CN-116560000-B - Semiconductor waveguide and SPP waveguide coupler

CN116560000BCN 116560000 BCN116560000 BCN 116560000BCN-116560000-B

Abstract

The invention relates to a semiconductor waveguide and SPP waveguide coupler, and relates to the technical field of integrated nano photon chips. The optical coupler comprises a first coupler and a second coupler, wherein the first coupler comprises a first semiconductor waveguide, a first SPP waveguide and a second SPP waveguide, the second coupler comprises a second semiconductor waveguide, a third SPP waveguide and a fourth SPP waveguide, the first semiconductor waveguide is positioned between the first SPP waveguide and the second SPP waveguide, the first semiconductor waveguide forms a V-shaped tip structure to realize conversion from an optical wave mode to an SPP mode, the second semiconductor waveguide is positioned between the third SPP waveguide and the fourth SPP waveguide, and the input end of the second semiconductor waveguide is provided with a V-shaped groove to realize conversion from the SPP mode to the optical wave mode. The invention can not only convert the light wave in the semiconductor into the SPP mode of the metal waveguide, but also transmit the SPP mode of the metal waveguide into the light wave mode in the semiconductor waveguide.

Inventors

JIANG PING
LI SONGZE
Zeng Youtao
Ma Huayan
LIU PENG
Qiao Xiaozhen

Assignees

中国石油大学(华东)

Dates

Publication Date: 20260505
Application Date: 20230423

Claims (9)

1. The semiconductor waveguide and SPP waveguide coupler is characterized by comprising a first coupler and a second coupler, wherein the first coupler comprises a first semiconductor waveguide, a first SPP waveguide and a second SPP waveguide; The first SPP waveguide and the second SPP waveguide are arranged at intervals side by side, the first semiconductor waveguide is positioned between the first SPP waveguide and the second SPP waveguide, and the first semiconductor waveguide forms a V-shaped tip structure along the light wave transmission direction so as to realize conversion from a light wave mode to an SPP mode; the third SPP waveguide and the fourth SPP waveguide are arranged at intervals side by side, the second semiconductor waveguide is positioned between the third SPP waveguide and the fourth SPP waveguide, the input end of the second semiconductor waveguide is provided with a V-shaped groove, and the tip end of the V-shaped groove faces the output end of the second semiconductor waveguide to realize conversion from an SPP mode to a light wave mode; the width of the second semiconductor waveguide is constant along the length direction, the notch width of the V-shaped groove is the same as the width of the second semiconductor waveguide, the gap between the third SPP waveguide and the fourth SPP waveguide is larger than the width of the second semiconductor waveguide, the gap size between the third SPP waveguide and the second semiconductor waveguide is kept unchanged, and the gap size between the fourth SPP waveguide and the second semiconductor waveguide is kept unchanged.
2. A semiconductor waveguide and SPP waveguide coupler as recited in claim 1, wherein a first SPP waveguide of the first coupler is connected to a third SPP waveguide of the second coupler and a second SPP waveguide of the first coupler is connected to a fourth SPP waveguide of the second coupler.
3. The semiconductor waveguide and SPP waveguide coupler of claim 1, wherein the first semiconductor waveguide is provided with a fixed width portion and a width gradually decreasing portion in order along the optical wave transmission direction, the width of the fixed width portion being a first fixed value, the width of the width gradually decreasing portion gradually decreasing from the first fixed value to zero along the optical wave transmission direction.
4. A semiconductor waveguide and SPP waveguide coupler as recited in claim 3, wherein a gap size between the first SPP waveguide and the first semiconductor waveguide remains unchanged and a gap size between the second SPP waveguide and the first semiconductor waveguide remains unchanged.
5. A semiconductor waveguide and SPP waveguide coupler as in claim 4 wherein the gap between the first SPP waveguide and the second SPP waveguide decreases gradually in the direction of light wave transmission from a second fixed value to a third fixed value, the third fixed value being greater than zero, the second fixed value being greater than the first fixed value.
6. A semiconductor waveguide and SPP waveguide coupler as claimed in claim 1 or claim 5 wherein the first semiconductor waveguide incorporates a quantum dot source or is connected to a semiconductor photonic circuit.
7. A semiconductor waveguide and SPP waveguide coupler as in claim 5 wherein the first SPP waveguide of the first coupler is coupled to the third SPP waveguide of the second coupler via a first SPP waveguide transition, the second SPP waveguide of the first coupler is coupled to the fourth SPP waveguide of the second coupler via a second SPP waveguide transition, and a gap between the first SPP waveguide transition and the second SPP waveguide transition increases gradually in the direction of light wave transmission from a third fixed value to a fourth fixed value, and a gap between the third SPP waveguide and the fourth SPP waveguide of the second coupler is equal to the fourth fixed value.
8. A semiconductor waveguide and SPP waveguide coupler as in claim 7, wherein the second semiconductor waveguide is connected to the semiconductor photonic circuit.
9. A semiconductor waveguide and SPP waveguide coupler as in claim 5 wherein the first SPP waveguide of the first coupler is coupled to the third SPP waveguide of the second coupler via a first SPP waveguide transition and the second SPP waveguide of the first coupler is coupled to the fourth SPP waveguide of the second coupler via a second SPP waveguide transition with an SPP photonic device coupled therebetween, thereby achieving integration of the semiconductor-based integrated nanophotonic device with the SPP-based integrated nanophotonic device.

