CN-116222975-B - Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system

CN116222975BCN 116222975 BCN116222975 BCN 116222975BCN-116222975-B

Abstract

The invention provides an auto-collimation detection system and method for conjugate position of digital single-light path or multi-light path optical system, the basic components of the detection system comprise a light source, a reticle, an imaging receiving device, a display, a spectroscope, a collimation objective lens component, a reflector, a displacement detection device and a focusing mechanism, the detection system formed by the combination of the basic components can accurately measure the conjugate position of the single-light path or multi-light path optical system. The specific embodiment flexibly sets the optical path layout of the optical system according to different applications under the condition of unchanged basic principle, has strong universality and is suitable for high-precision batch detection of the conjugate position of the optical system.

Inventors

ZHANG YI
MA GUOSHUN

Assignees

丹阳丹耀光学股份有限公司

Dates

Publication Date: 20260508
Application Date: 20230214

Claims (4)

1. A digital auto-collimation detection system for the conjugate position of single-optical-path or multi-optical-path optical system is composed of auto-collimation module, collimating objective lens module, displacement detector, reflector and focusing mechanism, The auto-collimation assembly comprises: A beam splitter; The reticle is arranged on one side of the spectroscope; a light source arranged at one side of the dividing plate; The imaging receiving device is electrically connected with the display and is arranged on one side of the spectroscope, and the target surface of the imaging receiving device and the dividing surface of the dividing plate are symmetrical relative to the light splitting surface of the spectroscope; a collimator objective assembly: The device is arranged between the optical system to be tested and the spectroscope, and the collimating objective lens component, the optical system to be tested, the spectroscope, the imaging receiving device and the reticle optical axis are aligned; a reflector, the reflecting surface of which is positioned at the conjugate position of a limited-distance or infinite-distance target of the optical system to be measured; The focusing mechanism is connected with the focusing component and is matched with the displacement detection device for use, and the displacement change of the focusing component is detected in real time; the dividing surface of the dividing plate and the target surface of the imaging receiving device are positioned at the focal surface of the collimating objective lens component; any structure of the collimating objective lens component, the optical system to be detected, the reflecting mirror and the auto-collimation component is arranged as a focusing component and is connected with the focusing mechanism.
2. The system of claim 1, wherein the collimating objective assembly provides a finite or infinite object for the optical system to be measured.
3. The system of claim 2 wherein the display displays an image of the reticle passing through the optical system to be measured, and wherein the reflective surface of the mirror is positioned at the conjugate position of the limited or infinite object of the optical system to be measured, the image of the reticle on the display being the sharpest.
4. A method of detecting an auto-collimation detection system for a conjugate position of a digital single-path or multi-path optical system as claimed in claim 1, comprising the steps of: Step S, establishing a reference detection system Designing a reference cylinder according to the characteristics of the optical system to be tested, arranging the reflecting surface of the reflector at the theoretical conjugate position of the optical system to be tested, and calibrating the optical system to be tested through a standard autocollimator to serve as a reference detection system; Step S, calibrating and detecting system The reference detection system is arranged on the detection system, the focusing mechanism is used for carrying out system focusing on the focusing component until clear reticle images appear on the display screen, the displacement detection device is reset to zero, and the reference detection system is dismounted; step S, detecting conjugate position deviation And installing the optical system to be tested on the detection system, and carrying out systematic focusing on the focusing component through the focusing mechanism until a clear reticle image appears on the display screen, wherein the reading of the displacement detection device is the conjugate position deviation with the standard value.

Description

Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system Technical Field The invention belongs to the technical field of optical system detection, and particularly relates to an auto-collimation detection system and method for a conjugate position of a digital single-light-path or multi-light-path optical system. Background The optical system can be divided into an infinite conjugate distance optical system and a finite conjugate distance optical system according to different conjugate distances, and can be divided into an afocal optical system and a focal optical system according to whether a focal point exists, and for the focal finite or infinite conjugate distance optical system or a part of optical systems in the middle of some optical systems, the distance from the conjugate position to a mounting surface is an important index, whether object image positions of a front optical system and a rear optical system are accurately connected or not is related, and finally whether the imaging relation of the whole optical system meets the design requirement or not is related, and the imaging relation of the whole optical system can only be assembled into the whole optical system for inspection without a conventional high-precision detection method at present, so that the conjugate position deviation of the optical system can not be found in time. Disclosure of Invention In order to solve the problems, the invention discloses an auto-collimation detection system and an auto-collimation detection method for the conjugate position of a digital single-optical-path or multi-optical-path optical system, which have strong universality, can be used for setting matched interfaces and applicable embodiments according to different types of optical systems, can be used for detecting the conjugate position of the single-optical-path to single-optical-path or multi-optical-path optical systems, and have the advantages of various embodiments, wide application range, good detection repeatability and correspondingly improved precision along with the improvement of the precision of related components. The technical thought of the technical scheme of the invention is that a reflector is arranged at the conjugate theoretical position of an optical system to be tested, an auto-collimation assembly is arranged at one side of the optical system to be tested, a collimation objective lens assembly provides a limited or infinite target to enter the optical system to be tested, if the conjugate position of the optical system to be tested coincides with a reflecting surface, light enters the optical system to be tested, the light passes through the optical system to be tested and then is converged on the reflector, the light is received by the collimation objective lens assembly after being reflected by the reflector and is finally converged on the target surface of an imaging receiving device of the auto-collimation assembly, a clear reticle image is presented by a display, if the conjugate image position of the optical system deviates from the reflecting mirror surface, a blurred reticle image appears on a display screen of the auto-collimation assembly, the reticle image on the display screen can be regulated clearly by regulating the position of a focusing component in a detection system, in the regulation process, the displacement change of the focusing component is detected by setting a displacement detection device, and finally, the accurate conjugate position deviation value can be obtained. In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: In a first aspect, the invention provides an auto-collimation detection system base component for the conjugate position of a digital single-light-path or multi-light-path optical system, which comprises an auto-collimation assembly, a collimation objective lens assembly, a displacement detection device, a reflector and a focusing mechanism, The auto-collimation assembly comprises: A beam splitter; The reticle is arranged on one side of the spectroscope; a light source arranged at one side of the dividing plate; The imaging receiving device is electrically connected with the display and is arranged on one side of the spectroscope, and the target surface of the imaging receiving device and the dividing surface of the dividing plate are symmetrical relative to the light splitting surface of the spectroscope; a collimator objective assembly: The device is arranged between the optical system to be tested and the spectroscope, and the collimating objective lens component, the optical system to be tested, the spectroscope, the imaging receiving device and the reticle optical axis are aligned; a reflector, the reflecting surface of which is positioned at the conjugate position of a limited-distance or infinite-distance target of the optical system to be measured; and the focusi