CN-116481418-B - High-sensitivity angle detection device based on tunnel magnetoresistance effect

Abstract

The invention belongs to the technical field of angle detection devices, and particularly relates to a tunnel magnetoresistance effect-based high-sensitivity angle detection device which comprises an upper substrate part and a lower substrate part, wherein the upper substrate part is arranged above the lower substrate part, the upper substrate part and the lower substrate part are parallel to each other, and the upper substrate part and the lower substrate part are in non-contact. The upper substrate part comprises a fixed substrate, square hollows, a magnetic resistance power wire, a tunnel magnetic resistance element, a magnetic resistance signal transmission line and a glass substrate, wherein the fixed substrate is arranged above the lower substrate part, and the square hollows are formed in the center of the fixed substrate. The invention uses tunnel magnetic resistance effect to detect, which can easily realize the full circle detection of the angle sensor, and the phase shift circuit in the signal processing module combines with the subdivision circuit to improve the resolution of measurement, thus providing thought for other magnetic angle sensors to realize the full circle high-precision angle measurement.

Inventors

• JIN LI
• RUAN YI
• LI MENGWEI
• ZHONG YUJIE
• LI WANG

Assignees

• 中北大学

Dates

Publication Date

20260505

Application Date

20230510

Claims (4)

1. 1. A tunnel magneto-resistance effect-based high-sensitivity angle detection device is characterized by comprising an upper substrate part (1) and a lower substrate part (2), wherein the upper substrate part (1) is arranged above the lower substrate part (2), the upper substrate part (1) and the lower substrate part (2) are mutually parallel, the upper substrate part (1) and the lower substrate part (2) are in non-contact, the upper substrate part (1) comprises a fixed substrate (101), square hollows (102), magneto-resistance power supply wires (103), tunnel magneto-resistance elements (104), magneto-resistance signal transmission wires (105) and a glass substrate (106), the fixed substrate (101) is arranged above the lower substrate part (2), the square hollows (102) are formed in the center of the fixed substrate (101), one end of each tunnel magneto-resistance element (104) is electrically connected with the corresponding power supply wire (103), the other end of each tunnel magneto-resistance element (104) is electrically connected with the corresponding magneto-resistance signal transmission wire (105), each tunnel magneto-resistance element (104) is electrically connected with a magneto-resistance signal transmission wire (104) through the corresponding magneto-resistance signal transmission wire (105) through the power supply wire (104), the phase shifting module (3) is electrically connected with a high-multiple subdivision processing module (4).
2. 2. The tunnel magnetoresistance effect-based high sensitivity angle detection device according to claim 1, wherein the tunnel magnetoresistance element (104) is disposed at the center of the square hollow (102), a glass substrate (106) is mounted under the square hollow (102) of the fixed substrate (101), and the tunnel magnetoresistance element (104) is fixed on the glass substrate (106).
3. 3. A tunnel magnetoresistance effect based high sensitivity angle detection device according to claim 1, wherein the lower substrate portion (2) comprises a permanent magnet (201), an angle displacement stage (202), a lift stage plane (203), the angle displacement stage (202) being fixed on the lift stage plane (203), the permanent magnet (201) being disposed at a center of the angle displacement stage (202).
4. 4. A tunnel magnetoresistance effect based high sensitivity angle detection device according to claim 3, wherein the permanent magnet (201) is disposed directly under the tunnel magnetoresistance element (104), and wherein no contact is made between the permanent magnet (201) and the tunnel magnetoresistance element (104).

Description

High-sensitivity angle detection device based on tunnel magnetoresistance effect Technical Field The invention belongs to the technical field of angle detection devices, and particularly relates to a tunnel magnetoresistance effect-based high-sensitivity angle detection device. Background The angle measuring device is widely applied to various industrial fields, particularly to the fields of automobiles, automation, intelligent industries, and plays a key role in the fields of automatic driving, robots, automatic production and the like. Conventional angle sensors employ resistive or strain gauge angle measurement methods. Although the structure and principle of the method are simpler, certain abrasion and error are inevitably generated in practical application due to the contact between the sensor and the detected object, so that the measurement accuracy is affected. The non-contact type angular displacement sensor can well avoid the problems, and the non-contact type angular displacement sensor currently on the market can be divided into an optical type, a capacitive type and a magnetic resistance type in principle. The optical angle measuring device has higher manufacturing cost and extremely high requirements on the precision of the manufacturing process, the measuring precision is often limited by the process level, and the problems of weak anti-interference capability, incapability of working under severe conditions, difficulty in integration and the like exist. Disclosure of Invention Aiming at the technical problems that the non-contact angle sensor on the market at present has weak anti-interference capability, cannot work under severe conditions and is difficult to integrate, the invention provides a tunnel magnetoresistance effect-based high-sensitivity angle detection device, and the high-sensitivity angle detection is realized by combining a 90-degree phase shifting circuit and a high subdivision multiple subdivision circuit through designing the tunnel magnetoresistance effect angle measurement device, so that the angle measurement precision can be improved by one to two orders of magnitude, and the angle detection device has the advantages of simple integral structure, simple process manufacturing, strong practicability and easiness in detection. In order to solve the technical problems, the invention adopts the following technical scheme: The utility model provides a high sensitivity angle detection device based on tunnel magnetoresistance effect, includes upper substrate part and lower floor's substrate part, upper substrate part sets up the top at lower floor's substrate part, upper substrate part and lower floor's substrate part are parallel to each other, contactless between upper substrate part and the lower floor's substrate part. The upper substrate part comprises a fixed substrate, square hollows, a magnetic resistance power wire, a tunnel magnetic resistance element, a magnetic resistance signal transmission line and a glass substrate, wherein the fixed substrate is arranged above the lower substrate part, and the square hollows are formed in the center of the fixed substrate. The tunnel magnetic resistance element is arranged at the center of the square hollow, a glass substrate is arranged below the square hollow of the fixed substrate, and the tunnel magnetic resistance element is fixed on the glass substrate. One end of the tunnel magnetic resistance element is electrically connected with a magnetic resistance power wire, and the other end of the tunnel magnetic resistance element is electrically connected with a magnetic resistance signal transmission line. The lower substrate part comprises a permanent magnet, an angle displacement table and a lifting table plane, wherein the angle displacement table is fixed on the lifting table plane, and the permanent magnet is arranged at the center of the angle displacement table. The permanent magnet is arranged right below the tunnel magneto-resistance element, and the permanent magnet is in no contact with the tunnel magneto-resistance element. The tunnel magnetic resistance element is electrically connected with a power supply through a magnetic resistance power supply lead, the tunnel magnetic resistance element is electrically connected with a phase shifting module through a magnetic resistance signal transmission line, and the phase shifting module is electrically connected with a high-multiple subdivision processing module. Compared with the prior art, the invention has the beneficial effects that: 1. The invention uses tunnel magnetic resistance effect to detect, which can easily realize the full circle detection of the angle sensor, and the phase shift circuit in the signal processing module combines with the subdivision circuit to improve the resolution of measurement, thus providing thought for other magnetic angle sensors to realize the full circle high-precision angle measurement. 2. The angle sensor adopts the tunnel magnet