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CN-116638745-B - Film vacuum plasma treatment equipment

CN116638745BCN 116638745 BCN116638745 BCN 116638745BCN-116638745-B

Abstract

The invention discloses film vacuum plasma processing equipment, which comprises a processing chamber, a belt body, a traction mechanism and an aggregate chamber, wherein an isolation box for placing film raw materials is arranged in the processing chamber, the processing chamber is provided with a plasma generator and a vacuum suction source, two ends of the belt body are respectively provided with a sleeve body for a film to pass through, the traction mechanism comprises a traction component arranged in the processing chamber and a contact component arranged on each group of sleeve bodies, the aggregate chamber is connected with the processing chamber through a material conveying channel, a movable component is arranged in the aggregate chamber, the movable component can enable the film to pass through the material conveying channel to enter the aggregate chamber for rolling after being processed from the processing chamber, and a cleaning component is arranged on the aggregate chamber for cleaning when the film is rolled.

Inventors

  • WANG RONG
  • WU ZHENGWEI

Assignees

  • 安徽中科大禹科技有限公司

Dates

Publication Date
20260512
Application Date
20230605

Claims (7)

  1. 1. A thin film vacuum plasma processing apparatus, comprising: A processing chamber in which an isolation box for placing a thin film raw material is provided, and which is configured with a plasma generator and a vacuum suction source; The belt body is provided with sleeves for the thin films to pass through at two ends respectively; the traction mechanism comprises a traction component arranged in the processing chamber and contact components arranged on each group of the sleeve bodies, the traction component can support and shrink the film through the contact components, so that the residual reactants on the film are scraped after the plasma is in contact reaction with the surface components of the film; The material collecting chamber is connected with the processing chamber through a material conveying channel, a movable component is arranged in the material collecting chamber, a film can pass through the material conveying channel to enter the material collecting chamber for rolling after being processed by the processing chamber, and a cleaning component is arranged on the material collecting chamber and used for cleaning when the film is rolled; the contact assembly comprises a second telescopic source arranged on the sleeve body, a first clamping plate connected with the second telescopic source and a second clamping plate arranged in the sleeve body, wherein a plurality of convex teeth are arranged on one side, close to the first clamping plate and the second clamping plate, of the first clamping plate; The traction assembly comprises a straight rail and a second rotation source which are fixedly connected in a material collecting chamber, two ends of the sleeve body are respectively provided with a movable block, the movable blocks are in sliding connection with the straight rail, each group of movable blocks is connected with a group of elastic pieces, an output shaft of the second rotation source is connected with a cylinder body, the cylinder body is wound with a pull rope, and the pull rope extends out of the cylinder body and is connected with the center of the belt body; The second telescopic source drives the first clamping plate to be close to the second clamping plate to clamp the film, and the second rotating source drives the cylinder to retract the rope body and then release the rope body, so that the belt body pulls the film to shrink inwards and then to be outwards stretched under the action of the elastic piece; the second telescopic source drives the first clamping plate to be far away from the second clamping plate and is contacted with the film through the convex teeth, and the second rotary source is used for winding the rope body and loosening the rope body through the driving cylinder, so that the two groups of the rope bodies are pulled to move along the film in opposite directions, and then move along the film in opposite directions under the action of the elastic piece.
  2. 2. The thin film vacuum plasma processing apparatus according to claim 1, wherein the material conveying channel is flat, elastic layers are respectively arranged on inner walls of two sides of the material conveying channel, and the elastic layers can be tightly attached to the thin film penetrating through the material conveying channel in a seamless manner.
  3. 3. A thin film vacuum plasma processing apparatus according to claim 1, wherein there are a plurality of ion generators distributed on different sides of the thin film in the processing chamber.
  4. 4. A thin film vacuum plasma processing apparatus according to claim 1, wherein the movable assembly comprises a frame box, and a truss and a roller body which are positioned in the frame box, wherein the roller body can rotate on the truss to wind up the thin film.
  5. 5. The apparatus of claim 4, wherein the movable assembly further comprises a first telescopic source and a first rotating source, the movable end of the first telescopic source is connected with the frame box, the output shaft of the first rotating source is connected with a supporting rod extending to one side, the supporting rod is detachably connected with the roller body through a fixing piece, the supporting rod drives the roller body to rotate around the output shaft of the power source to roll the film in a swinging state, and the first telescopic source drives the truss to move upwards after the film is rolled so that the film is tightened on the roller body.
  6. 6. The apparatus of claim 1, wherein the cleaning assembly comprises an air inlet source and an air outlet source capable of moving air flow in the processing chamber, the air outlet of the air inlet source is connected with a plurality of groups of air blowing pipes, the plurality of groups of air outlet pipes are positioned on different sides of the film, and each group of air blowing pipes is provided with a plurality of air outlets facing the film.
  7. 7. A thin film vacuum plasma processing method for a thin film vacuum plasma processing apparatus according to any one of the preceding claims 1 to 6, characterized by comprising the steps of: S1, placing a film raw material in an isolation box, and enabling the film to pass through a material conveying channel from a processing chamber to enter an aggregate chamber to be connected with a movable assembly; S2, the film stays in the processing chamber, plasma generated by the plasma generator contacts with the surfaces of the two sides of the film, the traction assembly and the contact assembly support and shrink the film, so that dirt and the plasma contact to react and decompose after gaps on the surface of the film are supported, reactants after the reaction and decomposition are scraped, and residues on the film are primarily reduced; S3, the film after the traction treatment of the movable component enters a collecting chamber for rolling, and the film is cleaned for the second time through the cleaning component, so that the residual reactant on the film is further removed.

