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CN-116528765-B - X-ray system and method

CN116528765BCN 116528765 BCN116528765 BCN 116528765BCN-116528765-B

Abstract

An X-ray system is disclosed that includes an electron impinging X-ray source configured to generate an X-ray beam, a radiation shielded housing having an X-ray outlet, an X-ray optical element disposed within the radiation shielded housing configured to direct the X-ray beam toward the outlet, a shutter disposed at the outlet, the shutter movable between an open position allowing X-rays to output through the outlet and a closed position preventing X-rays from output through the outlet, and a detector disposed to detect X-ray radiation directed from the X-ray source toward the outlet, wherein the detector is configured to detect X-ray radiation within a first energy range. A corresponding method of operating an X-ray system is also disclosed.

Inventors

  • ULF LUNDSTROM

Assignees

  • 伊克斯拉姆公司

Dates

Publication Date
20260508
Application Date
20211018
Priority Date
20201019

Claims (15)

  1. 1. An X-ray system, comprising: electrons impinge on an X-ray source, the electrons impinging on the X-ray source configured to generate an X-ray beam; a radiation-shielding housing having an X-ray outlet; an X-ray optical element disposed within the radiation-shielding housing, the X-ray optical element configured to direct the X-ray beam toward the outlet, and A shutter disposed at the outlet, the shutter being movable between an open position allowing X-rays to be output through the outlet and a closed position preventing X-rays from being output through the outlet, and A detector disposed within the radiation-shielding housing and configured to detect X-ray radiation directed from the X-ray source to the outlet; wherein the detector is configured to detect X-ray radiation in a first energy range.
  2. 2. The system of claim 1, wherein the detector comprises a filter that prevents X-ray radiation having energy outside the first energy range from being detected.
  3. 3. The system of claim 1 or 2, wherein the detector comprises a diode.
  4. 4. The system of claim 1 or 2, wherein the detector comprises a first detector element for detecting X-ray radiation in the first energy range and a second detector element for detecting X-ray radiation in a second energy range.
  5. 5. The system of claim 1 or 2, wherein the X-ray optical element is configured to transmit only X-ray photons within a predetermined energy range.
  6. 6. The system of claim 5, wherein the first energy range is selected to fall outside of the predetermined energy range.
  7. 7. The system of claim 5, wherein the system is configured to ensure that the shutter is in the closed position when a detected photon having energy outside the predetermined energy range exceeds a predetermined threshold.
  8. 8. The system of claim 1 or 2, further comprising a controller connected to receive a detector signal from the detector indicative of X-ray radiation in a desired energy range, the controller being arranged to adjust the alignment between the X-ray source and the X-ray optical element and/or between the X-ray optical element and the outlet such that the detector signal increases.
  9. 9. The system of claim 1 or 2, further comprising a manipulator controllable from outside the radiation-shielding housing, the manipulator being arranged to adjust the position and/or orientation of the X-ray optical element.
  10. 10. A method of operating an X-ray system, the method comprising: Generating an X-ray beam using electrons to impinge on an X-ray source; Directing the X-ray beam into a radiation-shielded housing having an X-ray outlet; Directing the X-ray beam towards the outlet using an X-ray optical element disposed within the radiation shielded housing; Using a shutter arranged at the outlet to allow or prevent X-rays from being output through the outlet by moving the shutter between an open position allowing X-rays to be output through the outlet and a closed position preventing X-rays from being output through the outlet, and X-ray radiation within a first energy range directed to the outlet is detected using a detector disposed within the radiation-shielding housing.
  11. 11. The method of claim 10, wherein the X-ray optical element is configured to transmit X-ray radiation within a predetermined energy range.
  12. 12. The method of claim 11, wherein the first energy range is selected to fall outside the predetermined energy range.
  13. 13. The method of claim 12, further comprising ensuring that the shutter is in the closed position when a detected photon having energy outside the predetermined energy range exceeds a predetermined threshold.
  14. 14. The method of any of claims 10 to 13, further comprising adjusting an alignment between the X-ray source and the X-ray optic and/or between the X-ray optic and the outlet such that the detected X-ray radiation directed to the outlet increases within a desired energy range.
  15. 15. The method of claim 13, further comprising adjusting an alignment between the X-ray source and the X-ray optic and/or an alignment between the X-ray optic and the outlet to reduce detected photons having energy outside the predetermined energy range below the threshold.

