CN-116250071-B - Industrial robot hand and industrial robot

Abstract

The invention provides a hand of an industrial robot capable of being used differently according to purposes while suppressing manufacturing cost and an industrial robot provided with the hand of the industrial robot. The hand has a support portion configured to be able to support either one of the suction wafer loading portion and the chucking wafer loading portion, the support portion having an air flow path connected to the suction hole in a state of supporting the suction wafer loading portion, and either one of a suction unit including a connection member connecting a tip end of the air pipe and the air flow path and the chucking unit including an attachment portion for attaching the other one of the suction unit and the chucking unit, the chucking unit being configured to be able to press an end surface of the wafer in a state of supporting the chucking wafer loading portion.

Inventors

• KAINO SHIGEYUKI

Assignees

• 日本电产三协株式会社

Dates

Publication Date

20260512

Application Date

20210915

Priority Date

20201002

Claims (3)

1. 1. An industrial robot hand configured to be capable of replacing a first loading unit that loads a conveyance object and has an end surface contact member including an abutment surface against which an end surface of the conveyance object is brought into contact, and a second loading unit that loads the conveyance object and has a suction hole that sucks and holds the conveyance object, The hand of the industrial robot includes a support portion configured to be able to support either one of the first loading portion and the second loading portion, The support part is provided with an air flow path which is connected with the suction hole in a state of supporting the second loading part; a first unit including a connection member for connecting a tip end of an air pipe accommodated in the industrial robot to the air flow path, and And a mounting portion for mounting a second unit capable of pressing an end surface of the object to be conveyed loaded on the first loading portion in a state of supporting the first loading portion.
2. 2. The hand of an industrial robot according to claim 1, wherein, The second unit is provided with a cylinder which, The air pipe is configured to be connectable to the connecting member of the first unit and the intake/exhaust port of the cylinder.
3. 3. An industrial robot comprising: A hand of an industrial robot according to claim 1 or 2; the air piping; an arm for supporting the hand, and An arm support portion for supporting the arm.

Description

Industrial robot hand and industrial robot Technical Field The present invention relates to a hand of an industrial robot and an industrial robot provided with the hand of the industrial robot. Background Conventionally, an industrial robot for transporting an object to be transported such as a semiconductor wafer is known. For example, patent document 1 discloses an industrial robot having four hands for loading an object to be transported, an arm to which the four hands are rotatably connected at a distal end side, and a body portion to which a proximal end side of the arm is rotatably connected. In the industrial robot, when four hands are used as a pair of first hands and a pair of second hands, a holding portion of either one of the pair of first hands and the pair of second hands is provided with an end face abutting member having an abutting face against which an end face of a conveying object abuts, and a pressing mechanism for pressing the conveying object so that the end face of the conveying object is pressed against the abutting face. The holding portion of the other hand of the pair of first hands and the pair of second hands is provided with a suction hole for sucking and holding the object to be conveyed. Prior art literature Patent literature Patent document 1 Japanese patent application laid-open No. 2017-119326 Disclosure of Invention Technical problem to be solved by the invention As a method for holding a semiconductor wafer in an industrial robot, as shown in patent document 1, a clamp holding method for holding a wafer by pressing an end face (outer peripheral face) of the wafer and a suction holding method for holding the wafer by suction are known. Even in the same industrial robot, there are cases where it is desired to switch between the clamping holding system and the suction holding system depending on the application. Thus, a hand can be manufactured that incorporates both a unit for the pinch-hold mode and a unit for the suction-hold mode. However, such a hand is costly to manufacture and the sales amount to the user is high. Thus, an unnecessary fee is paid to the user who does not need a party's unit. The purpose of the present invention is to provide an industrial robot hand that can be used differently according to the application while suppressing the manufacturing cost, and an industrial robot having the industrial robot hand. Technical proposal adopted for solving the technical problems The hand of the industrial robot according to one aspect of the present invention is configured to be capable of replacing a first loading unit that loads a conveyance target and has an end face abutting member including an abutting face against which an end face of the conveyance target abuts, and a second loading unit that loads the conveyance target and has a suction hole that sucks and holds the conveyance target, wherein the hand of the industrial robot is provided with a support unit that is configured to be capable of supporting either one of the first loading unit and the second loading unit, the support unit is provided with an air flow path that is connected to the suction hole in a state of supporting the second loading unit, only one of a first unit and a second unit that includes a connecting member that connects a front end of an air pipe accommodated in the industrial robot to the air flow path, the second unit being capable of pressing the conveyance target loaded on the end face of the first loading unit in a state of supporting the first loading unit, and the other one of the first unit and the second unit being mounted to the first unit. An industrial robot according to an aspect of the present invention includes the hand, the air pipe, an arm for supporting the hand, and an arm support portion for supporting the arm. Effects of the invention According to the present invention, it is possible to provide an industrial robot hand that can be used differently according to the application while suppressing the manufacturing cost, and an industrial robot having the industrial robot hand. Drawings Fig. 1 is a diagram for explaining a schematic configuration of a manufacturing system according to an embodiment of the present invention from the front side. Fig. 2 is a diagram for explaining a schematic configuration of the manufacturing system shown in fig. 1 from above. Fig. 3 is a side view of the horizontal multi-joint robot shown in fig. 1. Fig. 4 is a side view of the horizontal multi-joint robot shown in fig. 3 in a state in which the arm support is being raised. Fig. 5 is a top view of the horizontal multi-joint robot shown in fig. 3. Fig. 6 is a schematic diagram showing a detailed structure in the vicinity of the hand support portion shown in fig. 5. Fig. 7 is a schematic view showing a state in which the clamping unit is attached to the support portion of fig. 6. Fig. 8 is a schematic view showing a state in which a wafer mounting portion for clamping is mounted on th