Description

Film vacuum plasma treatment equipment Technical Field The invention relates to the technical field of plasma treatment, in particular to a thin film vacuum plasma treatment device. Background The development of plasma technology provides new technology and technology for the further development of materials, energy, information, environmental space, space physics, geophysics and other science. The plasma technology is adopted in the field of processing films of polymer plastics, textile chemical fiber products and the like, and the main technical key point is that a vacuum cavity reaches a certain vacuum degree, the molecular spacing and the free movement distance of molecules or ions are longer and longer along with the rarefaction of the gas in the vacuum cavity, the molecules or ions collide with each other under the action of an electric field to form plasma, and the plasma and the exposed surface of the film are subjected to chemical reaction or physical sputtering, so that the purposes of cleaning, modification and the like are realized. When the film is processed by the vacuum plasma processing equipment developed at present, the film is generally continuously pulled in a mode, so that the film achieves the effect of large-area continuous processing, but for some films with toughness, some dirt can be clamped in gaps on the surface and cannot react with plasma in a contact way, meanwhile, the reactant generated by the dirt on the film after reaction still has part remained on the surface, so that the cleaning is incomplete. Disclosure of Invention The present invention is directed to a thin film vacuum plasma processing apparatus for solving the problems set forth in the background art described above. In order to achieve the above object, the present invention provides a thin film vacuum plasma processing apparatus comprising: A processing chamber in which an isolation box for placing a thin film raw material is provided, and which is configured with a plasma generator and a vacuum suction source; The belt body is provided with sleeves for the thin films to pass through at two ends respectively; the traction mechanism comprises a traction component arranged in the processing chamber and contact components arranged on each group of the sleeve bodies, the traction component can support and shrink the film through the contact components, so that the residual reactants on the film are scraped after the plasma is in contact reaction with the surface components of the film; The material collecting chamber is connected with the processing chamber through a material conveying channel, a movable assembly is arranged in the material collecting chamber, the movable assembly can enable the film to pass through the material conveying channel to enter the material collecting chamber for rolling after being processed from the processing chamber, and a cleaning assembly is arranged on the material collecting chamber and used for cleaning when the film is rolled. As a preferable technical scheme of the invention, the material conveying channel is in a flat mouth shape, elastic layers are respectively arranged on the inner walls of the two sides of the material conveying channel, and the elastic layers can be tightly attached to a film penetrating through the material conveying channel in a seamless manner. As a preferred embodiment of the invention, there are a plurality of ionizers distributed on different sides of the film in the process chamber. As a preferable technical scheme of the invention, the movable assembly comprises a frame box, a truss and a roller body, wherein the truss and the roller body are positioned in the frame box, and the roller body can rotate on the truss to roll the film. As a preferable technical scheme of the invention, the movable assembly further comprises a first telescopic source and a first rotating source, the movable end of the first telescopic source is connected with the frame box, the output shaft of the first rotating source is connected with a supporting rod extending to one side, the supporting rod is detachably connected with the roller body through a fixing piece, the supporting rod drives the roller body to rotate around the output shaft of the power source to roll the film in a swinging state, and the first telescopic source drives the truss to move upwards after the film is rolled so that the film is tightened on the roller body. As a preferable technical scheme of the invention, the cleaning component comprises an air inlet source and an air exhaust source which can form air flow movement in the treatment chamber, wherein an air outlet of the air inlet source is connected with a plurality of groups of blowing pipes, the plurality of groups of air outlet pipes are positioned on different sides of the film, and each group of blowing pipes is provided with a plurality of air outlets facing the film. As a preferable technical scheme of the invention, the contact assembly