CN-116265894-B - Method and device for analyzing damage cause of excimer laser window element

CN116265894BCN 116265894 BCN116265894 BCN 116265894BCN-116265894-B

Abstract

The application discloses an excimer laser window element damage cause analysis method, which comprises the steps of determining the damage type of a window element to be analyzed by acquiring characteristic information corresponding to damage information of the window element to be analyzed, determining the actual damage form of the window element to be analyzed, wherein the damage type of the window element to be analyzed is obtained by using the same or similar operation means in the prior art, so that damage corresponding to the formed damage type is reproduced in a non-damaged area, the reproduced damage is compared with the damage information, the damage information is consistent with the damage information of the window element to be analyzed, and the damage cause of the window element to be analyzed is determined by using the same or similar operation means as the formed damage type. The application can accurately determine the cause of the damage category and improve the operation stability of the excimer laser by determining the damage category of the window element to be analyzed and combining the same or similar operation means for forming the damage category to reproduce the damage.

Inventors

LIU BIN
CHEN WENBIN
XU XIANGYU
LIU GUANGYI
JIANG RUI
GUO XIN
ZHU XINGHONG

Assignees

北京科益虹源光电技术有限公司

Dates

Publication Date: 20260512
Application Date: 20211216

Claims (10)

1. An excimer laser window element damage cause analysis method, comprising: Obtaining damage information of a window element to be analyzed, and obtaining characteristic information of damage of the window element to be analyzed according to the damage information; Determining the damage category of the window element to be analyzed according to the characteristic information; Repeating damage in a non-damaged area of the window element to be analyzed according to the preset same or similar operation means forming the damage category; And collecting repeated damage information, and comparing the repeated damage information with the damage information of the window element to be analyzed to determine the damage reason of the window element to be analyzed.
2. The method for analyzing the damage cause of the window element of the excimer laser according to claim 1, wherein the obtaining damage information of the window element to be analyzed, and obtaining the characteristic information of the damage of the window element to be analyzed according to the damage information, comprises: Determining a damaged area of a window element to be analyzed; Obtaining morphology information corresponding to the damaged area; and obtaining the characteristic information of the damage of the window element to be analyzed according to the morphological information.
3. The method for analyzing the damage cause of the window element of the excimer laser according to claim 1 or 2, wherein the characteristic information of the window element damage to be analyzed includes melting ablation characteristic information, local embrittlement or shattering characteristic information, and propagating crack and no melting, local embrittlement or shattering characteristic information exists; correspondingly, the determining the damage category of the window element to be analyzed according to the characteristic information includes: determining the damage category of the window element to be analyzed according to the melting ablation characteristic information; determining the damage category of the window element to be analyzed according to the local brittle fracture or chipping characteristic information; and determining the damage category of the window element to be analyzed according to the expansion crack and the absence of melting, local embrittlement or bursting characteristic information.
4. The method according to claim 3, wherein the damage class of the window element to be analyzed determined from the melting ablation characteristic information and the damage class of the window element to be analyzed determined from the local brittle fracture or chipping characteristic information respectively include a contaminant induced damage class; The method for analyzing the window element to be analyzed before the damage is repeated in the non-damaged area according to the same or similar operation means which are preset and form the damage category further comprises the following steps: Obtaining element information corresponding to the damaged area; comparing the element information with preset phase matrix information, and if the element information is consistent with the preset phase matrix information, determining that the damage type of the window element to be analyzed is a laser irradiation damage type; And if the element information and the preset phase matrix information have different elements, determining that the damage reason of the window element to be analyzed corresponding to the pollutant-induced damage category of the window element to be analyzed is the pollutant-induced damage reason.
5. The method according to claim 4, wherein after determining that the damage class of the window element to be analyzed is the laser irradiation damage class, the method comprises repeating damage in the non-damaged area of the window element to be analyzed according to the same or similar operation means as the one for forming the damage class, which is preset, including repeating the first morphological feature of damage in the non-damaged area of the window element to be analyzed according to the deep ultraviolet laser irradiation experiment for forming the laser irradiation damage class; Correspondingly, the collecting the information of the repeated damage and comparing the information with the damage information of the window element to be analyzed to determine the damage reason of the window element to be analyzed comprises the following steps: and acquiring the first morphological characteristics, comparing the first morphological characteristics with the damage information of the window element to be analyzed, and determining that the damage cause of the window element to be analyzed is the damage cause of laser irradiation if the morphological information in the damage information is consistent with the first morphological characteristics.
6. The method of claim 5, further comprising determining that the damage class of the window element to be analyzed is a metal contaminant damage class if the first morphology feature is not reproduced in the non-damaged area of the window element to be analyzed according to a predetermined deep ultraviolet laser irradiation experiment that forms the laser irradiation damage class or if the morphology information in the damage information of the window element to be analyzed is different from the first morphology feature.
