CN-116222485-B - Linear guide rail precision detection device based on planar motor

Abstract

The invention discloses a linear guide rail precision detection device based on a plane motor, which mainly comprises a probe, a spherical universal joint, a table frame, the plane motor and a data processing device, and can realize high-precision measurement of the straightness, the parallelism and the surface microscopic morphology of the linear guide rail. According to the invention, the plane motor is used as a driving device to drive the probe to perform two-degree-of-freedom translation and deflection in the test plane, so that the influence of vibration and friction wear on detection data is eliminated, the influence of installation errors on detection results is reduced by controlling the change of the pose of the probe, and the surface information of the guide rail is accurately acquired. And performing splicing fitting calculation on the detection data through a data processing device to finish guide rail precision measurement. The invention has the advantages of strong anti-interference capability and high supporting rigidity, and is particularly suitable for measuring scenes such as high-precision linear guide rails, ultra-long guide rails and the like.

Inventors

• FAN JINWEI
• LI ZHUANG
• PAN RI
• SUN GUN

Assignees

• 北京工业大学

Dates

Publication Date

20260505

Application Date

20230130

Claims (5)

1. 1. The linear guide rail precision detection device based on the plane motor is used as an application object of the detection device and comprises a machine tool body (1), a linear guide rail and bolts, and is characterized in that the detection device comprises a probe (4), a spherical universal joint (5), a table frame (6), a plane motor (7) and a data processing device (8), wherein the probe (4) is positioned at the upper end of the linear guide rail and is connected to the spherical universal joint (5) to ensure that the probe is kept in vertical contact with a detected plane of the linear guide rail, the spherical universal joint (5) is fixedly arranged on the table frame (6), the table frame (6) is positioned at the axial upper end of the plane motor (7) and is connected in a magnetic attraction mode, the plane motor (7) is positioned at one radial side of the machine tool body (1) and the linear guide rail and is arranged in parallel, and the data processing device (8) is connected with the probe (4) and analyzes and processes data acquisition results; The meter frame adopts a detachable structure and comprises a base, an upright post sensor, a cross beam and a cross beam sensor, wherein the base is positioned at the bottommost part and plays a role in stable fixation, the upright post is arranged at the axial upper end of the base through threads, the upright post sensor is embedded in the upright post and adopts a hollow structure, the cross beam is vertically arranged on the upright post through threads, the cross beam sensor is embedded in the cross beam, the upright post and the cross beam adopt splicing structures, the upright post sensor and the cross beam sensor respectively detect spatial position information of the centers of the upright post and the cross beam, detected data are transmitted to a planar motor controller, and corresponding current is output to a corresponding winding through the controller to generate angle accurate compensation.
2. 2. The linear guide rail precision detection device based on the planar motor, as claimed in claim 1, is characterized in that the spherical universal joint (5) can realize arbitrary angle deflection of 135 degrees in three-dimensional directions, and precision measurement of the top surface, the end surface and the side surface of the linear guide rail is completed.
3. 3. The linear guide rail precision detection device based on the planar motor, as claimed in claim 1, is characterized in that the meter frame (6) adopts a telescopic hollow structure, a displacement sensor is embedded, and the position information of the meter frame is obtained in real time.
4. 4. The linear guide rail precision detection device based on the planar motor, as set forth in claim 1, is characterized in that the data processing device (8) adopts a splicing algorithm to process data, and ultra-long linear guide rail precision measurement is completed.
5. 5. The linear guide rail precision detection device based on the planar motor according to claim 1, wherein the splicing algorithm integrated in the data processing device is an ICP algorithm, also called nearest neighbor iterative algorithm, the position information of the last section of measurement data point is recorded as M i , the next section of measurement data point is recorded as N j , the motion description is carried out through a rotation vector R (theta 0 ,θ x ,θ y ,θ z ) and a translation vector T (q x ,q y ,q z ), and the specific calculation steps are as follows: Firstly initializing coordinates, wherein a rotation vector and a peaceful vector are R (0) and T (0) respectively; Secondly, calculating the last-section end data M { M i |i=1, 2, L and Np } to obtain the nearest distance M i (k) of N data, solving by using a quaternion method if the two sections of data correspond, and judging the convergence of a calculation result; and obtaining optimal R and T, and completing the measurement data splicing.