Description

Semiconductor waveguide and SPP waveguide coupler Technical Field The invention relates to the technical field of integrated nano photon chips, in particular to a semiconductor waveguide and SPP waveguide coupler. Background In recent years, quantum Information Processing (QIP) is becoming a main research topic in the field of quantum optical research, and to implement an on-chip integrated quantum technology platform, the implementation of an integrated nanophotonic chip is a key link. In addition, the nano-photon integrated circuit has great application potential in the fields of data communication, signal processing, sensors, quantum photonics and the like. The integrated quantum chip technology requires the realization of an on-chip processing system by coupling the nanophotonic element and the photon detection device through a low-loss waveguide. Current research on integrated micro-nano photonic devices is mainly based on semiconductor materials and metal nano surface plasmon (SPP) structures. The research of quantum light sources mainly utilizes semiconductor self-assembled quantum dots, and the quantum dots can be used as single photon sources and logic and storage elements only from the application point of view, which is very useful for quantum information and calculation. In addition, research on integrated nano-photonics devices based on photonic crystals is mainly applied to semiconductor materials. Whereas SPP may facilitate near field coupling through strong field confinement, and also facilitate device integration due to ultra-small mode size. The integrated nano-photonic device based on the semiconductor is connected with the integrated nano-photonic device based on the SPP, so that a more powerful and comprehensive photonic chip is realized. While there is a large gap between the k-wave vector in the semiconductor and the k-wave vector of the plasma, which means that a large proportion of the light waves cannot be coupled directly from the semiconductor to the plasma mode. Therefore, how to provide a semiconductor waveguide and SPP waveguide coupler becomes a technical problem to be solved by those skilled in the art Disclosure of Invention The invention aims to overcome the defects of the prior art and provides a semiconductor waveguide and SPP waveguide coupler which can not only convert light waves in a semiconductor into SPP modes of a metal waveguide, but also convert the SPP modes of the metal waveguide into light wave modes in the semiconductor, thereby realizing the integration of a nano-photon device based on the semiconductor and a nano-photon device based on the SPP. The invention provides a semiconductor waveguide and SPP waveguide coupler, which comprises a first coupler and a second coupler, wherein the first coupler comprises a first semiconductor waveguide, a first SPP waveguide and a second SPP waveguide; The first SPP waveguide and the second SPP waveguide are arranged at intervals side by side, the first semiconductor waveguide is positioned between the first SPP waveguide and the second SPP waveguide, and the first semiconductor waveguide forms a V-shaped tip structure along the light wave transmission direction so as to realize conversion from a light wave mode to an SPP mode; The third SPP waveguide and the fourth SPP waveguide are arranged at intervals side by side, the second semiconductor waveguide is positioned between the third SPP waveguide and the fourth SPP waveguide, the input end of the second semiconductor waveguide is provided with a V-shaped groove, and the tip end of the V-shaped groove faces the output end of the second semiconductor waveguide, so that the conversion from the SPP mode to the optical wave mode is realized. Further, the first SPP waveguide of the first coupler is connected with the third SPP waveguide of the second coupler, and the second SPP waveguide of the first coupler is connected with the fourth SPP waveguide of the second coupler. Further, the first semiconductor waveguide is provided with a fixed width portion and a width gradually decreasing portion in order along the light wave transmission direction, the width of the fixed width portion is a first fixed value, and the width of the width gradually decreasing portion gradually decreases from the first fixed value to zero along the light wave transmission direction. Further, the gap size between the first SPP waveguide and the first semiconductor waveguide remains unchanged, and the gap size between the second SPP waveguide and the first semiconductor waveguide remains unchanged. Further, the gap between the first SPP waveguide and the second SPP waveguide is gradually reduced from a second fixed value to a third fixed value along the light wave transmission direction, the third fixed value is larger than zero, and the second fixed value is larger than the first fixed value. Further, a quantum dot light source is integrated in the first semiconductor waveguide or connected with th