7. The method according to claim 6, wherein after determining that the damage class of the window element to be analyzed is a metal contaminant damage class, the repeating damage in the non-damaged area of the window element to be analyzed according to the same or similar operation means as that of forming the damage class, which is preset, comprises: Determining whether the surface of the damaged area of the window element to be analyzed is an inner surface, if so, repeating the second morphological characteristics of damage in the non-damaged area of the window element to be analyzed according to a preset metal pollutant induced damage experiment forming a metal pollutant damage category; Correspondingly, the collecting the information of the repeated damage and comparing the information with the damage information of the window element to be analyzed to determine the damage reason of the window element to be analyzed comprises the following steps: Collecting the second morphological characteristics of the repeated damage, comparing the second morphological characteristics with the damage information of the window element to be analyzed, and if the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological characteristics, determining that the damage cause of the window element to be analyzed is the electrode pollutant induced damage cause; If the morphological information in the damage information of the window element to be analyzed and the second morphological characteristics have distinguishing characteristic information, and according to a preset second morphological characteristic that the damage is not repeated in a non-damaged area of the window element to be analyzed according to a metal pollutant induced damage experiment forming a metal pollutant damage category, determining the damage category of the window element to be analyzed as pollutant and surface damage category, and determining the damage cause of the window element to be analyzed corresponding to the pollutant and the surface damage category as pollutant and surface damage cause; And determining whether the surface of the damaged area of the window element to be analyzed is an outer surface, if so, determining the damage type of the window element to be analyzed as pollutant and surface damage type, and determining the damage reason of the window element to be analyzed corresponding to the pollutant and surface damage type as pollutant and surface damage reason.
8. The method according to claim 7, wherein for determining whether the surface of the damaged area of the window element to be analyzed is an inner surface, if so, after the determination that the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category is not the contaminant and surface damage cause, mechanically loading and temperature field loading the window element to be analyzed, the determination of the damage category of the window element to be analyzed according to the local brittle fracture or chipping characteristic information further includes mechanical loading and metal contaminant damage category; Correspondingly, the method for reproducing damage in the non-damaged area of the window element to be analyzed according to the same or similar operation means which are preset and form damage types comprises the steps of reproducing the third morphological characteristics of damage in the non-damaged area of the window element to be analyzed according to the preset metal pollutant induced damage experiment which forms mechanical loading and metal pollutant damage types; Correspondingly, the collecting the information of the repeated damage and comparing the information with the damage information of the window element to be analyzed to determine the damage reason of the window element to be analyzed comprises the following steps: Collecting the third morphological characteristics of the repeated damage, comparing the third morphological characteristics with the damage information of the window element to be analyzed, and if the morphological information in the damage information of the window element to be analyzed is consistent with the third morphological characteristics, determining that the damage cause of the window element to be analyzed is electrode pollutant induced damage and mechanical loading cause; if the morphological information in the damage information of the window element to be analyzed and the third morphological feature have distinguishing characteristic information, and the third morphological feature of the damage is not reproduced in the non-damage area of the window element to be analyzed according to a preset metal pollutant induced damage experiment forming mechanical loading and metal pollutant damage categories, determining that the damage reason of the window element to be analyzed is the pollutant induced damage reason.
9. The method according to claim 3, wherein after determining the damage class of the window element to be analyzed based on the propagating crack and the absence of melting, local embrittlement or chipping characteristic information, the window element to be analyzed is mechanically loaded and temperature field loaded; correspondingly, the determining the damage category of the window element to be analyzed according to the expansibility crack and the absence of melting, local embrittlement or bursting characteristic information further comprises loading operation damage category; Correspondingly, the method for reproducing damage in the non-damaged area of the window element to be analyzed according to the same or similar operation means which are preset and form damage types comprises the steps of reproducing the sixth morphological characteristics of damage in the non-damaged area of the window element to be analyzed according to a preset loading damage experiment which forms loading operation damage types; Correspondingly, the collecting the information of the repeated damage and comparing the information with the damage information of the window element to be analyzed to determine the damage reason of the window element to be analyzed comprises the following steps: Collecting the sixth morphological characteristics of the repeated damage, comparing the sixth morphological characteristics with the damage information of the window element to be analyzed, and if the morphological information in the damage information of the window element to be analyzed is consistent with the sixth morphological characteristics, determining that the damage cause of the window element to be analyzed is laser irradiation damage and mechanical loading; If the morphological information in the damage information of the window element to be analyzed and the sixth morphological feature have distinguishing characteristic information, and the sixth morphological feature of the damage is not reproduced in the non-damaged area of the window element to be analyzed according to a preset loading damage experiment forming a loading operation damage type, determining that the damage cause of the window element to be analyzed is pollutant and surface damage cause corresponding to the initial state of the window element to be analyzed.
10. An excimer laser window element damage cause analysis apparatus, comprising: The characteristic information acquisition unit is used for acquiring damage information of the window element to be analyzed and acquiring the characteristic information of the damage of the window element to be analyzed according to the damage information; the damage type determining unit is used for determining the damage type of the window element to be analyzed according to the characteristic information; a damage reproduction unit for reproducing damage in a non-damaged area of the window element to be analyzed according to a preset operation means which is the same as or similar to the operation means forming the damage category; And the damage cause determining unit is used for collecting the repeated damage information and comparing the repeated damage information with the damage information of the window element to be analyzed so as to determine the damage cause of the window element to be analyzed.

