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CN-116234868-B - Elastomer composition, sealing material, and method for producing sealing material

CN116234868BCN 116234868 BCN116234868 BCN 116234868BCN-116234868-B

Abstract

An embodiment of the present invention relates to an elastomer composition, a sealing material, or a method for producing a sealing material, wherein the elastomer composition contains a crosslinkable fluorine-containing elastomer (A1) other than a perfluoroelastomer having a fluorine content of 69 mass% or more and a crosslinkable fluorine-containing elastomer (A2) other than a perfluoroelastomer having a fluorine content of 55 to 68 mass%, and the content of the fluorine-containing elastomer (A1) is 60 to 95 mass% relative to 100 parts by mass of the total of the fluorine-containing elastomers (A1) and (A2).

Inventors

  • Yaze Okazaki
  • OHSUMI NAOKI

Assignees

  • 株式会社华尔卡

Dates

Publication Date
20260508
Application Date
20210909
Priority Date
20200928

Claims (6)

  1. 1. An elastomer composition comprising a thermoplastic elastomer and a thermoplastic elastomer, it comprises A crosslinkable fluorine-containing elastomer (A1) other than a perfluoroelastomer having a fluorine content of 69 mass% or more, A crosslinkable fluorine-containing elastomer (A2) other than a perfluoroelastomer having a fluorine content of 55 to 68 mass%, At least one ethylenically unsaturated bond-containing compound (B) selected from the group consisting of compounds having a perfluoro skeleton having an ethylenically unsaturated bond and compounds having a siloxane skeleton having an ethylenically unsaturated bond, The content of the fluorine-containing elastomer (A1) is 65-95% by mass relative to 100% by mass of the total of the fluorine-containing elastomers (A1) and (A2), The content of the compound (B) is 0.5 to 25 parts by mass based on 100 parts by mass of the total of the fluoroelastomers (A1) and (A2).
  2. 2. The elastomer composition according to claim 1, wherein the fluoroelastomers (A1) and (A2) are peroxide crosslinkable fluoroelastomers.
  3. 3. The elastomeric composition of claim 1 or 2, wherein a cross-linking agent is included.
  4. 4. The elastomer composition according to claim 1 or 2, wherein the filler is contained in an amount of 5 parts by mass or less based on 100 parts by mass of the total of the fluoroelastomers (A1) and (A2).
  5. 5. A sealing material obtained from the elastomer composition according to any one of claims 1 to 4.
  6. 6. A method for producing a sealing material, comprising the step of crosslinking the elastomer composition according to any one of claims 1 to 4.

Description

Elastomer composition, sealing material, and method for producing sealing material Technical Field One embodiment of the present invention relates to an elastomer composition, a sealing material, or a method for producing a sealing material. Background Conventionally, a sealing material has been widely used in various applications, and among these applications, as an example of the application of the sealing material with the largest load on the sealing material, a sealing material used in a semiconductor manufacturing apparatus or the like is given. As such a sealing material, a crosslinkable fluorine-containing elastomer such as a fluorine-containing elastomer (FKM) or a perfluoroelastomer (FFKM) is used in order to obtain a sealing material excellent in plasma resistance and radical resistance. For example, patent document 1 discloses a sealing material characterized by containing a predetermined amount of FFKM and FKM. A sealing material made of such a crosslinkable fluorine-containing elastomer is generally produced by using an elastomer composition obtained by blending an additive such as a crosslinking agent or a crosslinking aid into the crosslinkable fluorine-containing elastomer, and molding and crosslinking the elastomer composition. Prior art documents Patent literature Patent document 1 Japanese patent No. 4628814 Disclosure of Invention Technical problem to be solved by the invention As described above, when an additive is blended with a crosslinkable fluorine-containing elastomer to form an elastomer composition, it is necessary to uniformly mix the components in the elastomer composition in order to produce a sealing material exhibiting desired physical properties from the elastomer composition. However, in the case of using a conventional crosslinkable fluorine-containing elastomer, particularly in the case of using a liquid or oily component, a long time is required for preparing such a uniform elastomer composition, and there is room for improvement in this regard. In addition, when a sealing material is formed from the produced elastomer composition with high productivity, the elastomer composition is usually produced into a sheet by a tabletting process (japanese: step-out process). This sheeting step is usually performed by passing the elastomer composition between rolls, but when the conventional elastomer composition is used, the elastomer composition may not be caught between rolls or may not be smoothly wound around rolls, and thus sheets (poor sheeting properties) may not be easily produced. Accordingly, there is room for improvement in the formability of the existing elastomer compositions. In addition, as a sealing material formed from a conventional elastomer composition, particularly a sealing material used for applications where particle generation is a problem in a plasma atmosphere or the like, a sealing material to which no filler is added or a small amount of filler is added is used, and there is room for improvement in terms of tensile stress (100% mo) at 100% elongation. An embodiment of the present invention can form a uniform elastomer composition in a short time, and provides an elastomer composition excellent in formability, which can form a sealing material having high tensile stress (100% mo) at 100% elongation. Technical proposal adopted for solving the technical problems The present inventors have conducted intensive studies to solve the above-described problems, and as a result, have found that the above-described problems can be solved by the following configuration examples, and have completed the present invention. The configuration of the present invention is described below. [1] An elastomer composition comprising a crosslinkable fluorine-containing elastomer (A1) other than a perfluoroelastomer having a fluorine content of 69 mass% or more and a crosslinkable fluorine-containing elastomer (A2) other than a perfluoroelastomer having a fluorine content of 55 to 68 mass%, wherein the content of the fluorine-containing elastomer (A1) is 60 to 95 mass% relative to 100 parts by mass of the total of the fluorine-containing elastomers (A1) and (A2). [2] The elastomer composition according to [1], wherein the fluoroelastomers (A1) and (A2) are peroxide-crosslinkable fluoroelastomers. [3] The elastomer composition according to [1] or [2], wherein the elastomer composition comprises at least one ethylenically unsaturated bond-containing compound (B) selected from the group consisting of a compound having a perfluoro skeleton having an ethylenically unsaturated bond and a compound having a siloxane skeleton having an ethylenically unsaturated bond. [4] The elastomer composition according to any one of [1] to [3], wherein the elastomer composition comprises a crosslinking agent. [5] The elastomer composition according to any one of [1] to [4], wherein the filler is contained in an amount of 5 parts by mass or less based on 100 parts by mass of the total of the fluoroe