 16-33 turbomolecular pump blades according to any one of claims 1 to 3 are circumferentially arranged on each stage of blades on the air extraction section; Each stage of blades on the transition section are provided with 37-57 transition blades (7) along the circumferential direction; and 65-66 compression blades (8) are circumferentially arranged on each stage of blades on the compression section.
  5. 5. Turbine rotor according to claim 4, wherein the transition blades (7) have an inlet angle (3) of 25 ° -35 °, an outlet angle (4) of 40 ° -50 °, a blade pitch angle (5) of 0 ° -10 °, and a blade thickness of 1.5mm-3mm.
  6. 6. Turbine rotor according to claim 4, wherein the inlet angle (3) of the compression blades (8) is 20 ° -30 °, the outlet angle (4) is 40 ° -50 °, the blade pitch angle (5) is 0 ° -10 °, and the blade thickness is 1.5mm-3mm.
  7. 7. The turbine rotor of any one of claims 4 to 6 wherein there are no more than two stages of blades on the extraction section.
  8. 8. Turbine rotor according to any one of claims 4 to 6, wherein the pressure side (1) and the suction side (2) of the transition blades (7) and the compression blades (8) are curved.
  9. 9. A turbomolecular pump having a turbine rotor according to any one of claims 4 to 8.

Description

Turbo-molecular pump blade, turbine rotor and turbo-molecular pump Technical Field The invention relates to the technical field of turbomolecular pumps, in particular to a turbomolecular pump blade, a turbine rotor and a turbomolecular pump. Background As vacuum obtaining equipment, the compound turbomolecular pump has wide application in the industry of obtaining high vacuum, such as the semiconductor industry, and the chip processing and manufacturing requirements have higher vacuum environments, and the compound turbomolecular pump can pump most of air in the enclosed space so that the space reaches the required extreme vacuum environment. In order to reduce cost and shorten processing period, the traditional compound turbo molecular pump in the prior art generally sets the pressure surface and the suction surface of the blade of the molecular pump to be plane, the inclination angle from the root of the blade to the top of the blade is the same, when the pressure in the closed space is reduced, the pumping speed and the compression ratio of the blade can be greatly reduced, so that the gas with smaller molecular weight such as hydrogen can be left in the space, and the pumping effect is poor. Disclosure of Invention Therefore, the technical problem to be solved by the invention is to overcome the defect of poor air extraction effect of the turbomolecular pump with smaller molecular weight in the prior art, thereby providing a turbomolecular pump blade, a turbine rotor and a turbomolecular pump. In order to solve the technical problems, the invention provides a turbomolecular pump blade, wherein the pressure surface and the suction surface of a blade body are curved surfaces, the thickness of the blade body gradually decreases from the root to the top, the thickness of the blade at the root of the blade body is 3.5mm-4.5mm, the thickness of the blade at the top of the blade body is 1.5mm-2.5mm, the inlet angle of the blade body is 25-35 degrees, the outlet angle of the blade body is 40-50 degrees, and the blade inclination angle of the blade body is 0-20 degrees. Optionally, the blade thickness of the blade body root is 4mm, and the blade thickness of the blade body top is 2mm. Optionally, the inlet angle of the blade body is 30 ° and the outlet angle of the blade body is 45 °. Optionally, the blade inclination angle of the blade body gradually increases from the inlet end to the outlet end, the blade inclination angle of the inlet end of the blade body is 0 degrees, and the blade inclination angle of the outlet end of the blade body is 10 degrees to 20 degrees. The invention also provides a turbine rotor, which comprises an air extraction section, a transition section and a compression section which are sequentially connected, wherein multistage blades are axially arranged on each of the air extraction section, the transition section and the compression section; 16-33 turbomolecular pump blades are circumferentially arranged on each stage of blade on the air extraction section; Each stage of blades on the transition section are provided with 37-57 transition blades along the circumferential direction; and 65-66 compression blades are circumferentially arranged on each stage of blades on the compression section. Optionally, the inlet angle of the transition blade is 25-35 degrees, the outlet angle is 40-50 degrees, the blade inclination angle is 0-10 degrees, and the thickness of the blade is 1.5-3 mm. Optionally, the inlet angle of the compression blade is 20-30 degrees, the outlet angle is 40-50 degrees, the blade inclination angle is 0-10 degrees, and the thickness of the blade is 1.5-3 mm. Optionally, the suction section has no more than two stages of blades. Optionally, the pressure surface and the suction surface of the transition blade and the compression blade are curved surfaces. The invention also provides a turbomolecular pump with the turbine rotor. The technical scheme of the invention has the following advantages: 1. According to the turbomolecular pump blade provided by the invention, the pressure surface and the suction surface of the blade body are both curved surfaces, the thickness of the blade body gradually decreases from the root to the top, the thickness of the blade at the root of the blade body is 3.5mm-4.5mm, the thickness of the blade at the top of the blade body is 1.5mm-2.5mm, the inlet angle of the blade body is 25-35 degrees, the outlet angle of the blade body is 40-50 degrees, and the blade inclination angle of the blade body is 0-20 degrees. The turbomolecular pump blade provided by the invention is designed to have a smaller inlet angle, so that the capturing capability of an extracted body can be improved, and is designed to have a larger outlet angle, so that the discharging capability and the reverse backflow preventing capability of the extracted body can be improved. The pressure surface and the suction surface are both set to be curved surfaces, blades with differen