Description

Method and device for analyzing damage cause of excimer laser window element Technical Field The application relates to the technical field of excimer laser, in particular to an excimer laser window element damage cause analysis method and an excimer laser window element damage cause analysis device. Background With the increasing demands of the semiconductor industry for semiconductor chip manufacturing processes, lithographic apparatus light sources have evolved from original mercury lamp light sources to current deep ultraviolet light sources. Deep ultraviolet light has higher resolution, but also has larger single photon energy, and is easy to damage optical elements. In order to avoid problems of light shrinkage, color center and the like of the optical element caused by the excessively high absorptivity of the optical element to the light source, the existing deep ultraviolet laser adopts CaF2 (calcium fluoride) with extremely high transmissivity to the light source in the wave band as the optical element, and realizes the protection of the optical element by a film coating mode and the like. However, there is a special kind of optical element in excimer lasers, namely a window element, which not only needs to have high transmittance for light with specific wavelength or wavelength band, but also needs to isolate the external environment and protect the internal devices. The window element carries light, force, contaminants, etc. during use of the excimer laser, which may cause other effects such as photo-thermal effects, optical power effects, photochemical reactions, etc. of the window element, thereby causing damage to the window element. Therefore, the reasons for the damage of the window element are not only one, but how to accurately determine the reasons for the damage of the window element, so as to improve the operation stability of the excimer laser, and the problem to be solved by those skilled in the art is urgent. Disclosure of Invention The embodiment of the application provides an analysis method for damage reasons of a window element of an excimer laser, which aims to solve the problem of how to accurately determine the damage reasons of the window element in the prior art so as to improve the operation stability of the excimer laser. The embodiment of the application provides an excimer laser window element damage cause analysis method, which comprises the steps of obtaining damage information of a window element to be analyzed, obtaining damage characteristic information of the window element to be analyzed according to the damage information, determining damage types of the window element to be analyzed according to the characteristic information, reproducing damage in a non-damage area of the window element to be analyzed according to preset operation means which are the same as or similar to the operation means forming the damage types, collecting the reproduced damage information, and comparing the reproduced damage information with the damage information of the window element to be analyzed to determine the damage cause of the window element to be analyzed. Optionally, the obtaining damage information of the window element to be analyzed, and obtaining the feature information of the damage of the window element to be analyzed according to the damage information, wherein the obtaining comprises determining a damage area of the window element to be analyzed, obtaining morphology information corresponding to the damage area, and obtaining the feature information of the damage of the window element to be analyzed according to the morphology information. Optionally, the characteristic information of the damage of the window element to be analyzed comprises melting ablation characteristic information, local embrittlement or cracking characteristic information and expansibility crack, and no melting, local embrittlement or cracking characteristic information exists; Correspondingly, the determining the damage category of the window element to be analyzed according to the characteristic information comprises determining the damage category of the window element to be analyzed according to the melting ablation characteristic information, determining the damage category of the window element to be analyzed according to the local brittle fracture or chipping characteristic information, and determining the damage category of the window element to be analyzed according to the expansion crack and the absence of melting, local brittle fracture or chipping characteristic information. Optionally, the damage category of the window element to be analyzed determined according to the melting ablation characteristic information and the damage category of the window element to be analyzed determined according to the local brittle fracture or chipping characteristic information respectively comprise pollutant-induced damage categories, the method further comprises the steps of obtaining element informa