Description

X-ray system and method Technical Field The present invention relates generally to X-ray systems. Background An X-ray system typically includes an X-ray source and X-ray optics positioned to collect and direct X-ray radiation generated by the X-ray source. Thus, the amount of useful X-ray radiation available from an X-ray system depends in part on the amount of radiation that can be collected by these optics. In this regard, the prior art is limited by overall safety requirements and geometric constraints that limit how much of the generated radiation can be collected and used as an output of the X-ray system. Disclosure of Invention A typical prior art X-ray system comprises an X-ray source with a shutter and an X-ray optical element for collecting the generated X-ray radiation and providing a useful output. It will be appreciated that more useful X-ray radiation can be obtained if the X-ray optics are positioned closer to the X-ray source. However, in the prior art, the minimum distance between the source and the optics depends on the internal geometry of the light source and the size of the shutter. For safety reasons, it is necessary to use shutters (shutters) which must be able to protect the surrounding environment, in particular humans, from accidental exposure to X-rays at any time. If the X-ray optics are not properly adjusted when the source is on, the radiation may be nearly ubiquitous. In the prior art, the X-ray optics are therefore arranged downstream of the shutter, which imposes a limit on how short the distance between the source and the optics can be made and thus how much useful X-ray radiation can be provided. The present invention provides a safe way to bring the optics closer to the source by providing a radiation-shielding housing, preferably with only one intended X-ray exit. The housing may be an extension of the outer shell of the X-ray source or it may be rigidly or flexibly connected to the outer shell. It is even conceivable that the source and the housing are disconnected from each other, provided that there is a radiation trap where they meet to prevent any leakage of X-ray radiation. The invention is particularly useful in electron impact X-ray systems, where X-ray radiation is generated by the interaction between an electron beam and a target. The target may be a solid target, such as a reflective target or a transmissive target, or a liquid target, such as a liquid jet target. The general idea underlying the invention is that if the X-ray optical element(s) are arranged within such a radiation-shielding housing and thus upstream of the shutter, these X-ray optical elements can be placed closer to the X-ray source, wherein the shutter, which prevents unintentional output of X-ray radiation, is arranged at the outlet of the radiation-shielding housing. The X-ray optic is configured to direct X-ray radiation generated by the X-ray source toward the outlet. The radiation-shielding housing thus serves the purpose of preventing leakage of X-ray radiation and allows output only through the outlet, while the shutter is used to control whether output through the outlet is allowed or prevented. Traditionally, safety shutters have been integrated with, i.e. built into, the X-ray source, and X-ray optics and/or monochromators have been arranged downstream of the safety shutter. Thus, moving the safety shutter to a position downstream of the optics/monochromator seems counterintuitive to those skilled in the art. However, according to the invention, this is made possible by means of a radiation-shielding housing in which the X-ray optical element is placed. Conveniently, one or more detectors may be provided within the radiation shielded housing to detect X-ray radiation directed towards the outlet. For example, the detector may be attached to the shutter on its side facing the interior of the radiation-shielding housing. Such a detector may preferably be embodied as one or more diodes. Alternative detectors may include pixelated detectors that provide more information during alignment, or scintillator-based detectors that may provide better sensitivity. An embodiment includes a detector configured to detect X-ray radiation in a first energy range. The energy range may have an upper limit, a lower limit, or both. In an exemplary embodiment, the filter is arranged to prevent X-ray radiation having an energy outside said first energy range from reaching the detector. Other embodiments may include detecting X-ray radiation from at least a first energy range and a second energy range, respectively. In particular, it may be advantageous to detect X-ray photons having energies in a desired energy range and X-ray photons having energies above said desired energy range, respectively. The first signal generated by photons in the desired energy range may be used during the alignment process. The alignment between the X-ray source and the X-ray optic and/or between the X-ray optic and the outlet m