Description

Linear guide rail precision detection device based on planar motor Technical Field The invention relates to the field of high-precision numerical control machine tool guide rail precision measurement, in particular to a linear guide rail precision detection device based on a planar motor. Background The precision numerical control machine tool is widely applied to the precision manufacturing fields of aviation, aerospace, vehicle engineering and the like, and the machining precision directly determines the national manufacturing level. The linear guide rail is used as a key functional part of the machine tool, is influenced by external load and temperature in the machining process, can be subjected to micro deformation, so that geometric errors occur, and the precision of the machine tool is reduced. The error compensation method developed around the geometric errors is an effective means for improving the machining precision of the machine tool, and the original geometric errors of the machine tool are counteracted by software, so that the correction of the errors is realized. The accurate error measurement is the premise of error compensation work, and at present, the machine tool error is measured by adopting a method of a machine tool interferometer, an interference mirror and a plane mirror group, and the geometric error value of the guide rail is directly obtained by placing the mirror group on a lathe body and controlling the feeding of a motion platform by utilizing a numerical control system. However, the method needs a plurality of instruments to be matched for use, increases the installation error of equipment, simultaneously causes vibration, friction and abrasion and other factors in the operation of a machine tool, and reduces the error detection precision. Disclosure of Invention The linear guide rail precision detection device based on the planar motor solves the problems of the prior art, eliminates the influence of friction and abrasion and vibration on a detection result, has the advantages of simplicity in operation, strong anti-interference capability, high supporting rigidity and the like, and is particularly suitable for high-precision and wide-range linear guide rail error measurement. The technical scheme of the invention is that the linear guide rail precision detection device based on the planar motor is characterized by mainly comprising a probe, a spherical universal joint, a meter frame, the planar motor and a data processing device. The guide rail system is used as an application object of the detection device and mainly comprises a machine tool body, a linear guide rail and bolts. The probe is located the upper end of linear guide to connect on spherical universal joint, guarantee to keep the perpendicular contact with linear guide's measured plane, spherical universal joint fixed mounting is on the table frame, and the table frame is located the axial upper end of planar motor, through the mode connection of magnetic attraction, and planar motor is located the radial one side of lathe bed and linear guide, is parallel arrangement, and data processing device is connected with the probe, and carries out analysis processing to the data acquisition result. The spherical universal joint can realize 135-degree arbitrary angle deflection in the three-dimensional direction of space, can finish the precision measurement of the top surface, the end surface and the side surface of the linear guide rail, the meter frame adopts a telescopic hollow structure, a displacement sensor is embedded in the meter frame, the position information of the meter frame can be acquired in real time, and the data processing device adopts a splicing algorithm to process data, so that the precision measurement of the ultra-long linear guide rail can be finished. The linear guide rail precision detection device based on the planar motor provided by the invention can realize the measurement of wide-range linear guide rail straightness error, parallelism error and surface microscopic morphology. Firstly, a plane motor is arranged on one side of a machine tool body to ensure parallel installation. The meter frame is fixed at the top end of the rotor of the planar motor in a magnetic attraction mode, the spherical universal joint is vertically clamped at the tail end of a cross beam of the meter frame, and the probe can be driven to deflect at any angle within 135 degrees in the three-dimensional direction of the probe. The meter frame adopts a telescopic structure, the inside of the meter frame adopts a hollow structure, a laser displacement sensor is embedded in the meter frame, the position information of an upright post and a cross beam of the meter frame can be measured, data are transmitted to a plane motor controller, and the plane motor is controlled to generate two-degree-of-freedom deflection by adjusting the size and the direction of winding current, so that the pose control of the probe is realized.